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磁控溅射方法制备垂直取向FePt/BN颗粒膜
引用本文:李宝河,冯春,杨涛,翟中海,滕蛟,于广华,朱逢吾.磁控溅射方法制备垂直取向FePt/BN颗粒膜[J].物理学报,2006,55(5):2562-2566.
作者姓名:李宝河  冯春  杨涛  翟中海  滕蛟  于广华  朱逢吾
作者单位:(1)北京科技大学材料物理系,北京 100083; (2)北京科技大学材料物理系,北京 100083;北京工商大学数理部,北京 100037; (3)北京科技大学材料物理系,北京 100083;沈阳建筑大学理学院,沈阳 110168
基金项目:中国科学院资助项目;北京市教委科技发展计划项目
摘    要:用磁控溅射在热单晶MgO(100)基片上制备了[FePt/BN]多层膜,经真空热处理后,得到具有垂直取向L10-FePt/BN颗粒膜.X射线衍射结果和磁性测量的结果表明,[FePt(2nm)/BN(0.5nm)]10和[FePt(1nm)/BN(0.25nm)]20多层膜经700℃热处理1h后,均具有较好的(001)取向.[FePt(1nm)/BN(0.25nm)]20垂直矫顽力达到522kA/m,剩磁比达到0.99,开关场分布S达到0.94,FePt晶粒平均尺寸约15—20nm,适合用于将来超高密度的垂直磁记录介质. 关键词: 磁控溅射 垂直磁记录 0-FePt/BN纳米颗粒膜')" href="#">L10-FePt/BN纳米颗粒膜

关 键 词:磁控溅射  垂直磁记录  L10-FePt/BN纳米颗粒膜
文章编号:1000-3290/2006/55(05)2562-05
收稿时间:10 25 2005 12:00AM
修稿时间:2005-10-252005-11-22

The preparation of FePt/BN particle films with perpendicular texture by magnetron sputtering
Li Bao-He,Feng Chun,Yang Tao,Zhai Zhong-Hai,Teng Jiao,Yu Guang-Hua,Zhu Feng-Wu.The preparation of FePt/BN particle films with perpendicular texture by magnetron sputtering[J].Acta Physica Sinica,2006,55(5):2562-2566.
Authors:Li Bao-He  Feng Chun  Yang Tao  Zhai Zhong-Hai  Teng Jiao  Yu Guang-Hua  Zhu Feng-Wu
Institution:1 Department of Material Physics and Chemistry, Beijing University of Science and Technology, Beijing 100083, China;2 Department of Mathmatics and Physics, Beijing Technology and Business University, Beijing 100037, China;3 College of Science, Shenyang Jianzhu University, Shenyang 110168, China
Abstract:[FePt/BN]n multilayers were prepared on MgO (100) single crystal substrates at 250℃ with magnetron sputtering. The perpendicular texture of L10-FePt/BN particle films was formed after vacuum annealing. The results of X-ray diffraction and magnetic tests show that the [FePt(2nm)/BN(0.5nm)]10 and [FePt(1nm)/BN(0.25nm)]20 multilayers have excellent (001) texture when the films were sputtered on substrates at 250℃ after annealed at 700℃ for 1h. The mean size of L10-FePt particles is roughly 15—20nm and its perpendicular coercive force reaches 522 kA/m. Moreover, the Mr/Ms and switching filed distribution S* reach 0.99 and 0.94, respectively. This particle film is a candidate for future perpendicular magnetic recording media with ultrahigh density.
Keywords:magnetron sputtering  perpendicular magnetic recording  L10-FePt/BN nanoparticle films
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