X切H∶LiNbO_3光波导的工艺仿真研究

对于X切H∶LiNbO3光波导,在532nm和1310nm波长下,用棱镜耦合器进行了工艺仿真研究.对于在150℃,180℃和200℃用苯甲酸质子交换的光波导,分别求得交换厚度与交换时间的关系曲线,在此基础上给出质子交换的扩散系数与交换温度的关系曲线.对于在180℃质子交换并在350℃退火的光波导,给出以交换时间(交换厚度)为参变量的表面折射率增量、有效厚度与退火时间的关系曲线.研究结果可供低损耗α相单模波导的设计和制备做参考.     

集成光学 光波导材料与制备

TN2522006010415X切H∶LiNbO3光波导的工艺仿真研究=Technical mod-eling of X-cut H∶Li NbO3optical waveguides[刊,中]/黄韬(中国航天时代电子公司研究院.北京(100854)),金锋…∥光子学报.—2005,34(7).—996-1000对于X切H∶Li NbO3光波导,在532nm和1310nm波长下,用棱镜耦合器进行了工艺仿真研究。对于在150、180、200℃用苯甲酸质子交换的光波导,分别求得交换厚度与交换时间的关系曲线,在此基础上给出质子交换的扩散系数与交换温度的关系曲线。对于在180℃质子交换并在350℃退火的光波导,给出以交换时间(交换厚度)为参变量的表…     

LiNbO3质子交换波导及其退火效应

采用质子交换技术,以苯甲酸为交换源,实验研究X-切LiNbO₃质子交换平面波导及其退火效应。利用棱镜耦合器测出波导模折射率。采用费米函数,由模折射率确定出波导折射率分布随退火时间的变化关系,给出了分布参数和曲线.     

MgO:LiNb0.3与LiNb0.3质子交换光波导光学及结构特征的比较

利用退火的质子交换法在MgO:LiNbO.3和LiNbO.3两种材料上制作了光波导，得到了质子交换的扩散特性以及光波导折射率分布的退火规律．通过x射线衍射和OH-红外吸收谱方法研究了 MgO:LiNbO.3和LiNbO.3质子交换光波导的结构特征及其与退火参数的关系，对MgO :LiNbO.3和LiNbO.3光波导光学和结构特征的结果进行了分析和比较． 关键词： 退火质子交换光波导 晶格结构 x射线衍射 红外吸收     

质子交换LiNbO3光波导的特性研究

采用X射线衍射谱法和红外吸收光谱法对质子交换和退火质子交换LiNbO3光波导的特性进行了研究.研究结果表明:在LiNbO3晶体衬底X射线衍射主峰的左侧出现质子交换LiNbO3光波导的伴峰,则质子交换使光波导层Li1-xHxNbO3的晶格常数比衬底的晶格常数稍大,产生垂直于表面的应变,波导经过退火后,伴峰向主峰靠近,应变减少.质子交换波导中的OH-基团的红外吸收光谱在3 500和3 300 cm-1处存在特征峰,波导经过退火后,3 300 cm-1处的特征峰基本消失,而3 500 cm-1处的吸收强度基本不变.实验还表明,OH-在3 500 cm-1处吸收带的积分面积基本与交换时间的开方呈正比例关系.     

MgO:LiNbO_3与LiNbO_3质子交换光波导光学及结构特征的比较

利用退火的质子交换法在MgO :LiNbO3和LiNbO3两种材料上制作了光波导 ,得到了质子交换的扩散特性以及光波导折射率分布的退火规律 .通过x射线衍射和OH- 红外吸收谱方法研究了MgO :LiNbO3和LiNbO3质子交换光波导的结构特征及其与退火参数的关系 ,对MgO :LiNbO3和LiNbO3光波导光学和结构特征的结果进行了分析和比较     

光波导F-P干涉型电场和电压传感器

本文报道了 LiNbO₃质子交换光波导 F-P 干涉型电场和电压传感器的结构、制备、工作原理、实验装置与测量结果.用半导体激光器(780nm)作光源,测量了器件对频率在20Hz～1KHz 电场的响应特性,着重测量并得到工频(50Hz)交流电场(幅值为8.3～75V_zms/cm)和电压(20～180V_rms)与调制光输出电压之间的关系曲线.实验研究表明:该器件的线性度为1.4%,电场灵敏度为61.4mV_rms/V_rms/cm,电压灵敏度为25.6mV_rms/V_rms;且具有结构简单、制作容易、几何尺寸小、光传输插入损耗低等优点;稍加完善,可望制成实用化器件.     

质子交换铌酸锂多模干涉光功分器的研制

采用退火质子交换工艺在铌酸锂衬底上实现了渐变边界MMI光功分器。测量表明该器件有较好的光均分功能。利用红外光谱技术分析了利用纯苯甲酸质子交换源的退火质子交换波导的红外吸收光谱特性证明通过当地选择质子交换温度、时间和退火的温度与时间，可以实现低损耗质子交换光波导的制作。     

Z切LiNbO3晶体中退火质子交换光波导特性的研究

系统地研究Ｚ切ＬｉＮｂＯ３晶体中质子交换波导和退火质子交换波导的特性,得到了质子交换过程中的扩散常数和激活能。发现了质子交换波导的折射率呈线性阶跃型的折射率分布。通过连续退火,波导的折射率分布由线性阶跃型向高斯型过渡。退火可分为两个阶段,波导深度的增加在第一阶段随退火时间成指数关系,第二阶段与退火时间的平方根成线性关系。     

溶胶-凝胶法制备SiO2-TiO2平板光波导工艺研究

采用溶胶-凝胶法制备了SiO₂-TiO₂平板光波导,计算了平板光波导通光条件,分析了硅/钛溶胶-凝胶材料的热性能,观测了平板光波导的结构形貌,并测试了其通光损耗。结果表明：经过200℃,30 min干燥处理的凝胶薄膜呈疏松多孔状态,对于非对称平板波导,存在芯层通光截止厚度,而且当SiO₂-TiO₂芯层厚度为0.5 μm时,SiO₂下包层厚度至少有6 μm才能防止1550 nm波长光泄露入单晶硅衬底中。制备的光波导对于1550 nm波长光传输损耗最小值为0.34 dB/cm。     

Optical waveguides in LiNbO<Subscript>3</Subscript> and stoichiometric LiNbO<Subscript>3</Subscript> crystals by proton exchange

The formation of optical planar waveguides in LiNbO₃ and stoichiometric LiNbO₃ crystals by proton exchange was reported. The prism-coupling method was used to characterize the dark-line spectroscopy at the wavelength of 633 and 1539 nm, respectively. The mode optical near-field outputs from proton-exchanged LiNbO₃ and SLN waveguides at 633 nm were presented. The mode field from stoichiometric LiNbO₃ (SLN) waveguide is lighter and more uniform than that from LiNbO₃ waveguide, which means the quality of the waveguide in SLN crystal is better than that of the LiNbO₃ waveguide. For proton-exchanged LiNbO₃ waveguides, the evolution of the refractive index profile with annealing was presented. The disorder profiles of Nb atoms in proton-exchanged LiNbO₃ waveguides were obtained by Rutherford backscattering/channeling technique. It is shown that the longer the exchange time, the larger the displacement of Nb atoms. Supported by the National Natural Science Foundation of China (Grant No. 10475052) and the Scientific Research Start-up Financing of Qufu Normal University     

焦磷酸质子交换LiTaO3光波导

本文首次报道了在低于300℃的焦磷酸中制备质子交换LiTaO_3光波导的方法。通过测量有效扩散系数D给出D_0=3.91×10~6μm~2/h和激活能E_a=0.74eV;并测量了波导参数。实验结果表明:只有非寻常折射率产生增量△n_6,其中TM单模波导的传输损耗低达0.1dB/cm(633mm)。发现,热退火处理后的波导表面非寻常折射率增大了。     

质子交换LiNbO3光波导

本全面系统地综述了质子交换LiNbO3i光波导的机理、结构特征和光学性质。描述了掺杂LiNbO3质子交换波导的特征,并与纯LiNbO3光波导进行了比较。     

Photoconductivity and photovoltaic behaviour of LiNbO3 and LiNbO3 waveguides at high optical intensities

The photoconductivity and photovoltaic currents of pure LiNbO₃ and proton exchanged waveguides in LiNbO₃ have been measured as a function of the optical intensity up to about several kW/cm² by the use of surface electrodes. For pure LiNbO₃ the observed dependences are a simple extrapolation of the well known low intensity behaviour. The photoconductivity of proton exchanged waveguides is considerably increased compared with pure LiNbO₃ and the curves are strongly nonlinear in the high intensity region. These results can explain, at least qualitatively, the previously observed characteristic time and intensity dependence of light-induced refractive index changes in this type of waveguides. Both the time and temperature behaviour of the dark conductivity of all proton exchanged waveguides give strong evidence of ionic charge transport in the proton exchanged region.     

集成光学TM模偏振器的制作

用扩钛和质子交换相结合的方法在ｘ切ｙ传ＬｉＢｎＯ３衬底上制成了ＴＭ模集成光波导偏振器。质子交换区位于扩钛波导的末端两侧。在质子交换区域Δｎｅ〉０，Δｎ０〈０，因此ＴＥ模辐射进入衬底。偏振器工作于１．３μｍ波长，消光比优于４７ｄＢ，光纤０－波导－光纤插入损耗３．５ｄＢ。     

Estimation of Crystal Lattice Deformations with Depth of Proton-Exchanged Optical Waveguides on Lithium Niobate Single Crystal Substrates

Russian Physics Journal - A method for determining the crystal phase and estimating the crystal lattice deformations in HxLi1-xNbO3 proton-exchanged optical waveguides from an analysis of the Raman...     

Improvement of photorefractive properties of proton-exchanged LiTaO3 waveguides

3 are fabricated by both a proton exchange and a successive copper exchange. The influence of different fabrication steps on the refractive index profile and optical absorption is investigated. The holographic efficiency is determined together with the dark- and photo-conductivity. We show that the photorefractive properties of proton-exchanged LiTaO₃ waveguides are considerably improved by the additional copper exchange. It is established that the holographic efficiency depends on the copper content, the phase of the proton-exchanged layer and the light intensity. Received: 3 March 1997     

Proton-exchanged optical waveguides fabricated by glutaric acid

In this paper, we first report that a new proton source, glutaric acid, has been used to fabricate optical waveguides in Z-cut lithium niobate crystals. The relationship was experimentally established between proton-exchanged (PE) waveguide parameters and fabrication conditions. It is shown that this new organic acid can be used to obtain deep PE waveguides in fast diffusion speed (0.275 μm²/h at 221°C) and with low loss (0.2 dB/cm). It provides an alternative approach for fabricating PE waveguides in lithium niobate substrate.     

质子交换MgO:LiNbO3波导的双层结构

本文报导MgO:LiN_bO₃质子交换波导X射线双晶衍射和红外吸收的实验结果。这些结果表明质子交换波导由浅表面层和深表面层构成。浅表面层是一个连续应变层,有着大量随机排列的O—H—O形式的缔合OH^-基团。深表面层是一个均匀应变层,其内H⁺以自由OH^-基团形式出现。质子交换波导折射串不稳定性与双层结构中的结构驰豫密切相关。通过对质子交换过程的分析,提出两条避免双层结构的途径,其一为降低交换剂中的H⁺浓度,另一条是采用有限源工艺。     

质子交换Y分支光波导弯曲损耗研究

对采用退火质子交换技术(APE)制备的具有正弦型弯曲和余弦型弯曲两种不同的S型弯曲的Y分支光波导,利用宽角有限差分光束传播法,就过渡区长度、波导表面折射率增量、掩模版开口宽度等对波导弯曲损耗的影响进行了研究。结果表明,两种S弯曲下的Y分支波导的弯曲损耗,随波导结构参数的变化基本上是相同的,但二者的表现并不完全一致。数值计算结果为相应波导器件的设计和制备提供了一定的参考。