Gaussian beam coupling on a MEMS mirror array

A general formula for evaluating Gaussian beam coupling characteristics on a MEMS mirror array was developed, with consideration of parameters such as beam size, mirror width and mirror gap. Based on the formula, the influence of each parameter on the spectral response was simulated for MEMS mirror array employed in a wavelength selective switch and a tunable optical filter. The simulation results are helpful for the design of MEMS mirror array in optical devices.     

High-Speed and Large-Scale Electromagnetically Actuated Resonant MEMS Optical Scanner

A high speed electromagnetically actuated resonant micro-electromechanical systems (MEMS) optical scanner with large mirror area of 6×4mm² has beendeveloped. The MEMS optical scanner chip is fabricated using bulk silicon micromachining process and electroplating technique, and can generate the maximum optical deflection angle of ±6.8°circ at the 2.95kHz resonant frequency with a quality factor of 197 in air under the low power consumption of 50mW, when it is immersed in a constant 510.2mT magnetic field parallel to the coil plane. In addition, the surface roughness of less than 20nm for scanning mirror has been measured and the optical reflectivity of mirror atwavelength of 1550nm is high up to 85%. The results show that the device can satisfy the demands of mm-sized scanning systems in optical communications.     

基于2D微电子机械系统(MEMS)镜全向激光雷达光学系统设计

为了满足全向激光探测的需求,提出一种基于2DMEMS镜扫描的激光雷达结构。激光器通过1×6高速光开关分时地给6个扫描子系统提供光信号,6个扫描子系统探测视场叠加起来可实现360°激光探测。每个扫描子系统的扫描范围为60°×30°,其中包含一个扩展MEMS镜扫描角度的发射光学天线和一个大视场有增益的接收光学天线。发射光学天线将MEMS镜±10°的扫描角扩展到±30°,发散度小于0.2mrad;接收视场内的激光波经过接收天线在探测器上所成的半像高小于1mm,接收增益为3.65。通过计算修正后的激光雷达方程可得到发射功率20 W的激光束在工作距离100 m内的回波功率≥1 nW,结果表明该光学系统可适用于激光雷达系统。     

基于MEMS微镜的长波近红外光谱仪的设计与实现

为适应光谱仪微型化、集成化的发展趋势,详细分析了MEMS微镜应用于微型长波近红外光谱仪的方法和涉及的主要问题,例如分光系统的设计、MEMS微镜的选择、探测器与前置放大电路的设计等。并将50 Hz谐振频率、峰峰驱动电压为10V的MEMS微镜、高灵敏度的InGaAs单元探测器,结合立特罗式分光光路,设计和实现了900～2 055 nm波段的微型长波近红外光谱仪样机,其中1 000～1 965 nm谱段的光谱分辨率介于9.4～16 nm之间。采用MEMS扫描微镜技术后,一方面简化了光谱仪中的复杂机械结构,使尺寸可以更小;另一方面实现了单探测器的长波近红外光谱仪,与阵列长波近红外探测器光谱仪相比,成本有所降低。作为应用实例,此样机成功对纯水以及乙醇-水溶液的长波近红外光谱进行了测量,实现了乙醇-水溶液的浓度预测分析,其中本样机测量的纯水长波近红外光谱与文献相符。     

Serpentine Spring Corner Designs for Micro-Electro-Mechanical Systems Optical Switches with Large Mirror Mass

In this paper, we describe the design principles of serpentine springs with high reliability for the micro-electromechanical systems (MEMS) optical switches with large mirror mass. The most often seen failure mode of the MEMS optical switches under reliability tests is the breaking of these springs, which provide the restoring force for the MEMS actuators. The breaking points are usually at the turning corner of the serpentine springs when the MEMS optical switches are under a high G shock test or a vibration test. In order to overcome the difficulties, we redesigned the corner shapes of the springs with careful consideration. We will discuss the theoretical analysis and simulation modeling for the corner shapes of serpentine springs. MEMS optical switches with redesigned serpentine springs are fabricated and tested to prove the proposed design. The results show that the MEMS optical switches with new serpentine springs can pass rigorous reliability tests.     

Distance sensing using dynamic speckles formed by micro-electro-mechanical-systems deflector

We present a novel architecture of dynamic-speckles distance sensors with a micro-electro-mechanical system (MEMS) deflecting mirror for surface scanning. Since the MEMS mirror deflects the beam sinusoidally, the speed of scanning varies during the scan leading to sufficient variations in the signal frequency which is used to evaluate the distance to the object. Nevertheless, this feature does not affect the accuracy of range measurements when the distance is estimated from zero-crossing counts of the signal during a specially chosen time window within the scan. Experimental results indicate that a single 1 ms scan yields 70 μm accuracy of distance measurement. Averaging data from multiple scans of different surface areas during a 1-s measurement can provide approximately 2 mm of accuracy. Precision of the measurements can be further improved by optimization of the optical system. The compactness of the MEMS deflector and simplicity of the suggested signal processing provides a good basis for practical applications of this distance sensor.     

Doppler optical coherence tomography with a micro-electro-mechanical membrane mirror for high-speed dynamic focus tracking

An elliptical microelectromechanical system (MEMS) membrane mirror is electrostatically actuated to dynamically adjust the optical beam focus and track the axial scanning of the coherence gate in a Doppler optical coherence tomography (DOCT) system at 8 kHz. The MEMS mirror is designed to maintain a constant numerical aperture of approximately 0.13 and a spot size of approximately 6.7 microm over an imaging depth of 1mm in water, which improves imaging performance in resolving microspheres in gel samples and Doppler shift estimation precision in a flow phantom. The mirror's small size (1.4 mm x 1 mm) will allow integration with endoscopic MEMS-DOCT for in vivo applications.     

自适应光学波前校正器技术发展现状

波前校正器是自适应光学系统中的关键部件,相关技术已得到了多年的积累与发展。本文介绍了多种目前常用的波前校正器件,包括分离促动器连续表面变形镜、拼接子镜变形镜、薄膜变形镜、双压电片变形镜、微电子机械系统变形镜以及基于液晶技术的空间光调制器和自适应次镜等,给出了它们的实现方式及其基本工作原理,并从空间校正频率和校正速度等方面对各校正器的性能进行了比较。最后,总结了在新应用的需求下,波前校正器件的技术创新及发展趋势。     

MEMS-based optical beam steering system for quantum information processing in two-dimensional atomic systems

To provide scalability to quantum information processors utilizing trapped atoms or ions as quantum bits (qubits), the capability to address multiple individual qubits in a large array is needed. Microelectromechanical systems (MEMS) technology can be used to create a flexible and scalable optical system to direct the necessary laser beams to multiple qubit locations. We developed beam steering optics using controllable MEMS mirrors that enable one laser beam to address multiple qubit locations in a two-dimensional trap lattice. MEMS mirror settling times of approximately 10 micros were demonstrated, which allow for fast access time between qubits.     

一种MEMS可调光衰减器性能测试及动态响应分析

一种基于微细电火花加工(EDM)技术的非硅基MEMS可调光衰减器,以电磁线圈驱动微反射镜.本文介绍该器件特性测试及动态响应分析,结果表明,驱动电压为0～8 V,工作范围0～35 dB,动态响应时间为2 ms,插入损耗小于0.8 dB,回波损耗小于－50.5 dB.     

High-speed scanning fiber-optic heterodyne interferometer using a micro-electro-mechanical system mirror and an f-theta lens

This paper describes a novel fiber-coupled heterodyne interferometer using a micro-electro-mechanical system (MEMS) mirror and an f-theta lens. In this interferometer system, the cross-polarized laser beams operating at 2 μm with the frequency difference of 100 kHz are introduced by means of the two acousto-optic modulators (AOM). The sample with diameter of 300 mm is uniformly scanned by the 1 mm laser beam with the help of the combined optical scanning configuration, a MEMS mirror and an f-theta lens. The output intermediate signal from the two channels, reference channel and the measurement channel, are processed in the 12 bit analog-to-digital (A/D) process system. Details of our interferometer scheme are discussed.     

电磁驱动大尺寸MEMS扫描镜的研究

基于微机电系统工艺,设计并制作了一种电磁驱动大尺寸的二维扫描振镜.分析了两种不同的电磁驱动方式产生的力的大小,选择驱动力较大的双极子方式作为驱动.运用有限元法模拟了器件的谐振频率静态及动态响应,仿真结果与实际测得的结果一致.描述了振镜的工艺流程及封装方式,并制备了振镜.实验测得振镜在120mA静态电流驱动下,慢轴和快轴分别能达到的最大转角为±4.5°及±5°,慢轴及快轴的谐振频率分别为348Hz及660Hz,并得到在此谐振频率下的李萨如图形.将器件用于激光成像系统之中,使得散斑对比度下降到4.2%,激光成像质量得到很大提升.     

镜面起伏对1.55μm Si基MEMS光滤波器的影响

用传输矩阵方法,在简化的光学模型基础上,分别讨论了分布式Bragg反射镜DBR(Distributed Bragg Reflector)的生长精度及镜面起伏对1.55 μm Si基MEMS(Micro-Electro-Mechanical-System)可调谐光滤波器透射谱的影响.计算表明:DBR生长误差仅使主透射峰位置发生变化,而镜面起伏是导致主透射峰性能劣化的主要原因,它使得FWHM增大,透射峰强度下降.理论计算结果能较好地解释实验现像.在此基础上,进一步讨论了引起镜面起伏的多种原因,并提出了可能的解决方法.     

自组装静电驱动微机电系统倾斜镜

研制了一种基于自组装技术的静电驱动微机电系统(MEMS)倾斜镜,并利用表面硅工艺PolyMUMPs制备了样品。倾斜镜主要由一个中心镜面,两个偏转梁和两个可实现自组装的复合悬臂梁组成。中心镜面离衬底的高度可通过增大金和多晶硅复合悬臂梁的残余应力梯度得到提升。热退火技术被用于提高金层的残余应力。器件结构利用有限元仿真软件进行了优化并通过实验进行了验证。经过200 ℃热退火后,倾斜镜的偏转角度可以达到3.6。该倾斜镜可运用于微光机电系统。     

Experimental demonstration of 3×3 10 Gb/s reconfigurable free space optical card-to-card interconnects

In this Letter, we propose and demonstrate the concept of a free space optics-based parallel high-speed reconfigurable card-to-card interconnect architecture employing microelectromechanical systems (MEMS)-based steering mirror arrays in conjunction with VCSEL and photodiode arrays. A bit-error rate of ～10(-6) and a receiver sensitivity below -11.5 dBm are experimentally attained with a proof-of-concept 3×3 10 Gb/s reconfigurable card-to-card optical interconnect demonstrator.     

基于相位相关与块匹配的纳米精度微器件平面动态测量

为测量MEMS谐振器周期运动过程中各个时刻的运动特性及其动态特性参数,结合微器件的特征,利用光学的方法对MEMS器件进行了运动分析。提出了基于相位相关与块匹配相结合的运动检测技术,并对MEMS器件的运动图像序列做了分析与处理,得到了其动态特性参量,为MEMS器件的设计提供了重要参考。实验结果表明,该方法具有较好的测量精度和测量速度,测量重复性可达到44nm。     

MEMS变形反射镜主要特性测试

介绍了基于微机电系统技术的微变形反射镜的基本结构和电极分布.分析了微机系统变形镜的变形原理,推导了微变形镜的镜面变形与外加驱动电压的关系.分析了基于计算机控制的频闪显微干涉测量系统的组成及测试原理,并利用该系统实现了对微变形镜静态电压-位移曲线、静态面形、动态离面变形以及谐振频率的测试.实验表明,测试结果与理论分析有很好的一致性.     

MEMS变形反射镜主要特性测试

介绍了基于微机电系统技术的微变形反射镜的基本结构和电极分布.分析了微机系统变形镜的变形原理,推导了微变形镜的镜面变形与外加驱动电压的关系.分析了基于计算机控制的频闪显微干涉测量系统的组成及测试原理,并利用该系统实现了对微变形镜静态电压-位移曲线、静态面形、动态离面变形以及谐振频率的测试.实验表明,测试结果与理论分析有很好的一致性.     

基于微扫描镜的激光投影

利用微机械加工技术制造出一种新型微扫描镜,结合半导体激光器,可用于投影显示.激光器发出的光束被两个分别沿着X轴、Y轴扭转的镜面相继反射,扫描出二维图形.实验测得扫描镜在15 V电压,频率为扫描镜谐振频率2倍的方波信号驱动下,镜子的光学扫描角度达±12°.由于每个镜子都沿各自轴以简谐规律扭转,扫描所得投影为李萨如图形.通...     

Endoscopic Optical Doppler Tomography Based on Two-Axis Scanning MEMS Mirror

We study the feasibility of endoscopic optical Doppler tomography with a micro-electro-mechanical system(MEMS) mirror based probe. The additional phase shifts introduced by the probe are tracked and formulated.The suppression method of the probe phase shifts is proposed and validated by fluid flow detection experiments.In vivo blood flow detection is also implemented on a hairless mouse. The velocities of the blood flow in two directions are obtained to be-8.1 mm/s and 6.6 mm/s, respectively.