一种制作超高频全息光栅的新方法

为了满足测量的高分辨率和灵敏度，基于光栅为关键元件的光学测量方法要求光栅有很高的频率。在已有的高折射率介质制栅方法的基础上提出了一种新的制作超高频全息光栅的方法，该方法制栅准确、简单、方便，其特点是所制光栅的频率与激光波长及介质的折射率无直接关系，而是等于制栅光路所得频率与两倍母栅频率之和。实验表明，利用该方法制得１００００线／ｍｍ的光栅是完全可能的     

1.30μm／1.55μm SiGe多模干涉滤波器

用多模干涉原理分析和设计了光通信波长（１．３０μｍ～１．５５μｍ）的Ｓｉ１－ｘＧｅｘ／Ｓｉ滤波器，并用模的传播分析方法对其传输特性进行了研究。结果发现，在Ｇｅ含量ｘ＝０．０４时，干涉区的脊高和宽度分别为６．３５μｍ和８μｍ。如果多模干涉区长度ＬＭ＝２３０２．５μｍ，可滤１．３０μｍ而通１．５５μｍ的波长。且具有３１ｄＢ的对比度和０．０１ｄＢ的插入损耗；如果多模干涉区长度ＬＭ＝２５１２．５μｍ，可滤１．５５μｍ而通１．３０μｍ的波长。具有１６ｄＢ的对比度和０．０９ｄＢ的插入损耗。     

光栅位移激光多普勒遥测技术的研究

研究了利用运动光栅的多普勒效应进行切向位移的遥测技术。提出了测量光路，采用声光调制器作为分光和频移器件并用于鉴向，实现了５０ｍ的远距离光栅位移遥测。达到测量分辨率０．８μｍ，光栅位移４０ｍｍ，最大累积误差优于３４μｍ。并用理论分析和实验，证明了远距离目标的焦深及其计算方法，导出了计算公式。     

载氢光纤光致折变布拉格光栅

报道用１９３ｎｍＡｒＦ准分子激光，经过石英相位版的空间调制，在载氢增敏处理过的通信光纤上写入光致折射率变化的布拉格光栅，在光栅布拉格波长上（λ＝１．５３μｍ）测得的反射率大于９０％，半高全宽线宽小于０．６ｎｍ。     

激光调频光纤位移传感器多路复用技术的研究

叙述了运用半导体激光器连续波调频外差干涉和频域多路复用原理，研究了光纤位移传感器多路复用技术。已研制成的分频与分幅相结合四路复用光纤位移传感器，可同时进行对多点、多维位移和多种物理量的测量，各路位移测量范围大于１ｍｍ，测量精度优于０．１μｍ及位移分辨率为０．０１μｍ。     

高圆双折射率螺旋芯光纤

已研制出一种高性能螺旋芯光纤，这种光纤广泛使用于大电流或强磁场光纤传感系统。其性能指标分别为：螺距１．５ｍｍ、芯偏２５５μｍ、拍长３．５ｍｍ及损耗小于０．５ｄＢ／ｍ。     

高精度,大口径平面波像差标准—移相式数字平面干涉仪

介绍研制成的一台移相式数字平面干涉仪，其孔径为φ２４５ｍｍ，用液面作基准标定并消除仪器的系统误差，准确度优于λ／５０（峰谷值，λ＝０．６３２８μｍ），利用计算机辅助干涉术，被测件口径可扩展到φ５００ｍｍ，该仪器将用于建立高精度，大孔径平面波像差标准。文中阐述了光学干涉仪，移相器及精度校核等问题。     

有限包层半径光纤Bragg光栅的理论研究

采用光纤波导三层模型,对有限包层半径光纤Bragg光栅导模有效折射率的改变进行了理论分析,结果表明:当包层直径小于16μm时,单模光纤Bragg光栅(纤芯直径为8.3μm)的导模有效折射率才开始发生明显变化.在包层外添加外包层,通过改变外包层的折射率可以实现对光栅Bragg反射波长的调谐,同时对不同芯子直径的光栅Bragg波长移动进行了数值计算.在保证光纤归一化频率不变的前提下,芯径越小Bragg波长调谐范围越大,当包层厚度为1μm时,芯径为a＝2.2μm的光栅Bragg波长调谐范围约为3.9μm.     

光栅卡卷尺测长技术

本文在光栅卡尺技术和力矩电机技术的基础上，把卡尺量程扩大到２０ｍ作成卡卷尺。利用力矩电机作为卡卷尺的卷紧机构和利用力矩电机作为保证光栅编码器标尺光栅平直度的施力元件，在此基础上，发展了光栅卡卷尺测长技术。基于莫尔条纹技术的光栅卡尺测长技术与其它现有长度测量技术相比成本较低、性能可靠，其测量精度可达０．０５ｍｍ甚至更高。为克服实际应用中卡卷尺的平直度对测量精度的影响，在系统设计中使力矩电机工作在堵转状态作为保证光栅卡卷尺标尺光栅平直的施力元件，并设计了线性调节的力距电机电源。对系统的检测表明，在２０ｍ测程内测量精度为０．１ｍｍ。     

0.7微米i线投影曝光系统光刻物镜的设计与试制

介绍了微电子专用关键设备０．７μｍｉ线投影曝光系统光刻物镜的主要技术指标，及设计试制中解决的关键单元技术和试制结果。结果表明，数值孔径ＮＡ＝０．４２，光刻工作分辨力０．６μｍ，像场尺寸１４．６ｍｍ×１４．６ｍｍ，畸变＜±０．１μｍ的５倍精缩投影光刻物镜已试制成功。物镜具有双远心和有温度气压控制补偿，在满足高精度成像的同时，又能同时满足暗场同轴对准的特点。     

Optimal design of temperature-insensitive long period fiber gratings for athermal refractive-index sensor

Based on coupled-mode theory of long-period fiber grating (LPFG), a theoretical analysis and simulations for the optimal design of a temperature-insensitive LPFG is presented in order to achieve an athermal condition for sensing the refractive index of the external medium. Effects of the variation of the cladding radius and grating period on the temperature sensitivity of the LPFG are discussed. Both of these parameters are found to be important to control the temperature sensitivity when the thermo-optic coefficients of core and cladding materials are of the same order. Other grating parameters are also optimized in order to achieve a good contrast of the grating period with resonance wavelength in the 1.5 μm region and to sense the external medium refractive index over a wide range. Variation of external medium refractive index from 1.0 to 1.45 results a red-shift in the LPFG resonance wavelength by 86 nm with its temperature sensitivity as low as 0.008 nm/°C over a temperature range of 0–80 °C for this optimally designed LPFG.     

Compact microfiber Bragg gratings with high-index contrast

We fabricate fiber Bragg grating (FBG) in microfibers (MFs) using focused ion beam milling technique. By periodically etching 100 nm-depth grooves on the surface of silica MFs with diameters less than 2 μm, evident grating features with transmission dip up to 15 dB are obtained. Because of the high-index contrast of the gratings structure, the length of the microfiber Bragg grating (MFBG) can be reduced to 500 μm level. Using a 518 μm-length 1.8 μm-diameter MFBG, we also demonstrate sensitivity up to 660 nm per refractive index unit (RIU) for refractive index (RI) sensing. The highly compact MFBGs demonstrated here may serve as low-dimensional building blocks for miniaturized photonic components and devices.     

折/衍混合远心消色差f-θ物镜系统设计

设计了一个折/衍混合远心消色差f-θ物镜系统.该系统由一片折射/衍射透镜和三片折射透镜组成.入瞳位于系统前焦面,整个系统满足像方远心.与美国专利（专利号：4,925,279）相比较,垂轴色差由2.40 mm降到0.23 mm,降低了一个数量级;对于0°、14°和20°视场,最大垂轴像差分别由260μm、1350μm、2090μm降低到5μm、250μm、318μm,最大场曲分别由8mm、10mm、13 mm降低到0.5 mm、1 mm、6 mm.该物镜不仅可用于彩色激光打印机、激光数码彩扩等多波长的扫描系统,也可用于能量要求较高的扫描系统.在高能量扫描系统中,通过引用折/衍混合远心消色差f-θ物镜,可用小体积工作于多纵模状态的激光器代替大体积单波长的激光器,使整个扫描系统小型化,并且提高了扫描准确度.     

Antireflection coating on germanium for dual channel (3–5 and 7.5–10.6 μm) thermal imagers

The dual channel thermal imager, operating in the 3–5 and 7.5–10.6 μm wavelength bands, is one of the latest achievements in instrumentation for target recognition and acquisition. While the 3–5 μm band is utilised for detecting hot objects such as engine exhausts of vehicles and fighter planes, the 7.5–10.6 μm band is employed for human bodies and objects at ambient temperatures. Many substrates are available which transmit in both these wavelength bands and their transmission can be enhanced by providing a suitable antireflection coating. In this paper, a broad band antireflection coating on germanium substrate is reported. The design approach involves achieving a continuously varying refractive index from that of the incident medium to the substrate. The continuously varying refractive index profile may be generated by using a sequence of thin layers of high and low refractive index materials. In this design a continuous refractive index profile is approximated by using a 13-layer stack of thorium fluoride and germanium as low and high index coating materials respectively. This coating conforms to environmental stability standards and shows an average transmission of 91% in 3–5 μm band and 94.5% in 7.5–10.6 μm band with a peak of 97% at 9 μm on 10 mm thick germanium substrate. Polycrystalline germanium has 2.5% absorption for a 10 mm thick substrate.     

采用HfO2/SiO2溶胶-凝胶薄膜制备衍射光栅

采用溶胶-凝胶方法制备了具有光敏性的HfO2/SiO2溶胶-凝胶薄膜,并利用其光敏性制备了衍射光栅.采用XPS分析了薄膜的成份,证实了Hf元素的存在.并用椭偏仪测试了薄膜的折射率,结果证实了HfO2的加入确实提高了体系的折射率.利用其光敏性,采用X射线作曝光光源通过掩模进行曝光,利用曝光部分与未曝光部分的溶解度差,在薄膜上制备了高为0.8 μm、周期为1 μm的衍射光栅.     

基于闪耀光纤光栅的折射率传感技术实验研究

提出了一种基于闪耀光纤光栅传感技术的折射率测量新方法,即采用SLED作为光源,通过检测闪耀光纤光栅透射谱强度实现折射率的测量.实验证明,当环境折射率在1.372 3~1.453 2之间变化时,闪耀光纤光栅透射功率从0.611~0.472 mW线性下降,其灵敏度达到1.718 μW/（0.001折射率变化）.该检测方法具有结构简单、无需波长检测、灵敏度高、易于工程化等优点.     

Passively Q-switched laser with single longitudinal mode based on the frequency selection of grating and F-P etalon in twisted-mode folded cavity

A passively Q-switched side-pumped laser with folded resonator is specially constructed for single- longitudinal-mode smooth pulse output. Nd：YAG is chosen as the laser active medium and Cr^4＋：YAG as the saturable absorber medium. Additionally, the method of frequency selection by grating with 1200 line/mm and Fabry-Perot （F-P） etalon is used in the twisted-mode cavity. The single-frequency smooth pulses are produced with 10-Hz repetition rate, 20-ns pulse width, and 1.064-μm wavelength. The proba- bility of single-frequency laser output measured is over 99% by using the methods of Fourier analysis and F-P etalon multiple-beam interferometry at the threshold voltage. The measured near-field and far-field angles of divergence are 1.442 and 1.315 mrad, respectively. The values of M^2 are 1.32 and 1.31 separately with the knife-edge method. Single pulse at 1.064 tim with the energy of 8.8 mJ is achieved in TEM00 mode.     

用于复色哈特曼人眼波像差测量的折/衍混合调焦系统

设计了一个折/衍混合多色调焦系统,可用于哈特曼波前传感器测量不同波长下人眼的波像差.系统由两片折射透镜和一个二元衍射面构成,焦距调整范围为－200～200 mm.系统性能达到衍射受限,在0.488～0.655 μm波长范围内,焦点色位移小于3 μm.整个系统结构简单、紧凑,同哈特曼波前传感器相匹配,可用于普通人群眼波像差的测量.