磁控溅射方法制备垂直取向FePt/BN颗粒膜

用磁控溅射在热单晶MgO(100)基片上制备了［FePt/BN］多层膜，经真空热处理后，得到具有垂直取向L1₀-FePt/BN颗粒膜.X射线衍射结果和磁性测量的结果表明，［FePt(2nm)/BN(0.5nm)］₁₀和［FePt(1nm)/BN(0.25nm)］₂₀多层膜经700℃热处理1h后，均具有较好的(001)取向.［FePt(1nm)/BN(0.25nm)］₂₀垂直矫顽力达到522kA/m，剩磁比达到0.99，开关场分布S达到0.94，FePt晶粒平均尺寸约15—20nm，适合用于将来超高密度的垂直磁记录介质. 关键词： 磁控溅射 垂直磁记录 0-FePt/BN纳米颗粒膜')" href="#">L1₀-FePt/BN纳米颗粒膜     

Ag和Ti底层对[Fe/Pt]n多层膜有序化的影响

利用磁控溅射的方法，在热玻璃基片上制备了以Ag，Ti，Cu，Cr，Pt和Ta为底层的［Fe/Pt］_n多层膜，后经不同温度真空热处理，得到L1₀有序结构的FePt 薄膜（L1₀-FePt）.实验结果表明，以Ag和Ti为底层，通过采用基片加温，同时 利用［Fe/Pt］_n多层膜结构，可以促进FePt薄膜的有序化过程，使FePt-L1_０有序化温度从500℃降低到350℃.在较高的温度下退火，以Ag为底层对薄膜的磁性 能影响较小，而以Ti为底层在高于500℃退火后，矫顽力明显下降.在400℃退火20min后，以 Ag和Ti为底层的样品平行膜面的矫顽力分别达到597kA/m和645kA/m，剩磁比分别达到0.81和 0.94，为将来FePt-L1_０有序相合金薄膜用于未来超高密度磁记录介质打下基础. 关键词： ０-FePt薄膜')" href="#">L1_０-FePt薄膜 有序化温度 底层 多层膜结构     

利用FePt/Au多层膜结构制备垂直磁记录L10-FePt薄膜

利用磁控溅射方法在100℃的MgO单晶基片上制备了［FePt/Au］₁₀多层膜,并研究了采用FePt/Au多层膜结构对FePt薄膜的有序化温度、矫顽力（H_C）、垂直磁各向异性、晶粒尺寸以及颗粒间磁交换耦合作用的影响.磁性测试结果表明：FePt/Au多层膜在退火后具有较高的H_C、良好的垂直磁各向异性、较小的晶粒尺寸且无磁交换耦合作用.截面高分辨电镜分析表明：Au可以缓解MgO和FePt之间较大的晶格错配,从而促进薄 关键词： 0-FePt薄膜')" href="#">L1₀-FePt薄膜 有序化温度 垂直磁各向异性 磁交换耦合作用     

利用［Fe/Pt］n多层膜降低L10-FePt有序化温度

采用直流磁控溅射方法制备了Fe/Pt多层膜和FePt单层薄膜，再经不同温度真空热处理得到 了有序相L10₀-FePt薄膜.通过x射线衍射谱和磁性研究表明，FePt单层薄膜需 要在500℃ 以上热处理，才能开始有序化转变，而Fe/Pt多层膜可以降低FePt薄膜有序化温度.［Fe(1 5nm)/Pt(15nm)］13₁₃薄膜在350℃热处理后，有序度已经增加到 06，相应矫 顽力达到了501kA/m.多层膜化促进有序化在较低的温度下进行，这是由于热处理过程中多 关键词： 0-FePt有序相')" href="#">L10₀-FePt有序相 磁控溅射 有序度 Fe/Pt多层膜     

Bi底层对FePt薄膜的影响

利用磁控溅射的方法，在玻璃基片上制备了以Bi为底层的FePt薄膜，经不同温度真空热处理得到L1₀-FePt薄膜.研究了Bi做底层对FePt薄膜的有序化温度及矫顽力H_c的影响.实验结果表明：以Bi做底层的FePt薄膜在350℃实现低温有序，同时其H_c也有大幅度提高，并且可以在更大成分范围内获得H_c较高的L1₀-FePt薄膜.利用X射线光电子能谱研究了薄膜中Bi原子的分布情况，利用X射线衍射研究了薄膜的晶体学结构变化.结果表明,Bi底层在退火过程中的扩散促进了FePt薄膜有序度的升高. 关键词： 0-FePt薄膜')" href="#">L1₀-FePt薄膜 有序化温度 底层 扩散     

多层膜［Co85Cr15/Pt］20的磁性、垂直磁记录特性和微结构的关系

采用磁控溅射法制备了性能优良的以Pt为缓冲层的［Co85₈₅Cr15_{15/Pt］2020 多层膜，研究了溅射气压对［Co8585Cr1515/Pt］2020多层膜微结构和磁性的 影响.研究结果表明，Ar溅射气压对［Co8585Cr1515/Pt］2020多层膜的微结构 、垂直磁各向异性和矫顽力有重要的影响 关键词： 溅射气压 多层膜 垂直磁各向异性 有效磁各向异性常数}     

低相变温度垂直取向的CoPtCu/Ag纳米复合膜

采用磁控溅射(Ag/Cu/CoPt)_n多层膜先驱体结合真空退火的方法制备了一系列CoPtCu/Ag纳米复合薄膜，通过优化薄膜中Ag以及Cu的含量，成功制备出了低相变温度垂直取向的CoPtCu/Ag纳米复合膜，该膜在450℃退火即可发生相变，该温度比目前所报导的CoPtAg纳米复合膜的相变温度降低了150℃. 实验结果表明，薄膜中一定含量的Ag元素能够有效诱导薄膜的(001)取向，Cu元素的加入能有效降低薄膜的有序化温度. 对于特定组分为Co₄₀Pt₃₆Cu₈Ag₁₆的薄膜，经500℃退火后已经显示了明显的(001)取向，垂直于膜面方向上的矫顽力为5.0×10⁵A/m，并且薄膜中晶粒尺寸仅为4—5nm，为将来CoPt-L1₀有序相合金薄膜用于超高密度垂直磁记录介质打下了基础. 关键词： 磁记录材料 CoPt 纳米复合膜     

Cu掺杂对FexPt1－x薄膜有序化的影响

利用磁控溅射制备了薄膜厚度为50nm的系列(Fe_xPt_1-x)_100-yCu_y(x=0.46—0.56,y=0,0.04,0.12) 样品.利用直流共溅射方法精确控制Fe和Pt的原子比.实验结果表明，当x>0.52时，样品中添加Cu不能促进FePt的有序化，但是对于FePt化学原子定比或富Pt的样品，添加Cu可以促进FePt有序化，而且随着Fe含量的减少，需要更多的Cu添加才能实现较低温度下FePt薄膜的有序化.实验结果表明，原子比(FeCu)/Pt达到1.1—1.2的范围时，即可实现较低温度的有序化. 关键词： 0-FePt有序相')" href="#">L1₀-FePt有序相 磁控溅射 有序度 Cu掺杂     

室温生长MgO底层诱导(001)取向FePt薄膜的有序化过程对FePt成分的依赖

室温下通过磁控溅射在表面热氧化的Si基片上生长了MgO/Fe_xPt_100-x双层膜和Fe_xPt_100-x单层膜系列样品，Fe_xPt_100-x的原子成分x=48—68.研究了热处理前后不同成分FePt薄膜的晶体结构和磁性的变化，尤其是MgO底层的引入对FePt的晶体结构和磁性的影响 关键词： FePt(001)薄膜 0相')" href="#">L1₀相     

直流磁控溅射Si和玻璃衬底Fe/Co多层膜的磁性能比较

对直流磁控溅射Si和玻璃衬底［Co_t/Fe_3t］₅(t=2, 3, 4, 5nm)多层膜的磁性能进行了比较.对于t相同但衬底不同的样品,实验发现饱和磁化强度相差很小,但是矫顽力却相差很大.对矫顽力差异的理论分析表明,多层膜的粗糙度和畴壁类型是引起这种差异的主要原因. 关键词： Fe/Co多层膜 磁性能 矫顽力     

Microstructure and magnetic properties of FePt:Ag nanocomposite films on SiO2/Si(1 0 0)

FePt:Ag nanocomposite films were prepared by pulsed filtered vacuum arc deposition system and subsequent rapid thermal annealing on SiO₂/Si(1 0 0) substrates. The microstructure and magnetic properties were investigated. A strong dependence of coercivity and ordering of the face-central tetragonal structure on both Ag concentration and annealing temperature was observed. With Ag concentration of 22% in atomic ratio, the coercivity got to 6.0 kOe with a grain size of 6.7 nm when annealing temperature was 400 °C.     

FePt薄膜中磁相互作用

采用磁控溅射方法在自然氧化的单晶Si(100)衬底上制备了纳米结构的Fe₅₃Pt₄₇薄膜，并研究热处理后薄膜中的磁相互作用、晶粒尺寸与热处理温度的关系.经400℃热处理后，FePt薄膜中有明显的面心四方相形成，薄膜表现出硬磁性，晶粒尺度在20 nm，薄膜内部存在软硬磁交换耦合作用；随着热处理温度升高，硬磁相含量增加.同时由于FePt薄膜的晶粒长大，部分软硬磁晶粒之间的交换耦合作用失效；600℃热处理后，FePt的面心立方相已经完全转变为面心四方相，薄膜矫顽力由硬磁相之间的静磁作用贡献. 关键词： 磁性薄膜 纳米晶 磁性能 热处理     

L10-ordered high coercivity (FePt)Ag-C granular thin films for perpendicular recording

We report (FePt)Ag-C granular thin films for potential applications to ultrahigh density perpendicular recording media, that were processed by co-sputtering FePt, Ag, and C targets on MgO underlayer deposited on thermally oxidized Si substrates. (FePt)_1−xAg_x-yvol%C (0<x<0.2, 0<y<50) films were fabricated on oxidized silicon substrates with a 10 nm MgO interlayer at 450^oC. We found that the Ag additions improved the L1₀ ordering and the granular structure of the FePt-C films with the perpendicular coercivity ranging from 26 to 37 kOe for the particle size of 5-8 nm. The (FePt)_0.9Ag_0.1-50vol%C film showed the optimal magnetic properties as well as an appropriate granular morphology for recording media, i.e., average grain size of D_av=6.1 nm with the standard deviation of 1.8 nm.     

Microstructure and magnetic properties of nanocomposite FePt/MgO and FePt/Ag films

An in-plane magnetic anisotropy of FePt film is obtained in the MgO 5 nm/FePt t nm/MgO 5 nm films (where t=5, 10 and 20 nm). Both the in-plane coercivity (H_c∥) and the perpendicular magnetic anisotropy of FePt films are increased when introducing an Ag-capped layer instead of MgO-capped layer. An in-plane coercivity is 3154 Oe for the MgO 5 nm/FePt 10 nm/MgO 5 nm film, and it can be increased to 4846 Oe as a 5 nm Ag-capped layer instead of MgO-capped layer. The transmission electron microscopy (TEM)-energy disperse spectrum (EDS) analysis shows that the Ag mainly distributed at the grain boundary of FePt, that leads the increase of the grain boundary energy, which will enhance coercivity and perpendicular magnetic anisotropy of FePt film.     

Thickness dependence of microstructure and magnetic properties in FePt/B<Subscript>4</Subscript>C multilayer thin films

FePt/B₄C multilayer films with different single FePt layer thickness were prepared by magnetron sputtering and subsequently annealing in vacuum. Influence of single FePt layer thickness on microstructure and magnetic property of FePt/B₄C films is investigated. Experimental results suggest that the Fe and Pt rich regions will appear in the interior of single FePt layer. The increasing of FePt layer thickness leads to the increase of grain size and volume fraction of order phase f ₀, which eventually induce satisfied coercivity (5.8 kOe).     

Effect of Ag underlayer thickness on the microstructure and magnetic properties of L10-FePt films

FePt/Ag films were deposited on thermally oxidized Si(100) substrates by magnetron sputtering at room temperature and then the as-deposited films were annealed at 500 ^°C. The microstructure and magnetic properties of the films have been investigated by X-ray diffraction and vibrating sample magnetometry. The results indicate that introduction of the Ag underlayer promotes an ordering transformation of the FePt phase due to thermal tensile stress between the Ag underlayer and the FePt film. The in-plane tensile stress induced by the Ag underlayer should stretch the horizontal lattice parameter of FePt; thus, it is helpful for the ordering transformation. With increasing Ag underlayer thickness, the ordering parameter and coercivity first increase and then decrease. When the Ag underlayer thickness is 12 nm, the ordering parameter and coercivity of the film reach the maximum values, respectively. The Ag underlayer thickness also affects the magnetization reversal mechanism.