| 物体表面形貌的正弦相位调制实时干涉测量技术研究 |
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| 引用本文： | 何国田,王向朝,曾爱军.物体表面形貌的正弦相位调制实时干涉测量技术研究[J].光学学报,2007,27(11):1997-2002. |
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| 作者姓名： | 何国田 王向朝 曾爱军 |
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| 作者单位： | 1. 中国科学院上海光学精密机械研究所信息光学实验室,上海,201800;中国科学院研究生院,北京,100039
2. 上海恒益光学精密机械有限公司,上海,201800 |
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| 基金项目： | 国家自然科学基金(60578051)，上海市科委国际合作计划项目(051107085)，上海市青年科技启明星计划项目(06QB14047)资助课题 |
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| 摘 要： | 表面形貌干涉测量技术是一种高精度的非接触式测量技术,在工业生产和科学研究中具有广泛的应用。提出一种实时测量表面形貌的正弦相位调制干涉测量新技术。该技术用激光二极管作光源,用自制的高速图像传感器探测干涉信号,通过信号处理电路实时解相得到被测表面所对应的相位分布,实时分析相位获得物体表面形貌。该技术消除了光强和部分外界干扰的影响,提高了系统的测量精度。楔形光学平板表面形貌的测量结果表明,测量点为60×60个的情况下,测量时间小于8.2 ms,重复测量精度(RMS)为4.3 nm。
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| 关 键 词： | 光学测量 表面形貌 实时测量 正弦相位调制干涉仪 激光二极管 图像传感器 |
| 文章编号： | 0253-2239（2007）11-1997-6 |
| 收稿时间： | 2006/10/17 |
| 修稿时间： | 2006-10-17 |
Real-Time Surface Profile Measurement Using Sinusoidal Phase-Modulating Interferometry |
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| He Guotian,Wang Xiangzhao,Zeng Aijun.Real-Time Surface Profile Measurement Using Sinusoidal Phase-Modulating Interferometry[J].Acta Optica Sinica,2007,27(11):1997-2002. |
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| Authors: | He Guotian Wang Xiangzhao Zeng Aijun |
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| Institution: | 1 Shanghai Institute of Optics and Fine Mechanics, the Chinese Academy of Sciences, Shanghai 201800;2 Shanghai Hengyi Optics and Fine Mechanics Co., Ltd., Shanghai 201800;3 Graduate University of Chinese Academy of Sciences, Beijing 100039 |
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| Abstract: | A sinusoidal phase-modulating (SPM) interferometer for real-time surface profile measurement is proposed and analyzed. A laser diode and a high-speed image sensor are used as the light source and the photo detector. The phase corresponding to each measurement point on the surface is calculated by a signal processing circuit. The surface profile is obtained by the phase distribution . The interferometer is insensitive to vibrations of the optical components and fluctuations in the light source. The surface profile of an optical wedge was measured . For 60×60 measurement points, the measurement time was less than 8.2 ms. Repeatability in the measurements was 4.3 nm. |
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| Keywords: | optical measurement surface profile real-time measurement sinusoidal phase-modulating interferometer laser diode image sensor |
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