基于激光毛化技术的5052铝合金粘接试验研究

为了提高5052铝合金的粘接性能,利用脉冲光纤激光的短脉冲和高峰值功率的特性,对铝合金试件进行了激光毛化试验研究。通过正交实验法,研究了平均功率、扫描速度、脉冲频率和脉冲宽度等工艺参数对激光毛化质量的影响,以及各工艺参数的影响权重,并求得最佳工艺参数,最佳工艺参数为平均功率90 W、扫描速度10 mm/s、脉冲频率1000 kHz、脉冲宽度200 ns。根据优化后的工艺参数,加工获得了粗糙度2.35 μm,然后对激光毛化后的铝合金试件进行单搭接拉伸试验,研究发现粘接强度随着粗糙度的增大而增大,当粗糙度到达一定程度时,粘接强度反而会随着粗糙度的增大而减小。另外,粘接强度还跟铝合金表面的微织构的类型及疏密程度都有很大关系。     

皮秒激光在激光状态方程靶制备中的应用

介绍了激光状态方程靶中金属薄膜台阶的切割方法。采用皮秒激光加工技术切割了宽度百μm量级的金属薄膜台阶,研究了金属薄膜台阶宽度控制的方法,讨论了切割过程中产生热效应的因素,优化了激光加工参数。实验加工中,采用加工的参数:功率为0.5W,脉宽10ps,波长355nm,扫描速率为100mm/s,获得了宽度400μm和120μm的金属薄膜。测量结果表明,金属薄膜的宽度能精确控制,切割后金属薄膜表面质量能保持切割前的质量。     

内燃机缸套内表面激光微造型数值模拟与实验研究

针对内燃机缸套-活塞环摩擦副系统,开展缸套内表面单脉冲同点间隔多次激光微凹腔和微沟槽的工艺实验和数值模拟研究,分析了激光功率、激光脉冲次数对45~#钢靶材表面微凹腔和微沟槽形貌的影响规律。研究结果表明,随激光功率的增加,微凹腔的深度增加幅度不大且趋于平缓,外沿金属残渣增多,光斑中心温度近似线性增加;增加激光脉冲次数,微凹腔深度增加显著,但金属熔液的重铸现象明显,表面加工质量下降;微沟槽深度和宽度随激光功率的增加都有所增加,且宽度的增幅较深度更为明显;相同工况条件下,仿真结果与实验结果趋势一致。     

激光微织构硬质合金表面润湿性

为了研究硬质合金表面激光微织构对其表面润湿性的影响,利用光纤激光不同功率(3,5,7,9,10W)及不同加工次数(1,2,3,4,5)加工微凹坑,采用VHX1000c超景深三维显微镜、光学显微镜分析微凹坑形貌,利用CAM 200光学接触角仪测量表面微织构(微凹坑直径、深度和织构密度)与润湿性之间的关系。结果表明:随着激光功率的增大,微凹坑深度增加,直径变化不明显;硬质合金表面的亲水性能随着微凹坑深度的增加而减小;随着微凹坑直径的增大,亲水性增强;随着微织构密度的增加,亲水性出现极值。     

脉冲激光加工碳纤维复合材料板材的数值模拟与实验优化

利用激光线扫描方式建立丝状高斯热源的传热模型,并对其进行数值分析,得到脉冲激光烧蚀碳纤维的演化规律。对碳纤维复合材料（CFRP）板材进行激光烧蚀实验研究以验证所提模型的可行性。结果表明：当激光功率为9 W、激光扫描速度为200 mm/s时,板材表面绝大多数树脂被蒸发,表面粗糙度降至7.20μm,表征数据稳定性的样本方差为1.889。实验证明了该理论模型的正确性和可行性,为CFRP材料的激光加工研究提供了参考。     

内嵌微流道低温共烧陶瓷基板传热性能（英）

随着系统级封装（SIP）所容纳的电子元器件和集成密度迅速增加,传统的散热方法（热通孔、风冷散热等）越来越难以满足系统级封装的热管理需求。低温共烧陶瓷（LTCC）作为常见的封装基板材料之一,设计并研制了三种内嵌于LTCC基板的微流道,其中包括直排型、蛇型和螺旋型微流道（高度为0.3 mm,宽度分别为0.4, 0.5和0.8 mm）。通过数值仿真和红外热像仪测试相结合的方式分析了微流道网络结构、流体质量流量、雷诺数、材料热导率对内嵌微流道LTCC基板换热性能的影响,实验结果表明:当去离子水的流量为10 mL/min,热源等效功率为2 W/cm2时,直排型微流道的LTCC基板最高温度在3.1 kPa输入泵压差下能降低75.4 ℃,蛇型微流道的LTCC基板最高温度在85.8 kPa输入泵压差下能降低80.2 ℃,螺旋型微流道的LTCC基板最高温度在103.1 kPa输入泵压差下能降低86.7 ℃。在三种微流道中,直排型微流道具有最小的雷诺数,在相同的输入泵压差下有最好的散热性能。窄的直排型微流道（0.4 mm）在相同的流道排布密度和流体流量时比宽的微流道（0.8 mm）能多降低基板温度10 ℃。此外,提高封装材料的热导率有助于提高微流道的换热性能。     

0.05mm薄塑料片小孔群光纤激光精密加工技术

利用光纤激光加工系统对厚度为0.05mm的薄塑料片进行了打孔试验,分析了激光功率、脉冲宽度、辅助气体压强及种类等工艺参数对薄塑料片小孔群加工质量的影响情况。实验结果表明:小孔孔径随激光功率、激光脉冲宽度、辅助气体压强的增大而增大。相比氮气作为辅助气体,采用氧气作为辅助气体,由于氧气有助燃的作用,孔径明显增大,孔质量变差,热影响区增大。采用优化后的激光加工工艺参数,加工出的小孔群孔径为40±2μm,孔壁光滑,加工质量满足设计要求。     

连续/脉冲复合体制高功率固体激光技术研究

常规高功率激光器以连续或者长脉冲方式工作,与物质作用主要是依靠单一“加热”模式,针对其对复杂目标作用能力有限的问题, 提出一种连续和脉冲激光同时输出,脉宽、重频可调的新体制高功率激光技术,激光放大链路以特殊时域模式工作,即高重频脉冲与连续运转同时输出,在重频10 kHz时,实现输出功率4800 W,其中连续激光功率3600 W,脉冲激光功率1200 W,脉冲宽度为3.6 ns;在重频100 kHz时,实现输出功率4920 W,其中连续激光功率3100 W,脉冲激光功率1820 W,脉冲宽度为7 ns,光束质量4.8倍衍射极限 。     

激光烧蚀硅基表面抗反射微结构的声信号监测

为了提高抗反射硅表面制备的加工质量、缩短研制周期,提出了一种基于时频域处理的面向激光加工过程的声波信号在线监测及分析方法。利用声信号的时频谱图分析了0～30 kHz内的声信号与激光烧蚀形成的表面微结构特征尺寸之间的相关性,具体分析了激光功率及加工次数对微结构深度及声信号各频率幅值变化的影响。以声信号作为输入,基于人工神经网络对加工质量进行预测。实验结果表明：通过监测激光加工时产生的声信号能够明确反映被烧蚀硅表面是否形成周期性微结构,且微结构宽度不同,其对应的声信号频率组成也不同。在微结构宽度固定的情况下,归一化后的声信号特征参数随微结构深度线性变化,且受到激光功率变化的影响忽略不计。以硅基表面5%的反射率作为加工质量分界线,采用人工神经网络对加工质量的预测结果与实际测量结果的准确率可以超过90%。结果表明：声波在线监测可以有效应用于评估表面加工质量,为抗反射硅表面制备过程的实时监测提供了理论依据。     

4H-SiC压力敏感膜片的低损伤飞秒激光加工

采用飞秒激光加工4H-SiC压力敏感膜片,研究了飞秒激光深度方向步进间距、扫描路径方向、单脉冲能量、扫描线间距等参数对4H-SiC烧蚀形貌和烧蚀速率的影响。实验结果表明,飞秒激光加工4H-SiC样品表面孔洞的形成主要与激光诱导微沟槽的重叠有关,激光能量分布更均匀能够有效减少4H-SiC被烧蚀表面的激光诱导微沟槽的数量,增大激光扫描路径与激光偏振方向的夹角能够有效降低激光诱导微沟槽的重叠概率,从而抑制孔洞的形成。采用优化后的飞秒激光加工工艺参数,制备出直径为1 600μm、厚度为100μm的4H-SiC压力敏感膜片。所制备的4H-SiC压力敏感膜片表面无明显孔洞,边缘过烧蚀深度小于10μm,实现了4H-SiC压力敏感膜片的低损伤飞秒激光加工。     

Experimental approach to the laser machining of PMMA substrates for the fabrication of microfluidic devices

This paper deals with CO₂ laser machining of a suitable amorphous polymer (PMMA) as a flexible technique for the rapid fabrication of miniaturized structures such as microfluidic devices.A model to estimate the main dimensions (depth and width) of the grooves produced by the laser on PMMA is presented, taking into account the influence of the main process parameters (incident power, scanning speed and spot diameter). This theoretical model allows to control the engraving process showing that laser could represent a valid alternative for the production of microchannels. PMMA single-use devices are found to be easier to manufacture with respect to the conventional glass or silicon products.In a second step, IR laser vaporization is adopted for the removal of a single layer of PMMA. This is achieved using multiple overlapping sequences of straight grooves with different scanning directions. The proposed technique showed that the removal depth varied proportionally with the number of layers machined, while surface roughness is influenced by the grooves spacing and the orientation of the scanning direction between successive layers.A method for thermally bonding the PMMA sheets, constituting the 3D structure of the chip, is also presented. The combination of high temperatures and low bonding pressures makes it possible to generate a bulk junction enabling good performances in terms of sealing characteristics.     

Irradiation effects of CO2 laser parameters on surface morphology of fused silica

To understand the surface morphology evolution of fused silica induced by 10.6-μm CO2 laser irradiation at different parameters,this paper reports that optical microscopy,profilometry,and hydrophilicity tests are utilized to characterize the surface structure and roughness of the laser irradiated area. The results show that three typical surface morphologies and two typical hydrophilicity test images are observed at different laser powers and pulse durations. The correlations between surface temperature and surface morphology as well as hydrophilicity behaviours are presented. The different hydrophilicity behaviours are related to surface structures of the laser-induced crater and thermal diffusion area. The thermal diffusion length monotonously increases with increasing laser power and pulse duration. The crater width is almost determined by the laser beam size. The crater depth is more sensitive to the laser power and pulse duration than the crater width.     

Micromachining of microchannel on the polycarbonate substrate with CO2 laser direct-writing ablation

Low-power CO₂ laser direct-writing ablation was used to micromachine a microchannel on the polycarbonate substrate in this work. The influence of the process parameters (the laser power, the moving velocity of the laser beam and the scanning times) on the micromachining quality (the depth, the width and their aspect ratio) of the microchannel was experimentally studied. The depth and width of microchannel both increase with the increase of the laser power and the decrease of the moving velocity of the laser beam. When higher laser power and slower moving velocity were used, the polycarbonate surface bore more heat irradiated from the CO₂ laser for longer time which results in the formation of deeper and wider molten pool, hence the ability to fabricate bigger microchannel. Because of the effect of the laser power on the depth and width of microchannels, higher aspect (depth/width) ratio could be achieved using slower moving velocity and higher laser power, and it would reach a steady state when the laser power increases to 9.0 W possibly caused by the effect of laser power on the different directions of microchannel. The polycarbonate–polycarbonate chip was bonded with hot-press bonding technique.     

Surface roughness analysis and improvement of PMMA-based microfluidic chip chambers by CO2 laser cutting

For the microfluidic chip, the surface roughness of the chamber sidewall is an important parameter in estimating its quality. In this work, the chambers of the polymethyl methacrylate (PMMA)-based microfluidic chip were fabricated by CO₂ laser cutting, and then the surface roughness of the sections cut using different laser parameters and ambient temperature was studied by a non-contact 3D surface profiler. Our observation shows that the surface roughness results primarily from the residues on the laser-cut edge, which are produced by the bubbles bursting. To reduce the surface roughness of the cut section, a new approach is proposed, that is preheating the PMMA sheet to a suitable ambient temperature during laser processing. The results indicate that at a preheat temperature of 70-90 °C, the surface roughness resulting from the cut would be reduced. In our experiment, the best result was that the arithmetical mean roughness is R_a = 100.86 nm when the PMMA sheet was heated to 85 °C.     

YAG laser percussion drilling of a functional multi-layer thin plate

An Au-coated Fe–Ni alloy thin plate was laser drilled by a pulsed Nd:YAG laser. The influences of laser parameters on the diameter of perforation, the outer diameter of crater and the roundness of the perforation have been investigated by employing scanning electron microscopy. The diameter of perforation increases gradually with an increase in pulse width from 0.3 to 8 ms at the fixed average laser power and frequency, and increases with an increase in average laser power from 10 to 25 W at the fixed pulse width and frequency. Some craters are found around the perforations because of the heat affecting of laser beam to the non-irradiated zone. The diametric difference of the perforation between the incident and the effluent sides is very small under the shortest pulse width of 0.3 ms. Good roundness of the perforation can be achieved at either the lowest pulse width or the lowest laser power.     

Ultrafast laser machining of tapered microchannels in glass and PDMS

The ability to fabricate tapered microchannels with customizable cross sections in a variety of materials is highly desirable for microfluidic applications. This article examines ultrafast laser machining of tapered microchannel trenches in both hard (soda-lime and borosilicate glasses) and soft (PDMS elastomer) transparent solids. A simple model for channel width and depth as a function of processing parameters and threshold fluence is presented. Estimated channel sizes from the model are in good agreement with experimental results. We also show that the channel depth is a linear function of the number of laser pulses per channel width. All measurement data are found to collapse onto a single curve, which can serve as a useful guide for micromachining of tapered channels in transparent materials.     

Validity of reciprocity rule on mouse skin thermal damage due to CO2 laser irradiation

CO₂ laser (10.6 μm) is a well-known infrared coherent light source as a tool in surgery. At this wavelength there is a high absorbance coefficient (860 cm^?1), because of vibration mode resonance of H₂O molecules. Therefore, the majority of the irradiation energy is absorbed in the tissue and the temperature of the tissue rises as a function of power density and laser exposure duration. In this work, the tissue damage caused by CO₂ laser (1–10 W, ～40–400 W cm^?2, 0.1–6 s) was measured using 30 mouse skin samples. Skin damage assessment was based on measurements of the depth of cut, mean diameter of the crater and the carbonized layer. The results show that tissue damage as assessed above parameters increased with laser fluence and saturated at 1000 J cm^?2. Moreover, the damage effect due to high power density at short duration was not equivalent to that with low power density at longer irradiation time even though the energy delivered was identical. These results indicate the lack of validity of reciprocity (Bunsen-Roscoe) rule for the thermal damage.     

Influence of synchrotron radiation on morphological features of a polymethylmetacrilate thin film

The interaction of polymethylmetacrilate (PMMA) hard films with synchrotron radiation (SR) has been studied by atomic force microscopy (AFM). It has been found that the roughness changes from 1.85 to 2.98 nm with an increase in the irradiation time for the selected beam with the energy corresponding to the hard X-ray region λ = 0.2 nm. The roughness decreases from 6.41 to 2.36 nm with an increase in the irradiation time from 1 to 17 min when photons with a lower energy are used. The interaction of radiation with PMMA leads to the appearance of nanohillocks, the average diameter and height of which depend directly proportionally on the spectral composition and SR exposure time. The revealed effects of interaction of synchrotron radiation with PMMA will help to correct the X-ray lithography conditions in electron engineering (PMMA is the basis for X-ray resist) and will allow one to control the roughness degree of the PMMA surface that is the basis for intraocular lenses.     

Measurement of crater geometries after laser ablation of bone tissue with optical coherence tomography

The feasibility of measuring crater geometries by use of optical coherence tomography (OCT) is examined. Bovine shank bone on a motorized translation stage with a motion velocity of 3 mm/s is ablated with a pulsed CO2 laser in vitro. The laser pulse repetition rate is 60 Hz and the spot size on the tissue surface is 0.5 mm. Crater geometries are evaluated immediately by both OCT and histology methods after laser irradiation. The results reveal that OCT is capable of measuring crater geometries rapidly and noninvasively as compared to histology. There are good correlation and agreement between crater depth estimates obtained by two techniques, whereas there exists distinct difference between crater width estimates when the carbonization at the sides of craters is not removed.