Influence of ion species ratio on grid-enhanced plasma source ion implantation

Grid-enhanced plasma source ion implantation (GEPSII) is a newly proposed technique to modify the inner-surface properties of a cylindrical bore. In this paper, a two-ion fluid model describing nitrogen molecular ions N_2^+ and atomic ions N^+ is used to investigate the ion sheath dynamics between the grid electrode and the inner surface of a cylindrical bore during the GEPSII process, which is an extension of our previous calculations in which only N_2^+ was considered. Calculations are concentrated on the results of ion dose and impact energy on the target for different ion species ratios in the core plasma. The calculated results show that more atomic ions N^+ in the core plasma can raise the ion impact energy and reduce the ion dose on the target.     

Inner Surface Modification of a Tube by Magnetic Glow-Arc Plasma Source Ion Implantation

A new method named the magnetic glow-arc plasma source ion implantation （MGA-PSⅡ） is proposed for inner surface modification of tubes. In MGA-PSⅡ, under the control of an axial magnetic field, which is generated by an electric coil around the tube sample, glow arc plasma moves spirally into the tube from its two ends. A negative voltage applied on the tube realized its inner surface implantation. Titanium nitride （TIN） films are prepared on the inner surface of a stainless steel tube in diameter 90mm and length 600mm. Hardness tests show that the hardness at the tube centre is up to 20 GPa. XRD, XPS and AES analyses demonstrate that good quality of TiN films can be achieved.     

Self—Consistent Description of nitrogen dc Glow Discharge

A self-consistent hybrid Monte Carlo Fluid model is presented to describe the nitrogen dc glow discharge.The movement of fast electrons is simulated by the Monte Carlo method while the dynamics of slow electrons and ions is by fluid equations.The spatial features of the charged species and the corresponding electric field throughout the discharge have been calculated,which include the creation rates of ions and slow electrons,densities of the charged species,the electric field and the potential distribution.These closely related results can give a selfconsistent explanation of the discharge characteristics throughout the space of nitrogen dc glow discharge.The calculated ion density is also compared with the corresponding experimental result.     

ELECTRON TRANSPORT BEHAVIOURS IN THE NITROGEN DIRECT CURRENT GLOW DISCHARGE

A Monte Carlo simulation is presented to describe the electron transport behaviours in the nitrogen direct current glow discharge. The energy and angular distributions of the electrons at different positions of the cathode dark space are calculated; their energy and density distribution features throughout the entire discharge are discussed. The influence of molecular vibrational excitation, typical for electron－molecule collisions, has been studied and the elementary process of active species generation has been illustrated. The simulated results reveal that, in the cathode dark space, the high-energy electrons are mainly forward scattering and behave as a high-energy ‘electron beam'. The sharp increase of the number of secondary electrons plays an important role in producing active species at the interface between the cathode dark space and the negative glow region. The vibrational excitation enhances the energy loss of electrons in the negative glow region.     

脉冲高能量密度等离子体法类金刚石膜的制备及分析

利用脉冲高能量密度等离子体法在光学玻璃衬底上、在室温下成功的制备了光滑、致密、均匀的纳米类金刚石膜.工艺研究表明：放电电压和放电距离以及工作气体种类对纳米类金刚石膜的沉积起着关键作用.利用拉曼光谱、扫描电镜以及电子能量损失谱分析薄膜的形态结构表明：薄膜具有典型的类金刚石特征；纳米类金刚石膜的晶粒尺寸小于20nm甚至为非晶态；类金刚石膜中含有一定量的氮原子，随着沉积能量的升高，氮的含量增大.纳米类金刚石膜的薄膜电阻超过109Ω/cm2.对放电溅射过程进行了理论分析，结果与工艺研究的结论吻合.     

内表面栅极等离子体源离子注入TiN薄膜及其特性研究

阐述了栅极增强等离子体源离子注入（GEPSII）方法的基本思想.利用GEPSII方法在45号钢 基底上生成了金黄色氮化钛（TiN_x）膜.对不同条件下的TiN膜做电化学腐蚀，X PS，AES， XRD等分析.电化学腐蚀实验显示TiN薄膜改善了45号钢的耐腐蚀性能5—10倍，且在高气压下 效果更好.结构分析显示TiN膜含有TiO₂，TiN成分，主要沿（111）和（200）晶 向生长，深度分析显示膜的厚度只有二十几纳米，膜质地均匀且在基底有一定的嵌入深度. 关键词： 腐蚀 等离子体源离子注入 薄膜 氮化钛     

Pulsed Ion Sheath Dynamics in a Cylindrical Bore for Inner Surface Grid—Enhanced Plasma Source Ion Implantation

Based on our recently proposed grid-enhanced plasma source ion implantation(GEPSII) technique for inner surface modification of materials with cylindrical geometry,we present the corresponding theoretical studies of the temporal evolution of the plasma ion sheath between the grid electrode and the target in a cylindrical bore.Typical results such as the ion sheath evolution,time-dependent ion density and time-integrated ion energy distribution at the target are calculated by solving Poisson‘s equation coupled with fluid equations for collisionless ions and BOltzmann assumption for electrons using finite difference methods.The calculated results can further verifty the feasibility and superiority of this new technique.     

金属管件内壁栅极增强等离子体源离子注入的轴向特性研究

栅极增强等离子体源离子注入(GEPSII)一种新的金属管件内壁处理方法，该方法能够均匀地对金属管件内壁进行离子注入，并且能够生成二元金属化合物.在金属管件内轴向放置三块45号钢样品，利用GEPSII方法在金属管件内壁成功生长金黄色氮化钛(TiN)薄膜.结构分析显示TiN主要沿(111)和(200)晶面生长，深度分析显示膜的厚度大约二十几纳米，膜质地均匀且在基底有一定的嵌入深度.电化学腐蚀、硬度、磨擦学分析表明TiN薄膜很好地改善了45号钢的表面性能，并且表现出很高的轴向均匀性. 关键词： 等离子体源离子注入 内表面 氮化钛     

高阻隔碳氢膜的制备及性能研究

利用射频等离子体化学气象沉积法（r.f.PECVD），在12μm厚的聚对苯二甲酸乙二醇酯 (PET)上制备了碳氢膜. 用原子力显微镜（AFM），x射线光电子能谱（XPS），激光拉曼光谱，傅里叶红外光谱等仪器，对碳氢膜的表面形貌和内部结构特性进行了较详细研究. 镀碳氢膜PET的阻隔性能在标准透水蒸气测试仪上进行检测. 实验结果证明：沉积工艺参数对碳氢膜的生长速率及结构性能有重要影响；在PET上沉积的是纳米碳氢膜，该膜主要由sp2和sp3杂化的碳氢化合物组成；当PET上碳氢膜厚度为900nm时，阻水蒸气性能可提高7倍. 关键词： 碳氢膜 射频等离子体化学气象沉积法 聚对苯二甲酸乙二醇酯 阻隔性能     

A Novel Atmospheric Pressure Plasma Fluidized Bed and Its Application in Mutation of Plant Seeds

An atmospheric pressure plasma fluidized bed (APPFB) is designed to generate plasma using a dielectric barrier discharge (DBD) with one liquid electrode. In the APPFB system, the physical properties of DBD discharge and its application in plant-seed mutating are studied fundamentally. The results show that the generated plasma is a typical glow discharge free from filament and arc plasma, and the macro-temperature of the plasma fluidized bed is nearly at room temperature. There are no obvious changes in the pimientos when their seeds are treated by APPFB, but great changes are found for coxcombs.