Langmuir单探针诊断射频辉光放电等离子体及其数据处理

Langmuir探针是诊断等离子体参数的重要手段.报道了在氩气射顿(13.56MHz)辉光放电等离子体中使用调谐单探针进行诊断,对探针I-V特性曲线的统计噪声进行了数字滤波的光滑化处理,而后求二次微商.在相同的放电条件下,使用自行设计的微分电路,对探针特性二次微商进行在线测量.这两种方法得到的二次微商结果能够较好地符合. 关键词： Langmuir探针 二次微商 数值滤波 微分电路     

射频辉光放电等离子体的电探针诊断及数据处理

Langmuir探针是等离子体诊断的一个重要方法.对探针I-V曲线进行求解二次微商是获得等离子体中的电子能量分布函数的关键.由Fourier变换导出一个求解微商的数值解方法.克服了现有方法所存在的缺点.实现了对探针I-V曲线求解二次微商的精确、自动运算.测量了硅烷射频辉光放电等离子体的平均电子能量(温度)和浓度随放电功率的变化. 关键词：     

EEDF Determination by Numerical Processing of the Probe Data in Neon DC Discharge

Numerical processing of the data from single probe measurements allows determination of the electron energy distribution function (EEDF) from the second derivative of the probe current. The current‐voltage probe characteristics are measured by acquisition system for further smoothing and differentiation. The developed procedure is a combination of the Savitzky‐Golay (S‐G) smoothing filter and three‐point differentiator with varying step. The above methods are modified for irregularly sampled data which enables more accurate determination of EEDF. Advantages of this approach are data smoothing with minimum information loss and improved noise reduction at the differentiation procedure. The procedure is applied for EEDF calculation in low current low pressure neon discharge. The shape of EEDF shows deviation from both Maxwellian and Druyvesteyn distributions. (© 2006 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Determination of the electron energy distribution in a plasma from the first and second derivatives of the probe current

An approach to the reconstruction of the electron energy distribution function (EEDF) as the sum of the second derivative of the electron current to the probe and some value proportional to its first derivative is proposed (hereafter we mean derivatives with respect to voltage). Solutions to model problems for typical electron distributions in a plasma show that this approach lowers the systematic error of EEDF reconstruction by several times in comparison with the conventional techniques using Langmuir and diffusion probes. The approach is applicable in a wide range of the ratio of the probe radius to the free path of electrons. It can be used for the determination of fast nonequilibrium electron distribution in neon discharge afterglow and also for the evaluation of the Maxwellian electron temperature in the low-energy range of nitrogen discharge afterglow.     

Effects of nonlocal electron kinetics and transition from αto γ regime in an RF capacitive discharge in nitrogen

The electron kinetics and regime of operation of asymmetrically coupled RF (27-MHz) nitrogen discharges in two vessels with different interelectrode gaps over the range of 0.20-0.35 torr gas pressure are studied in terms of the electron energy distribution function (EEDF). The latter is measured by means of a computer-controlled data acquisition system, a Langmuir probe with cross-modulation second derivative technique applied. The experiments are performed with an axial resolution along the RF electric field and accompanied with a measurement of electrical discharge characteristics. The effects of local and nonlocal plasma response are considered. The transition between α and γ discharge regimes is registered by measuring the EEDF and its moments' changes with the increase of the RF discharge current density     

射频低压等离子体电子能量分布函数的探针诊断

本文对于无内电极放电的射频低压等离子体,采用探针电流调制法,设计并建立了三探针诊断电子能量分布函数的测量系统,测量了压力在10^-3—10^-1Torr下氮气等离子体的电子能量分布函数。从理论和实验上研究了探针鞘层上射频干扰电压对测量电子能量分布函数的影响,给出了确定射频干扰值以及对射频干扰的影响进行修正的方法,并采用该方法对实验数据进行了修正,得到了正确的电子能量分布函数。根据所得到的电子能量分布函数计算的电子平均能量,与由探针伏安特性计算得到的电子平均能量相差不超过5％,该结果间接证明了本文实验测量系统的可靠性以及对射频干扰影响进行修正的正确性。     

Determination of mean electron energy in an elevated-pressure plasma by the probe method

The possibility of determining mean electron energy from the slope of the dependence of probe electron current on probe potential under conditions of a nonequilibrium electron energy distribution function (EEDF) and electron drain to the probe is demonstrated. To accomplish this one must use the portion of the current-voltage curve (CVC) in the region of the null of the third derivative of the probe current. Given a drain parameter < 1 for a wide class of EEDF and arbitrary value of . for a rapidly falling EEDF this permits determination of <> with an accuracy of 20%. For an EEDF close to equilibrium the maximum uncertainty of <> determination by this technique does not exceed 50%.Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 5, pp. 44–49, May, 1988.     

Detailed comparison between probe density measurements of glow discharge in argon and in helium

In this article we shall look a bit more closely at some of the fundamental plasma parameters obtained by a cylindrical Langmuir probe within low-pressure electrical gas discharge plasma. The presented measurements were made in argon and in helium glow discharge plasmas. We are mainly concerned with the densities of the charged particles (electrons and ions) within the plasma and the effect of the discharge conditions upon them. The electron density is calculated from the electron current at the space potential and from the integration over the EEDF. The ion density is calculated by using the OML collisionless theory. The parameterization of Laframboise's numerical results is also used for the ion density calculation. In the range of our experimental conditions the results of plasma density, for both gases, tend to show that the ion densities measured with the OML and Laframboise theories exceeds the measured electron densities. The results also show that the plasma electron and ion densities increased with both discharge power and gas pressure.     

沿面闪络流体模型电离参数粒子模拟确定方法

介绍了粒子模拟确定高功率微波介质沿面闪络击穿流体模型相关电离参数的方法.对粒子模拟方法 (包括带电粒子动力学方程、次级电子发射以及蒙特卡罗碰撞模型)和流体整体模型方法 (包括连续性方程和能量守恒方程)做了简介.基于自编的1D3V粒子模拟-蒙特卡罗碰撞程序给出了在高(低)气压、不同气体种类以及不同微波场强和微波频率下流体模型电离参数的粒子模拟结果,包括电离频率、击穿时间、平均电子能量、电子能量分布函数类型.研究结果表明:平均电子能量与电子能量分布函数类型关系不大;中低气压下,电子能量接近Maxwell分布,电子能量分布函数类型对电离参数几乎没有影响;中高气压下,电子能量分布函数类型对电离参数有重要影响,其依赖系数X趋于高阶形式.不同气体的电子能量分布函数类型不同,需要利用粒子模拟对电子能量分布函数类型进行标定.同时,电子能量分布函数依赖系数与微波场强和频率也有关系,其随微波场强增加而增大,随微波频率增加而减小.在给定考察范围(微波场强在7 MV/m以下,微波频率在40 GHz以内),中低气压下,平均电子能量随微波场强增加而迅速增大,电离频率随微波场强增加先增大后降低,平均电子能量随微波频率增加而降低,电离频率随微波频率增加先增加后降低;高气压下,平均电子能量随微波场强增加而缓慢增大,电离频率随微波场强增加而增大,微波频率对平均电子能量和电离频率影响不大.     

Substantiation of the two-temperature kinetic model by comparing calculations within the kinetic and fluid models of the positive column plasma of a dc oxygen discharge

Results from kinetic and fluid simulations of the positive column plasma of a dc oxygen discharge are compared using commercial CFDRC software (), which enables one to perform numerical simulations in an arbitrary 3D geometry with the use of both the fluid equations for all the components (fluid model) and the kinetic equation for the electron energy distribution function (kinetic model). It is shown that, for both the local and nonlocal regimes of the formation of the electron energy distribution function (EEDF), the non-Maxwellian EEDF can satisfactorily be approximated by two groups of electrons. This allows one to take into account kinetic effects within the conventional fluid model in the simplest way by using the proposed two-temperature approximation of the nonequilibrium and nonlocal EEDF (2T fluid model).     

Variations in the electron energy distribution function in discharge plasma of a unipolar gas breakdown

It is experimentally demonstrated that the electron energy distribution function (EEDF) and electron density in plasma of a little-studied pulse discharge of a unipolar gas breakdown (UGB) significantly vary in time. The revealed behavior of its plasma parameters is explained based on the proposed physical model of a UGB discharge.     

Non-Maxwellian electron energy distribution function in He,He/Ar,He/Xe/H<Subscript>2</Subscript> and He/Xe/D<Subscript>2</Subscript> low temperature afterglow plasma

Experimental studies of the electron energy distribution function “EEDF” under well defined conditions in flowing afterglow plasma, using a Langmuir probe are reported. The EEDF is measured in He₂ ⁺ and Ar⁺ dominated plasmas and in XeH⁺ and XeD⁺ dominated recombining plasmas. He is used as a buffer gas at medium pressures in all experiments (1600 Pa, 250 K). The deviation of the measured EEDF from Maxwellian distribution is shown to depend on plasma composition and on the processes governing the plasma decay. The influence of energetic electrons produced during the plasma decay on the body and tail of the EEDF is observed. The mechanism of energy balance in afterglow plasma is discussed.     

Experimental investigation of nonlocality effects in the electron energy spectrum in an electronegative gas

The nonlocality of the electron energy distribution function (EEDF) in a dc discharge in oxygen is observed experimentally. A method is developed for measuring the isotropic part of the EEDF in a low-temperature plasma of electronegative gases. The radial dependence of the EEDF and the radial distributions of the electron density, the average electron energy, and the potential are determined. Pis’ma Zh. éksp. Teor. Fiz. 63, No. 7, 511–516 (10 April 1996)     

Electron energy distribution function in a hollow-cathode glow discharge in mixtures of nitrogen with electronegative gases

The electron energy distribution function (EEDF) in a hollow-cathode glow discharge in mixtures of nitrogen with electronegative gases is investigated. It is shown that small admixtures of SF₆ or CCl₄ to nitrogen significantly increase the number of electrons in the energy range 2–6 eV, which corresponds to the inverse part of the EEDF. In nitrogen with small admixtures of F₂ or NF₃, the EEDF differ slightly from that calculated for pure nitrogen. The EEDF in these mixtures substantially depends on electron attachment to electronegative gas molecules.     

射频感应耦合Ar-N2等离子体物理特性的Langmuir探针测量及理论研究

分别通过Langmuir探针测量和动力学模型模拟方法研究了射频感应耦合Ar-N₂等离子体中电子能量分布、电子温度、电子密度等物理量随N₂含量的变化规律.实验研究结果表明：电子能量分布呈现出非Maxwell型分布,并由双温分布向三温分布过渡;电子温度在不同的气压下随N₂含量的增加呈现出不同的变化规律.在放电气压小于1.3 Pa时,电子温度随N₂含量的增加而下降;当气压大于1.3 Pa时,电子温度随N₂关键词： 感应耦合等离子体 2混合气体放电')" href="#">Ar-N₂混合气体放电 电子能量分布 Langmuir探针     

Zur Anwendung der Sondendiagnostik in einem polymerisierenden Plasma

On the example of the Ne glow discharge with a benzol admixture the possibility of applicating the probe diagnostic in polymerizing plasmas is investigated. Heating the probe at 900°C stetady values for the floating potential, the probe characteristic and its second derivation are obtained. The variation with time of these quantities without heating the probe yields informations about the rate of polymerization. The effect of a benzol admixture from 1% to 20% on the energy distribution function of electrons and the plasma parameters in the tube axis is pointed out. From the second derivation of the characteristic at emissive probe conditions it is possible to deduce in addition to the space potential the influence of the benzol admixture on the ionization mechanism.     

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采用Langmuir探针方法对氢等离子体中电子密度和电子能量概率函数随射频功率的变化进行研究,发现电子密度在射频功率增加过程中出现两次跳跃。通过发射光谱法测得氢等离子体Hα、Hβ和Hγ三条谱线强度比值的变化,进一步验证了密度跳跃现象。该现象说明氢等离子体的放电模式发生了从电感耦合到电容耦合再到螺旋波模式的转变。从电子与氢分子的相互作用和Nagoya type Ⅲ型(N-型)天线电场耦合作用两方面解释密度跳跃现象。随着输入功率的增加,电子与氢分子相互作用增强,使电子密度发生跃变;当天线横向电场Ey取最大值,螺旋波轴向波矢kz分别为π/la和3π/la时天线与等离子体耦合最好,分别产生两次密度跳跃。     

Effect of molecular nitrogen on the electron mobility in a mixture of argon and optically excited sodium vapor

A parametric study of the electron energy distribution function (EEDF) and the electron mobility in the mixture Na + Ar + N₂ is carried out. An analysis is made of the conditions that obtain in a photoplasma when the detachment of the mean electron energy from the neutral gas temperature is due to superelastic collisions (collisions of the second kind) with excited sodium atoms. The case of low ionization of the medium at low vibrational temperatures of the ground state of the nitrogen molecules is considered. To find the EEDF a numerical solution of the Boltzmann transport equation is carried out. It is found that in the indicated mixture the presence of nitrogen leads to a depletion of the EEDF in the region of efficient vibrational excitation of the molecules and promotes the formation of inversion in the EEDF ∂f(ɛ)/∂ɛ>0 in the energy range corresponding to the Ramsauer minimum in the cross section of elastic collisions of electrons with the argon atoms. It is shown that the nonequilibrium character of the EEDF leads to a complicated dependence of the electron mobility on the partial ratios of the components of the mixture, the degree of ionization of the medium, and the population of the resonantly excited sodium atoms. Zh. Tekh. Fiz. 69, 14–19 (April 1999)