| InP/SiO2纳米复合膜的微观结构和光学性质 |
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| 引用本文： | 丁瑞钦,王浩,W.F.LAU,W.Y.CHEUNG,S.P.WONG,王宁娟,于英敏.InP/SiO2纳米复合膜的微观结构和光学性质[J].物理学报,2001,50(8):1574-1579. |
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| 作者姓名： | 丁瑞钦 王浩 W.F.LAU W.Y.CHEUNG S.P.WONG 王宁娟 于英敏 |
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| 作者单位： | (1)广东省五邑大学薄膜与纳米材料研究所,江门529020; (2)南开大学光电子薄膜器件与技术研究所,天津300071; (3)香港中文大学电子工程系暨材料科技研究中心,新界,香港 |
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| 基金项目： | 国家自然科学基金(批准号:69806008);广东省自然科学基金(批准号:970716)和中山大学超快速激光光谱学国家重点实验室开放课题（批准号:1999）资助的课题. |
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| 摘 要： | 应用射频磁控共溅射方法在石英玻璃和抛光硅片上制备了InP/SiO2复合薄膜,并在几种条件下对这些薄膜进行退火.X射线光电子能谱和卢瑟福背散射实验结果表明,复合薄膜中InP和SiO2的化学组分都大体上符合化学计量配比.X射线衍射和激光喇曼谱实验结果都证实了复合薄膜中形成了InP纳米晶粒.磷气氛保护下的高温(520℃)退火可以消除复合薄膜中残存的In和In2O3并得到了纯InP/SiO2纳米复合薄膜.实验观察到了室温下纳米复合薄膜的明显的光学吸收边蓝移现象和光学非线性的极大增强
关键词：
InP
纳米晶粒
微观结构
光学性质
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| 关 键 词： | InP 纳米晶粒 微观结构 光学性质 |
| 收稿时间： | 2000-12-19 |
| 修稿时间： | 2000年12月19 |
THE MICROSTRUCTURE AND OPTICAL PROPERTIES OF THE NANOCOMPOSITE FILMS OF InP/SiO2 |
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| DING RUI-QIN,WANG HAO,W.F.LAU,W.Y.CHEUNG,S.P.WONG,WANG NING-JUAN and YU YING-MIN.THE MICROSTRUCTURE AND OPTICAL PROPERTIES OF THE NANOCOMPOSITE FILMS OF InP/SiO2[J].Acta Physica Sinica,2001,50(8):1574-1579. |
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| Authors: | DING RUI-QIN WANG HAO WFLAU WYCHEUNG SPWONG WANG NING-JUAN and YU YING-MIN |
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| Abstract: | InP/SiO2 composite thin films have been deposited on hot substrates of slice of silica glass and polished silicon by a radio frequency magnetron co-sputtering technique, and annealing under several conditions. Detailed analysis of the composition of the films by X-ray photoelectron spectroscopy and Rutherford backscattering spectroscopy shows that the InP and SiO2 exist in normal stoichiometry as a whole. X-ray diffraction patterns and Raman spectra of the films conform the presence of InP nanocrystals in the composite films. Very small amounts of extra indium and In2O3 have been removed and pure InP/SiO2 nanocomposite films have been obtained by annealing at high temperature (520℃) in over-pressure of phosphorous vapor. Blue shifts of optical absorption spectra and great enhancement of optical nonlinearity of the films at room temperature have been observed. |
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| Keywords: | InP nanocrystals microstructure optical property |
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