基于微观结构的Cu互连电迁移失效研究

提出了一种基于微观晶粒尺寸分布的Cu互连电迁移失效寿命模型. 结合透射电子显微镜和统计失效分析技术, 研究了Cu互连电迁移失效尺寸缩小和临界长度效应及其物理机制. 研究表明, 当互连线宽度减小, 其平均晶粒尺寸下降并导致互连电迁移寿命降低. 小于临界长度的互连线无法提供足够的空位使得铜晶粒耗尽而发生失效. 当互连长度大于该临界长度时, 在整个电迁移测试时间内, 部分体积较小的阴极端铜晶粒出现耗尽情况. 随着互连长度的增加该失效比例迅速增大, 电迁移失效寿命减小. 当互连长度远大于扩散长度时, 失效时间主要取决于铜晶粒的尺寸, 且失效寿命和比例随晶粒尺寸变化呈现饱和的波动状态. 关键词： Cu 互连 电迁移 微观结构     

金属互连电迁移噪声的分形特征

为了研究金属互连电迁移失效机理并寻找新的电迁移表征参量，应用分形理论，通过电子扩散轨迹分形维数，将电迁移噪声时间序列分形维数与晶粒间界分形维数相联系，确定了噪声时间序列分形维数在电迁移演变中的变化趋势.研究结果表明，在金属互连电迁移前期，晶粒间界形貌越来越复杂，致使噪声时间序列的分形维数逐渐增大；成核后，由于空位凝聚成空洞，晶粒间界形貌变得较成核前规则，致使噪声时间序列的分形维数减小；成核时刻是其折点.实验结果证明理论分析的正确性，噪声时间序列的分形维数可望作为金属互连电迁演变的表征参量.     

热-电应力下Cu/Ni/SnAg_(1.8)/Cu倒装铜柱凸点界面行为及失效机理

微互连铜柱凸点因其密度高、导电性好、噪声小被广泛应用于存储芯片、高性能计算芯片等封装领域,研究铜柱凸点界面行为对明确其失效机理和组织演变规律、提升倒装封装可靠性具有重要意义.采用热电应力实验、在线电学监测、红外热像测试和微观组织分析等方法,研究Cu/Ni/SnAg_1.8/Cu微互连倒装铜凸点在温度100—150℃、电流密度2×10~4—3×10~4 A/cm~2热电应力下的互连界面行为、寿命分布、失效机理及其影响因素.铜柱凸点在热电应力下的界面行为可分为Cu_6Sn_5生长和Sn焊料消耗、Cu_6Sn_5转化成Cu_3Sn、空洞形成及裂纹扩展3个阶段,Cu_6Sn_5转化为Cu_3Sn的速率与电流密度正相关.热电应力下,铜凸点互连存在Cu焊盘消耗、焊料完全合金化成Cu_3Sn、阴极镍镀层侵蚀和层状空洞4种失效模式.基板侧Cu焊盘和铜柱侧Ni镀层的溶解消耗具有极性效应,当Cu焊盘位于阴极时,电迁移方向与热迁移方向相同,加速Cu焊盘的溶解以及Cu_3Sn生长,当Ni层为阴极时,电迁移促进Ni层的消耗,在150℃,2.5×10~4 A/cm~2下经历2.5h后,Ni阻挡层出现溃口,导致Ni层一侧的铜柱基材迅速转化成(Cu_x,Ni_y)_6Sn_5和Cu_3Sn合金.铜柱凸点互连寿命较好地服从2参数威布尔分布,形状参数为7.78,为典型的累积耗损失效特征.研究结果表明:相比单一高温应力,热电综合应力显著加速并改变了铜柱互连界面金属间化合物的生长行为和失效机制.     

金属互连电迁移噪声的相关维数研究

针对金属铝互连中噪声信号随电迁移过程变化规律及其所反映的内部失效机理问题，提出将相关维数用于对电迁移噪声时间序列的分析.通过对互连电迁移噪声实验数据的相关维数计算，发现随着电迁移的进行，金属铝互连噪声由随机性成分占主导变为确定性成分占主导，反映出噪声由随机信号转变为混沌动力学信号.应用散射理论解释上述现象，在金属互连电迁移中，空位扩散阶段噪声主要产生机制是空位随机散射；在空位聚集到空洞成核这一过程中，噪声产生机制逐渐从随机散射转变到弹道混沌腔输运机制为主.通过与传统表征参量的对比，证明相关维数可用于预测金 关键词： 电迁移 噪声 相关维数 混沌     

Cu互连应力迁移温度特性研究

提出了一种基于扩散-蠕变机制的空洞生长模型, 结合应力模拟计算和聚焦离子束分析技术研究了Cu互连应力诱生空洞失效现象, 探讨了应力诱生空洞的形成机制并分析了空洞生长速率与温度、应力梯度和扩散路径的关系. 研究结果表明, 在Cu M1互连顶端通孔拐角底部处应力和应力梯度达到极大值并观察到空洞出现. 应力梯度是决定空洞成核位置及空洞生长速率的关键因素. 应力迁移是空位在应力梯度作用下沿主导扩散路径进行的空位积聚与成核现象, 应力梯度的作用与扩散作用随温度变化方向相反, 并存在一个中值温度使得应力诱生空洞速率达到极大值. 关键词： Cu互连 应力迁移 应力诱生空洞 失效     

金属互连电迁移噪声的多尺度熵复杂度分析

针对传统频域方法用于分析金属铝互连中的噪声信号的局限性,本文采用多尺度熵方法分析电迁移噪声时间序列.结果表明在电迁移早期,噪声信号较不规律,复杂度较大;随空洞成核的发生,噪声信号规律性增强,复杂度明显减小,反映出随电迁移过程的进行系统的混乱度不断减小.通过与传统表征参量的对比,证明多尺度熵能够对电迁移失效过程进行表征. 关键词： 电迁移 噪声 多尺度熵 复杂度     

有丢失物缺陷的铜互连线中位寿命的定量研究

本文研究了六层互连线上的丢失物缺陷对互连电迁移中位寿命的影响,提出了各层互连线缺陷处的温度模型和缺陷在不同互连层的中位寿命模型,能够定量地计算缺陷对互连电迁移中位寿命的影响,给出了提高互连线中位寿命的方法.研究结果表明：互连线宽度与缺陷处互连线有效宽度的比值越大,互连线寿命越短;缺陷处的温度越高,互连线寿命越短.在互连线参数变化明显的层与层之间,互连线寿命受比值和温度的双重影响,寿命急剧下降.根据该物理模型可以准确计算出互连线具体的温度和寿命数据,可以直接指导集成电路的设计和工艺制造. 关键词： 丢失物缺陷 中位寿命 可靠性 铜互连     

p型多晶硅薄膜应变因子与掺杂浓度关系理论研究

多晶硅薄膜具有良好的压阻特性,晶粒结构和掺杂浓度决定其压阻特性.一般通过调节掺杂浓度改变压阻参数,但现有的多晶硅薄膜压阻系数与掺杂浓度的理论关系和适用范围不够全面.为了完善多晶硅薄膜压阻理论,基于多晶硅纳米薄膜隧道压阻模型,以及硅价带和空穴电导质量随应力改变的机理,提出了一种p型多晶硅薄膜压阻系数算法.该算法分别求取了晶粒中性区和复合晶界区的压阻系数π_(11),π_(12)和π_(44)的理论公式,据此可以计算任意择优晶向排列多晶硅的纵向和横向压阻系数.根据材料的结构特性,求取了p型多晶硅纳米薄膜和普通多晶硅薄膜应变因子,绘制了应变因子与掺杂浓度的关系曲线,与测试结果比较,具有较好的一致性.因此,该算法全面和准确,对多晶硅薄膜的压阻特性的改进和应用具有重要意义.     

基于ITO/聚甲基丙烯酸甲酯/Al的有机阻变存储器SPICE仿真

探索了ITO/PMMA/Al器件的阻变机理及其SPICE电路仿真, 通过优化聚甲基丙烯酸甲酯(PMMA)层退火温度, 器件可实现连续擦-读-写-读操作. 基于不同退火温度PMMA薄膜的表面形貌研究, 构建了单层有机阻变器件的非线性电荷漂移模型, 以及描述该模型掺杂区界面移动的状态方程, 并通过反馈控制积分器建立了SPICE仿真电路. 最后, 代入器件实际测量参数, 得到与器件实际结果基本一致的电流-电压模拟曲线. 结果验证了单层有机器件的阻变机理, 说明该非线性电荷漂移模型的SPICE仿真在有机阻变器件仿真中同样适用. 关键词： 有机阻变存储器 非线性电荷漂移 SPICE仿真     

霍尔效应推力器放电双稳态机理研究

实验发现霍尔效应推力器在自励磁模式下具有两个稳定的放电工作点,且运 行过程中在这两个工作点上往复跳变,很大程度上影响了推力器通道内等离子体的放 电物理过程及其综合性能.本文结合推力器放电磁安特性曲线与励磁电流曲线的相互关 系,给出了推力器放电双稳态特性形成的物理机理．在此基础上提出了通过改变励磁电 流曲线斜率,使推力器稳定工作于单放电工作点的方法,结合一维动态流体模型给予了物 理解释,并通过实验加以验证.     

Theoretical analysis and simulation of conjugate heights for dual-conjugate AO system in lidar

A multi-conjugate adaptive optics （MCAO） can offer a possibility of widening field of view （FOV） characterized by the isoplanatic angle, and the choose of conjugate height becomes a basic problem for MCAO, which influences the size of iosplanatic angle. Considering the application of lidar, the isoplanatic angle＇s expressions of two deformable mirrors （DMs） MCAO for uplink and downlink are deduced. The effects of conjugate heights for dual-conjugate AO are thoughtfully discussed, and the isoplanatic angles are further analyzed. The results show that the isopanatic angle varies with the conjugate height and reaches the maximum as the conjugate height is at the optimal altitude. Moreover, the optimal conjugate height changes with the propagation distance.     

Quick single-photon detector with many avalanche photo diodes working on the time division

Due to the limit of response speed of the present single-photon detector, the code rate is still too low to come into practical use for the present quantum key distribution (QKD) system.A new idea is put up to design a quick single-photon detector.This quick single-photon detector is composed of a multi-port optic-fiber splitter and many avalanche photo diodes (APDs).Au of the ports with APDs work on the time division and cooperate with a logic discriminating and deciding unit driven by the clock signal.The operation frequency lies on the number N of ports, and can reach N times of the conventional single-photon detector.The single-photon prompt detection can come true for high repetition-rate pulses.The applying of this detector will largely raise the code rate of the QKD, and boost the commercial use.     

Characterization of PolyA and PolyC mismatches by Raman spectroscopy

A.C mismatches are studied by Raman spectral characterization of PolyA, PolyC, and their equimolar complex in solution of 0.14 mol/L Na ,pH7.0.Experimental results show that A·C mismatches occur to be A/B (mainly A) conformers, and unlike Watson-Crick base pairing, this kind of mismatches is stabilized by only one hydrogen bond involving cytosine N4H2 and adenine N7.The formation of A·C complex makes the base stacking interactions much stronger, and conformation of the backbone more ordered, which leads to obvious Raman hypochromic effect with some shifts in corresponding bands.     

Improvement of four-wave mixing-based wavelength conversion efficiency in dispersion shifted fiber by 40-GHz clock pumping

40-GHz clock modulated signal as a pump to improve the efficiency of four-wave mixing (FWM)-based wavelength conversion in a 26.5-km dispersion shifted fiber (DSF) is investigated. The experimental results demonstrate that the conjugated FWM component has higher intensity with the clock pumping than that with the continuous-wave (CW) light pumping. The improvement of FWM-based wavelength conversion efficiency is negligible when the pump power is less than Brillouin threshold. But when the pump power is greater than Brillouin threshold, the improvement becomes significant and increases with the increment of pump power. The improvement can increase up to 9 dB if pump power reaches 17 dBm.     

Multi-pulse operation of a Kerr-lens mode-locked femtosecond laser

Our experimental results show that the presence of a proper amount of negative group velocity dispersion is essential to multi-pulse operation of a Kerr-lens mode-locked femtosecond laser. We demonstrate that the pulse separations and the number of pulses contained within a cavity round trip are strongly dependent on the initial perturbations. The results allow us to get a better understanding on the influences of the convoluted self-phase modulation and intra-cavity dispersions on the stable multi-pulse oscillation in a Kerr-lens mode-locked femtosecond laser.     

Propagation of Helmholtz-Gauss beams in weak turbulent atmosphere

Based on the Rytov approximation of light propagation in weak turbulent atmosphere,the closed-form expressions of field and average irradiance of each one of the four fundamental families of Helmholtz-Gauss (HzG)beams:cosine-Gauss beams,stationary Mathieu-Gauss beams,stationary parabolic-Gauss beams,and Bessel-Gauss beams,which are propagating in weak turbulent atmosphere,are obtained.The results show that the field and average irradiance can be written as the product of four factors:complex amplitude depending on the z-coordinate only,a Ganssian beam.a factor of complex phase perturbation induced by atmospheric turbulence,and a complex scaled version of the transverse shape of the non-diffracting beam.The effect of weak atmospheric turbulence on irradiance distribution of the HzG beam can be ignored.     

An effective method for reducing speckle noise in digital holography

An effective method for reducing the speckle noise in digital holography is proposed in this paper.Different from the methods based on classical filtering technique,it utilizes the multiple holograms which are generated by rotating the illuminating light continuously.The intensity images reconstructed by a series of holograms generated by rotating the illuminating light possess different speckle patterns.Hence by properly averaging the reconstructed intensity fields,the speckle noises can be reduced greatly.Experimental results show that the proposed method is simple and effective to reduce speckle noise in digital holography.     

Influence of purity of HfO2 on reflectance of ultraviolet multilayer

The impurities in two kinds of HfO2 materials and in their corresponding single layer thin films were determined through glow discharge mass spectrum technology and secondary ion mass spectrometry(SIMS) equipment respectively.It was found that ZrO2 was the main impurity in the two kinds of HfO2 either in the original HfO2 materials or in the electron beam deposited films.In addition,the difference of Zr content in the two kinds of HfO2 single laver films was much laxger than that of the other impurities such as Ti and Fe.which showed that it was just ZrO2 that made the difference between the optical performance of the film products including the two kinds of HfO2.With these two kinds of HfO2 and the same kind of SiO2.we deposited HfO2/SiO2 multilayer reflective coatings at the wavelength of 266 nm.Experimental results showed that the reflectances of these two mirrors were about 99.85% and 99.15% respectively,which agreed well with the designed results what were based on the optical constants obtained from the corresponding single layer thin films.     

Speech enhancement by array crosstalk resistant ANC and spectrum subtraction

Microphone array-based speech enhancement has great importance for speech communications and speech recognition. To reduce the aperture of the microphone array and to increase the effect of the speech enhancement will greatly broaden the application areas of the microphone array. An array crosstalk resistant adaptive noise cancellation method is therefore presented. And then an improved spectral subtraction algorithm is further cascaded to obtain better enhancement results. Theoretic analysis and experiments indicate that the proposed scheme needs only a very small microphone array while it simultaneously achieves a higher SNR improvement. Besides, the proposed scheme can be used in many noisy environments and is easy for real-time implementation.