脉冲电压上升沿对He大气压等离子体射流管内放电发展演化特性的影响

通过仿真和实验相结合的手段,以直流脉冲电压驱动的双环电极结构He大气压等离子体射流为例,研究了电压上升沿时间对管内放电等离子体发展演化特性的影响.随着电压上升沿的改变,管内介质阻挡放电(dielectric barrier discharge, DBD)区出现空心和实心两种放电模式.上升沿为纳秒和亚微秒量级时,以空心模式发展,上升沿持续增加后转变为实心模式.放电模式本质上受鞘层厚度、管内电场和表面电荷密度分布的影响,鞘层厚度小于1.8 mm时等离子体通常以空心模式传播,等于1.8 mm时等离子体的径向传播范围有限而转变为实心传播.管内DBD区,电场以轴向分量为主时,等离子体以放电起始时的模式传播;而在地电极内部,由于外施电场方向发生径向偏转,同时管壁沉积的正电荷形成径向自建电场,两者叠加形成的强径向电场致使放电以空心模式传播.     

金属目标表面气体放电单元放电过程的PIC-MCC模拟

 对目标表面的浮地导体边界的存在及其对单元气体放电过程所产生的影响进行了研究，针对导体边界条件，应用高斯定理和电荷守恒定律推导出这种边界条件的数值处理方法，得到了有界等离子体空间电势的数值分布。电场的数值计算表明，浮地导体的电势随着内部场的变化而变化，其大小介于两个电极的电势之间，对放电区域的电场分布产生较大的影响。 对金属目标表面放电单元的放电过程的PIC-MCC模拟结果表明， 浮地导体的存在能够改变放电空间的电场结构，形成不均匀场，有利于气体的电离和等离子体区域的形成，同时将使虚阳极所形成的电势平台在边界附近下陷，导致等离子体壳层的厚度变小。     

空心圆管端点附近等离子体源离子注入过程中鞘层的时空演化

等离子体源离子注入过程中，鞘层的演化规律直接影响到离子注入到材料中的深度进而影响材料表面的性质和结构，对材料的不同部位这种影响是不同的.利用无碰撞两维流体动力学模型，研究了有限上升时间的电压脉冲作用下，共轴放置附加零电极的半无限空心圆管端点附近等离子体源离子注入过程中，鞘层的时空演化规律.通过计算得到了鞘层内随时间变化的电势分布和离子密度分布，计算了端点附近材料表面处的离子流密度分布和注入剂量分布随时间的变化规律.计算机模拟结果显示了空心圆管内部、外部及端点表面处的离子流密度分布和注入剂量分布存在很大差异.     

双频容性耦合CF4等离子体放电的二维混合模拟

研究了等离子体反应装置内的等离子体密度、粒子能量与角度分布等参量在装置径向与轴向上的分布特性。在研究过程中应用二维混合模型对CF4气体放电进行模拟。计算结果显示:在电极表面与侧壁附近的鞘层区特性有明显的区别。由于装置侧壁处受电源产生的射频电场的影响较小,侧壁处的鞘层主要由双极扩散机制形成,其产生的径向电场强度较弱,鞘层厚度也较薄。而在电极附近,由于受到射频电场的影响,鞘层的厚度显著增加,指向电极方向的轴向电场强度也远大于指向侧壁方向的径向电场强度。在电极区域内,离子通量分布均匀;在电极边缘与侧壁的间隙内,因电场强度减小,离子通量则发生迅速衰减。在射频电极覆盖的范围内离子能量分布大体上保持不变,电极与侧壁的交界处,由于受到侧壁处径向电场的影响,离子能量分布略有不同。在放电装置的中心区域,入射到电极上的离子角度分布基本保持一致,而在电极边界与装置侧壁的交界处,由于径向电场的影响,离子的垂直入射角增加,以大角度轰击电极的离子数量也显著增加。     

等离子体鞘层中尘埃粒子的分布特性

采用柱槽状电极的流体模型，数值模拟了等离子体鞘层及鞘层中尘埃粒子的分布结构. 研究了尘埃粒子数、粒子大小、电极尺寸等因素对尘埃分布结构的影响. 研究表明：当等离子体密度较高时，鞘层较薄，反之鞘层较厚；当尘埃粒子数少时，尘埃分布形成一层结构，反之则形成多层结构；随电极尺寸的不同，尘埃粒子形成一些复杂而又有趣的结构. 关键词： 尘埃粒子 等离子体鞘层 电极     

双路微波耦合反应腔的等离子体发射光谱分析

反应腔作为微波等离子体化学气相沉积法制备光纤预制棒的核心,其结构直接影响到反应腔内的电磁场分布,进而影响到等离子体状态,因此对反应腔的结构进行研究是十分有必要的。为了在反应腔中获得较高密度和较好均匀性的等离子体,提出了一种双路微波耦合反应腔结构,首先模拟计算了不同反应腔结构参数下反应腔内的电场分布规律,并以氧气作为工作气体,通过等离子体发射光谱探究了反应腔结构和工作气压对石英管内的等离子体分布的影响。研究结果表明:双路微波输入方式在石英管中心区域产生了很强的电场耦合增强效果。反应腔的内径对电场分布状态影响较大,在反应腔内径为86 mm时,石英管内的电场分布出现轴对称性,且轴向中心区域的等离子体密度最大。在两路矩形波导的距离为61.2 mm和反应腔的长度为202 mm时,反应腔内等离子体的强度和均匀性具有最佳分布。另外还发现,当气压从1.8 kPa上升到2.8 kPa时,反应腔内等离子体光谱强度减小,但靠近石英管内壁处的变化不明显,这与等离子体中粒子碰撞几率增加造成的能量损失和管壁存在的高温有关。     

基于原子层沉积技术的石英管表面减反射膜的制备

采用原子层沉积(ALD)技术在石英管表面制备了薄膜,研究了该薄膜的均匀性,以及石英管的内径、外径、长度对沉积薄膜均匀性的影响。以单波长减反射膜为研究对象,实验测试的反射光谱与仿真结果一致,石英管表面最低反射率可降至0.17%。忽略夹具影响,石英管外壁与内壁的减反射薄膜的非均匀性基本一致,在±1.69%范围内,内外壁表面减反射薄膜的厚度和中心波长相同,且石英管尺寸对内外壁薄膜均匀性无明显影响。利用ALD技术可在大曲率元件的内外表面沉积厚度偏差小且均匀性分布相似的减反射薄膜。     

离子轰击控制准直碳纳米管生长的研究

用CH₄,H₂和NH₃作为反应气体，利用等离子体增强热丝化学汽相沉积制备出准直碳纳米管，并用扫描电子显微镜研究了不同负偏压对准直碳纳米管生长的影响. 结果表明，随着负偏压的增大，准直碳纳米管的平均直径减小、平均长度增大. 由于辉光放电的产生，在衬底表面附近形成阴极鞘层，并在阴极鞘层内形成大量的离子和在衬底表面附近形成很强的电场. 离子在电场的作用下对衬底表面的强烈轰击将对准直碳纳米管的生长产生影响. 结合有关理论，分析和讨论了离子的轰击对准 关键词： 准直碳纳米管 离子轰击 负偏压     

金属管件内壁栅极增强等离子体源离子注入的轴向特性研究

栅极增强等离子体源离子注入(GEPSII)一种新的金属管件内壁处理方法，该方法能够均匀地对金属管件内壁进行离子注入，并且能够生成二元金属化合物.在金属管件内轴向放置三块45号钢样品，利用GEPSII方法在金属管件内壁成功生长金黄色氮化钛(TiN)薄膜.结构分析显示TiN主要沿(111)和(200)晶面生长，深度分析显示膜的厚度大约二十几纳米，膜质地均匀且在基底有一定的嵌入深度.电化学腐蚀、硬度、磨擦学分析表明TiN薄膜很好地改善了45号钢的表面性能，并且表现出很高的轴向均匀性. 关键词： 等离子体源离子注入 内表面 氮化钛     

圆筒电极对离子磁电加热的影响

高效的磁电加热不仅能够提高电子回旋共振(ECR)等离子体的离子温度,还能改善离子的径向和轴向分布,促进ECR等离子体在化学气相沉积金刚石膜刻蚀中的应用.将磁电加热系统中的圆环电极改进为圆筒电极,研究了圆筒电极对离子磁电加热的影响,对比了圆筒和圆环电极加热离子的区别.结果表明:在同一阳极偏压下,圆筒比圆环电极更有利于提高离子温度,圆筒电极加热时各径向位置的离子温度升高的幅度较大,其中圆筒电极内部的离子温度径向分布差异较大,而圆筒下游的离子温度径向分布比较均匀;磁电加热对离子密度的影响很小;采用圆筒电极加热时,有利于离子向轴向下游的输运,改善了离子的轴向均匀性.     

Nano-Fabrication by Cathodic Plasma Electrolysis

Cathodic plasma electrolytic (CPE) techniques are new groups of coating processes, which can be used for fabrication of nanostructured layers on surface of a wide range of metallic substrates. The most exciting visible feature of these atmospheric-based plasma techniques is continuous sparking on processed surface inside an electrolyte. Unlike the anodic part of plasma electrolysis (usually known as plasma electrolytic oxidation (PEO) or micro arc oxidation (MAO)), which is commonly used for oxidation of light metals/alloys such as aluminum, titanium and magnesium, CPE techniques can clean and coat different metals and alloys such as steel, copper, and light metals/alloys with formation of wide range of nanostructures including complex carbides, carbonitrides, intermetallics, and even oxides. It has been observed that the properties of obtained layers depend on the characteristics of achieved nanostructures such as average size, distribution and average coordination number of nanocrystallites. Furthermore, the properties of the processed surface can be tailored by tailoring the nanostructure characteristics. There is limited literature available on the mechanism of CPE and its connection to the morphology of nanostructured layers. This article addresses the two important aspects of CPE, namely characterization of nanostructured layers and mechanism of cathodic plasma electrolysis, which are reviewed in accordance to the morphology of fabricated nanostructures.     

Deposition of duplex Al2O3/aluminum coatings on steel using a combined technique of arc spraying and plasma electrolytic oxidation

Plasma electrolytic oxidation (PEO) is a cost-effective technique that can be used to prepare ceramic coatings on metals such as Ti, Al, Mg, Nb, etc., and their alloys, but this promising technique cannot be used to modify the surface properties of steels, which are the most widely used materials in engineering. In order to prepare metallurgically bonded ceramic coatings on steels, a combined technique of arc spraying and plasma electrolytic oxidation (PEO) was adopted. In this work, metallurgically bonded ceramic coatings on steels were obtained using this method. We firstly prepared aluminum coatings on steels by arc spraying, and then obtained the metallurgically bonded ceramic coatings on aluminum coatings by PEO. The characteristics of duplex coatings were analyzed by X-ray diffractometer (XRD) and scanning electron microscopy (SEM). The corrosion and wear resistance of the ceramic coatings were also studied. The results show that, duplex Al₂O₃/aluminum coatings have been deposited on steel substrate after the combined treatment. The ceramic coatings are mainly composed of α-Al₂O₃, γ-Al₂O₃, θ-Al₂O₃ and some amorphous phase. The duplex coatings show favorable corrosion and wear resistance properties. The investigations indicate that the combination of arc spraying and plasma electrolytic oxidation proves a promising technique for surface modification of steels for protective purposes.     

Characteristic of ceramic coatings on aluminum by plasma electrolytic oxidation in silicate and phosphate electrolyte

In the present work, four processes were carried out to produce ceramic coatings on aluminum substrate in two kinds of electrolytes (silicate and phosphate solution systems) using plasma electrolytic oxidation (PEO) technology. The voltage-time responses were recorded during different PEO processes. SEM/EDX and XRD were adopted to investigate the microstructure, elements distribution and phase composition of the coatings prepared in the two electrolyte systems. It is found that coatings produced in the silicate electrolyte have a more homogeneous morphology than those produced in the phosphate system. EDX analysis shows that silicon element tends to present primarily in the outer region of the coatings while phosphorus distributes uniformly throughout the coating thickness. According to the conventional anodic oxidation mechanism, a model is set up to explain the different characteristics of ceramic coatings fabricated in different electrolytes which is helpful to understand the growth mechanism of PEO coatings.     

多孔阳极氧化铝膜的制备及其在一维纳米材料合成中的应用

从一维纳米材料的研究范畴入手 ,综述了多孔阳极氧化铝膜的结构特征、形成机理以及作为模板在合成纳米导电聚合物、纳米金属、纳米半导体、纳米复合材料及碳纳米管等方面的研究与应用的最新进展 ,揭示了多孔阳极氧化铝模板在合成与组装纳米新材料方面的重要作用 .     

Preparation and properties of composite ceramic coating containing Al2O3–ZrO2–Y2O3 on AZ91D magnesium alloy by plasma electrolytic oxidation

A composite ceramic coating containing Al₂O₃–ZrO₂–Y₂O₃ was successfully prepared on AZ91D magnesium alloy by plasma electrolytic oxidation (PEO) technique in an alkaline aluminate electrolyte. The morphology, elemental and phase composition, corrosion behavior and thermal stability of the uncoated and coated samples were studied by environmental scanning electron microscopy (ESEM), energy dispersive X-ray spectrometer (EDS), X-ray diffractometer (XRD), electrochemical corrosion test, high temperature oxidation test and thermal shock test. The results showed that the composite ceramic coating was composed of Al₂O₃, c-ZrO₂, t-ZrO₂, Y₂O₃ and some magnesium compounds, such as MgO, MgF₂ and MgAl₂O₄. After PEO treatment, the corrosion potential of AZ91D alloy was increased and the corrosion current density was significantly reduced. Besides, the coated magnesium alloys also showed excellent high temperature oxidation resistance and thermal shock resistance at 500 °C environment.     

Chemical treatment of TiO2-based coatings formed by plasma electrolytic oxidation in electrolyte containing nano-HA, calcium salts and phosphates for biomedical applications

TiO₂-based coatings were formed on titanium alloy by plasma electrolytic oxidation (PEO) in an electrolyte containing nano-HA, calcium salts and phosphates. Bioactive surface was formed after chemical treatment (NaOH aqueous solution) of the PEO coating. The surface of the PEO coating was mainly composed of Ti, O, Ca and P showing anatase and rutile; while that of the chemically treated PEO (CT-PEO) coating mainly contains Ti, O, Ca and Na showing anatase, rutile and amorphous phase. And the chemically treated surface exhibits dissolution of P and introduction of Na during the chemical treatment process. The chemical treatment has no effect on the chemical states of Ca and Ti of the PEO coating. In addition, the surface constituents of the CT-PEO coating show a uniform distribution near its surface with increasing depth. When incubated in a simulated body fluid for 7 and 14 days, the PEO coating does not exhibit apatite-forming ability; however, apatite was successfully deposited on the CT-PEO coating after 7 days probably due to the formation of hydroxyl functionalized surface, enhancing the heterogeneous nucleation of apatite. The addition of nano-HA in the electrolyte has effects on the surface character and apatite-forming ability of the PEO coating; however, it has no obvious influence on those of the CT-PEO coatings.     

DL capacitance-emission spectroscopy of determining the electrochemical behavior of anodized aluminum in aqueous solutions

In the present investigation, holographic interferometry was utilized for the first time to determine the rate change of the double layer (DL) capacitance of aluminum samples during the initial stage of anodization processes in aqueous solution without any physical contact. In fact, because the DL capacitance values in this investigation were obtained by holographic interferometry, electromagnetic method rather than electronic method, the abrupt rate change of the DL capacitance was called DL capacitance-emission spectroscopy. The anodization process (oxidation) of the aluminum samples was carried out chemically in different sulfuric acid concentrations (0.5-3.125% H₂SO₄) at room temperature. In the mean time, the real-time holographic interferometry was used to determine the difference of the DL capacitance of two subsequent values, dC, as a function of the elapsed time of the experiment for the aluminum samples in 0.5%, 1.0%, 1.5%, and 3.125% H₂SO₄ solutions. The DL capacitance-emission spectra of the present investigation represent a detailed picture of not only the rate change of the DL capacitance throughout the anodization processes, but also, the spectra represent the rate change of the growth of the oxide films on the aluminum samples in different solutions. Consequently, holographic interferometry is found very useful for surface-finish industries especially for monitoring the early stage of anodization processes of metals, in which the rate change of DL capacitance of the aluminum samples can be determined in situ.     

Plasma electrolytic oxidation coating on AZ91 magnesium alloy modified by neodymium and its corrosion resistance

Ceramic coatings on the surfaces of Mg-9Al-1Zn (AZ91) magnesium alloy and Mg-9Al-1Zn-1Nd magnesium alloy (AZ91 magnesium alloy modified by neodymium, named as AZ91Nd in this paper) are synthesized in aluminate electrolyte by plasma electrolytic oxidation (PEO) process, respectively. X-ray diffraction and X-ray photoelectron spectroscopy analyses show the PEO coating on the Mg-9Al-1Zn-1Nd alloy comprises not only MgO and Al₂O₃, which are found in the coating on the AZ91 alloy, but also a trace amount of Nd₂O₃. Microstructure observations indicate the addition of Nd can decrease the sizes of β phases and form Al₂Nd intermetallics in the AZ91 alloy. The fine β phases can effectively restrain the formation of unclosed-holes and greatly decrease the sizes of pores in the coating during the PEO process. In addition, the Al₂Nd intermetallics can be completely covered due to the lateral growth of the PEO coatings formed on the α and β phases. As a result, the coating on the AZ91Nd alloy possesses a dense microstructure compared with that on the AZ91 alloy. The following corrosion tests indicate the corrosion resistance of the PEO coating on the AZ91Nd alloy is evidently higher than that of the PEO coating on the AZ91 alloy.     

Thermal Desorption Study of the Trapping and Retention of Hydrogen Isotopes upon Irradiation of Oxidized Metal Surfaces with Hydrogen Plasma

Patterns of hydrogen isotope trapping and retention are investigated by applying hydrogen ion radiation to nickel samples free of oxidation, tungsten samples with oxide layer on their surfaces, and tungsten samples with aluminum coating with oxide layer. It is found that hydrogen isotope desorption upon hydrogen ion plasma irradiation occurs in samples of tungsten and tungsten with aluminum coating, but not in nickel samples. It is concluded that hydrogen isotope transport through the tungsten–aluminum interface is initiated when one surface of a samples is irradiated with hydrogen plasma ions.     

Si,Al对激光熔覆MoFeCrTiW高熵合金涂层组织性能的影响

为了提高材料表面的耐磨性和高温抗氧化性,利用激光熔覆技术在Q235钢表面制备了MoFeCrTiW高熵合金涂层,并采用X射线衍射仪(XRD)、扫描电镜(SEM)和磨损试验机等研究了Si,Al添加对高熵合金涂层组织、相结构、耐磨性和高温抗氧化性能的影响。结果表明:激光熔覆MoFeCrTiW高熵合金涂层组织为等轴晶,单独添加等物质的量的Si或Al时,涂层分别为共晶组织或树枝晶,同时添加等物质的量的Si和Al时,涂层组织为细小的等轴晶。各高熵合金涂层的主体相均为BCC相,随着Si,Al的添加,BCC相的晶格常数减小。添加等物质的量的Al有助于抑制涂层中金属间化合物的形成,使涂层耐磨性降低;添加等物质的量的Si则会形成含Si的金属间化合物和一些未知相,提高涂层耐磨性。激光熔覆MoFeCrTiW高熵合金涂层在800℃的抗氧化性较高,Si、Al的添加可使涂层的高温抗氧化性进一步提高。