Langmuir Probe Determination of Charged Particles Density in an rf Discharge

The article presents results of probe measurements of the electron and ion densities in an argon rf discharge. The electron density is determined from the electron probe current at the space potential which is estimated by extrapolation of the linear part of the probe electron current dependence to the plasma potential. The plasma potential is calculated from the floating potential. The positive ion density is determined from the probe ion saturated current according to collisional KOPICZYNSKI and ZAKREWSKI model [1]. The agreement between the electron and ion densities is better than in the work of HOPKINS and GRAHAM [2], where the collisionless Lafram-boise theory is used under similar conditions.     

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The electron densities in the atmospheric pressure helium plasma were calculated by means of electron drift velocity and the jet velocity respectively. The electron velocity and jet velocity can be calculated by means of helium plasma jet current measured by a dielectric probe and plasma discharge current signal measured by voltage probes. The results show that the estimated electron densities of the helium plasma jet calculated from electron drift velocity and the jet velocity are in the order of 10 ¹¹ cm ^-3 and they increase with applied voltage. There is a little fluctuation in the value of the electron density along the jet axis of the plasma. This result is the same as the measured electron density in atmospheric pressure helium non-thermal plasma jet by using a Rogowski coil and a Langmuir probe. This is in one order lower than the electron density measured by microwave antenna.     

利用介质阻挡探针法测量大气压氦等离子体射流电子密度

分别利用电子的漂移速度和等离子体的传播速度计算了大气压下氦等离子体射流的电子密度。     

PIC/MCC Simulation of Electron and Ion Currents to Spherical Langmuir Probe

The Particle In Cell/Monte Carlo Collisions (PIC/MCC) simulation was used for the calculation of electron and ion currents to a spherical Langmuir (electrostatic) probe. This simulation took into account the collisions of collected charged particles with neutral gas particles around the probe and it can calculate the probe currents at higher neutral gas pressures. The improvements of usual simulation techniques enabled to speed up the simulation and to calculate the probe current even for neutral gas pressures above 1 kPa. The simulations were carried out for two cases: i) probe with radius of 0.5 mm in non‐thermal plasma with high electron temperature, ii) probe with radius of 10 µm in afterglow plasma with low electron temperature. The influence of probe radius on electron probe current was also studied. The simulations showed that thick sheath limit of OML theory provides incorrect values of probe current for probes with radii larger than 200 µm at plasma parameters considered even at very low neutral gas pressures. The probe characteristics were calculated for probe with 0.5 mm radius for pressures up to 500 Pa and for probe with 10 μm radius for pressures up to 3 kPa. The influence of collisions on electron and ion probe current was demonstrated and the procedure for determination of electron and ion densities from the probe measurement at higher pressures was developed. The results from PIC/MCC simulations were compared with results from continuum theory. (© 2015 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

基于气体放电等离子体射流源的模拟离子引出实验平台物理特性

离子引出过程是原子蒸气激光同位素分离中非常重要的物理过程之一,而其中关键的等离子体参数(等离子体初始密度和电子温度等)均会对离子引出特性产生影响.基于千赫兹电源驱动的氩气高压交流放电等离子体射流源,建立了离子引出模拟实验平台-2015 (IEX-2015),开发了用于诊断氩等离子体参数的"碰撞-辐射"模型,对等离子体射流区的电子温度和电子数密度等关键参数进行了测量.结果表明,电源输入功率和驱动频率以及工作气体流量均会对等离子体射流区的电子温度和数密度产生影响;在真空腔压强为10~(-2)Pa量级下,射流区电子数密度和电子温度的可调参数范围分别为10~9—10~(11)cm~(-3)和1.7—2.8 e V,这与实际离子引出过程中的等离子体参数范围相近.在此基础上,开展了不同引出电压、极板间距和电子数密度条件下初步的离子引出实验,所得到的离子引出电流变化规律亦与实际原子蒸气激光同位素分离中的离子引出特性定性一致.上述研究结果验证了在IEX-2015上开展离子引出模拟实验的可行性,为后续深入开展离子引出特性的实验研究准备了良好的条件.     

Modelling of the Positive Column in an Argon-Hexamethyl-disiloxane dc Glow Discharge

A model is presented of the positive column of a dc glow discharge in argon with small admixtures of hexamethyldisiloxane (HMDS). The axial electric field, the ion production rates for direct-, stepwise-, pair-, and Penning ionization, the densities of metastable Ar atoms and of electrons, and the wall current of HMDS ions are calculated in dependence on HMDS admixture and discharge current density. For the calculations particle balance equations were used for a diffusion determined plasma in a mixture of two gaseous components. The reaction rates for the electron collision processes were determined applying the electron distribution function calculated for pure argon. Taking into account PENNING ionization of HMDS molecules by metastable argon atoms the decrease of electric field for increasing HMDS admixtures is according to the experimen-tally measured values. Also ion wall currents and electron densities are compared with experimen-tal values for thin film formation rate and results of probe measurements.     

Numerical Study on Characteristics of Argon Radio-Frequency Glow Discharge with Varying gas Pressure

A one-dimensional fluid simulation on argon rf glow discharge with varying linearly gas pressure from 1 Torr to 100 Tort is performed. The model based on mass conservation equations for electron and ion under diffusion and mobility approximation, and the electron energy conservation equation is solved numerically by finite volume method. The numerical results show that a uniform plasma with high density can be obtained from rf glow discharge with varying gas pressure, and the density of plasma becomes higher as the gas pressure varies from 1 Tort to 100 Tort. It is also shown that in the range of the gas pressure from 1 Tort to 100 Tort with the slower rate of varying gas pressure, higher density of plasma can be obtained.     

On the Stark broadening of the He I 447.1 nm spectral line

Characteristics of the Stark broadened and overlapping 447.1 nm He I spectral line and its forbidden 447.0 nm components have been measured at electron densities between 4.4×10²² m^-3 and 8.2×10²² m^-3 and electron temperatures between 18 000 K and 33 000 K in plasmas created in five various discharge conditions using the low pressure pulsed arc as an optically thin plasma source operated in helium-nitrogen-oxygen gas mixture. Good agreement was found among our measured line characteristics and their existing calculated values, based on the quasistatic approximation. Possible influence of the singly ionized oxygen impurity atoms (O II) on the intensity values of the dip between allowed and forbidden components was found that can explain the disagreement among some existing experimental and calculated line characteristics data, at higher electron temperatures and densities. On the basis of the observed asymmetry of the 447.1 nm spectral line profile we have obtained the ion contribution parameter at 10²² m^-3 electron density and 8 000 K electron temperature. Received 20 February 2001 and Received in final form 25 April 2001     

Längsfeldstärke,Elektronentemperatur, mittlere Neutralgasdichte,Ionenstromdichte auf die Wand und mittlere Entladungsstromdichte in der Freifallsäule bei hohem Ionisationsgrad

On the basis of a foregoing paper new theoretical results for the positive column at low pressure and strong ionization, especially for discharges in noble gas ion lasers, are given. The mean velocity v_n0 of the neutral atoms reemitted from the wall is taken into account. The electric conductivity is calculated for an argon plasma. The formulas connecting the electron temperature, the mean neutral gas density, and the electric field strength are derived. The electron temperature, the axial electric field intensity, the degree of ionization, the axial electron drift velocity, the ion flux to the wall, and the force density causing the main part of gas pumping along the column are calculated as functions of the product of the mean current density and the tube radius, and of v_n0 for argon. The axial drift velocity of the electrons is still smaller than the mean thermal electron velocity for high discharge currents, except at very low gas pressures. In general, the ion flux to the wall is not directly proportional to the discharge current. The factor for the determination of the charged particle density by means of probe measurements at the wall is discussed. The self-magnetic field affects the discharge only at high electron temperature, high degree of ionization, and relatively large tube radius, i.e. at high current density and low gas pressure in not too narrow discharge channels.     

电子回旋共振等离子体密度均匀性的数值研究

基于漂移扩散近似,在轴对称假设下,对电子回旋共振等离子体源腔室内的等离子体建立了二维流体模型.采用有限差分法对所建立的模型进行了自洽数值模拟,得到了等离子体密度均匀性随时间演化的数值结果.通过对数值结果的分析,研究了背景气体压强、微波功率和磁场线圈电流对等离子体密度均匀性的影响.研究表明,在电离初期,电子密度的均匀性好于离子密度的均匀性.在电离后期,离子密度的均匀性好于电子密度的均匀性.随着背景气体压强的增大,电子密度和离子密度的均匀性都在增加,且离子密度的均匀性增加的更快.随着微波功率的增大,电子密度和 关键词： 等离子体密度均匀性 背景气体压强 微波功率 磁场线圈电流     

13.56 MHz/2 MHz柱状感性耦合等离子体参数的对比研究

通过Langmuir双探针和发射光谱诊断方法,对比研究了驱动频率为13.56 MHz和2 MHz柱状感性耦合等离子体中电子密度和电子温度的径向分布规律.结果表明:在高频和低频放电中,输入功率的增加对等离子体参数产生了不同的影响,高频放电中主要提升了电子密度,低频放电中则主要提升了电子温度.固定气压为10 Pa,分别由高频和低频驱动时,电子密度的径向分布均为"凸型".而电子温度的分布差异比较明显,高频驱动时,电子温度在腔室中心较为平坦,在边缘略有上升;低频驱动时,电子温度随径向距离的增加而逐渐下降.为了进一步分析造成这种差异的原因,在相同放电条件下采集了氩等离子体的发射光谱图,利用分支比法计算了亚稳态粒子的数密度,发现电子温度的径向分布始终与亚稳态粒子的径向分布相反.继续升高气压到100 Pa,发现不论高频还是低频放电,电子密度的径向分布均从"凸型"转变为"马鞍形",较低气压时电子密度的均匀性有了一定的提升,但低频的均匀性更好.     

Geschwindigkeitsverteilungsfunktionen von Atomen und Ionen in verschiedenen Anregungs- und Ionisationsstufen in Niederdruck-Entladungen bei hohem Ionisationsgrad

Supposing free-fall conditions the velocity distribution functions of atoms and ions in various levels in gas discharges at low pressures are calculated. In particular, plasmas at high degrees of ionization are considered. Solving the Boltzmann equation for the motions transverse to the wall of the discharge tube it is shown that the velocity distribution functions can considerably deviate from the Maxwellian and become non-isotropic. Inelastic collisions with electrons and the ionization by electron impacts considerably determine the velocity distribution function of the neutral atoms. The velocity distribution function of the ions is also essentially determined by the electric field within the plasma. For the motions transverse to the wall the half widths of the velocity distribution functions do not only depend on the temperature of the wall, but on the electron density and on the electron temperature as well. At small electron densities the half widths for excited atoms and for ions can be narrower than the one for the ground state atoms. The charge exchange between atoms and ions is shortly taken into consideration.     

Investigations on ionic processes and dynamics in the sheath region of helium and hydrogen discharges by laser spectroscopic electric field measurements

Temporally and spatially resolved measurements of the electric field distribution in the sheath region of RF and dc discharges provide a detailed insight into the sheath and ion dynamics. The electric field is directly related to the sheath ion and electron densities, the sheath voltage, and the displacement current density. Under certain assumptions also the electron and ion conduction current densities at the electrode, the ion current density into the sheath from the plasma bulk, the ion energy distribution function, and the power dissipated in the discharge can be inferred. Furthermore, the electric field distribution can give an indication of the collision-induced conversion between different ion species in the sheath. Laser spectroscopic techniques allow the noninvasive in situ measurement of the electric field with high spatial and temporal resolution. These techniques are based on the spectroscopic measurement of the Stark splitting of Rydberg states of helium and hydrogen atoms. Two alternative techniques are applied to RF discharges at 13.56 MHz in helium and hydrogen and a pulsed dc discharge in hydrogen. The measured electric field profiles are analyzed, and the results discussed with respect to the ion densities, currents, energies, temporal dynamics and species composition. Received: 26 July 2000 / Accepted: 12 December 2000 / Published online: 3 April 2001     

Experimental Study of Planar Langmuir Probe Characteristics in Electron Current-Carrying Magnetized Plasma

Experimental study of planar Langmuir probe characteristics in a magnetized plasma with an electron current along the direction of the magnetic field shows that the usual procedure for determination of the electron temperature and plasma density, which is applicable in a current-free magnetized plasma, gives erroneous results for these plasma parameters. When this procedure is applied on the characteristics measured at two opposite orientations of the probe collecting surface with respect to the direction of the electron drift, different values of the electron temperature are obtained. These virtual electron temperatures and corresponding plasma densities calculated from the measured ion saturation currents are higher and/or smaller than the exact local electron temperature and plasma density. Calculation of particular averages of these quantities is proposed as a possible way to obtain correct results for the local electron temperature and plasma density. These averages are used in the approximate evaluation of the electron drift velocity from the electron saturation currents measured at the two orientations of the probe collecting surface.     

甚高频激发容性耦合氩等离子体的电子能量分布函数的演变

甚高频激发的容性耦合等离子体由于离子通量和能量的相对独立可控而受到人们的关注. 本文采用朗缪尔探针诊断技术测量了40.68 MHz激发的容性耦合Ar等离子体的特性(如电子能量概率分布、电子温度和密度等)随宏观参量的演变情况. 实验结果表明, 电子能量概率分布随着气压的增加从双麦克斯韦分布逐步转变为单麦克斯韦分布并最终演变为Druyvesteyn分布, 而射频激发功率的增加促进了低能电子布居数的增强; 在从等离子体放电中心移向边界的过程中, 低能电子的布居数显著下降, 而高能电子的布居则有所上升; 放电极板间距的变化直接导致了等离子体中电子加热模式的转变. 另外, 我们也对等离子体中的高低能电子密度和温度的分配情况进行了讨论.     

基于光谱诊断的热源间距对激光-脉冲GMAW复合焊等离子体物理特性影响研究

激光电弧复合焊中,热源间距会影响到等离子体物理特性,进而影响到焊接过程的稳定性及焊接质量。 基于Boltzmann作图法和Stark展宽法研究了不同热源间距下的激光-脉冲GMAW复合焊峰值阶段的温度场和电子密度分布,并结合高速摄影手段分析了热源间距对温度和电子密度的影响规律。 光谱诊断结果表明,随着热源间距的增大,激光等离子体的温度和电子密度都没有明显的变化;电弧温度出现下降,电弧电子密度则呈现先增高后降低的趋势。     

射频容性耦合等离子体放电特性的光谱诊断

利用流体模型模拟和发射光谱实验诊断相结合的方法,研究了中等气压、中等功率下射频容性耦合等离子体的放电特性。理论上,采用基于流体模型的COMSOL软件仿真,建立一维等离子体放电模型,以Ar气为工作气体,研究了不同气压以及不同射频输入功率下等离子体电子温度和电子密度的分布规律。实验上,依据仿真模型设计制作了相同尺寸的密闭玻璃腔体和平板电极,采用13.56 MHz射频放电技术电离腔体内的工作气体Ar气,测量了不同气压、不同射频输入功率时放电等离子体的发射光谱。通过分析和选择适当的Ar Ⅰ和Ar Ⅱ的特征谱线,分别利用玻尔兹曼斜率法以及沙哈-玻尔兹曼方程计算了等离子体的电子温度与电子密度,并结合模拟仿真结果对光谱诊断结果进行了修正。结果表明：当气体压强为300~400 Pa、输入功率为600~800 W时,等离子体近似服从玻尔兹曼分布,此时利用光谱法得到的等离子体参数与仿真结果相符合。仿真模拟与光谱实验诊断相结合的方法可初步诊断出中等气压下等离子体的放电参数,增加了玻尔兹曼斜率法和沙哈-玻尔兹曼方程在等离子体放电中的使用范围,扩大了光谱法在低电子密度容性耦合等离子体参数诊断的应用场合,为中等气压容性耦合等离子体在工业与军事上的应用研究提供了重要物理状态的分析手段。     

三种电极的大气压氩等离子体射流光学特性

采用铜片-单匝线圈电极、螺旋缠绕电极和双铜片电极3种结构的放电装置,以氩气作为工作气体,在正弦波激励下获得了大气压等离子体射流。利用电学方法测量了放电电流以及电荷量,并对放电脉冲和放电功率进行了研究;利用发射光谱法对射流的等离子体参量进行了空间分辨测量,并根据ArⅠ 763.5 nm和Ar Ⅰ 772.4 nm的光强计算了电子激发温度。结果发现：在外加电压的正负半周期内,电流脉冲的个数和幅值呈现非对称的变化趋势;随着外加电压的增加,3种结构电极的放电功率从1.7 W逐渐增加到6.0 W;在相同的外加电压情况下,电极面积越小,等离子体射流的长度越长;3种等离子体射流的电子激发温度在1 348.5~3 212.1 K之间,并且随着气体流量的增加,各位置的电子激发温度总体上呈下降趋势,而等离子体的电子密度呈上升趋势。实验结果表明：外加电压对放电功率有一定影响;射流长度与电极面积有关;气体流量对电子激发温度和电子密度的空间分布起重要作用。