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采用离子注入与反应磁控溅射相结合的方法在钛合金及硅片基体表面上制备了纳米TiC类金刚石(DLC)复合膜.通过纳米压痕技术检测了薄膜的纳米硬度,显微划痕试验评估了薄膜的结合力.通过X射线光电子能谱及X射线衍射表征了薄膜的化学结构.结果表明,通过改变C2H2气体流量,可以达到控制薄膜中钛原子含量的目的,合适的C2H2气体流量可以在DLC膜中形成较多的纳米TiC晶粒,形成DLC包覆TiC晶粒的复合结构,使DLC膜力学性能得到明显提高.另外,划痕试验表明掺钛、先注入后沉积工艺都使薄膜的结合力得到了较大提高.
关键词:
纳米TiC类金刚石复合膜
类金刚石膜
力学性能 相似文献
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采用低气压等离子体喷涂在DZ4镍基高温合金表面沉积NiCoCrAlY 涂层,并利用强流脉冲电子束(HCPEB)对其进行辐照处理。对HCPEB辐照处理前后的涂层的结构和性能分析得出,经HCPEB辐照处理后,疏松的涂层表面重熔,变得致密平整,产生微区光滑、熔坑和裂纹。X射线衍射分析表明,电子束辐照后涂层中的γ′相增多,涂层没有产生明显的残余微观内应力。900 ℃静态空气等温氧化试验结果显示,HCPEB辐照处理后,涂层的抗氧化性能明显提高。原因在于电子束辐照处理的涂层氧化后表面形成了更加完整的Al2O3保护层,同时γ′相的增加也有利于其耐氧化性能的提高。 相似文献
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Nanocomposite TiC/a-C:H film prepared on titanium aluminium alloy substrates by PSII assistant MW-ECRCVD 下载免费PDF全文
Thin films of titanium carbide and amorphous hydrogenated carbon have been synthesized on titanium aluminium alloy substrates by PSII assisted MW-ECRCVD with a mirror field. The microstructure, chemical composition and mechanical property were investigated. Using XPS and TEM, the films were identified to be a-C:H film containing TiC nanometre grains (namely, the so-called nanocomposite structure). The size of TiC grains of nanocomposite TiC/DLC film is about 5 nm. The nanocomposite structure has obvious improvement in the mechanical properties of DLC film. The hardness of a-C:H film with Ti is enhanced to 34 G Pa~ while that of a-C:H film without Ti is about 12 G Pa, and the coherent strength is also obviously enhanced at the critical load of about 35N. 相似文献
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