乙炔气体流量对纳米TiC类金刚石复合膜的化学结构及力学性能影响

采用离子注入与反应磁控溅射相结合的方法在钛合金及硅片基体表面上制备了纳米TiC类金刚石(DLC)复合膜.通过纳米压痕技术检测了薄膜的纳米硬度，显微划痕试验评估了薄膜的结合力.通过X射线光电子能谱及X射线衍射表征了薄膜的化学结构.结果表明，通过改变C₂H₂气体流量，可以达到控制薄膜中钛原子含量的目的，合适的C₂H₂气体流量可以在DLC膜中形成较多的纳米TiC晶粒，形成DLC包覆TiC晶粒的复合结构，使DLC膜力学性能得到明显提高.另外，划痕试验表明掺钛、先注入后沉积工艺都使薄膜的结合力得到了较大提高. 关键词： 纳米TiC类金刚石复合膜 类金刚石膜 力学性能     

Au/SiO2纳米多层薄膜的制备及其性质表征

利用多靶磁控溅射技术制备了Au/SiO₂纳米颗粒分散氧化物多层复合薄膜.研究了在保持Au单层颗粒膜沉积时间一定时薄膜厚度一定、变化SiO₂的沉积时间及SiO₂的沉积时间一定而改变薄膜厚度时，多层薄膜在薄膜厚度方向的微观结构对吸收光谱的影响.研究结果表明：具有纳米层状结构的Au/SiO₂多层薄膜在560 nm波长附近有明显的表面等离子共振吸收峰，吸收峰的强度随Au颗粒的浓度增加而增强，在Au颗粒浓度相同的情况下，复合薄膜 关键词： 2纳米复合薄膜')" href="#">Au/SiO₂纳米复合薄膜 多靶磁控溅射 吸收光谱 有效介质理论     

Si衬底上异质外延金刚石的初始阶段原子H的作用及其界面结构

用高分辨率电子能量损失谱方法研究了原子H与被C₂H₂吸附的Si(100)界面的相互作用.结果显示,在Si(100)界面上,Si—Si二聚化键和C₂H₂中的C—C键被H原子打开,它们分别形成Si—H,C—H键.用AM1量子化学方法,计算了C₂H₂和C₂H₄在Si(100)上的吸附结构,指出了C₂H_{2关键词：}     

纳米VO2/ZnO复合薄膜的热致变色特性研究

为提高VO₂薄膜的热致变色性能,采用纳米结构和复合结构二者相结合的方法,通过磁控溅射技术先在玻璃衬底上制备高(002)取向ZnO薄膜,再在ZnO层上室温沉积钒金属薄膜,最后经热氧化处理获得纳米结构VO₂/ZnO复合薄膜.利用变温拉曼光谱观察分析了VO₂/ZnO薄膜相变前后的晶格畸变和键态的演变过程,讨论了薄膜的结构与热致红外开关特性和相变温度的内在关系.结果显示,与相同条件获得的同厚度的单层VO₂薄膜相比,纳米VO关键词： ZnO 2')" href="#">VO₂ 纳米复合薄膜 热致变色 拉曼光谱     

Au/SiO2纳米复合薄膜的微结构及光吸收特性研究

用多靶磁控溅射技术制备了Au/SiO₂纳米多层薄膜.利用透射电子显微镜以及吸 收光谱对Au/SiO₂复合薄膜的微观结构、表面形貌及光学性能进行了表征和测试 .研究结果表明：单层Au/SiO₂薄膜中Au沉积时间小于10s时，分散在SiO_{2< /sub>中的Au颗粒随Au的沉积时间的延长而增大；当沉积时间超过10s后，Au颗粒的尺寸几乎 不随沉积时间变化，但Au颗粒的形状由网络状结构变为薄膜状结构.［Au(t1关键词： 尺寸效应 纳米复合薄膜 吸收光谱 有效媒质理论}     

不同氮源制备CNx纳米管薄膜及其低场致电子发射性能

采用高温热解法，分别以氯化铵(NH₄Cl)和乙二胺(C₂H₈N₂)为氮源在洁净的硅片上沉积生长CN_x纳米管薄膜.利用扫描电子显微镜、高分辨率透射电子显微镜和拉曼光谱对CN_x纳米管进行形貌观察和表征.结果显示不同氮源制备出的CN_x纳米管薄膜的洁净度、有序度以及纳米管的结构明显不同.热解乙二胺(C₂H₈N₂)/二茂铁(C₁₀H₁₀Fe)制备出的结晶度较低的“竹节状” 结构CN_x纳米管平行基底表面有序生长，而且低场致电子发射性能优越,开启电场1.0V/μm，外加电场达到2.89V/μm时发射电流密度为860μA/cm². 关键词： x纳米管')" href="#">CN_x纳米管 高温热解 “竹节状”结构 场致发射     

InP/SiO2纳米复合膜的微观结构和光学性质

应用射频磁控共溅射方法在石英玻璃和抛光硅片上制备了InP/SiO₂复合薄膜,并在几种条件下对这些薄膜进行退火.X射线光电子能谱和卢瑟福背散射实验结果表明,复合薄膜中InP和SiO₂的化学组分都大体上符合化学计量配比.X射线衍射和激光喇曼谱实验结果都证实了复合薄膜中形成了InP纳米晶粒.磷气氛保护下的高温(520℃)退火可以消除复合薄膜中残存的In和In₂O₃并得到了纯InP/SiO₂纳米复合薄膜.实验观察到了室温下纳米复合薄膜的明显的光学吸收边蓝移现象和光学非线性的极大增强 关键词： InP 纳米晶粒 微观结构 光学性质     

Cu/TiOx复合薄膜的电子态分析及其对亲水性的影响

在室温下,采用射频磁控溅射法制备了Cu/TiO_x纳米晶复合薄膜.利用X射线粉末衍射（XRD）、X射线光电子能谱（XPS）对其结构进行表征,并研究了Cu/TiO_x复合薄膜的UV-vis吸收谱和亲水性.结果表明,退火前后薄膜中钛元素皆以Ti³⁺形式存在.薄膜在可见区有吸收,吸收限为600 nm左右.Cu/TiO_x复合薄膜具有良好的亲水性.这主要是由于Cu的掺杂,使得薄膜的性能的亲水性变好. 关键词： x复合薄膜')" href="#">Cu/TiO_x复合薄膜 射频磁控溅射 XPS 亲水性     

微波ECR磁控溅射制备SiNx薄膜的XPS结构研究

利用微波电子回旋共振等离子体增强非平衡磁控溅射法在不同N₂流量下制备无氢SiN_x薄膜.通过X光电子能谱、纳米硬度仪等表征技术,研究了不同N₂流量下制备的SiN_x薄膜的化学键结构、化学键含量、元素配比及各元素沿深度分布.研究结果表明,N₂流量是影响SiN_x薄膜化学键结构、元素配比、元素延深度分布等性质的主要因素.在N_{2关键词： x}')" href="#">SiN_x 磁控溅射 XPS 化学键结构     

C2H2在金刚石（001）-（2×1）重构面上吸附的分子动力学模拟

利用Brenner半经验多体相互作用势和分子动力学模拟方法，研究了乙块（C₂H₂）分子在金刚石（001）-（2×1）重构表面上的碰撞动力学过程与化学吸附构型的关系.观察到C₂H₂在金刚石表面的6种吸附结构.约95％的吸附呈C₂H₂与表面形成两个σ单键的形式.讨论了轰击能量、入射位置及金刚石表面原子的空间位形对各种吸附构型形成的影响.还给出了化学吸附过程的分子快照，并讨论了C₂H₂分子与表面的能量交换关系. 关键词：     

Microstructure and mechanical properties of reactive magnetron sputtered Ti-B-C-N nanocomposite coatings

Ti-B-C-N nanocomposite coatings with different C contents were deposited on Si (1 0 0) and high speed steel (W18Cr4V) substrates by closed-field unbalanced reactive magnetron sputtering in the mixture of argon, nitrogen and acetylene gases. These films were subsequently characterized ex situ in terms of their microstructures by X-ray diffraction (XRD) and high-resolution transmission electron microscopy (HRTEM), their nanohardness/elastic modulus and facture toughness by nano-indention and Vickers indentation methods, and their surface morphology using atomic force microscopy (AFM). The results indicated that, in the studied composition range, the deposited Ti-B-C-N coatings exhibit nanocomposite based on TiN nanocrystallites. When the C₂H₂ flow rate is small, incorporation of small amount of C promoted crystallization of Ti-B-C-N nanocomposite coatings, which resulted in increase of nano-grain size and mechanical properties of coatings. A maximum grain size of about 8 nm was found at a C₂H₂ flux rate of 1 sccm. However, the hardness, elastic modulus and fracture toughness values were not consistent with the grain size. They got to their maximum of 35.7 GPa, 363.1 GPa and 2.46 MPa m^1/2, respectively, at a C₂H₂ flow rate of 2 sccm (corresponding to about 6 nm in nano-grain size). Further increase of C content dramatically decreased not only grain size but also the mechanical properties of coatings. The presently deposited Ti-B-C-N coatings had a smooth surface. The roughness value was consistent with that of grain size.     

Micro- and nanocomposite Ti-Al-N/Ni-Cr-B-Si-Fe-based protective coatings: Structure and properties

A new type of nanocomposite Ti-Al-N/Ni-Cr-B-Si-Fe-based coatings 70–90 μm thick produced by combined magnetron sputtering and a plasma detonation technology is created and studied. Phases Ti₃AlN + Ti₃Al₂N₂ and the phases caused by the interaction of plasma with a thick Al₃Ti + Ni₃Ti coating are detected in the coatings. The TiAlN phase has a grain size of 18–24 nm, and other phases has a grain size of 35–90 nm. The elastic modulus of the Ti-Al-N coating is E = 342 ± 1 GPa and its average hardness is H = 20.8 ± 1.8 GPa. The corrosion rate of this coating is very low, 4.8 μg/year, which is about three orders of magnitude lower than that of stainless steel (substrate). Wear tests performed according to the cylinder-surface scheme demonstrate high wear resistance and high adhesion between the thick and thin coatings.     

Composition and structure-property relationships of chromium-diboride/molybdenum-disulphide PVD nanocomposite hard coatings deposited by pulsed magnetron sputtering

The composition and structure-property relationships of physical vapour deposited coatings containing mixtures of CrB₂ and MoS₂ are reported. The coatings were produced by pulsed magnetron sputtering of loosely-packed powder targets formed from a blend of chromium and boron powders, alloyed with 12.8, 18.9 and 24.0 atom percent MoS₂. Results of coating characterisation (by X-ray diffraction, scanning electron microscopy, transmission electron microscopy, Auger electron spectroscopy and nanoindentation measurement of hardness and elastic modulus) revealed that increasing amounts of MoS₂ produced the following effects: frustration of crystallisation and phase separation; a decrease in average grain sizes (from ∼5.5 to ∼ 4.3 nm) and a decrease in coating hardness (from ∼15 to ∼ 10 GPa). Scratch testing also showed that the load-bearing capability of coatings was altered; coatings possessing an intermediate concentration of MoS₂ exhibited the best behaviour with no failure observed in mechanical testing, due to an optimal nanocomposite structure. The corrosion resistance (investigated by potentiodynamic polarisation tests) however tended to improve as more MoS₂ was introduced. An investigation of the effects of generating an amorphous structure by adding Ti and C into Cr-B-MoS₂ coatings revealed improved corrosion behaviour, which significantly exceeded that of uncoated stainless steel and CrB₂-coated samples. PACS 68.37.Lp; 68.55.A-; 68.55.Ln; 68.55.Nq; 68.60.Bs     

Peculiarities of structural phase and elastic stress states of superhard TiN-based nanocomposite coatings

A new concept of designing nanocomposite coatings is proposed. The concept consists in microstructural self-organization through simultaneous nucleation of islands of different mutually insoluble or slightly soluble phases at the stage of coating formation. Physical principles on which to select compositions of the coatings were developed and were experimentally verified on multicomponent nanocomposite coatings. With a Sprut magnetron arc plasma complex, superhard (H _μ > 40 GPa) multicomponent nanocomposite coatings of the system Ti-Al-Si-Cr-Ni-Cu-O-C-N were obtained. The peculiarities of structural phase and elastic stress states of the multicomponent coatings before and after annealing at a temperature of up to 1000 °C were studied by transmission electron microscopy, X-ray diffraction analysis, microhardness measurements and scratch tests. The study reveals a wide range of lattice bending-torsion (up to 200° μm^?1) of nanosized (less than 30 nm) coherent scattering regions in the two-level coating structure and of individual (up to 15 nm) TiN nanocrystals. Annealing of the coatings causes the two-level grain structure to relax with the formation of TiN-based nanocrystals of size less than 30–40 nm and with a decrease in lattice bending-torsion down to 40°–50° μm^?1. Comparative analysis of acoustic emission signals and tracks of the multicomponent and TiN coatings in scratch tests points to an increase in fracture ductility in the multicomponent coatings.     

Boron–Carbon Nanocomposites Fabricated at High Pressures and Temperatures

Interaction of amorphous boron and C₆₀ fullerite is analyzed at pressures of 2.0 and 7.7. GPa and temperatures of 600–1800°C. Effect of pressure and temperature on the material structure is studied, temperatures for synthesis of boron carbide and diamond are found, and the sequence of transformations of the carbon component is determined. Ultrasonic method is used to measure elastic moduli of the samples, and the dependences of the moduli on the structure are analyzed. It is demonstrated that the boron–carbon nanocomposite synthesized at relatively low pressure (2.0 GPa) and temperature (about 1000°C) exhibits high elastic parameters (bulk modulus, B ≈ 75.3–84.0 GPa; Young modulus, E ≈ 108–119 GPa; and shear modulus, G ≈ 43–47 GPa at a density of about 2.2 g/cm³). The results can be used for development of novel nanocomposite materials.     

Dynamic compliance of multilayer coatings

The algorithm for calculation of dynamic compliance of multilayer coatings was developed. The compliance modulus and phase lag of coating surface motion vs. the current pressure depend on viscoelastic properties of materials, ratio of wavelength to layer thickness λ/H, and ratio of wave velocity to propagation velocity of shear vibrations in the base layer V / C _t,2 ⁰ Dynamic compliance of the two-layer coating consisting of a thick base layer and thin durable outer layer was calculated. The elasticity modulus of the outer layer ranged up to eight values of elastic modulus of the inner layer; the density of the outer layer either remained equal to the density of the inner layer or increased proportionally to the elastic modulus. Depending on V / C _t,2 ⁰ two scenarios of compliant coating interaction with the turbulent flow were distinguished: resonant and broadband ones. It is shown that the vibration properties of two-layer coatings can be significantly better than the properties of the monolayer coatings. This makes it possible either to increase the coating strength or to work efficiently at lower velocities.     

脉冲磁控溅射法制备单斜相氧化铒涂层

用中频脉冲反应磁控溅射法,在溅射功率为78 W,93 W和124 W以及衬底温度分别为室温,500 ℃及677 ℃下制备了氧化铒涂层.采用原子力显微镜、纳米压痕、X射线衍射和掠入射X射线衍射法研究了涂层的形貌、力学性能及物相结构.测量了涂层的电学性能.结果显示,脉冲磁控溅射沉积氧化铒涂层具有较高的沉积速率.实验制备得到了单斜相结构的氧化铒涂层.提高溅射功率时,沉积速率从28 nm/min增大至68 nm/min,涂层的结晶质量显著下降.提高衬底温度至500 ℃和677 ℃时,单斜相衍射峰强度下降.分析认为 关键词： 氧化铒 脉冲磁控溅射 单斜晶相     

Microstructure and mechanical properties of alumina coatings prepared by double glow plasma technique

Low-temperature growth (600 °C) of α-Al₂O₃ coatings on the stainless steel substrate by double glow plasma technique was achieved. The compositions and microstructures of the coatings prepared at different oxygen flow rates were characterized, respectively, by X-ray diffraction (XRD), scanning electron microscopy (SEM) and energy dispersive X-ray (EDX) spectrometry. A phenomenological mechanism for the formation of the Al₂O₃ ceramic coatings during the oxidation process was proposed on the basis of the experimental results. It was obvious that the oxygen flow rates had a great effect on the surface structure of the prepared Al₂O₃ coatings. The dense and smooth Al₂O₃ coatings were prepared at the oxygen flow rate of 15 sccm. In addition, the correlations between the mechanical properties of Al₂O₃ coating and oxygen flow rates were also discussed. The coating prepared at 15 sccm oxygen flow rate exhibited the best mechanical properties with a maximum hardness of 31 GPa and elastic modulus of 321 GPa. The corresponding critical load of scratch adherence for this sample was 47 N.     

Structure and hardness of a-C:H films prepared by middle frequency plasma chemical vapor deposition

a-C:H films were prepared by middle frequency plasma chemical vapor deposition (MF-PCVD) on silicon substrates from two hydrocarbon source gases, CH₄ and a mixture of C₂H₂ + H₂, at varying bias voltage amplitudes. Raman spectroscopy shows that the structure of the a-C:H films deposited from these two precursors is different. For the films deposited from CH₄, the G peak position around 1520 cm⁻¹ and the small intensity ratio of D peak to G peak (I(D)/I(G)) indicate that the C-C sp³ fraction in this film is about 20 at.%. These films are diamond-like a-C:H films. For the films deposited from C₂H₂ + H₂, the Raman results indicate that their structure is close to graphite-like amorphous carbon. The hardness and elastic modulus of the films deposited from CH₄ increase with increasing bias voltage, while a decrease of hardness and elastic modulus of the films deposited from a mixture of C₂H₂ + H₂ with increasing bias voltage is observed.     

Enhancement of surface mechanical properties by using TiN[BCN/BN]n/c-BN multilayer system

The aim of this work is to improve the mechanical properties of AISI 4140 steel substrates by using a TiN[BCN/BN]_n/c-BN multilayer system as a protective coating. TiN[BCN/BN]_n/c-BN multilayered coatings via reactive r.f. magnetron sputtering technique were grown, systematically varying the length period (Λ) and the number of bilayers (n) because one bilayer (n = 1) represents two different layers (t_BCN + t_BN), thus the total thickness of the coating and all other growth parameters were maintained constant. The coatings were characterized by Fourier transform infrared spectroscopy showing bands associated with h-BN bonds and c-BN stretching vibrations centered at 1400 cm⁻¹ and 1100 cm⁻¹, respectively. Coating composition and multilayer modulation were studied via secondary ion mass spectroscopy. Atomic force microscopy analysis revealed a reduction in grain size and roughness when the bilayer number (n) increased and the bilayer period decreased. Finally, enhancement of mechanical properties was determined via nanoindentation measurements. The best behavior was obtained when the bilayer period (Λ) was 80 nm (n = 25), yielding the relative highest hardness (∼30 GPa) and elastic modulus (230 GPa). The values for the hardness and elastic modulus are 1.5 and 1.7 times greater than the coating with n = 1, respectively. The enhancement effects in multilayered coatings could be attributed to different mechanisms for layer formation with nanometric thickness due to the Hall-Petch effect; because this effect, originally used to explain increased hardness with decreasing grain size in bulk polycrystalline metals, has also been used to explain hardness enhancements in multilayered coatings taking into account the thickness reduction at individual single layers that make up the multilayered system. The Hall-Petch model based on dislocation motion within layered and across layer interfaces has been successfully applied to multilayered coatings to explain this hardness enhancement.