射频低压等离子体电子能量分布函数的探针诊断

本文对于无内电极放电的射频低压等离子体,采用探针电流调制法,设计并建立了三探针诊断电子能量分布函数的测量系统,测量了压力在10^-3—10^-1Torr下氮气等离子体的电子能量分布函数。从理论和实验上研究了探针鞘层上射频干扰电压对测量电子能量分布函数的影响,给出了确定射频干扰值以及对射频干扰的影响进行修正的方法,并采用该方法对实验数据进行了修正,得到了正确的电子能量分布函数。根据所得到的电子能量分布函数计算的电子平均能量,与由探针伏安特性计算得到的电子平均能量相差不超过5％,该结果间接证明了本文实验测量系统的可靠性以及对射频干扰影响进行修正的正确性。     

溅射相关的Pb97.4Sn2.6合金表面现象研究

本文对Pb_97.4Sn_2.6合金表面在溅射时所产生的一些现象进行了研究。实验在室温下,利用PHI-590型扫描俄歇微探针进行。根据理论计算结果对实验数据进行分析后,观察到了溅射增强扩散效应。当Ar⁺离子能量为5千电子伏,离子流密度为70微安/厘米²时,测得锡在合金中的扩散系数为10^-15厘米²/秒量级,影响层厚度约为200埃。 关键词：     

直流空心阴极放电中鞘层区电子的输运过程

采用蒙特－卡洛方法对空心阴极放电中鞘层区电子的输运过程进行了研究，电子在鞘层区被非均匀电场加速，两次碰撞之间的步长是由电子与中性粒子的碰撞频率确定。模型中三种碰撞截面积是由实验和理论数据拟合而来。研究了电子平均能量、电子密度和电离系数在径向的分布。电子能量的空间分布结果与实验很好地符合。 关键词：     

壁面二次电子发射对霍尔推力器放电通道绝缘壁面双鞘特性的影响

为进一步揭示霍尔推力器放电通道绝缘壁面鞘层的特性, 利用考虑了壁面二次电子分布函数的一维稳态流体鞘层模型, 研究了壁面二次电子发射对近壁双鞘特性的影响. 分析结果表明, 由于壁面发射的二次电子对近壁鞘层中的电子密度有增加作用, 存在一个临界二次电子发射系数σ_dc使得: 当σ≤σ_dc时, 鞘层为单层的正离子鞘结构; 当σ>σ_dc时, 鞘层表现为双层的正离子鞘和电子鞘相连结构, 连接点对应于垂直于壁面方向上电势分布的拐点. 然而, 当σ进一步增大到0.999时, 鞘层转变为三层的正离子鞘-电子鞘-正离子鞘交替结构. 数值结果表明: 随着σ的增加, 电子鞘与离子鞘的连接点向远离壁面的方向移动, 电子鞘的厚度逐渐增加; 随着壁面出射电子能量系数a的增加, 近壁区鞘层的厚度也逐渐增加. 关键词： 霍尔推力器 双鞘 壁面二次电子发射     

电子温度各向异性对霍尔推力器BN绝缘壁面鞘层特性的影响

建立多价态多组分等离子体一维流体鞘层模型,引入电子温度各向异性系数并考虑出射电子速度分布,研究了电子温度各向异性对霍尔推力器中的BN绝缘壁面鞘层特性和近壁电子流的影响.分析结果表明,相比于纯一价氙等离子体鞘层参数,推力器中的多价态氙等离子体鞘层电势降略有降低,电子壁面损失增加,临界二次电子发射系数减小.推力器中的电子温度各向异性现象可以显著地加大出射电子能量系数,进而降低鞘层电势降,增强电子壁面相互作用.数值结果表明,空间电荷饱和机制下电子温度各向异性对鞘层空间电势分布影响显著. 关键词： 霍尔推力器 电子温度各向异性 空间电荷饱和鞘层     

背势垒层结构对AlGaN/GaN双异质结载流子分布特性的影响

首先通过一维自洽求解薛定谔/泊松方程,研究了AlGaN/GaN双异质结构中AlGaN背势垒层Al组分和厚度对载流子分布特性的影响.其次利用低压MOCVD方法在蓝宝石衬底上生长出具有不同背势垒层的AlGaN/GaN双异质结构材料,通过汞探针CV测试验证了理论计算的正确性.理论计算和实验结果均表明,随着背势垒层Al组分的提高和厚度的增加,主沟道中的二维电子气面密度逐渐减小,寄生沟道的二维电子气密度逐渐增加;背势垒层Al组分的提高和厚度的增加能有效的增强主沟道的二维电子气限域性,但是却带来了较高的 关键词： AlGaN/GaN 双异质结构 限域性 寄生沟道     

氩气微腔放电中特性参数的数值模拟研究

本文采用二维自洽完全流体模型,针对阳极为通孔的高气压微腔放电结构,研究了微腔放电的参数特性.数值计算得到了氩气压强为100 Torr,放电稳态时的电势分布、电子数密度分布和电子温度分布等重要参数.模拟结果表明放电区存在显著的阴极鞘层结构,电子数密度的峰值达到10²⁰ m^-3,电子温度的量级为几个eV至十几eV,该结论与实验结果相一致.数值模拟合理的解释了微腔放电的基本原理. 关键词： 微腔放电 等离子体模拟 流体模型     

电子温度对霍尔推进器等离子体鞘层特性的影响

采用二维粒子模拟方法研究了霍尔推进器通道中电子温度对等离子体鞘层特性的影响, 讨论了不同电子温度下电子数密度、鞘层电势、电场及二次电子发射系数的变化规律. 结果表明: 当电子温度较低时, 鞘层中电子数密度沿径向方向呈指数下降, 在近壁处达到最小值, 鞘层电势降和电场径向分量变化均较大, 壁面电势维持一稳定值不变, 鞘层稳定性好; 当电子温度较高时, 鞘层区内与鞘层边界处电子数密度基本相等, 而在近壁面窄区域内迅速增加, 壁面处达到最大值, 鞘层电势变化缓慢, 电势降和电场径向分量变化均较小, 壁面电势近似维持等幅振荡, 鞘层稳定性降低; 电子温度对电场轴向分量影响较小; 随电子温度的增大, 壁面二次电子发射系数先增大后减少. 关键词： 霍尔推进器 等离子体鞘层 电子温度 粒子模拟     

液固DBD等离子体煤液化反应动力学分析

本文从DBD液固表面等离子体鞘层的研究出发,通过建立流体力学方程组来确定鞘层内的电子浓度,进而确定电子温度;借助碰撞理论和Boltzmann方程,给出反应速率常数随电子温度变化曲线.该曲线与实验曲线相吻合,从而说明等离子体鞘层理论和速率常数作为分析DBD等离子体煤液化反应机理方法的可行性和合理性,为分析、预测反应进程和反应产物提供理论依据.     

射频感应耦合Ar-N2等离子体物理特性的Langmuir探针测量及理论研究

分别通过Langmuir探针测量和动力学模型模拟方法研究了射频感应耦合Ar-N₂等离子体中电子能量分布、电子温度、电子密度等物理量随N₂含量的变化规律.实验研究结果表明：电子能量分布呈现出非Maxwell型分布,并由双温分布向三温分布过渡;电子温度在不同的气压下随N₂含量的增加呈现出不同的变化规律.在放电气压小于1.3 Pa时,电子温度随N₂含量的增加而下降;当气压大于1.3 Pa时,电子温度随N₂关键词： 感应耦合等离子体 2混合气体放电')" href="#">Ar-N₂混合气体放电 电子能量分布 Langmuir探针     

真空中微波等离子体喷流电子数密度分布规律实验研究

为了准确诊断真空中微波等离子体喷流的电子数密度，利用统一的发射和单郎缪尔探针测量等离子体的空间电位，再测量等离子体的电流-电压特性曲线.根据空间电位测量结果，在等离子体的电流-电压特性曲线上能准确地获取饱和电流，从而处理出电子数密度.最后的诊断实验表明，当真空环境压强为2—6 Pa、等离子体发生器以60 W以下的微波功率击穿流量范围是42—106 mg/s的氩气时，所产生的微波等离子体喷流中电子数密度分布在1×10¹⁶—7.2×10¹⁶/m³范围内.     

Langmuir probe experiments on Korean satellites

We report in this paper the test results of the Langmuir Probes (LPs) that have been used on several Korean low earth orbit (LEO) satellites since 1999. The probes were designed to measure the electrons in the density range of ～10⁴ to ～10⁶/cm³ and temperatures less than ～10⁴ K, which are the typical characteristics of the upper ionosphere. Careful considerations were given to the probe design to reduce many error sources. For example, a 10 Hz fast voltage sweep was applied to the probe to minimize measurement errors caused by probe contaminations. An electron temperature probe was installed in addition to the LP on the KOMPSAT-1, and the electron temperatures measured simultaneously and independently by the two instruments were compared. The results showed good agreement, which confirms the validity of the LP data obtained from these Korean satellites.     

Influence of Plasma Resistance and Fluctuation on Probe Characteristics in Detached Recombining Plasmas

In order to find the causes of the strong anomaly of current‐voltage characteristics of Langmuir probe observed in detached recombining plasmas in a linear divertor plasma simulator, NAGDIS‐II, we have investigated plasma resistance along a magnetic field and potential fluctuations in the detached recombining plasmas. Simple calculation on the ratio between the plasma length, at which plasma resistance and resistance of ion sheath formed around a probe tip become equal, and an electron collection length indicates that the evaluation of electron temperature T_e becomes inaccurate at T_e of less than 0.6 eV when plasma density and neutral pressure are 1.0 × 10¹⁸ m^—3 and 10 mtorr, respectively. The potential fluctuation in detached recombining plasmas was found to be so large compared to T_e/e, which can also modify the probe characteristics.     

Electron impact ionization and excitation rate coefficients in the negative glow region of a glow discharge

Some easy to use reasonable approximations for electron impact rate coefficients have been considered. The most important rate coefficients for electron collisions in noble gases are electron-neutral ionization and electron impact excitation. Electron-neutral ionization besides electron impact excitation of some states of the argon and helium atom in direct current (dc) glow discharge plasma has been calculated. The plasma parameters of electron are significant factors for computing the rate coefficients. We present first results of probe diagnostic that includes the double probe measurements of the plasma parameters, namely, electron temperature (T_e) and electron density (n_e). Electron properties obtained from the double probe characteristic curves including T_e and n_e as well as the calculated rate coefficients (ionization and excitation) were studied as a function of the axial distance from the cathode while the discharge operating parameters of voltage and pressure were varied. Two regions of the glow discharge were investigated: cathode fall region and negative glow. Particular emphasis was placed on the negative glow region.     

Microwave power coupling with electron cyclotron resonance plasma using Langmuir probe

Electron cyclotron resonance (ECR) plasma was produced at 2.45 GHz using 200–750 W microwave power. The plasma was produced from argon gas at a pressure of 2 × 10^???4 mbar. Three water-cooled solenoid coils were used to satisfy the ECR resonant conditions inside the plasma chamber. The basic parameters of plasma, such as electron density, electron temperature, floating potential, and plasma potential, were evaluated using the current–voltage curve using a Langmuir probe. The effect of microwave power coupling to the plasma was studied by varying the microwave power. It was observed that the optimum coupling to the plasma was obtained for ~ 600 W microwave power with an average electron density of ~ 6 × 10¹¹ cm^???3 and average electron temperature of ~ 9 eV.     

Energetic Characteristics of Oxygen Plasma

A low-temperature oxygen plasma is studied using the thermocouple, probe and spectral method in the range of 2–8 Torr pressure, 30–100 mA discharge currents, 0, 5, 10 m/s pumping velocity. The gas temperature, concentrations of electrons and oxygen atoms in the 3 p⁵P state, and the longitudinal electric field are measured. Radial distributions of gas temperature and electron concentration are obtained. Ranges of pressures and currents are found in which considerable increases in electric field, discharge voltage, temperatures of gas and electrons are observed at pumping switched on. An estimate of the rate constant of the steplike ionization through the O₂(a¹Δg) state is given. The concentration of atomic oxygen in the ground state and excitation constant of the triplet O(3p⁵P) by electron impact are obtained from the solution of the balance equations and our experimental data.     

Effect of neutral pressure on the He plasma flow measurement in a linear device

Axial and azimuthal flow velocities have been measured in a linear plasma device called NAGDIS-II (NAGoya DIvertor Simulator-II), along with plasma density and electron temperature, using a vector Mach probe composed of two Mach probes, one of which is for the axial flow, and the other is for the azimuthal flow. To study the effect of neutral pressure on the deduction of the Mach numbers, the ratio of upstream to downstream currents are measured by changing the neutral pressure for the deduction of flow velocities. Helium plasma was generated with pressure of 2–35 mTorr. Since the ion gyro-radius at the magnetic flux of 300 G is larger than the probe size, an unmagnetized collisionless Mach probe theory was used for the deduction of Mach numbers and their variations. In order to check the range of collisionality, plasma density (n_e = 10¹⁰–10¹¹ cm^?3) and electron temperature (T_e = 2–9 eV) are measured by a single electric probe using a conventional collisionless probe theory. Variations of Mach number, electron temperature and plasma density with collisionless models are to be compared with those using collisional models for different pressures where ionization and ion-neutral collision are included. Mach numbers by the collisionless model are found to be overestimated by 120% for the maximum difference even in weakly collisional plasmas. A clear flow reversal exists in the axial direction with higher pressure plasma, even in the linear machine. Azimuthal flows are also measured simultaneously along with axial flows, yet they seem to be very small in the present cold ion plasma (T_i/T_e << 1).     

局域环境中微波等离子体电子密度诊断实验研究

为了研究局域真空环境中微波等离子体喷流电子数密度的分布规律及其影响因素,利用发射/郎缪尔探针测量等离子体的空间电位,再测量等离子体的电流-电压特性曲线,根据空间电位测量结果,在等离子体的电流-电压特性曲线上能准确地获取饱和电流,从而处理出电子数密度.最后的诊断实验表明：在有约束边界条件下,微波等离子体发生器以60 W以下的微波功率击穿流量范围是21—105 mg/s的氩气时,所产生的喷流中电子数密度分布在8.8×10¹⁴—7.53×10¹⁶/m^{3关键词： 等离子体诊断技术 等离子体基本过程 等离子体基本特性}     

Electron Temperature Measurement in a Premixed Flat Flame Using the Double Probe Method

The electron temperatures T_e were measured using a double probe in a premixed methane flame produced by a calibration burner according to Hartung et al. The experiment was performed at atmospheric pressure. In contrast to other authors, we have managed to find typical nonlinearities corresponding to the retarding electron current region and to calculate electron temperatures using a suitable fit on the basis of the measured characteristics. A Pt‐Rh thermocouple was used to measure temperatures T_h corresponding to “heavy” species. Our results indicate that the flame plasma can be considered to be weakly non‐isothermic — T_e = (2400–4000) K, T_h = (1400–1600) K. On the basis of measurement of the saturated ion current, the number density of the charged particles was estimated at (0.3–3.8) · 10¹⁷ m^‐3. The trends in T_e and T_h in dependence on the positions of the probes and thermocouple in the flame differ substantially; this fact has not yet been explained (© 2012 WILEY‐VCH Verlag GmbH & Co. KGaA, Weinheim)