共查询到20条相似文献,搜索用时 140 毫秒
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本文针对微透镜阵列与红外焦平面阵列集成的应用,对折射性微透镜阵列的非成象光学特性进行了研究和总结.采用系统性能评价因子来衡量微透镜的聚能效率,分析了系统参数对会聚效率的影响,并用标量衍射方法对几何光学分析结果进行了校验,为红外焦平面阵列微镜集成的设计和制作提供了理论依据. 相似文献
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六角形孔径平面微透镜阵列的制作及基本特性研究 总被引:5,自引:4,他引:1
采用光刻离子交换工艺制作了六角形孔径平面微透镜阵列.离子交换后的变折射率区域有微小重叠,填充系数可达95%以上.对制作的六角形孔径平面微透镜进行了折射率分布、数值孔径和像差等光学特性测试,得到的六角形孔径平面微透镜阵列光学性能均匀,成像质量较好的结果.该透镜阵列的研制成功为制作高质量高填充系数透镜阵列及模拟生物复眼光学系统奠定了基础. 相似文献
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本文介绍一种供非接触式光刻使用的由三片微透镜陈阵叠合成1:1成像多孔径微小光学光刻曝光系统。针对大面积光刻,可以获得良好的分辨率和较大的焦深。本文还介绍了这种微透镜阵列的制作方法。 相似文献
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凹折射微透镜阵列的离子束刻蚀制作 总被引:1,自引:0,他引:1
利用光刻热熔成形工艺及离子束刻蚀制作 12 8× 12 8元凹微透镜阵列。所制硅及石英凹微透镜的典型基本图形分别为凹球冠形、凹柱形和矩顶凹面形。分析了在光致抗蚀剂柱凹微透镜图形制作过程中的膜系匹配特性 ,与制作该种微透镜有关的光掩模版的主要结构参数 ,以及光致抗蚀剂掩模工艺参数的控制依据等。探讨了在凹微透镜器件制作基础上利用成膜工艺开展平面折射微透镜器件制作的问题。采用扫描电子显微镜 (SEM)和表面轮廓仪测试了所制石英凹微透镜阵列的表面微结构形貌。给出了所制石英凹微透镜阵列远场光学特性的测试结果。 相似文献
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微透镜阵列的铸塑复制技术 总被引:3,自引:0,他引:3
在光刻热熔成型以及电铸复制得到的微透镜阵列镍板基础上,采用静态铸塑技术,得到了高质量的PMMA微透镜阵列。本文介绍了静态铸塑的聚合反应理论基础、模具设计以及工艺过程。最后对微透镜阵列的复制精度进行分析,结果表明复制精度优于0.5μm. 相似文献
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用于红外焦平面的正方形孔径球面微透镜阵列研究 总被引:1,自引:0,他引:1
针对目前红外焦平面光敏阵列中存在的占空比小、光能利用率低的实际问题,展开了正方形孔径球面微透镜阵列制作及其与红外焦平面阵列集成应用的研究.本文从红外焦平面光敏阵列特点入手,对比分析了正方形孔径相比于传统圆形孔径微透镜阵列在光能利用上的优势.提出正方形孔径微透镜阵列激光直写变剂量曝光制作技术,建立光刻胶曝光数学模型和正方形球面微透镜面型函数,以此为基础,编制直写设备变剂量曝光控制软件;利用长春理工大的学复合坐标激光直写系统和等离子刻蚀机进行相关工艺实验,制作了阵列256×256、单元尺寸40×40μm2、球面半径60μm、单元间距1μm的红外石英微透镜阵列;并将其与相应阵列的碲-镉-汞红外光敏阵列进行集成.结果表明:微透镜的占空比达到95%,红外焦平面光能利用率从原来的60%提高到90%以上.由此得出结论:变剂量曝光制作微透镜技术是可行的,正方形孔径球面微透镜阵列代替圆形孔径微透镜阵列,对于提高红外探测器的灵敏度、信噪比、分辨率等性能具备明显优势. 相似文献
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This paper presents a technique that distortion aberrations of an optical imaging system can be reduced by using spherical lenses accompanying a microlens array. This technique is implemented by putting a microlens array on the intermediate image plane in the imaging system. Our experimental result confirmed that distortion aberrations can be obviously reduced after applying our proposed techniques. 相似文献
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A novel real-time gray-scale photolithography technique for the fabrication of continuous microstructures that uses a LCD panel as a real-time gray-scale mask is presented. The principle of design of the technique is explained, and computer simulation results based on partially coherent imaging theory are given for the patterning of a microlens array and a zigzag grating. An experiment is set up, and a microlens array and a zigzag grating on panchromatic silver halide sensitized gelatin with trypsinase etching are obtained. 相似文献
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为了提升高功率固体激光器中激光二极管(LD)面阵抽运场性能,采用几何光学和数理统计分析的方法,建立了基于微透镜阵列匀束的LD面阵抽运耦合系统的数学与物理模型,对微透镜阵列参数与最终耦合输出抽运场参数之间的关系进行分析,明确了微透镜单元F数、微透镜通光单元数以及微透镜阵列空间周期参数的设计原则.经实验测试,优化设计完成的LD面阵抽运耦合系统光场不均匀度为7.9%,耦合效率为90.7%. 相似文献
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Imaging or beam-steering systems employing a periodic array of microlenses or micromirrors suffer from diffraction problems resulting from the destructive interference of the beam segments produced by the array. Simple formulas are derived for beam steering with segmented apertures that do not suffer from diffraction problems because of the introduction of a moving linear phase shifter such as a prescan lens before the periodic structure. The technique substantially increases the resolution of imaging systems that employ microlens arrays or micromirror arrays. Theoretical, numerical, and experimental results demonstrating the high-resolution imaging concept using microlens arrays are presented. 相似文献
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Shih-Wei Yang Chern-Sheng Lin Shu-Hsien Fu Mau-Shiun Yeh Chingfu Tsou Teng-Hsien Lai 《Optics Communications》2012,285(6):1066-1074
This study attempted to develop a detection system for lens sag of the microlens array in real time using an optical automatic inspection framework to link with the computer through a camera. An image processing technique was applied to detect the spherical microlens array, and then, the results were compared.The system light source used laser light and applied CCD to collocate with the microscope array to form an automatic optical detection system for an optical interferometric microscope. It applied the principle of the Fizeau interferometer, illuminated the surface of microlens array, and formed the phase difference required by the interference of two lights through the laser light reflected by the reference plane and the surface of the microlens array, thus, forming an interference fringe.When the sag of the microlens was much longer than the wave length of the detection light source, the fringe would be densely distributed, thus, only a few central fringes were clear in the microscopic image. An image processing method was used to search the center of the interference fringe and a creative algorithm was utilized to obtain the lens sag of the microlens. As proved by the experiment, lens sag of 4 microlens arrays were detected in real time, with a minimum detection error of 0.08 μm, and a maximum detection error of 4 μm (error value 1 ~ 9%), according to different sample processes. This system featured a simple structure and is applicable to non-contact detection and detection of different-sized microlens arrays. 相似文献
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Jinjin Jin Xiaohu Zhang Ping Gao Jun Luo Zuojun Zhang Xiong Li Xiaoliang Ma Mingbo Pu Xiangang Luo 《Annalen der Physik》2018,530(2)
Ascribing to the properties of two dimensional parallel focusing and imaging, low propagation loss, integration and miniaturization, microlens array has been widely used in imaging, optical communication, organic light emitting devices, adaptive optics, photolithography, biomedical and other applications. However, the existing traditional microlens array suffers from difficulty in fabrication, large‐thickness, curved surface, non‐uniformity of light spots, or requirement of additional discrete components to control the microlens. Herein, a planar microlens array is experimentally demonstrated based on the geometric metasurface. The single microlens is composed of space‐variant subwavelength metallic gratings with high polarization conversion efficiency and thus exhibits gradient phase distribution. The focused spot diameter of 22.5 μm with radius of 350 μm, focal length of 1 cm and the light spots intensity uniformity of 0.9885 (standard deviation 0.0115) at the focal plane are obtained. Moreover, the broadband property of microlens array is also confirmed. The novel design strategy for microlens array would facilitate the miniaturization of optical devices and be easily integrated in the optical interconnected devices. 相似文献
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