飞秒激光抽运探测热反射法对金属纳米薄膜超快非平衡传热的研究

随着微电子器件尺寸的减小、 工作频率的提高, 金属薄膜中电子与声子将处于非平衡状态, 这将导致微电子器件的热阻增大. 为准确地对这些微电子器件进行热管理, 电子-声子耦合系数的测量变得越来越重要. 本文采用飞秒激光抽运-探测热 反射法研究了不同厚度的金属纳米薄膜的非平衡传热过程. 通过抛物两步模型对实验数据进行拟合, 在拟合过程中引入电子温度与声子温度对反射率影响的比例关系, 从而优化了拟合结果. 通过对不同厚度的Ni膜与Al膜的电子-声子耦合系数的研究, 表明金属薄膜中的电子-声子耦合系数并不随薄膜厚度的改变发生变化. 实验结果还验证了探测光的反射率同时受到电子温度和声子温度的影响, 并通过数据分析量化了电子温度和声子温度对反射率的影响系数.     

飞秒脉冲激光加热金属薄膜的理论和实验研究

超短脉冲激光加热可应用于研究材料中载能子之间的超快相互作用,同时也广泛应用于超快激光加工.此前人们提出的双温度模型和抛物一步模型都只能用于描述超短脉冲激光加热金属薄膜后热量传递过程的特定片段.基于双温度模型和傅里叶导热定律,提出普适的理论模型可用于完整描述飞秒激光加热金属薄膜/基底时的整个热量传递过程.同时在300 K温度下,采用背面抽运-表面探测瞬态热反射法实验研究了飞秒脉冲激光加热金属薄膜的热量传递过程,理论预测曲线和实验测量结果符合较好,验证了理论模型的正确性.基于此模型测量得到了金薄膜的电子-声子 关键词： 飞秒脉冲激光 电子-声子耦合 界面热导 瞬态热反射     

飞秒激光加热金属薄膜反演问题的求解

飞秒激光加热金属薄膜时会在金属内部形成电子温度和晶格温度不平衡的热输运过程,此过程一般可以用抛物两步模型描述。飞秒激光抽运-探测技术可以对上述过程中金属表面的瞬时电子温度进行测量。通过上述实验结果结合抛物两步模型,反推金属微尺度热物性参数是一个反演问题。本文分析了此反演问题求解的可行性,并采用遗传算法对此反演问题进行了...     

金属纳米薄膜微尺度热输运过程实验研究

本文应用飞秒激光泵浦-探测技术对金属纳米薄膜微尺度能量输运过程进行了研究.在此系统中,我们采用低能量密度泵浦光进行加热,测量了纳米金膜在一个脉宽为140fs的激光脉冲作用后,其非平衡电子温度在几个皮秒内随时间的变化.分别用一步抛物模型、两步抛物模型以及双相滞模型和实验结果进行了对比.结果表明,实验结果和两步抛物模型数值模拟结果吻合良好.     

飞秒激光热反射实验系统测量金属薄膜中的超快速热传递过程

飞秒激光热反射技术已经成为研究不同材料中超快速热传导过程的有效实验方法.实验中采用前表面加热、后表面探测的方法对不同厚度的Au薄膜进行了测量,通过比较表面电子温度可以得到超快速激光加热条件下Au薄膜材料中电子温度振荡的传递速度.结果表明瞬态条件下非平衡态电子是热量的主要载体,根据实验测量值拟合得到的能量传递速度接近于非...     

飞秒激光泵浦-探测热反射系统的建立与调试

建立了用来研究超快传热现象的飞秒激光泵浦-探测热反射系统.利用该系统测量并得到了在140fs(飞秒)超短脉冲激光加热下, 50 nm金膜的非平衡电子温升引起的反射信号随时间的变化曲线.由于加热光单脉冲能量密度只有5×10-3mJ/cm2,估算最高温升在10 K以内,这有效地减小了由丁物性参数随温度变化而引起的洪差.论文介绍了在系统的调试过程中,各种因素对实验结果的影响,并对实验结果及数据处理方法进行了讨论.     

多晶碲化锌薄膜载能子超快动力学实验研究

利用双波长飞秒激光抽运-探测实验方法测量了掺氮多晶ZnTe薄膜在飞秒激光加热情况下载能子超快动力学过程. 采用包含电子弛豫过程和晶格加热过程的理论模型拟合实验数据, 二者符合得很好. 拟合得到10 ps以内影响掺氮多晶ZnTe薄膜表面超快反射率变化的三个弛豫过程的时间常数均为亚皮秒量级. 其中, 正振幅电子弛豫过程是由电子-光子相互作用引起的载流子扩散和带间载流子冷却过程, 负振幅电子弛豫过程是由缺陷造成的光激载能子的俘获效应引起的, 晶格加热过程主要通过电子-声子耦合过程进行的.     

飞秒脉冲激光作用下金属薄膜的热弹性研究

利用双曲-双温两步热传导和热电子崩力模型,考虑到晶格温度与应变速率的耦合效应,得到了用于描述飞秒激光作用下金属薄膜热力效应的超快热弹性模型。以飞秒脉冲激光辐照金属铜薄膜为例,运用具有人工粘性和自适应步长的有限差分算法,对不同能量密度和脉冲宽度条件下薄膜体内温度场和应力场的变化规律进行了数值模拟,对比分析了电子晶格耦合系数对超快加热过程的影响。结果表明,飞秒脉冲激光辐照早期为明显的非平衡加热过程,电子温度迅速升高,而晶格温度的升高却相对较慢;激光辐照早期的热力耦合效应导致薄膜前表面附近的热应力表现为压应力,随着时间的推移,热应力由压应力转变为张应力,为激光加工和激光对抗提供了理论参考。     

Co膜中多次超快瞬态反射突变现象研究

飞秒激光泵浦瞬态热反射技术是研究金属薄膜超快动力学的有效手段,这种技术具有两大突出特点：首先,可以揭示飞秒激光激发的微观电、声子的传输过程是一个非平衡热输运过程。其次,反射率瞬态变化实验中电子运动的超短时间分辨可以用来研究热过程中电子的非平衡相互作用情况。利用磁控溅射真空镀膜技术,在玻璃衬底和硅衬底上蒸镀了不同厚度的Co单层膜,Cr,Co双层膜以及Ag,Co双层膜。利用飞秒激光瞬态反射技术研究了Co膜及其双层膜的瞬态反射率响应。结果表明,在同一厚度的Co膜样品上,施加不同的泵浦光功率时,Co膜内电子的加热时间与泵浦光功率的大小无关,均为0.1344 ps。而对于不同厚度的Co膜,电子的热化时间与薄膜厚度直接相关。此外,发现与以往研究结果不同的是,在泵浦光功率足够大时,玻璃衬底上的Co膜在飞秒激光脉冲泵浦下会出现两次或三次瞬态反射率下降现象,Co膜厚度决定了Co膜内瞬态反射率突变的次数,即Co膜内电子的超快动力学变化次数。     

双波长飞秒激光抽运-探测法测量纳米薄膜及界面热物性

建立了用来研究时间空间微尺度传热现象的双波长飞秒激光抽运-探测热反射系统,与常规的单波长飞秒激光抽运探测系统相比,双波长的光路设计方案可以大幅提高信噪比,并使共线的聚焦光路更易实现,从而提高测量的准确度。建立了与实验测量过程相应的多层膜热传导模型,并实现了多参数拟合,可用于对体材料或薄膜材料的热导率以及界面热导的准确测量。本文采用这种先进的测量方法测量了SiO₂纳米薄膜的热导率及其与Si之间的界面热导。     

ENERGETIC ABOVE-THRESHOLD IONIZATION SPECTRA OF H-ATOM IN INTENSE LASER FIELDS

The above-threshold ionization (ATI) spectra of H-atom in intense laser fields (laser intensity I is up to 10¹⁸W/cm²) are calculated. It is found that the kinetic energy of the ejected electron at the location of the peak of the ATI spectra is about equal to the corresponding ponderomotive potential of the applied laser fields. This result is consistent with that obtained by Wilks et al. and fits the experimental results of the super thermal electron. A possible new mechanism of the super thermal electron generation is proposed.     

Picosecond laser ablation of thin copper films

The ablation process of thin copper films on fused silica by picosecond laser pulses is investigated. The ablation area is characterized using optical and scanning electron microscopy. The single-shot ablation threshold fluence for 40 ps laser pulses at 1053 nm has been determinated toF _thres = 172 mJ/cm². The ablation rate per pulse is measured as a function of intensity in the range of 5 × 10⁹ to 2 × 10¹¹ W/cm² and changes from 80 to 250 nm with increasing intensity. The experimental ablation rate per pulse is compared to heat-flow calculations based on the two-temperature model for ultrafast laser heating. Possible applications of picosecond laser radiation for microstructuring of different materials are discussed.     

Thermo-optic effects affecting the high pump power end pumped solid state lasers: Modeling and analysis

A complete solution of the thermal effect for continuous wave laser diode array fiber coupled high pump power end pumped actively solid state laser is presented. In this paper, the thermal loading resulted from energy transfer up-conversion effect for laser operated under different pulse repetition frequency has been taken into account in the overall thermal effects. The thermal loading transfer the absorbed pump power into non-uniform temperature distribution in the laser rod, and thus results in thermal strain, thermal stress, thermal dispersion of index, and thermally induced diffraction losses. For a practical laser cavity configuration containing the internal optical elements, we use spherical aberration theory to give a better explanation of experimental results via calculating diffraction losses quantitatively. According to analysis of thermal focal length experimental data, the results show that our calculated value of thermal loading under fixed Nd³⁺ doped concentration laser crystal is not a constant but a function of pump power instead. The theoretical predicted curve of thermal focal length based on our model is in good agreement with experimental measurements. At low pump power, the thermal loading is a linear function varying with pump power, but it begins to saturate at pump powers exceeding 6 W. This phenomenon is consistent with our physical intuitions.     

Numerical simulation of ultrafast expansion as the driving mechanism for confined laser ablation with ultra-short laser pulses

Recently, a so-called “directly induced” laser ablation effect has been reported, where an ultra-short laser pulse (660 fs and 1053 nm) irradiates a thin Mo film through a glass substrate, resulting in a “lift-off” of the irradiated layer in form of a thin, solid, cylindrical fragment. This effect provides a new and very energy-efficient selective structuring process for the Mo back electrode in thin-film solar cell production. To understand the underlying physical mechanisms, a 3D axisymmetric finite element model was created and numerically solved. The model is verified by a direct comparison of experimental and numerical results. It includes volume absorption of the laser pulse, heat diffusion in the electron gas and the lattice, thermal expansion of the solid phase and further volume expansion from phase transition to fluid and gas, and finally the mechanical motion of the layer caused by the resulting stress wave and the interaction with the substrate. The simulation revealed that irradiation of the molybdenum layer with an ultra-short pulse causes a rapid acceleration in the direction of the surface normal within a time frame of a hundred picoseconds to a peak velocity of about 100 m/s. The molybdenum layer continues to move as an oscillating membrane, and finally forms a dome after about 100 ns. The calculated strain at the edges of the dome exceeds the tensile stress limit at fluences that initiate the “lift-off” in experimental investigations. In addition, the simulation reveals that the driving mechanism of the “lift-off” is the ultrafast expansion of the interface layer and not the generated gas pressure.     

Neutron yield upon the irradiation of thin TiD<Subscript>2</Subscript> foils with a superintense laser pulse

The yield of neutrons from the thermonuclear-fusion reaction D(d, n)³He induced in a thin skin layer by the interaction of a high-intensity laser pulse of picosecond duration with thin TiD₂ foils is calculated. A multiple ionization of titanium atoms at the leading edge of the laser pulse is considered. The heating of free electrons proceeds via induced inverse bremsstrahlung in elastic electron scattering on multiply charged titanium ions. The electron temperature is calculated. It proves to be about 10 keV at the laser-pulse intensity of 5×10¹⁸ W/cm² at the peak. The neutron yield is estimated at 10⁴ per laser pulse. These results are in qualitative agreement with experimental data.     

Electron–phonon energy relaxation in bismuth excited by ultrashort laser pulse: temperature and fluence dependence

We present analysis of the experiments on excitation of bismuth by ultrafast laser pulses and compare with heating bismuth in equilibrium conditions. The analysis shows that the electron–phonon relaxation time is a strong function of the lattice temperature. We developed a kinetic theory, which predicts well the experimental results. We demonstrate that lattice heating and re-structuring with the temperature-dependent energy exchange rates occurs much faster than what follows from the two-temperature model with constant relaxation factor. The analytic formulae corrected by equilibrium and non-equilibrium data allowed the interpretation of various experiments without controversy. We demonstrate that all observed ultrafast transformation of bismuth are purely thermal in nature, thus excluding the conjectures about non-thermal melting.     

(e, 2e) triple differential cross section for ionization-excitation of helium

Simultaneous ionization and excitation of helium by electron impact is considered in an improved second Born approximation. The wave function of the low energy ejected electron is obtained in the field of residual He⁺ ion in 2s-state. The calculation has been done for the processe ⁻+He→e ⁻+He⁺(2s)+e ⁻ in the coplanar asymmetric geometry with Hartree-Fock wave function of Byron and Joachain for the helium ground state and the results are compared with the absolute experimental data of Dupreet al [J. Phys. B25, 259 (1992)] at ∼ 5.5 keV incident energy. Our results are found to increase the ratio of the recoil peak to binary peak intensity by about 30% over the first Born results and thus to bring it closer to the experimental data.     

Combined continuum-atomistic modeling of ultrashort-pulsed laser irradiation of silicon

Ultrafast thermomechanical responses of silicon thin films due to ultrashort-pulsed laser irradiation were investigated using an atomic-level hybrid method coupling the molecular dynamics and the ultrafast two-step energy transport model. The dynamic reflectivity and absorption were considered, and the effects of laser fluence and pulse duration on the thermomechanical response were studied. It was found that both the carrier temperature and number density rapidly increase to their maximum while the lattice temperature rises at a much slower rate. The ultrafast laser heating could induce a strong stress wave in the film, with the maximum compressive and tensile stress occurring near the front and back surfaces, respectively. For laser pulses of the same duration, the higher the laser fluence is, the higher the carrier temperature and density and lattice temperature are induced. For the same laser fluence, a longer pulse generally produces lower carrier density and temperatures and weaker stress shock strength. However, for the fluence of 0.2 J/cm², the lowest lattice temperature was simulated for a 100-fs pulse compared to the 1-ps and 5-ps pulses, due to the increase of reflectivity by high carrier density. It is also shown that the optical properties as functions of lattice temperature usually employed are not suited for modeling ultrafast laser interactions with silicon materials.     

利用一维原子链模型研究薄膜瞬态结构变化

对于晶格结构响应的仿真与实验有助于我们理解激光激发引起的动态过程.利用一维原子链模型研究了激光加热后由于温度分布不均匀性产生的热应力对晶格的影响,该模型的计算结果与使用超快X射线衍射获得的实验结果相符合.该模型为研究光激发金属以及半导体等材料的超快晶格动力学提供了理论分析基础.     

脉冲激光对类金刚石（DLC）薄膜的热冲击效应研究

强激光辐照红外热像系统时，可造成系统的干扰和破坏，激光的波长不同，对系统的破坏效果也不同.为了保护红外系统窗口以及提高窗口的透过率，红外窗口广泛沉淀类金刚石（DLC）薄膜.当入射的激光波长位于红外系统响应波段外时，激光对系统的破坏首先是激光对DLC薄膜的破坏.以波长为1.06μm的激光为例，研究了脉冲激光对DLC薄膜的损伤机理，建立了DLC薄膜的热冲击效应模型，并通过求解热传导和应力平衡方程，得出了薄膜的温度场和应力场分布.理论分析表明，热应力破坏在脉冲强激光对DLC膜的损伤机理中占主导地位.当 辐照能量密度为E₀=100mJ·cm^-2时，在薄膜表面距光斑中心约 40μm区域内的压应 力明显超出其断裂强度，将造成膜层的剥离、脱落.理论分析与实验结果基本相符，表明建 立热冲击效应模型的正确性. 关键词： 激光辐照 类金刚石（DLC）薄膜 热冲击效应