Nondestructive investigation of interface states in high‐k oxide films on Ge substrate using X‐ray absorption spectroscopy

The unoccupied electronic structures of 5 nm thick high permittivity (k) oxides (HfO₂, ZrO₂, and Al₂O₃) and SiO₂ films on Ge substrates were examined using O K‐edge X‐ray absorption spectroscopy. Comparative studies with those on Si substrates showed contrasts in the conduction bands, which should be due to the formation of interface states. In the Al₂O₃ and SiO₂ films, GeO₂ layers are formed at the interface and they suppress in part the formation of detrimental germanate phases. In contrast, in the HfO₂ and ZrO₂ films, no signature of the Ge‐oxide phase is observed but some germanate phases are expected to prevail, suggesting a degradation of the gate oxide characteristics. (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)     

Suspension plasma sprayed composite coating using amorphous powder feedstock

Al₂O₃-ZrO₂ composite coatings were deposited by the suspension plasma spray process using molecularly mixed amorphous powders. X-ray diffraction (XRD) analysis shows that the as-sprayed coating is composed of α-Al₂O₃ and tetragonal ZrO₂ phases with grain sizes of 26 nm and 18 nm, respectively. The as-sprayed coating has 93% density with a hardness of 9.9 GPa. Heat treatment of the as-sprayed coating reveals that the Al₂O₃ and ZrO₂ phases are homogeneously distributed in the composite coating.     

Optical properties of multilayer structures

The possibility of using the ellipsometry method for investigation of the optical properties of multilayer films and structures is shown. The optical properties of structures HfO₂/SiO₂/Si, HfO₂/Si, ZrO₂/Si, Ta₂O₅/Si, and Al₂O₃/Si are studied. It is found that a layer of hafnium silicate is formed at the interface between the HfO₂ film and Si. Annealing of the structures in oxygen shows that oxides studied are oxygen-permeable and that the thickness of SiO₂ at the film-substrate interface increases. The growth rate of SiO₂ layers depends on the chemical nature of an oxide. Al₂O₃ films are impermeable for oxygen diffusion. The production of layers of alloys (Al₂O₃) _x (HfO₂)_{1 ? x} is optimized, which allows one to obtain layers with a homogeneous distribution of elements over the thickness.     

焙烧温度对SiO2负载的Co3O4纳米粒子表面氧缺陷浓度和CO氧化催化性能的影响

以传统的浸渍法,在不同焙烧温度下制备了用于CO氧化反应的Co₃O₄/SiO₂催化剂．通过激光拉曼光谱(Raman)、X射线光电子能谱(XPS)、X射线衍射(XRD)、程序升温还原(TPR)和X射线吸收精细结构谱(XAFS)表征了该系列催化剂的结构．在所有的催化剂中,XRD和Raman光谱都只检测到了Co₃O₄晶相的存在．与Co₃O₄体相相比,XPS结果表明在200 oC焙烧的(Co₃O₄(200)/SiO₂)催化剂中Co₃O₄表面上存在着过量的Co²⁺．与XPS的结果一致,TPR结果表明Co₃O₄(200)/SiO₂催化剂中Co₃O₄表面上存在氧缺陷, 并且XAFS结果也表明Co₃O₄(200)/SiO₂催化剂中Co₃O₄具有更多的Co²⁺．提高焙烧温度使得过量的Co²⁺进一步氧化为Co³⁺,同时降低了表面氧缺陷浓度,从而得到计量比的Co₃O₄4/SiO₂催化剂．在所有的负载催化剂中Co₃O₄(200)/SiO₂催化剂表现出了最好的CO氧化催化性能,表明过量Co²⁺和表面氧缺陷的存在能够促进Co₃O₄催化CO氧化反应的活性.     

Ni基催化剂在邻甲酚原位加氢反应中的催化性能

采用等体积浸渍法制备了一系列负载型Ni基催化剂,利用XRD、H₂-TPR、NH₃-TPD 等技术表征了催化剂的理化特性,考察了载体(CMK-3、SiO₂ZrO₂、MgO、Al₂O₃)、助剂(Cu、Ce、Fe)对Ni基催化剂理化特性的影响,测试了230 oC、0.1 MPa冷压下催化剂对邻甲酚原位加氢反应的性能．结果表明,在负载型镍基催化剂作用下,甲醇水相重整制氢反应可以与邻甲酚的原位加氢反应相耦合;以CMK-3为载体的催化剂活性明显优于其他三种载体,邻甲酚的转化率为45.35%;助剂的添加对催化剂性能影响显著,Fe 的引入使原位加氢体系的转化率降至40.49%,助剂Ce、Cu的加入提高了Ni/CMK-3催化剂的原位加氢反应性能,转化率分别提高至64.6%、66.8%,Cu的添加改变了产物的分布,在产物中出现了新产物甲苯;同时探讨原位加氢反应路径及反应机理．     

Surface properties of palladium catalysts supported on ternary ZrO2–Al2O3–WOx oxides prepared by the sol–gel method: Study of the chemical state of the support

The surface properties of Pd and Pd–Pt catalysts supported on binary ZrO₂–WOx and ternary ZrO₂–Al₂O₃–WOx oxides prepared by the sol–gel method were studied. Special attention was paid to the study of the texture of the catalysts as well as the chemical state of tungstated zirconia and tungstated zirconia promoted with alumina in the palladium catalysts. The catalysts were tested in the isomerization of n-hexane and were characterized by N₂ physisorption, XRD, TPR, Raman spectroscopy, XPS and FT-IR of adsorbed pyridine. The catalysts had bimodal pore size distributions with mesopores in the range 55–70 Å and macropores of 1000 Å in diameter. The catalysts had a surface WOx coverage (4.4–6.0 W nm^?2) lower than that of the theoretical monolayer (7.0 W nm^?2). A lower acidity of the ternary ZrO₂–Al₂O₃–WOx oxide as compared to the binary ZrO₂–WOx oxide was found. Higher activity in the isomerisation of n-hexane was obtained in the Pd–Pt catalysts supported on ternary ZrAlW oxides prepared by sol–gel that is correlated with the coexistence on the surface of W⁴⁺ (WO₂) or W⁰ and W⁶⁺ (Al₂(WO₄)₃) species, ZrO₂ in the tetragonal phase and a high amount of ZrOx suboxides species in a low oxidation state (Zr³⁺ and Zr²⁺).     

Effect of combination of noble metals and metal oxide supports on catalytic reduction of NO by H2

We investigated the effects of combination of noble metals M (Rh, Pd, Ir, Pt) and metal oxide supports S (Al₂O₃, SiO₂, ZrO₂, CeO₂) on the NO + H₂ reaction using planar catalysts with M/S two layered thin films on Si substrate. In this study, NO reduction ability per metal atom were evaluated with a specially designed apparatus employing pulse valves for the injection of reactant molecules onto catalysts and a time-of-flight mass spectrometer to measure multiple transient products: NH₃, N₂ and N₂O simultaneously as well as with an atomic force microscopy to observe the surface area of metal particles. The catalytic performances of Rh and Ir catalysts were hardly affected by a choice of a metal oxide support, while Pd and Pt catalysts showed different catalytic activity and selectivity depending on the metal oxide supports. This assortment is consistent with ability to dissociate NO depending on metals without the effect of any support materials. There, the metals to the left of Rh and Ir on the periodic table favor dissociation of NO and those to the right of Pd and Pt tend to show molecular adsorption of NO. Therefore, the catalytic property of noble metals could be assorted into two groups, i.e. Rh and Ir group whose own property would mainly dominate the catalytic performance, and Pd and Pt group whose interaction with metal oxides supports would clearly contribute to the reaction of NO with H₂. NO reduction activity of Pd and Pt was found to be promoted above that of Rh and Ir, provided that Pd and Pt were supported by CeO₂ and ZrO₂.     

Permeation barrier properties of an Al2O3/ZrO2 multilayer deposited by remote plasma atomic layer deposition

We report the permeation barrier properties of Al₂O₃/ZrO₂ multi-layers deposited by remote plasma atomic layer deposition. Electrical Ca degradation tests were performed to derive the water vapor transmission rate (WVTR) of Al₂O₃, ZrO₂ and Al₂O₃/ZrO₂ multi-layers at 50 °C and 50% relative humidity (RH). Al₂O₃/ZrO₂ multi-layers exhibit better barrier properties than Al₂O₃ and ZrO₂ layers, and when more individual layers were deposited in the same total thickness, the WVTR value was reduced further, indicating a better barrier property. The WVTR of the Al₂O₃ and ZrO₂ layers were 9.5 × 10⁻³ and 1.6 × 10⁻² g/m² day, respectively, but when deposited alternatively with 1 cycle of each layer, the WVTR decreased to 9.9 × 10⁻⁴ g/m² day. X-ray diffraction results indicated that ZrO₂ has a monoclinic structure but Al₂O₃ and Al₂O₃/ZrO₂ multi-layers show an amorphous structure. Cross sectional Al₂O₃/ZrO₂ multi-layer structures and the formation of a ZrAl_xO_y phase are observed by transmission electron microscopy (TEM). X-ray photoelectron spectrometry (XPS) results indicate that Al₂O₃ and ZrO₂ contain 33.7% and 37.8%, respectively, Al–OH and Zr–OH bonding. However, the ZrAl_xO_y phase contained 30.5% Al–OH and Zr–OH bonding. The results of transmittance measurement indicate that overall, Al₂O₃, ZrO₂ and Al₂O₃/ZrO₂ multi-layers show high transmittance greater than 80% in the visible region.     

Hydrogen-Water Deuterium Exchange Reaction Over Mixed Oxide Supported Nickel Catalysts

Three series of catalysts, Ni/Al₂O₃-SiO₂, Ni/Al₂O₃-Cr₂O₃ and Ni/SiO₂-Cr₂O₃, were prepared by co-precipitation. In all samples the nickel content was kept constant at 70 at.% Ni, while the support composition was varied. The nickel surface areas, which are required to measure the specific catalytic activities, were determined by hydrogen chemisorption. In the case of the single oxide supported nickel catalysts, the order of the specific catalytic activity values was: Ni/Cr₂O₃<Ni/Al₂O₃<Ni/SiO₂. The specific catalytic activity of the Ni/Al₂O₃-SiO₂ samples, as a function of the support composition, follows approximately the weighted sum of the specific activities of the single oxide supported nickel catalysts. The specific catalytic activity value of the Ni/Al₂O₃-Cr₂O₃ and Ni/SiO₂-Cr₂O₃ samples more closely resembled that of Ni/Cr₂O₃ catalyst. The presence on chromia surface of the chromic anhydride and its tendency to spread onto are supposed to be the cause of this behaviour. Due to their enhanced activity, the Ni/Al₂O₃-Cr₂O₃ catalysts can be used for the production and detritiation of heavy water.     

Mesoporous (ZrO2-TiO2)/Al2O3 ternary carriers as hydrodesulfurization catalysts support

Ternary systems at various compositions were synthesized by coprecipitating Zr and Ti (to get a ZrO₂-TiO₂ 40-60 mol%) chlorides in aqueous basic media (provided by urea thermal decomposition) over an alumina substrate. Materials characterization included N₂ physisorption, X-ray diffraction, thermal analysis, high-resolution electron microscopy and Raman and UV-vis spectroscopies. High interaction among components was clearly evidenced by various techniques. Textural properties of ternary oxides could be tuned depending on composition of formulations. Mixed oxides with 10 or 20 mol% of ZrO₂-TiO₂ (at 40-60% mol, in turn) had the most suitable combination of textural properties (surface area, average pore diameter and pore volume) for the intended application (support of catalyst for hydrodesulfurization de oil-derived middle distillates). The suitability of those ternary supports was demonstrated in the dibenzothiophene hydrodesulfurization where the corresponding supported MoS₂ catalysts (at 2.8 atom Mo nm⁻²) were much more active (on a per mass of catalyst basis) than when impregnated over either alumina or zirconia-titania oxides.     

The effect of heat treatment on the performance of the Ni/(Zr-Sm oxide) catalysts for carbon dioxide methanation

The active catalysts for methane formation from the gas mixture of CO₂ + 4H₂ with almost 100% methane selectivity were prepared by reduction of the oxide mixture of NiO and ZrO₂ prepared by calcination of aqueous ZrO₂ sol with Sm(NO₃)₃ and Ni(NO₃)₂. The 50 at%Ni-50 at%(Zr-Sm oxide) catalyst consisting of 50 at%Ni-50 at%(Zr + Sm) with Zr/Sm = 5 calcined at 650 or 800 °C showed the highest activity for methanation. The active catalysts were Ni supported on tetragonal ZrO₂, and the activity for methanation increased by an increase in inclusion of Sm³⁺ ions substituting Zr⁴⁺ ions in the tetragonal ZrO₂ lattice as a result of an increase in calcination temperature. However, the increase in calcination temperature decreased BET surface area, metal dispersion and hydrogen uptake due to grain growth. Thus, the optimum calcination temperature existed.     

A novel DME steam-reforming catalyst designed with fact database on-demand

Novel catalysts for dimethyl ether (DME) steam reforming (SR) were designed based on catalysis database on-demand. A catalyst library consisting of precious metals loaded on various metal oxides was tested for DME SR and its elemental reactions of DME hydrolysis and MeOH SR. Platinum loaded on alumina, Pt/Al₂O₃, shows high activity for DME SR as reported previously. The drawback of the catalyst was also confirmed; the formation of methane leading to the reduction of hydrogen formation. From the fact database for DME hydrolysis and MeOH SR built up with high-throughput experimentation tools, the high activity of Pt/Al₂O₃ for DME SR is owing to its high activity on DME hydrolysis because its activity on MeOH steam reforming is not remarkable. Based on these facts, novel catalysts were designed and achieved by physical mixing of Pt/Al₂O₃ which reveals high activity on DME hydrolysis with an active catalyst on MeOH steam reforming. By mixing of Pt/Al₂O₃ with Pd/Al₂O₃, methane formation was suppressed without loss of hydrogen production activity.     

The optimisation of mixed conduction in potential S.O.F.C. anode materials

The success of the SOFC rests heavily on materials selection. In this work we address the optimisation of mixed conductivity in fluorite compounds in the search for new improved SOFC anodes based upon oxides. The mobility of electronic carriers is considered to be much higher than that of ionic defects, therefore, doping a good ionic conductor with a small concentration of reducible transition metal ions can form promising mixed conductors. Zirconia based mixed conductors were studied for two reasons. Firstly, zirconia, stabilised in the defect fluorite structure, exhibits a high level of ionic conductivity. Secondly it is the most common electrolyte material for a S.O.F.C. An anode based on zirconia would therefore be expected to offer a good physical compatibility with the electrolyte material and to exhibit a high ionic contribution to total conductivity. Work on the system ZrO₂-Nb₂O₅-Y₂O₃ showed that the influence of composition on conduction could be determined. This enabled the optimisation of both the electronic and ionic contributions to conduction by compositional selection. These factors were extended to explain conductivity behaviour observed in the comparable system ZrO₂-TiO₂-Y₂O₃. Paper presented at the 5th Euroconference on Solid State Ionics, Benalmádena, Spain, Sept. 13–20, 1998.     

The electrical properties of dielectric stacks of SiO2 and Al2O3 prepared by atomic layer deposition method

We produced dielectric stacks composed of ALD SiO₂ and ALD Al₂O₃, such as SiO₂/Al₂O₃, Al₂O₃/SiO₂, and SiO₂/Al₂O₃/SiO₂, and measured the leakage currents through the stacks in comparison with those of the single oxide layers. SiO₂/Al₂O₃ shows lowest leakage current for negative bias region below 6.4 V, and Al₂O₃/SiO₂ showed highest current under negative biases below 4.5 V. Two distinct electron conduction regimes are observed for Al₂O₃ and SiO₂/Al₂O₃. Poole-Frenkel emission is dominant at the high-voltage regime for both dielectrics, whereas the direct tunneling through the dielectric is dominant at the low-voltage regime. The calculated transition voltage between two regimes for SiO₂ (6.5 nm)/Al₂O₃ (12.6 nm) is −6.4 V, which agrees well with the experimental observation (−6.1 V). For the same EOT of entire dielectric stack, the transition voltage between two regimes decreases with thinner SiO₂ layer.     

The role of Mössbauer spectrometry in designing a catalyst

In this review some aspects are shown of the role of Mössbauer spectrometry in the understanding and the development of catalysts for the hydrogenation of CO, such as Fe/ZrO₂ for the production of light olefins, Fe/SiO₂ to study the formation of iron pentacarbonyl and Co/Al₂ O₃. Applying this Fischer-Tropsch process fuels of high purity, chemical feedstocks and special chemicals by leading a mixture of CO and H₂ over an iron (cobalt) based catalyst are produced.     

Characterization of ZrO2-promoted Cu/ZnO/nano-Al2O3 methanol steam reforming catalysts

Three Cu/ZnO/ZrO₂/Al₂O₃ methanol reforming catalysts were investigated using X-ray photoelectron spectroscopy (XPS). The catalysts which contained ZrO₂ from a monoclinic nanoparticle ZrO₂ precursor exhibit both a higher activity toward the methanol steam reforming reaction and a lower CO production rate compared to catalysts composed of an XRD-amorphous ZrO₂ produced by impregnation using a Zr(NO₃)₂ precursor. The presence of a monoclinic phase appears to result in an increased charge transfer between the Zr and Cu species, as evidenced by a relatively electron-rich ZrO₂ phase and a partially oxidized Cu species on reduced catalysts. This electron deficient Cu species is more reactive toward the methanol reforming reaction and partially suppresses CO formation through the reverse water gas shift or methanol decomposition reactions.     

Investigation of 4H—SiC metal—insulation—semiconductor structure with Al2O3/SiO2 stacked dielectric

Atomic layer deposited (ALD) Al₂O₃/dry-oxidized ultrathin SiO₂ films as high-k gate dielectric grown on the 8° off-axis 4H-SiC (0001) epitaxial wafers are investigated in this paper. The metal-insulation-semiconductor (MIS) capacitors, respectively with different gate dielectric stacks (Al₂O₃/SiO₂, Al₂O₃, and SiO₂) are fabricated and compared with each other. The I-V measurements show that the Al₂O₃/SiO₂ stack has a high breakdown field ( ≥ 12 MV/cm) comparable to SiO₂, and a relatively low gate leakage current of 1× 10^-7 A/cm² at electric field of 4 MV/cm comparable to Al₂O₃. The 1-MHz high frequency C-V measurements exhibit that the Al₂O₃/SiO₂ stack has a smaller positive flat-band voltage shift and hysteresis voltage, indicating less effective charge and slow-trap density near the interface.     

Reactivity and oxygen diffusion property of resistive barriers for Bi-2223/Ag tapes

Reactivity of several oxide materials (OM) with BSCCO powder and oxygen diffusion through OM layer has been tested at temperature ≈840 °C in air. The OM (e.g.: BaZrO₃, SrCO₃, MgO and ZrO₂) showing the low or no reactivity with BSCCO have been mixed (10 wt.%) with precursor powder and used for single-core tapes. Bi-2223/Ag/OM/Ag single-core tapes with oxide barriers made of BaZrO₃, SrCO₃, ZrO₂ and Al₂O₃ have been also prepared by a standard powder-in-tube technique. The used OM in the direct contact with BSCCO influences the electrical properties of Bi-2223 phase differently. These is because the oxides react with BSCCO during the heat treatment and simultaneously affect the 2212→2223 phase transformation, the Bi-2223 grain growth and so also grain connectivity. SrCO₃ powder has been evaluated as the best material from the point of no destructive effect on 2223 phase transport current property. The oxide barrier controls the oxygen diffusion during the tape heat treatment and simultaneously the HTS phase formation kinetics, its purity and content within the superconducting core. For single-core Bi-2223/Ag/OM/Ag tapes, the highest current density was measured for Al₂O₃ due to only slightly reduced oxygen diffusion through the barrier.     

Glass bead with minimized amount (11 mg) of sample for X‐ray fluorescence determination of archaeological ceramics

By using very small amount – 11‐mg – of sample powder, major oxides (Na₂O, MgO, Al₂O₃, SiO₂, P₂O₅, K₂O, CaO, TiO₂, MnO, and total Fe₂O₃) in ancient pottery (and igneous rocks) were determined with X‐ray fluorescence spectrometry. This minimized amount of sample was used to prepare a fused glass bead with 300 times the weight of lithium tetraborate as an alkali flux. Calibration standards were obtained by compounding chemical reagents (Na₂CO₃, MgO, Al₂O₃, SiO₂, Na₄P₂O₇, K₂CO₃, CaCO₃, TiO₂, MnO₂, and Fe₂O₃) and the flux. Fewer 11 mg of reagents as oxides were able to give reliable calibration curves with good linearity (correlation coefficient: r > 0.995). Fewer 11 mg of sample was able to give reliable analytical results with good precision (relative standard deviation: <3% for more than 10.0 mass% of analyte, <10% for 1.0–10.0 mass% of analyte, and <20% for 0.1–1.0 mass% of analyte). Lower limits of detection were roughly a sub‐percentage of analyte in an unprepared sample (e.g. 0.3 mass% for Na₂O, 0.5 mass% for MgO, 1.0 mass% for Al₂O₃, and 0.01 mass% for MnO). Composition of major oxides in artificial and natural aluminosilicate materials (including rock, stone, sand, sediment, and clay; and their products) should be fundamental information to be considered in detail. The present X‐ray determination based on very small amount of sample might be made readily accessible for destructive analysis of precious samples for archaeology (and geochemistry). Copyright © 2011 John Wiley & Sons, Ltd.     

Esca investigations of some NiO/SiO2 and NiO—Al2 O3 /SiO2 catalysts

The ESCA spectra of a series of NiO/SiO₂ and NiO—Al₂ O₃/SiO₂ catalysts are reported, together with those of some reference compounds. The positions and shapes of the lines, in conjunction with a quantitative surface analysis from relative intensities, allow the identification of different surface phases, e.g. an NiO-like phase in the impregnated catalysts with very low catalytic activity and an Ni talc-like phase in the precipitated catalysts which have higher activity. The addition of Al₂O₃ has a great influence on the surface structure (formation of alumosilicate).