Metal thin film ablation with femtosecond pulsed laser

Micromachining thin metal films coated on glass are widely used to repair semiconductor masks and to fabricate optoelectrical and MEMS devices. The interaction of lasers and materials must be understood in order to achieve efficient micromachining. This work investigates the morphology of thin metal films after machining with femtosecond laser ablation using about 1 μm diameter laser beam. The effect of the film thickness on the results is analyzed by comparing experimental images with data obtained using a two-temperature heat transfer model. The experiment was conducted using a high numerical aperture objective lens and a temporal pulse width of 220 fs on 200- and 500-nm-thick chromium films. The resulting surface morphology after machining was due to the thermal incubation effect, low thermal diffusivity of the glass substrate, and thermodynamic flow of the metal induced by volumetric evaporation. A Fraunhofer diffraction pattern was found in the 500-nm-thick film, and a ripple parallel to the direction of the laser light was observed after a few multiple laser shots. These results are useful for applications requiring micro- or nano-sized machining.     

热物性参量对飞秒激光烧蚀金属影响的分子动力学模拟

利用结合双温模型的分子动力学模拟方法,研究了飞秒激光与金属相互作用的烧蚀机制.采用中心波长为800 nm,能量密度从0.043 J·cm~(-2)到0.40 J·cm~(-2)不等,脉宽分别为70 fs和200 fs的激光烧蚀金属镍和铝材料.靶材的温度、原子位型以及内部压力随时间的演化展示了材料热物性参量特性和激光参量对烧蚀结果的影响.结果显示材料电子热传导率对飞秒脉宽激光下的影响仍然较大;对比铝和镍的结果可知,铝的电子晶格耦合系数比镍的小,故电子晶格间的温度梯度持续时间较长;铝的电子热传导系数比镍的大,所以材料上下表面电子温度耦合的时间缩短.铝薄膜表面在能量密度为0.40 J·cm~(-2)激光烧蚀下呈现纳米尺寸的晶体结构.     

富勒烯有机-无机杂化材料的非共珍三阶非线性光学特性

采用中心波长800 nm、脉宽30 fs的超短激光脉冲,通过飞秒光开关技术(Optical Kerr Shutter,OKS)对富勒烯有机-无机杂化材料的飞秒超快非线性特性进行了实验研究.获得270 fs的开关时间,所得的富勒烯有机-无机杂化材料的三阶非线性系数X~(3)约为4.5×10~(-4) esu,比C_(60)分子的三阶非线性系数X~(3)高一个数量级.通过实验测定的光克尔信号强度与激发光和探测光偏振方向夹角的依赖关系表明:30 fs的超短激光脉冲激发富勒烯有机-无机杂化材料的克尔信号主要是源于光诱导双折射效应,而非用200 fs的超短激光脉冲时来自瞬态栅的自衍射效应.     

Femtosecond ring all-fiber Yb laser with combined wavelength-division multiplexer-isolator

An original scheme of an all-fiber all-normal-dispersion ring mode-locked Yb laser is proposed and experimentally studied. A single fiber element serves as a wavelength-division multiplexer for the pumping radiation, an optical isolator, and a spectrally selective element for the radiation of the Yb laser. The output pulse duration is 900 fs, and the intracavity compression yields the pulses with a duration of 200 fs. The maximum laser power is 35 mW at a wavelength of 1070 nm.     

Double Gires-Tournois interferometer negative-dispersion mirrors for use in tunable mode-locked lasers

We report the implementation and operation of novel superhigh-reflectivity negative-dispersion dielectric mirrors for use in tunable ultrafast laser systems. The mirror structure is divided into two distinct regions: an underlying superhigh-reflectivity dielectric quarter-wavelength stack and an overlying negative-dispersion section consisting of only a few layers and forming simple multiple Gires-Tournois interferometers. The example that we present was designed for operation from 800 to 900 nm and has a near-constant group-delay dispersion of -40 fs(2) and a peak reflectivity greater than 99.99%. We show a comparison of the predicted and the measured mirror performance and application of these mirrors in a mode-locked Ti:sapphire laser tunable from 805 to 915 nm.     

飞秒激光对高反膜的破坏及其超快动力学过程

研究了800nm飞秒激光照射下45°高反膜ZrO2-Si O2的破坏及其超快动力学过程。利用原子力显微镜和扫描电镜观察了材料的烧蚀形貌,测量了破坏阈值与脉冲宽度、烧蚀深度与脉冲能量的依赖关系。随着脉冲宽度从50fs增加到900fs,其烧蚀阈值从0.35J/cm2增加到1.78J/cm2。烧蚀深度与激光能流密度近似成对数关系。当激光强度略高于烧蚀阈值时,材料很快被烧蚀到几百纳米,烧蚀深度表现出明显的层状特性。同时,利用建立的抽运探针实验系统,测量了高强度抽运脉冲作用下材料对探针光的反射率随延迟时间的变化,揭示了薄膜烧蚀的超快动力学过程。实验结果表明高反膜表层的材料对烧蚀特性有重要影响。     

新型AgInSbTe相变薄膜的光学及记录性能

利用直流磁控溅射法制备了一种新型AgInSbTe相变薄膜。示差扫描量热(DSC)实验测定的结晶峰温度为193．92℃。X射线衍射(XRD)表明未经热处理的沉积态薄膜是非晶态,而经过200℃热处理,X射线衍射图出现衍射峰,薄膜从非晶态转变到晶态。同时,研究了晶态和非晶态相变薄膜的吸收率、透射率和反射率随波长的变化。测定了650nm激光作用下的相变薄膜的记录性能,分析了记录功率、记录脉宽对薄膜反射率衬比度的影响,在同一记录脉宽条件下,记录功率越大,反射率衬比度也越大;在同一记录功率条件下,随记录脉宽的增加,反射率衬比度也增大。结果表明,新型AgInSbTe相变薄膜在激光作用下具有较高的反射率衬比度,可获得良好的记录性能。     

富勒烯有机-无机杂化材料的非共珍三阶非线性光学特性

采用中心波长800 nm、脉宽30 fs的超短激光脉冲,通过飞秒光开关技术（Optical Kerr Shutter,OKS）对富勒烯有机-无机杂化材料的飞秒超快非线性特性进行了实验研究.获得270 fs的开关时间,所得的富勒烯有机-无机杂化材料的三阶非线性系数χ(3)约为4.5×10－14 esu,比C60分子的三阶非线性系数χ(3)高一个数量级.通过实验测定的光克尔信号强度与激发光和探测光偏振方向夹角的依赖关系表明：30 fs的超短激光脉冲激发富勒烯有机-无机杂化材料的克尔信号主要是源于光诱导双折射效应,而非用200 fs的超短激光脉冲时来自瞬态栅的自衍射效应.     

Selective metallization of photostructurable glass by femtosecond laser direct writing for biochip application

We report the selective metallization of photostructurable glass by femtosecond (fs) laser direct writing followed by electroless copper (Cu) plating. It was found that a Cu thin film can be deposited only on the rough surface of glass ablated by the fs laser. The deposited Cu thin film exhibits strong adhesion and excellent electrical properties. A Cu film can even be deposited on the internal wall of a hollow microchannel inside photostructurable glass by the multiphoton absorption of the fs laser. To show the use of this technique for micro-total-analysis-system (μ-TAS) applications, the fabrication of a microheater operating at temperatures up to 200 °C was demonstrated. PACS 81.05.Kf; 85.40.Ls; 87.85.Va     

Dynamics of phase transitions induced by femtosecond laser pulse irradiation of indium phosphide

The structural transformation dynamics of single-crystalline indium phosphide (InP) irradiated with 150 fs laser pulses at 800 nm has been investigated by means of time-resolved reflectivity measurements covering a time window from 150 fs up to 500 ns. The results obtained show that for fluences above a threshold of 0.16 J/cm² thermal melting of the material occurs on the timescale of 1–2 ps. The evolution of the reflectivity on a longer timescale reveals the reflectivity of the liquid phase and shows resolidification times typically around 10–30 ns after which an amorphous layer several tens of nanometers thick is formed on the surface. This amorphous layer significantly alters the optical properties of the surface and finally leads to a reduced ablation threshold for subsequent laser pulses. Single-pulse ablation at higher fluences (>0.23 J/cm²) is preceded by an ultrafast phase transition (non-thermal melting) occurring within 400 fs after the arrival of the pulse to the surface. PACS 79.20.Ds; 78.47.+p; 64.70.-p     

Spectral mirror for ultra-short, high peak power, multi-PW Ti:sapphire lasers

A multilayer mirror for spectral filtering adapted to ultra-short and multi-PW Ti:Sa laser has been designed, manufactured and characterized. The method used to determine both the reflectivity shape and the coating design leads to global compensation of gain narrowing, saturation and spectral phase. The result is a spectral control on 200 nm range while keeping a flat spectral phase. This kind of filter will enable obtaining 15 fs pulse duration for multi-PW laser systems based on Ti:Sa.     

Development of high-throughput, high-damage-threshold beam separator for 13 nm high-order harmonics

We demonstrate a high-throughput, high-damage-threshold beam separator for wavelengths shorter than 30 nm, which uses a 10 nm thick niobium nitrogen film prepared on a Si substrate, set at the Brewster angle relative to the pump wavelength. The film was deposited by rf reactive magnetron sputtering on a Si substrate. The beam separator has an attenuation ratio of 0.01 and a damage-threshold intensity of at least 0.8 TW/cm2 for a 26 fs pump pulse. The measured reflectivity of the beam separator exceeded 70% in a wavelength range of 13-18 nm. This broadband beam separator may be used to eliminate energetic laser pulses from longitudinally pumped x ray lasers as well as from high-order harmonics.     

超短脉冲照射下氟化锂的烧蚀机理及其超快动力学研究

研究了超短脉冲激光照射下LiF晶体的破坏机理及其超快动力学过程,利用扫描电镜和原子力显微镜等测试手段,观测了飞秒激光照射下LiF晶体的烧蚀形貌。利用烧蚀面积与激光脉冲能量的对数关系确定了LiF晶体的破坏阈值,并利用非线性玻璃棒展宽脉宽,得到了800nm激光作用下LiF破坏阈值对激光脉宽（50～1000fs）的依赖关系;利用抽运一探针超快探测平台,探测了LiF烧蚀过程中反射率的变化。采用雪崩击穿模型,并根据晶体材料反射率与材料的介电常量的依赖关系,通过数值计算,模拟了材料烧蚀阈值与脉宽的依赖关系及材料激发过程中反射率的变化关系。结果表明,理论结果与实验结果符合较好。讨论了飞秒激光照射下LiF晶体中导带电子数密度的变化规律,并解释了相应的实验结果。     

温度变化对金属Ag膜反射镜偏振特性的影响研究

空间遥感应用中的光学有效载荷对系统偏振控制提出了越来越高的要求,作为常用的宽光谱反射镜,金属银(Ag)膜反射镜的偏振特性随着环境温度的改变而变化。本文设计并制备了低偏振灵敏度的Ag膜反射镜,研究了反射镜在45°和60°入射角下,从室温25℃升温到150℃时的偏振特性变化和反射光谱变化情况。随着温度的升高,Ag膜的折射率在350~1 200 nm波长范围内有所增加;Ag膜反射镜的反射光中s和p光的相位差Δ在350~600 nm波长范围内减小,在600~650 nm波长范围内基本稳定,在650~1 200 nm波长范围内增大。温度上升到125℃时,Ag膜和反射镜表面形貌发生改变,增加了表面散射和吸收,导致350~900 nm波段反射率降低,在波长350 nm附近的降低约25%。     

CS_2飞秒超快非线性特性的实验研究

采用中心波长800 nm、脉宽30 fs的超短激光脉冲,通过飞秒光开关技术对CS_2的飞秒超快非线性特性进行了实验研究.在探测光强与抽运光强比为1∶10时,得到了较理想的光克尔时间分辨曲线.通过实验测定的光克尔信号强度与激发光和探测光偏振方向夹角的依赖关系表明:30 fs的超短激光脉冲激发CS_2的克尔信号主要是源于光诱导双折射效应,而非用200 fs的超短激光脉冲时来自瞬态栅的自衍射效应.     

Ultrafast dynamics of BixSb1-x film studied by femtosecond pump-probe technique

The Bi_xSb_1-x film is an important phase change material. The ultrafast dynamics of Bi_xSb_1-x film is studied by the femtosecond pump-probe technique with an 80 fs pulsed laser. Experimental results show that the reflectivity change increases with the fluence of the pump laser. The fast increase of the reflectivity occurs between 100 and 800 fs. Subsequently, the slower recovery of the reflectivity on a time scale of 1.24-18.3 ps is detected. We also found that the reflectivity change can be greatly affected by the ratio between Bi and Sb composition in Bi_xSb_1-x materials with x = 0.2 and 0.88. These experimental results should be helpful for developing new devices with ultrafast dynamics of Bi_xSb_1-x film and ultrafast optical switching.     

SEM and Raman spectroscopy analyses of laser-induced periodic surface structures grown by ethanol-assisted femtosecond laser ablation of chromium

The effect of fluence and pulse duration on the growth of nanostructures on chromium (Cr) surfaces has been investigated upon irradiation of femtosecond (fs) laser pulses in a liquid confined environment of ethanol. In order to explore the effect of fluence, targets were exposed to 1000 pulses at various peak fluences ranging from 4.7 to 11.8?J?cm^–2 for pulse duration of ～25?fs. In order to explore the effect of pulse duration, targets were exposed to fs laser pulses of various pulse durations ranging from 25 to 100?fs, for a constant fluence of 11.8?J?cm^–2. Surface morphology and structural transformations have been analyzed by scanning electron microscopy and Raman spectroscopy, respectively. After laser irradiation, disordered sputtered surface with intense melting and cracking is obtained at the central ablated areas, which are augmented with increasing laser fluence due to enhanced thermal effects. At the peripheral ablated areas, where local fluence is approximately in the range of 1.4–4?mJ?cm^–2, very well-defined laser-induced periodic surface structures (LIPSS) with periodicity ranging from 270 to 370?nm along with dot-like structures are formed. As far as the pulse duration is concerned, a significant effect on the surface modification of Cr has been revealed. In the central ablated areas, for the shortest pulse duration (25?fs), only melting has been observed. However, LIPSS with dot-like structures and droplets have been grown for longer pulse durations. The periodicity of LIPSS increases and density of dot-like structures decreases with increasing pulse duration. The chemical and structural modifications of irradiated Cr have been revealed by Raman spectroscopy. It confirms the formation of new bands of chromium oxides and enol complexes or Cr-carbonyl compounds. The peak intensities of identified bands are dependent upon laser fluence and pulse duration.     

磁控溅射法制备的高反Ag_5In_5Te_(47)Sb_(33)相变薄膜的光谱性质及短波长静态记录性能

研究了磁控溅射制备的Ａｇ５Ｉｎ５Ｔｅ４７Ｓｂ３３相变薄膜的光谱及短波长静态记录性能。研究结果表明，晶态薄膜反射率较高，并在６００～９００ｎｍ波长范围内，晶态与非晶态的反射率和折射率相差很大。在ＣＤ－Ｅ系统的工作波长７８０ｎｍ处，晶态反射率高达５０％，光学常数为５．３４－１．０ｉ；非晶态反射率为２３％，光学常数为２．５－１．０３ｉ。从这一角度讲，Ａｇ５Ｉｎ５Ｔｅ４７Ｓｂ３３相变薄膜适于做ＣＤ－Ｅ系统的记录介质。另外，采用波长为５１４．４ｎｍ的短波长光学静态记录测试仪对Ａｇ５Ｉｎ５Ｔｅ４７Ｓｂ３３薄膜的记录性能进行了测试，结果表明，这种薄膜短波长记录性能较好，它在较低功率和短脉宽的激光束作用下就可得到较高的反射率对比度。     

Stimulated Raman backscattering from an ultrashort laser interacting with underdense plasmas

We present experimental results of the stimulated Raman backscattering instability (BSRS) in an ultrashort intense (45fs, 5.7×10¹⁷Wcm^-2) laser pulse interacting with an optically ionized helium gas. We have studied the stimulated Raman backscattering reflectivity and the phenomenon of the transition from strongly coupled BSRS to weakly coupled BSRS. We have obtained a good agreement between our experimental results and the theory of BSRS.     

Spin-flip processes and ultrafast magnetization dynamics in Co: Unifying the microscopic and macroscopic view of femtosecond magnetism

The femtosecond magnetization dynamics of a thin cobalt film excited with ultrashort laser pulses has been studied using two complementary pump-probe techniques, namely, spin-, energy-, and time-resolved photoemission and the time-resolved magneto-optical Kerr effect. Combining the two methods, it is possible to identify the microscopic electron spin-flip mechanisms responsible for the ultrafast macroscopic magnetization dynamics of the cobalt film. In particular, we show that electron-magnon excitation does not affect the overall magnetization even though it is an efficient spin-flip channel on the sub-200 fs time scale. Instead, we find experimental evidence for the relevance of Elliott-Yafet-type spin-flip processes for the ultrafast demagnetization taking place on a time scale of 300 fs.