Optical measurement of instantaneous liquid film thickness based on total internal reflection

An optical method of measuring the instantaneous transparent liquid film thickness, based on the effect of total internal reflection by the gas-liquid interface, is represented. A light circle whose diameter is proportional to the liquid film thickness and eccentricity is proportional to the slope gradient of the liquid film surface in the measurement region is formed around a small-size light source in the plane of vessel bottom. Using several light sources, the method allows measurement of the liquid film thickness field. The method is implemented in a multichannel meter of transparent liquid film thickness and curvature surface, with computer image processing.     

Accurate measurement method of the thickness of a quartz pendulous reed by combining polarized reflectance and vision image

The detection of thickness provides important information on the production process of the quartz pendulous reed (QRP). Through real-time detection of QPR thickness, high-quality products can be produced, and defective products can be identified and removed. In order to improve detection accuracy and efficiency, a novel noncontact method for measuring the QPR thickness by combining the polarized reflectance and vision image is presented, which can be automated. Based on Snell’s law of fundamental optics, the image of the laser spot is obtained by a laser vision system. The selection criterion of the laser incident angle is analyzed. An improved edge detection algorithm is proposed to locate the subpixel edge of the laser spot, and the calculation method of the laser spot center is presented based on a set of subpixel edge-point data obtained by defining an error function which is to optimize the distribution of data points and minimize it. Experimental results show that the method proposed has good stability and high measurement accuracy, which can achieve noncontact accurate measurement of QPR thickness.     

基于锥形透镜的光线入射角度测量系统设计与研究

为测量光线入射角度，设计了一种基于锥形透镜的新型光线入射角度测量系统。利用光阑、锥形透镜和图像接收装置，获取待测光线通过光阑射入锥形透镜后经过多次的折射和反射，在图像接收装置上得到的复杂光斑图像，通过图像处理得到光斑图像特征信息，进而求解光线入射角度。采用锥形透镜的测量方案，角度测量范围可达80°，精度最高可达 (1×10?4)″。该方案结构简单、体积小且不需要进行繁琐的安装调试。与现有的单光点测量等方法相比，该方案中锥形透镜具有角度放大作用，可大幅度提高测量精度且具有大视场；图像传感器像素分辨率对测量结果影响较小，系统光通量大，容易获得较高的信噪比。     

The effect of laser patterning parameters on fluorine-doped tin oxide films deposited on glass substrates

The purpose of this study is to pattern the fluorine-doped tin oxide thin film deposited on the soda-lime glass substrates for touch screen applications by ultraviolet laser. The patterned film structures provide the electrical isolation and prevent the electrical contact from each region for various touch screens. The surface morphology, edge quality, three-dimensional topography, and profile of isolated lines and electrode structures after laser patterning were measured by a confocal laser scanning microscope. Moreover, a four-point probe instrument was used to measure the sheet resistance before and after laser patterning on film surfaces and also to discuss the electrical property at different laser spot overlaps. After laser patterning, a high overlapping area of laser spot was used to pattern the electrode layer on film surfaces that could obtain an excellent machined quality of edge profile. All sheet resistance values of film surfaces near the isolated line edge were larger than the original ones. Moreover, the sheet resistance values increased with increasing laser spot overlapping area.     

微透镜变化对半导体激光器光束匀化效果的影响

为了实现高均匀性的半导体激光器泵浦光源,研究了成像型光束积分器中微透镜的变化对泵浦光均匀性的影响。详细讨论了微透镜数值孔径与入射光束的角度匹配的问题。推导了高斯光束经成像型光束积分器的光场分布模型,分析了微透镜的边缘衍射对光斑均匀性的影响,明确了微透镜孔径大小的取值范围,并利用ZEMAX进行了系统仿真及实验验证。结果表明,经优化后的成像型光束积分器实现了不均匀性为8.11%的矩形光斑。     

水面油膜偏振反射影响因子及其交互作用定量分析

为了利用遥感技术提取更多水面油膜的反射特征信息,在传统遥感研究的基础上,对水面油膜的多角度高光谱偏振反射信息进行了测量与分析,且以偏振度作为定量研究指标,采用3因素3水平的正交实验研究了入射天顶角、波段和油膜厚度以及它们之间交互作用对水面油膜偏振度的影响.对正交实验数据进行方差分析结果表明3个因素与它们之间的交互作用对水面油膜的偏振度均有影响;而入射天顶角、油膜厚度以及波段与油膜厚度的交互作用对偏振度的影响高度显著,说明在利用多角度高光谱偏振反射信息研究水面油膜时,不但要考虑单一因素对偏振度的影响,而且必须要考虑因素间交互作用对偏振度的影响.     

基于线结构光的视频内窥镜测量技术

针对视频内窥镜的测量需求，提出了一种基于线结构激光照射的测量技术。采用线激光作为定标光照射物体表面，建立了线结构光成像模型，标定了不同物距时的放大率和图像中线位置间的比例系数。通过构建测量平台计算了物体的几何参数，实验结果表明测量误差在10%以内，能够满足视频内窥镜观测和测量要求。     

Two-photon fluorescence isotropic-single-objective microscopy

Two-photon excitation provides efficient optical sectioning in three-dimensional fluorescence microscopy, independently of a confocal detection. In two-photon laser-scanning microscopy, the image resolution is governed by the volume of the excitation light spot, which is obtained by focusing the incident laser beam through the objective lens of the microscope. The light spot being strongly elongated along the optical axis, the axial resolution is much lower than the transverse one. In this Letter we show that it is possible to strongly reduce the axial size of the excitation spot by shaping the incident beam and using a mirror in place of a standard glass slide to support the sample. Provided that the contribution of sidelobes can be removed through deconvolution procedures, this approach should allow us to achieve similar axial and lateral resolution.     

天基激光告警系统成像特征及信噪比研究

目标成像特征和信噪比是天基激光告警系统优化设计、目标检测及攻击事件判定的重要依据.在介绍告警系统结构的基础上,分析计算了攻击激光成像光斑的情况,并进行了实验验证,讨论了系统的背景光噪声环境,计算了入瞳处的背景光辐照度,推导了系统成像信噪比公式,并得到了攻击激光成像信噪比.结果表明:攻击激光在正入射情况下的理论光斑直径约...     

一种基于荧光信号的海面厚油膜评估方法

油膜厚度是海面溢油污染评估分析的一个重要指标,激光诱导荧光(LIF)技术是目前最有效的海面溢油探测技术之一,基于LIF探测技术的油膜厚度反演算法当下仅有适用于薄油膜(≤10~20 μm)的评估方法,而对于较厚油膜(>20 μm)的评估目前尚无有效的反演算法。鉴于此,提出一种基于LIF技术适用于较厚油膜的反演算法,该算法采用油膜荧光信号反演油膜厚度,推导了油膜厚度反演公式,并给出了基于该反演算法的油膜厚度评估方法。首先采用最大类间方差算法(Otsu)选取合适的荧光光谱波段,然后根据选取波段内每个波长的光谱数据反演油膜厚度,最后采用反演油膜厚度的平均值作为油膜厚度评估结果。研究了该算法的适用范围,给出了该算法有效评估范围最大值与测量相对误差的关系,并结合消光系数给出了在多种测量误差条件下不同消光系数油品有效评估范围的最大值。通过实验对本文方法进行了验证,选用原油和白油的混合油(1∶50)作为实验油品,以波长为405 nm的激光作为激发光源,采集波长范围为420～750 nm,采集了海水背景荧光和拉曼散射光光谱、实验油品的荧光特征光谱和多种不同厚度的较厚油膜的荧光光谱。采用Otsu算法选取420～476 nm波段评估油膜厚度,在实验油品油膜厚度≤800 μm时,该算法对油膜厚度的评估具有较高的精度,平均误差为10.5%;在油膜厚度>800 μm时,平均误差为28.8%,评估误差较大且随油膜厚度的增加快速变大,该实验结果与利用测量相对误差和消光系数的分析结果一致。实验结果表明,该方法可以实现对海面较厚油膜厚度的有效评估,并可以根据测量相对误差和消光系数判断评估结果的有效性。     

用扫描近场光学显微镜技术研究金膜表面等离体子共振

表面等离体子波(SPW)可与入射光横磁波极化能量耦合并被共振激发,这种现象被称为表面等离体子共振现象(SPR)。主要利用扫描近场光学显微镜(SNOM)技术和表面等离体子共振现象技术相结合,来研究金膜表面等离体子共振。设计并建立了结构独特的新型Kretschmann型表面等离体子共振现象耦合装置,同时又设计了具有厚度梯度的表面等离体子的制备方法。在此基础上,测量了改变入射角条件下的表面等离体子共振曲线,测得该装置的等离体子共振角灵敏度为1°。并且对金膜表面进行表面等离体子共振条件下的扫描近场光学显微成像。实验结果表明,在共振时金膜表面的扫描成像比不共振时清晰,而且增加了很多细节。应用表面等离体子共振现象技术将可以明显提高扫描近场光学显微镜的信噪比、分辨力等性能。     

Superresolution vibrational imaging by simultaneous detection of Raman and hyper-Raman scattering

We have developed a superresolution vibrational imaging method by simultaneous detection of Raman and hyper-Raman scattering. Raman and hyper-Raman images obtained with the same laser spot carry independent information on the sample spatial distribution, owing to different signal dependence (linear in Raman and quadratic in hyper-Raman) on the incident light intensity. This information can be quantitatively analyzed to recover the incident light intensity distribution at the focal plane. A superresolution vibrational image is then derived by the constrained deconvolution of the images by the obtained incident light intensity distribution. This method has been applied to a TiO? nanostructure and the obtained superresolution image was compared with a scanning electron microscopy image. The spatial resolution achieved by the present method is evaluated to be 160 nm, which is more than twice better than the diffraction limited resolution.     

一种基于相位测量的角漂移自适应结构表面等离子体共振气体折射率测量系统

提出了一种可抑制角漂移的表面等离子体传感器结构,并结合相位测量设计了相应的气体折射率测量系统。分析表明激光入射角、金膜厚度以及反射光p、s分量的相位差与气体折射率之间的固有非线性是影响相位响应度与折射率测量精度的主要因素。计算表明所提出的自适应结构将角漂移引起的误差降低了一个数量级并很大程度提高了测量灵敏度。同时分析设计了金膜厚度参数,并评估了反射光p、s分量的相位差与气体折射率之间固有非线性带来的误差。应用于空气折射率的测量比对实验显示其测量精度达到了10-6量级。     

基于数字微镜器件的自适应高动态范围成像方法及应用

在结构光三维扫描测量中,强反射表面因编码结构光照射后易产生局部镜面反射的特性,引起相机曝光饱和,淹没了所要检测的表面几何特征信息.为解决强反射表面的视觉成像难题,基于数字微镜器件(digital micromirror device,DMD)具有调制入射光线空间信息的特性,本文提出一种基于DMD的自适应高动态范围成像方法.设计与搭建了一套新型可编程的计算成像系统,建立其光学系统模型,并实现了DMD微镜与CMOS像素的匹配与映射;分析了基于逐像素编码曝光的高动态范围成像原理,并设计了基于DMD的光强编码控制算法,实现对入射光线强度的自适应精确调制,从而使进入成像系统中的入射光强始终处于相机的合适曝光强度内.实验表明:该方法突破了普通数字相机的动态范围限制,能够精确地控制被测强反射表面各个区域的入射光线强弱,并实现了对强反射表面的局部过曝光区域的清晰成像.该研究成果将为从根源上解决强反射表面因局部过曝光造成的三维点云缺失问题提供重要的解决方案.     

玻璃在线激光测厚误差的透反互补抑制

为了抑制激光在线测厚时入射角波动引起的误差,根据几何光学分析了激光透射式和反射式测厚原理,发现激光在特定入射角附近波动时,两种方式的测厚误差一正一负,具有互补性,在此基础上提出基于透射和反射同时测量的互补式测厚方法,该方法可将误差限定在透射式和反射式测量误差之间,抑制在线测厚误差.对于有机玻璃平板,理论计算表明,当激光入射角在67.013°±4°波动时,相对误差绝对值在1%以内,误差抑制率均值大于90%;当入射角为61.536°时,误差抑制率为100%.利用线结构激光器和两个线阵CCD相机搭建互补式测厚实验系统,测量了标称厚度为1~5mm的有机玻璃平板,与透射式和反射式测厚结果进行对照,除厚度为1mm的玻璃外,互补式测厚误差被限制在透射式和反射式之间,最大误差抑制率达61%.实验结果表明,该互补式方法有效抑制了误差,提高了在线厚度测量准确度,解决了在线测量不可重复性导致的无法通过均值法减小误差的问题.     

In-situ thin film growth/etch measurement and control by laser light reflectance analysis

In this article, I report in-situ thin film growth and etching measurement and control with ultra high precision. A stack of thin film layers of AlAs/Al_0.1Ga_0.9As to form Bragg reflector for the surface emitting semi-conductor laser was grown by gas source molecular beam epitaxy on a rotating wafer and the growth process was monitored with inclined incident polarized He–Ne laser light reflectance measurement. The multiple thin film layers were preferred to increase the visibility of the oscillating intensity variation signal for feasibility experiments. The inferred growth rate from the reflectance analysis was found to be 0.15 nm/s which remained in agreement with set growth parameters. The laser light reflectance analysis method was also employed for in-situ control and measurement of thin film etching process. The inferred etching rate was found to be 0.75 nm/s by the chemical etchant H₃PO₄:H₂O₂:H₂O::3:1:100. Calibrated optical reflectance signal for growth and etching process is proposed for measuring and control their respective thickness and depth with very high accuracy and precision.     

基于傅里叶变换轮廓术的动态液膜测量

动态液膜三维形貌的高速测量及重建，对于能源动力领域的工业过程优化十分重要。基于傅里叶变换轮廓术，对缓变表面和非缓变表面分别进行了模拟仿真，研究了物体表面形貌重建精度的影响因素，包括物体表面高度变化率、环境随机噪声以及条纹频率。并根据模拟结果对实验参数进行了优化，研发构建了高速三维结构光测量系统，对竖直壁面下降液膜表面形貌进行了动态测量。实验结果表明:随着液膜沿竖直壁面向下流动，液膜厚度呈现先增大后减小的趋势，高度方向的平均误差为0.1 mm，傅里叶变换轮廓术能够精确地应用于动态液膜高速测量。     

基于高斯拟合的激光光斑中心定位算法

激光光斑中心定位是光学测量中的关键技术之一。通过对常用定位算法的分析,给出利用光斑图像中的不饱和点对光斑进行高斯拟合,并以拟合函数的幅值点作为光斑中心的方法。利用人工光斑对该算法进行验证,结果表明该算法误差远小于0.1 像素;利用一维高精度电动平移台、CCD相机、激光器等搭建测试系统,由计算机自动采集激光光斑图像并对其进行分析,实验结果表明该算法与理论分析结果的均方根误差仅为0.1 像素。     

Mechanism and characteristics of steam laser patterning

Steam laser patterning of thin films and/or solid surfaces has been studied by jetting a beam of steam, such as water vapor, onto a sample surface to form a thin liquid film on it and patterning the sample by laser etching along predetermined path. In steam laser patterning, bubbles are formed in a thin liquid film on a sample surface irradiated by a pulsed laser. When the collapsed shock wave generated at the moment of bubble collapse and the high-speed liquid jet formed during bubble collapse are strong enough, cavitation erosion of the sample surface takes place. Compared to dry laser patterning, the etching rate can be greatly enhanced and no shoulder-like structure is formed at the rim of the laser-irradiated spot in steam laser patterning due to this cavitation erosion effect. PACS 81.65.cf; 52.38.Mf; 79.20.Ds; 42.62.-b; 62.50.+p     

基于激光诱导水拉曼抑制法的油膜厚度测量方法研究

为了实现水体表面油膜厚度的快速测量分析,以266 nm的激光作为探测系统的激发光源,基于激光诱导水拉曼散射光谱检测技术,通过获取不同种类不同厚度油膜存在下水拉曼光谱信息,建立油膜厚度反演模型。采用高斯函数拟合法校正了荧光光谱对拉曼光谱的干扰。然后根据水拉曼抑制法结合非线性最小二乘优化算法,建立油膜厚度反演模型。结果表明：对92#汽油、0#柴油、美孚机油20w-40、壳牌润滑油10w-40、采埃孚变速箱油AG6和原油油膜能探测到的油膜厚度范围为0.19~379.22 μm。采用水拉曼光谱-油膜厚度反演模型预测油膜厚度的平均相对误差在8.14%~15.81%之间。该方法能实现实验室条件下对微米级油膜的测量。