应用于VCSEL的GaAs/AlOx高折射率对比度亚波长光栅反射镜的设计和制备

基于严格耦合波理论,分析GaAs/AlO_x高折射率对比度亚波长光栅(HCG)反射镜的偏振和反射特性,设计了横电(TE)偏振的HCG。当入射光由衬底垂直入射时,HCG在940 nm附近的最高反射率接近1。分析了光栅形貌误差和入射角偏差对其反射特性的影响。采用金属有机化合物气相沉积技术进行外延生长,通过电子束曝光、干法刻蚀、湿法刻蚀以及湿法氧化等方法制备出HCG,并进行理论与实验结果的对比分析。实验测试了入射光由光栅表面垂直入射的反射率,其中TE偏振光的最高反射率达到84.9%,与86.5%的理论值比较接近,且横磁(TM)偏振光的反射率低于40%,反射谱的变化规律也与理论结果基本一致,这验证了理论结果的合理性。该反射镜可以作为垂直腔面发射激光器的超薄反射器,具有低损耗、偏振稳定和单模工作的特性。     

任意偏振态光束全反射时的侧向和横向位移

光束在电介质界面发生全反射时,实际反射光束会在入射面内相对于几何反射光束产生一侧向位移,在垂直于入射面的方向产生一横向位移。利用改进的能流法研究了任意偏振态光束发生全反射时的侧向和横向位移特性。研究表明,侧向位移的大小与入射光束的两组成部分———TE和TM偏振光的相位差无关,而与两组分的光强比密切相关,且该位移可以表示为TE和TM偏振光束各自的位移按光强的加权平均。横向位移的大小不仅与入射光束两组分的光强比相关,还与组分的相位差密切相关。另外,反射光束不仅在椭圆偏振态入射的情况下会产生横向位移,而且在TE和TM偏振态之外的其他线偏振态入射时,也会产生横向位移。     

氧化膜对一维随机粗糙铝表面双向反射特性影响

本文采用时域有限差分方法模拟了一维随机粗糙铝表面双向反射分布函数,分析了表面氧化膜厚度对双向反射分布函数的影响.研究结果表明,氧化膜对一维随机粗糙铝表面的双向反射分布特性有很大的影响。双向反射分布函数受入射波的偏振态影响,横电(TE)波产生的影响比横磁(TM)波更大。在TE波入射时会产生镜反射高峰值现象,但在TM波斜入射时会产生较强的倒反射现象.随机粗糙铝表面在不同的自相关长度(T)条件下的BRDF的峰值均随着T的增大而略微有所增大.     

基于一维金属-介质周期结构的偏振分束

分析了一维金属一介质周期结构的能带特性,根据一定频率范围内TM波(磁场方向与界面平行)在结构中的负折射以及TE波的正常折射,提出了一种偏振分束器件.利用传输矩阵法(TMM)模拟了该结构对入射高斯光束的偏振分束作用,讨论了不同入射角度下的偏振分束能力,并结合实际金属参量,分析了金属层吸收对结构特性的影响.结果表明该结构在55°附近入射时有最好的性能;在吸收作用下结构偏振分束能力有一定的减小,TM波透射比发生了较大变化,TE波效果较好;随着周期数增加,结构透射比下降,但分光能力显著提高;在工作波段上随着波长增大,金属层吸收对器件的影响减弱.该结构能实现宽波段、宽角度、较高透射比的偏振分束.     

高效全偏振矩形闪耀光栅的设计(英文)

入射光在光栅内传输时将激发产生离散模.本文采用模态法调节光栅内离散模的传输特性,使TE和TM偏振光所激发的0、1模为传输模,其余高阶模为消逝模.通过调控0模和1模间的累积相位差,对衍射光进行调控,实现了-1级近100%的高效衍射.采用模态法分三部设计了共振域的矩形全偏振闪耀光栅:1)根据光栅的共振条件给出光栅周期,光栅周期越大槽深越小;2)根据特征模方程计算出光栅占空比;3)根据耦合模条件计算机光栅槽深.实验结果表明,该光栅的TE和TM偏振光同时具备近100%的-1级衍射效率.给出了633nm波长-1级矩形石英全偏振闪耀光栅的典型设计实例,计算结果表明:所设计的全偏振闪耀光栅对TE和TM偏振入射光的-1级衍射效率分别高达96.7%和98.1%,且具有较宽的入射角及入射波长的变化适应范围,较大的制作容差.     

半导体激光偏振特性与模式竞争的实验分析

本文叙述了对称型GaAs-GaAlAsP双异质结激光器偏振特性的实验研究,分析了这种半导体激光器的模式竞争过程。实验证明。半导体激光器外加电流低于阈值时,只有自发辐射,不呈现光的偏振特性;高于阈值时,对于d=0.15～0.40μ的有源层激光器,通常只有基摸振荡,而且TE模起支配作用,偏振的选择取决于模的谐振腔镜面反射率R_0,而TM模在阈值时就达到饱和,高于阈值的电流都用于加强TE模偏振。当有源层厚度d>0.40μ时,会出现TE模和TM模、基次模和高次模之间的竞争,TE模的增强会导致TM模的削弱,或TE模的减弱提供TM模的增强。在这种情况下,偏振的选择要由光的限制因子Г和镜面反射率R_m一起决定,TE、TM模和基模、高次模都有可能出现。此外,偏振特性的好坏还与激光器有源层内部晶体缺陷、非均匀性结晶和注入载流子的分配比密切相关.     

一维TiO2亚波长光栅的衍射异常现象及其结构设计

研究了一维TiO₂亚波长光栅（SWG）的衍射异常现象,具体表现为泄漏模共振效应和瑞利异常。研究表明,一定参数条件下的横磁波（TM偏振）和横电波（TE偏振）入射均会出现瑞利异常和泄漏模共振效应。在TM偏振光情况下,会出现传统的窄带、高衍射效率泄漏模共振效应,而在TE偏振光情况下,由于多个接近的泄漏模共振峰相互叠加,故会形成宽带、高衍射效率的反射谱。采用严格耦合波理论计算了一维TiO₂ SWG的衍射效率,研究了光栅周期、高度和占空比对光栅反射率的影响。当光栅周期为0.49μm,高度为0.25μm,占空比为0.34时,SWG具有TE偏振选择性,在0.52μm波段处的反射率接近1,且高反带（反射率达到99.9%以上）宽度为26 nm。优化各结构参数,得到光栅周期、占空比、高度的制作容差分别为1.6%、8.3%、2.0%,故SWG理论上可以作为垂直腔面发射激光器的反射镜。     

各向异性光子晶体的全反射隧穿偏振特性

为了研究一维各向异性光子晶体的全反射隧穿偏振特性,利用传输矩阵法计算了TE波和TM波以大于全反射角入射一维各向异性光子晶体时的透射率,在透射波中发现了TE波和TM波的一、二级全反射隧穿带.得出了与一维各向同性光子晶体的全反射隧穿效应的不同点,即TE波和TM波的一、二级全反射隧穿带的频率中心和频率宽度存在着较大的差异,利用这个特性可以将两种偏振光进行频率分离,为设计优质偏振滤波器提供理论依据.     

基于亚波长光栅的VCSEL偏振控制研究

为了确定亚波长光栅在微电机械系统(MEMS)波长可调谐VCSEL不同位置(上DBR上表面、上DBR下表面以及内腔)中实现TE和TM偏振控制的光栅参数范围以及光栅在哪个位置时实现偏振控制最稳定,通过MATLAB建立MEMS波长可调VCSEL的模型,然后计算光栅在3种位置时上反射镜(包括空气隙和光栅)随光栅参数变化的反射率,以此来确定它们实现TE/TM稳定偏振的光栅参数范围(即高反射范围内的参数)。将各自的高反射所对应反射率减去相同光栅参数范围内TM/TE低反射对应的反射率,通过反射率差值确定光栅在哪种位置时MEMS波长可调谐VCSEL实现偏振是最稳定的。最后得出的结论是光栅在上DBR下表面几乎无法控制TM偏振,而将光栅放置于内腔中,无论是在TE偏振控制上还是TM偏振上都是最稳定的。在实现TE偏振稳定的参数范围内,TE的阈值增益比TM最小少10 cm~(-1);而在实现TM偏振稳定时,在TE偏振稳定的参数范围内,TE的阈值增益比TM最小少5 cm~(-1)。     

对称平面单轴晶体金属波导的模式场(1)

由于平面各向异性介质金属波导的重要应用,本文讨论了光在对称平面单轴晶体金属波导(波导层是单轴晶体,两个波导界面均为金属)内的传输特性.对于晶体光轴位于波导界面法方向与传输方向构成的平面内的特殊波导结构,利用麦克斯韦方程组并结合单轴晶体的性质,精确解出了波导模式场.结果表明:1)此种特殊结构波导内存在横电波(TE)和横磁波(TM);2)TM波的坡印廷矢量与波矢方向不在一条直线上;3)波导层为负单轴晶体时波导主模是TE波主模,而波导层为正单轴晶体时波导主模是TM波主模.     

Connecting-layer-based polarizing beam splitter grating with high efficiency for both TE and TM polarizations

We describe a novel polarizing beam splitter (PBS) of transmission connecting-layer-based grating, which can show high efficiency for TE polarization in the ?1st order and TM polarization in the 0th order. According to the modal method, grating duty cycle and period are prescribed to obtain high efficiency for TM polarization. Using the rigorous coupled-wave analysis, grating depth and thickness of the connecting layer are optimized to achieve high efficiency for TE polarization. The presented PBS has advantages of wideband properties for incident wavelength and angle. Most importantly, the efficiency is improved greatly for TE polarization compared with the reported PBS based on fused-silica grating.     

A reflective surface-relief two-layer grating for splitting beams with the polarization-selective property

A polarization-selective beam splitter is presented based on a reflective surface-relief two-layer grating with a metal slab. The grating is composed of two dielectric layers and a metal slab on the substrate. For TE polarization, efficiencies of 97.58% can be diffracted into the reflective −1st order. For TM polarization, two-port output of 47.55% and 47.11% can be split into the 0th order and the −1st order, respectively. Such a polarization-selective beam splitter can be fulfilled by one grating in reflection. The grating depths of two layers are optimized by using rigorous coupled-wave analysis with the given duty cycle of 0.6 and period of 1100 nm. The performance for different incident conditions is investigated when the incident wavelength and angle deviate from the central wavelength and the Bragg angle, respectively. For TM polarization, good uniformity can still be achieved within the given incident wavelength and angle regions. For TE polarization, the reflective polarization-selective beam splitter can have merits of wideband for different incident wavelengths.     

非对称偏振分束光栅的矢量衍射优化设计

基于严格耦合波理论分析了一种非对称偏振分束光栅的设计。这种偏振分束光栅分别在1级和0级衍射级次上衍射TE和TM偏振波。介绍了利用遗传算法设计偏振分束光栅的方法,并给出了优化实例。仿真结果表明:在设计波长为1.55时,TE偏振波在1级的衍射效率大于93%,TM偏振波在0级的衍射效率大于99%,此时1级和0级的透射消光比分别达到了9914.1和46841.5。通过对设计结果的分析发现,该偏振分束光栅在设计波长附近100nm的波长范围内都具有较高的消光比(大于100),达到了较好的偏振分束效果。     

Polarizing beam splitter based on a double-layer subwavelength grating

A Si–ZnS double-layer subwavelength grating is theoretically used as a high-efficient polarizing beam splitter. To design this structure, the rigorous coupled-wave analysis (RCWA) is applied to study the reflectivity and transmissivity for the TE and TM polarization, respectively. Simulation results show that both the zero-order reflection for TE polarization and the zero-order transmission for TM polarization can exceed 90% in a wide tunable working incident angle range from 48° to 72°. Moreover, the proposed polarizing beam splitter has a working wavelength that is in the range of 1500–1600 nm.     

基于自准直效应的光子晶体异质结偏振分束器

基于光子晶体的自准直效应和禁带特性,提出了一种具有非正交异质结结构的光子晶体偏振分束器.无需引入缺陷或波导,可使光波在该结构中准直无发散地传输并实现分束功能,对制造工艺的要求大大降低.利用Rsoft软件,结合平面波展开法和二维时域有限差分法,对提出的偏振分束器进行了仿真研究.结果表明,该偏振分束器在一个较大的频率范围f=0.275—0.285(a/λ)内可实现横电(TE)和横磁(TM)模的大角度偏振分离,TE和TM模的透过率均在88%以上,偏振消光比分别大于26.57 dB和17.50 dB.该结构可应用到太赫兹波段的传输系统中,a=26μm,尺寸大小为572μm×546μm,在91—95μm波长范围内可实现TE和TM模的分离.利用该结构可设计用于光通信系统(n=3.48)的偏振分束器,a=426.25 nm,结构仅为9.38μm×8.95μm.本方案结构简单,易于集成,有望在集成光路的发展中发挥重要作用.     

Polarization-selective subwavelength grating used with 193 nm light

Hyper-NA ArF (193 nm) immersion lithography is one of the most potential technologies to achieve 32 nm critical dimension node. At the corresponding large angles in the photoresist, control of polarization becomes necessary. A polarization beam splitter (PBS) based on a subwavelength dielectric grating has been designed for use with 193 nm light. The polarization-selective property of such grating is explained by the mechanism of mode interference. The designed grating working as a 1 × 2 beam splitter can transmit TM wave (∼ 90%) to the zeroth order with extinction ratio of 753, and it diffracts TE wave (∼ 80%) to the −1st order with extinction ratio of 300.     

Polarization-Independent Directional Beaming of Light by a Subwavelength Metal Slit

We present the directional beaming effect of light at the terahertz frequency by using a subwavelength slit in the metal film. The metal is dressed with anisotropic dielectric so that both the transverse electric （TE） and transverse magnetic （TM） polarized waves can be well guided on the metal surface and reach the phase matching. By using a periodical array of dielectric ridges and grooves around the slit, the guided waves can be scattered out of the slit and interfere with the transmitted light directly through the slit. The results performed by finite-difference at time-domain computations indicate that the directional beaming of light can be obtained simultaneously for both the TE and TM polarized waves after optimizing the geometric parameters. The structure may find great applications in polarization-independent optical devices such as couplers, connectors, beam collimator, and etc.     

Polarizing beam splitter of deep-etched triangular-groove fused-silica gratings

We investigated the use of a deep-etched fused-silica grating with triangular-shaped grooves as a highly efficient polarizing beam splitter (PBS). A triangular-groove PBS grating is designed at a wavelength of 1550 nm to be used in optical communication. When it is illuminated in Littrow mounting, the transmitted TE- and TM-polarized waves are mainly diffracted in the minus-first and zeroth orders, respectively. The design condition is based on the average differences of the grating mode indices, which is verified by using rigorous coupled-wave analysis. The designed PBS grating is highly efficient over the C+L band range for both TE and TM polarizations (>97.68%). It is shown that such a triangular-groove PBS grating can exhibit a higher diffraction efficiency, a larger extinction ratio, and less reflection loss than the binary-phase fused-silica PBS grating.