Real-time surface profile measurement using a feedback type of sinusoidal phase modulating interferometer

In this paper, we propose a sinusoidal phase modulating (SPM) interferometer that is insensitive to external disturbances, and its measuring principle is analyzed theoretically. In the SPM interferometer, the interference signal is detected by a high-speed image sensor based on a low-speed CCD and a signal processing circuit is used to obtain the phase of each point on the surface. Therefore, the surface profile can be measured real-time. The experiments measuring the surface profile of a wedge-shaped optical flat show that the measurement time of the SPM interferometer is less than 10 ms, the repetitive measurement accuracy is 4.2 nm. The results show that the impacts of nonlinear distortion of the piezoelectric transducer (PZT) and part external disturbance are removed.     

物体表面形貌的正弦相位调制实时干涉测量技术研究

表面形貌干涉测量技术是一种高精度的非接触式测量技术,在工业生产和科学研究中具有广泛的应用。提出一种实时测量表面形貌的正弦相位调制干涉测量新技术。该技术用激光二极管作光源,用自制的高速图像传感器探测干涉信号,通过信号处理电路实时解相得到被测表面所对应的相位分布,实时分析相位获得物体表面形貌。该技术消除了光强和部分外界干扰的影响,提高了系统的测量精度。楔形光学平板表面形貌的测量结果表明,测量点为60×60个的情况下,测量时间小于8.2 ms,重复测量精度(RMS)为4.3 nm。     

法布里-珀罗板正弦相位调制型高精度角位移测量

提出了一种基于法布里-珀罗板和正弦相位调制干涉术的角位移测量新方法。采用CCD探测法布里-珀罗板两透射光束光斑的中心距,通过运算得到了入射光的初始角,解决了采用法布里-珀罗板干涉法测量角位移需确定入射光初始角的问题。采用正弦相位调制干涉术通过测干涉信号的相位来测量物体的角位移,增强了对杂散光的抗干扰能力,减少测量误差,提高了测量精度。理论模拟和实验结果表明本方法可以实现精度为10^-8rad数量级的高精度角位移测量。     

基于线阵CCD像素数提取的高速运动目标形变测量方法研究

针对传统光学成像测量方法对高速运动目标成像帧频低、像质模糊,难以满足对目标形变高精度测量的缺点,提出一种基于线阵CCD像素数提取的高速运动目标形变测量方法。该方法利用线阵CCD高分辨率、高帧频等优势,通过提取线阵CCD输出目标强度——像素曲线斜率变化率最大点来获取目标所占像素数N的像素数提取方法,同时采用DMD模拟高速运动目标形变过程,配合基于线阵CCD像素数提取的高速运动目标形变测量方法进行形变测量实验验证。实验结果显示采用该方法对V=450 km/h的高速运动目标进行形变量测量时,可以满足目标形变测量偏差小于0.3 mm,标准差小于0.5 mm,相对误差最低0.01%。实现了高速运动目标形变量的准确测量,为高速磨损测试、高温形变测试、高压形态测试等奠定了基础。     

Quadrature phase-shifting interferometer with a polarization imaging camera

We present a new high-speed phase distribution measurement, in which a polarization imaging camera is applied to a quadrature phase-shifting interferometer. The polarization imaging camera composed of a polarizer-mask on a detector array can provide simultaneously two phase-shifted data in quadrature. Two sets of two phase-shifted data in quadrature are obtained before and after a change of the interferometer such as object displacement or environmental disturbances. Phase sum and difference distributions of the interferograms between two states with arbitrary phase-shift in the interferometer are calculated with the two sets of two phase-shifted data in quadrature. This phase calculation method in the pixel displaced phase-shift method has such advantage that phase-shifted data required for the calculation of phase distributions can be obtained by only two pixels in the polarizer-mask detector array, which means no reduction of the image resolution in the other direction. The principle of this technique and experimental results are presented.     

Image encryption based on pure intensity random coding and digital holography technique

We propose a novel image encryption method that combines the pure intensity random encoding and the digital holography technique. A phase-shifting interferometer records both phase and amplitude information of a complex object with a CCD sensor array. The encryption is performed by placing two pure intensity random masks between the image to be encrypted and an intensity recording device. Electronic decryption can be performed with fast Fresnel reconstruction procedure. Numerical simulation results show the validity of the algorithm and an optoelectronic implementation setup is also presented.     

小型线形可变滤光片分光的可见成像光谱仪及其特性研究

本文设计了一种使用线形可变干涉滤光片的小型成像光谱仪。使用CCD摄像头作图像传感器，通过微动平台带动线形可变干涉滤光片，横向扫描通过面阵CCD的每个像元，每扫描一步所得到的总体图像中不同列的像元是由不同波长的单色部分像元组成，随着扫描步进，这些单色部分像元的波长随之变化，最后采用图像重构的文教是到一系列单色图像（或见光波段400－700mm）。扫描间隔由所需的单色图像的光谱分辨率和各单色图像间的波长间隔来确定。经过试验证明，此成像光谱仪充分利用了线型干涉滤光片的性能，其光谱分辨率为16nm，同后者的光谱带宽相差无几，仪器的空间分辨率由成像系统和CCD来确定，论仪器装置具有结构简单，高空间分辨率，较主光谱分辨率，扫描速度快等特点，通过一个伪装识别试验，验证了仪器的性能指标。     

Sinusoidal phase-modulating laser diode interferometer insensitive to intensity modulation for real-time displacement measurement with feedback control system

In sinusoidal phase modulating laser diode (LD) interferometer, the injection current of the LD is sinusoidally modulated to realize the modulation of the wavelength. However, the light intensity of LD is also modulated, which affects the measurement accuracy. An all-fiber sinusoidal phase modulating LD interferometer for real-time displacement measurement is proposed where the influence of the intensity modulation is eliminated with a new algorithm. It is made clear that an optimal depth of the sinusoidal phase modulation (SPM) exists in the algorithm. Moreover, the SPM depth is locked at the optimal value by controlling the injection current with a feedback control system. The feasibility of the proposed interferometer for displacement measurement is verified by experiments.     

基于多光谱图像颜色特征的茶叶分类研究

提出了一种利用多光谱图像颜色特征进行茶叶分类的新方法,对两种颜色几乎一样用肉眼几乎不能分辨的茶叶进行了分类。图像由MS3100-3CCD光谱成像仪和普通数码相机同时获得,光谱成像仪提供3个波段的图像,由近红外(NIR)、红色(R)和绿色(G)组成,因此它比普通数码照相机包含更丰富的信息,特别NIR波段的图像对有机物的颜色比可见光敏感。提取3CCD光谱成像仪和普通数码照相机各个波段图像颜色的特征即像素偏方差值和平均值进行统计分析,用多光谱图像的NIR图像所提供颜色信息能够辨别这两种颜色几乎一样的茶叶,而普通数码相机无法提供信息进行识别。然后应用人工神经网络技术,对NIR图像像素偏方差值和平均值这两个参数进行建模,建模样本40个,每个样本为20个,预测样本20个,每个样本为10个。结果表明,在阈值为0.3,对两种茶叶进行分类得到了100%识别率,此研究为茶叶的分类提供一种快速和无损的新方法。     

长脉冲激光对组成CCD图像传感器的MOS光敏单元的硬破坏机理研究

以帧转移型面阵CCD图像传感器为例,采用有限元法研究了波长1.06 μm,脉宽ms量级长脉冲Nd:YAG激光与组成CCD传感器的MOS光敏单元的作用过程及硬破坏机理.建立了长脉冲激光辐照MOS光敏单元的热力耦合模型,模拟了MOS光敏单元的温度分布和应力分布.研究结果表明:在长脉冲激光作用下,由于S层表面径向压应力超过其抗压强度引起MOS光敏单元出现了OS层间分裂,进而受径向、环向和轴向压应力的共同作用下,在光敏单元还未熔融时,层间分裂就扩大至光敏单元的整个OS层间.OS层间完全分裂会使光敏单元发生硬破坏,并造成CCD传感器中激光照射区的单个或一列光敏单元的功能完全失效.文章的研究结果可为CCD图像传感器的激光损伤及防护提供必要的理论依据. 关键词： 长脉冲激光 CCD图像传感器 硬破坏机理 层间分裂     

探月光学

介绍了我国首次绕月探测嫦娥一号卫星的主载荷CCD立体相机与干涉成像光谱仪的原理、设计思想、技术措施与特色、设计结果以及在轨图像质量评估与检测. CCD立体相机采用一个广角物镜加一块面阵CCD的独特技术方案,从而使立体相机具有结构紧凑、小型轻量、配准精度高、航天环境适应性强等优点. 4种曝光时间与4种电子学增益共16组合,可以实现同轨不同纬度的曝光量调整. 干涉成像光谱仪采用了大比尺缩小的图像传递、2×2像元合并、矩形孔径光阑、2种曝光时间与3种电子学增益共6种组合的在轨曝光量调整等技术措施. 在轨运行表明,各项技术措施有效,达到了预期目标.     

Quadrature phase-shifting interferometer using spatial carrier

We propose a high-speed phase measurement using a phase calculation algorithm in a quadrature phase-shifting interferometer (QPI), which is applied to tilted fringes. Although the spatial carrier method is useful for a high-speed measurement with a single imaging sensor, the spatial resolution in conventional phase calculation algorithms is reduced owing to the use of three or more phase-shifted data at different sample points. Phases in the QPI method can be calculated with only two quadarture phase-shifted data extracted from the tilted fringes before and after a phase change of the interferometer. Thus, the proposed method can suppress the reduction of the spatial resolution compared with that in conventional methods, and makes it possible to measure a phase at high-speed. The principle and experimental results of this technique are presented.     

Surface profile measurement of low-frequency vibrating objects using temporal analysis of fringe pattern

A simple and accurate algorithm (phase scanning method) is proposed for 3D surface contouring and dynamic response determination of a vibrating object. A sinusoidal fringe pattern is projected onto a low-frequency vibrating object by a programmable liquid crystal display projector. The fringe patterns are captured by a high-speed CCD camera with a telecentric gauging lens. Phase values are evaluated point by point using phase scanning method. From the phase values of each point on the object, the contour of the specimen at different instants of vibration can be retrieved. In this paper, a small vibrating coin is used to demonstrate the validity of the method and the experimental results are compared with test results on a stationary coin using four-step phase shifting and fast Fourier transform methods. The technique is especially useful in applications where the vibrating object has a complicated shape.     

基于偏振位相调制的位相轮廓测量

本文介绍了一种用来测量三维物体面形的位相轮廓方法，它是通过将正弦光场投影到被测物面，该光场被物体表面调制后发生位相改变，利用偏振位相调制及位相检测算法计算物面的位相分布，再根据几何关系实现对物体三维形貌的测量。实验装置采用一种偏振位相调制的干涉光场投影装置对光场进行简便而精确的移相，采用ＣＣＤ摄像机记录畸变光场，并用计算机处理和显示测量结果。文中给出了有关实验结果。     

CCD与CMOS像素传感器γ射线电离辐射响应特性对比研究

为了研究CCD与CMOS像素传感器对γ射线电离辐射的响应差异,对比研究了4类像素传感器的结构特点和辐射响应特性。通过辐射实验,对各传感器在不同辐射水平条件下的光子响应事件分布、平均灰度值以及典型光子响应事件进行研究。研究结果表明：光子响应程度均与辐射剂量率相关;CCD像素传感器的沟道传输方式使每列像元间的辐射响应更容易相互干扰;平均灰度值随剂量率的增大存在明显的梯度,各积分周期内输出信号灰度值围绕均值上下波动,CCD像素传感器输出信号灰度浮动范围较小;CMOS像素传感器各像元对光子的响应更加明显,CCD像素传感器各像元的响应信号易与相邻像元发生串扰;各类像素传感器典型辐射响应事件区域中发生光子响应的像元数量随剂量率的增大而增多,响应事件并非单个光子的行为,而是反映了多个光子在区域内同时沉积能量的过程。本研究为开发像素传感器的γ射线辐射探测技术和应用提供了重要的理论分析和实验数据支撑。     

一种用于在线三维测量的五步非等步相移算法

提出了一种五步非等步相移算法,并成功应用于在线三维测量中。仅投影一固定正弦光栅条纹到物体上,通过物体在线运动产生等效相移,在一个条纹周期范围内任意采集五帧变形条纹图,通过像素匹配使各帧条纹图中的物点一一对应并计算出相应的等效相移量。采用所提出的五步非等步相移算法,即可重构物体。计算机模拟与实验验证了该方法的可行性和有效...     

面向实时视觉芯片的高速CMOS图像传感器

提出了一种面向实时视觉芯片的高速CMOS图像传感器.该高速图像传感器主要包括CMOS像素单元阵列、相关双采样(CDS)阵列、可编程增益放大(PGA)阵列、单次比较模数转换(ADC)阵列和控制模块.该传感器集成了光信号采集和行并行信号处理等功能,以大于1000 frame/s的速度输出数字信号或数字图像,同时实现了行并行...     

Double sinusoidal phase modulating laser diode interferometer for thickness measurements of transparent plates

A double sinusoidal phase modulating (SPM) laser diode interferometer for thickness measurements of a transparent plate is presented. A carrier signal is given to the interference signal by using a piezoelectric transducer, and the SPM interferometry is applied to measure the thickness of a transparent plate. By combining the double-modulation technique with the Bessel function ratio method, the measurement error originating from light intensity fluctuations caused by the modulation current can be decreased greatly.The thicknesses of a glass parallel plate and a quartz glass are measured in real time, and the corresponding experimental results are also given.     

Resonant characteristics of microcantilever by using self-mixing interferometer based on phase reconstruction method

<正>The self-mixing interferometer is used to investigate the characteristics of resonant frequency of the microresonator, which is excited by a sinusoidally driven loud-speaker.The detected self-mixing signal is processed by the phase reconstruction method.The 1st-order resonant frequency of the microresonator is measured to be 4.437 kHz with full-width at half-maximum(FWHM) of 0.13 kHz.The measurement results are verified by the sinusoidal phase modulating(SPM) interferometer.     

Photothermal Phase-Modulating Laser Diode Interferometer with High-Speed Feedback Control

We propose a photothermal phase-modulating laser diode interferometer equipped with a high-speed feedback control system. The CCD camera’s shutter-function raises the modulating frequency, which in turn elicits a higher feedback response, thus enabling us to eliminate nearly all external disturbance. With the recent application of a system purpose-built for discriminating between numerous fringe sequences, we have also reduced processing time.