p种子层对单室制备微晶硅电池性能的影响

采用单室等离子体化学气相沉积技术沉积pin微晶硅电池时,硼污染降低了本征材料的晶化率并影响了p/i界面特性.针对该问题文中采用p种子层技术,即在沉积p层后采取高的H₂/SiH₄比率及适当的功率又沉积一个薄的p层,初步研究了p种子层对微晶硅i层纵向均匀性及电池性能的影响.实验结果表明：采用此方法能改善p/i界面特性,提高本征材料纵向结构的均匀性并降低硼对本征层的污染,有效地提高单结微晶硅电池的性能.最后,通过优化沉积条件,制备得到光电转换效率为881%（1 cm 关键词： 单室 甚高频等离子体增强化学气相沉积 微晶硅太阳电池 p种子层     

Three dimensional a-Si:H thin-film solar cells with silver nano-rod back electrodes

We present three dimensional (3-D) amorphous silicon (a-Si:H) thin-film solar cells with silver nano-rods as back electrodes, which are fabricated by low cost nano imprint lithography (NIL). After conformal deposition of thin metal and semiconductor layers, we can achieve a dome-shaped geometry, which is shown to be effective in reducing the reflectance at the front surface due to the graded refractive index effect. In addition, the enhancement of the diffused reflectance over a broad wavelength in this dome-shaped geometry provides light trapping due to the increase in the effective light propagation length. Using this 3-D solar cell, we achieved 54% increase in short circuit current density and 45% increase in the conversion efficiency compared to the control cells with flat Ag surfaces. This 3-D structure can be also used for improving light harvesting in various photovoltaic devices regardless of materials and structures.     

硅异质结太阳电池的物理机制和优化设计

硅异质结太阳电池是一种由非晶硅薄膜层沉积于晶硅吸收层构成的高效低成本的光伏器件,是一种具有大面积规模化生产潜力的光伏产品.异质结界面钝化品质、发射极的掺杂浓度和厚度以及透明导电层的功函数是影响硅异质结太阳电池性能的主要因素.针对这些影响因素已经有大量的研究工作在全世界范围内展开,并且有诸多研究小组提出了器件效率限制因素背后的物理机制.洞悉物理机制可为今后优化设计高性能的器件提供准则.因此及时总结硅异质结太阳电池的物理机制和优化设计非常必要.本文主要讨论了晶硅表面钝化、发射极掺杂层和透明导电层之间的功函数失配以及由此形成的肖特基势垒;讨论了屏蔽由功函数失配引起的能带弯曲所需的特征长度,即屏蔽长度;介绍了硅异质结太阳电池优化设计的数值模拟和实践;总结了硅异质结太阳电池的研究现状和发展前景.     

钙钛矿/硅叠层太阳电池中平面a-Si:H/c-Si异质结底电池的钝化优化及性能提高

最近,旋涂法制备的钙钛矿/平面硅异质结高效叠层太阳电池引起人们广泛关注,主要原因是相比于绒面硅衬底制备的钙钛矿/硅叠层太阳电池,其制备工艺简单、制备成本低且效率高.对于平面a-Si:H/c-Si异质结电池, a-Si:H/c-Si界面的良好钝化是获得高转换效率的关键,进而决定了钙钛矿/硅异质结叠层太阳电池的性能.本文主要从硅片表面处理、a-Si:H钝化层和P型发射极等方面展开研究,通过对硅片表面的氢氟酸(HF)浸泡时间和氢等离子体预处理气体流量、a-Si:H钝化层沉积参数、钝化层与P型发射极(I/P)界面富氢等离子体处理的综合调控,获得了相应的优化工艺参数.对比研究了p-a-Si:H和p-nc-Si:H两种缓冲层材料对I/P界面的影响,其中高电导、宽带隙的p-nc-Si:H缓冲层既能够降低I/P界面的缺陷态,又可以增强P型发射层的暗电导率,提高了前表面场效应钝化效果.通过上述优化,制备出最佳的P-type emitter layer/aSi:H(i)/c-Si/a-Si:H(i)/N-type layer (inip)结构样品的少子寿命与implied-Voc分别达到2855μs和709 mV,表现出良好的钝化效果.应用于平面a-Si:H/c-Si异质结太阳电池,转换效率达到18.76%,其中开路电压达到681.5 mV,相对于未优化的电池提升了34.3 mV.将上述平面a-Si:H/c-Si异质结太阳电池作为底电池,对应的钙钛矿/硅异质结叠层太阳电池的开路电压达到1780 mV,转换效率达到21.24%,证明了上述工艺优化能够有效地改善叠层太阳电池中的硅异质结底电池的钝化及电池性能.     

Influence of the semiconductor/metal rear contact on the performance of n(a-Si:H)/i(a-Si:H)/p(c-Si) heterojunction solar cells

The aim of this work is to analyze on the results of using of Al/Ag layer as a rear contact to improve the performance of heterojunction silicon solar cells. An analytical method is presented to extract the physical parameters of the equivalent circuit. These parameters are extracted to simulate the I(V) characteristic of heterojunction silicon solar cells, with Al and Al/Ag rear-metal contact. A good agreement between our analytical method and experimental measurement of electrical characteristics is obtained which show clearly how the Al/Ag rear contact can improve the characteristics of silicon solar cells. The influence of the rear-metal contact on the performance of the c-Si(p)-based bifacial HIT solar cell, i.e., the ZnO/Al/a-Si:H(n)/a-Si:H(i)/c-Si(p)/metal solar cell, is investigated in detail by computer simulation using the AFORS-HET software. Accordingly, the design optimization of the bifacial HIT solar cells on c-Si(p) substrates is provided. These simulation show an optimal conversion efficiency of 23% when the rear-metal contact is perfectly ohmic.     

单室沉积p-i-n型微晶硅薄膜太阳电池性能优化的研究

采用原位的氢等离子体处理技术和微晶覆盖技术来降低单室沉积p-i-n型微晶硅薄膜太阳电池中的硼污染问题.通过对不同处理技术所制备电池的电流密度-电压和量子效率测试结果的比较发现,一定的氢处理时间和合适的覆盖层技术都可以在一定程度上提高电池的性能,但每种方法的影响程度各异、文中对此异同进行了分析.通过对电池陷光结构和氢等离子体处理时间的优化,在单室中获得了效率为6.39%的单结微晶硅太阳电池.     

高压射频等离子体增强化学气相沉积制备高效率硅薄膜电池的若干关键问题研究

报道了采用高压射频等离子体增强化学气相沉积(RF-PECVD) 制备高效率单结微晶硅电池和非晶硅/微晶硅叠层电池时几个关键问题的研究结果, 主要包括: 1)器件质量级本征微晶硅材料工艺窗口的确定及其结构和光电性能表征; 2)孵化层的形成机理以及减小孵化层的有效方法; 3)氢稀释调制技术对本征层晶化率分布及其对提高电池性能的作用; 4)高电导、高晶化率的微晶硅p型窗口层材料的获得, 及其对减小微晶硅电池p/i界面孵化层厚度和提高电池性能的作用等. 在解决上述问题的基础上, 采用高压RF-PECVD制备的单结微晶硅电池效率达8.16%, 非晶硅/微晶硅叠层电池效率11.61%.     

太阳电池用本征微晶硅材料的制备及其结构研究

采用VHF-PECVD技术制备了系列不同硅烷浓度和反应气压的微晶硅薄膜.运用拉曼散射光谱和 x射线衍射对制备的材料进行了结构分析.在实验研究的范围内，制备材料的晶化程度随硅烷 浓度的增加而降低.XRD的测试结果表明：制备的微晶硅材料均体现了(220)方向择优.应用在 电池的有源层中，制备出了效率达7.1%的单结微晶硅太阳电池，电池的结构是glass/ZnO/p( μc-Si:H)/i(μc-Si:H)/n(a-Si:H/Al)，没有ZnO背反射电极，有源层的厚度仅为1.2μm. 关键词： 本征微晶硅薄膜 拉曼光谱 x射线衍射     

Application of millimeter-sized polymer cylindrical lens array concentrators in solar cells

A unique method is proposed to encapsulate solar cells and improve their power conversion efficiency by using a millimeter-sized cylindrical lens array concentrator. Millimeter-sized epoxy resin polymer(ERP) cylindrical lens array concentrators are fabricated by the soft imprint technique based on polydimethylsiloxane stamps. The photovoltaic measurements show that millimeter-sized ERP cylindrical lens array concentrators can considerably improve the power conversion efficiency of silicon solar cells. The validity of the proposed method is proved by the coupled optical and electrical simulations. The designed solar cell devices with the advantages of high-efficiency and convenient cleaning are very useful in practical applications.     

一种新方法制备硅/聚(3, 4-乙撑二氧噻吩)核/壳纳米线阵列杂化太阳能电池

采用气相聚合法制备了有机/无机杂化的硅/聚3, 4-乙撑二氧噻吩核/壳纳米线阵列(SiNWs/PEDOT)太阳能电池. 相对平面结构Si/PEDOT太阳能电池, SiNWs/PEDOT太阳能电池的能量转换效率提升了7倍, 达到3.23%.对比分析反射光谱、I-V曲线及外量子效率的实验结果, 发现SiNWs/PEDOT太阳能电池性能改进的主要原因可归结为: 气相聚合法能够有效地制备出SiNWs/PEDOT电池的核/壳纳米线阵列结构, 使得器件具有高光捕获、高比结面积和高电荷收集效率. 关键词： Si/PEDOT核/壳纳米线结构 太阳能电池 气相聚合     

聚合物和小分子叠层结构有机太阳电池研究

旋涂法和真空蒸发结合制备了MEH-PPV:PCBM体异质结和CuPc/C60有机小分子叠层有机太阳电池. 测试结果表明:MEH-PPV:PCBM有源层和Ag中间层分别为50 nm和0.5 nm时,与同等厚度有源层的MEH-PPV:PCBM体异质结器件和CuPc/C60小分子器件相比,叠层器件太阳能转换效率大大提高,达到了1.86%. 关键词： 聚(2-甲氧基,5-(2-乙基-乙氧基)-对苯乙炔) 铜酞菁 叠层结构 太阳电池     

Effect of emitter layer doping concentration on the performance of silicon thin film heterojunction solar cell

A novel type of n/i/i/p heterojunction solar cell with a-Si:H(15 nm)/a-Si:H(10 nm)/ epitaxial c-Si(47 μm)/epitaxial c-Si(3 μm) structure is fabricated by using the layer transfer technique, and the emitter layer is deposited by hot-wire chemical vapour deposition. The effect of the doping concentration of emitter layer S_d (S_d=PH₃/(PH₃+SiH₄+H₂)) on the performance of the solar cell is studied by means of current density-voltage and external quantum efficiency. The results show that the conversion efficiency of the solar cell first increases to a maximum value and then decreases with S_d increasing from 0.1% to 0.4%. The best performance of the solar cell is obtained at S_d = 0.2% with an open circuit voltage of 534 mV, a short circuit current density of 23.35 mA/cm², a fill factor of 63.3%, and a conversion efficiency of 7.9%.     

单室沉积高效非晶硅/微晶硅叠层太阳电池的研究

采用甚高频等离子体增强化学气相沉积技术,在前期单室沉积的微晶硅薄膜太阳电池和非晶硅/微晶硅叠层太阳电池研究的基础上,通过对微晶硅底电池本征层硅烷浓度的优化,获得了初始效率达到11.02%(电池面积1.0 cm²)的非晶硅/微晶硅叠层太阳电池.同时,100 cm²的非晶硅/微晶硅叠层太阳电池的组件效率也达到了9.04%. 关键词： 非晶硅/微晶硅叠层电池 单室 甚高频     

Transparent conductive oxide layer with monolayer closed-pack Al-doped ZnO spheres and their application to a-Si thin-film solar cells

We report a new (to the best of our knowledge) transparent conductive oxide (TCO) layer with a monolayer of closed-pack Al-doped ZnO (AZO) spheres partly embedded in an AZO thin film. The average transmittance and haze ratio in the wavelength range of 380-800 nm achieves 65% and 55%, respectively, when AZO spheres with a diameter of 500 nm are embedded in a thickness of 240 nm AZO thin films. The a-Si thin-film solar cell with a regular p-i-n TCO structure is demonstrated. Under air mass 1.5 global illumination, conversion efficiencies of 5.6%, a fill factor of 0.55, V(oc) of 0.81 V, and a J(sc) of 2.44 mA/cm2 are obtained. The Letter helps us to open up potential applications of a new TCO in advanced solar cells and light-emitting diodes.     

Fabrication of large-grain polycrystalline silicon for solar cells

The rapid recrystallization of a-Si films utilizing excimer laser crystallization (ELC) is investigated. The melt duration of liquid silicon (liquid Si) is measured by in-situ time-resolved optical measurements during ELC. The grain size of crystallized poly-Si films are characterized by FE-SEM. The substrate temperature as a function of the longest melt duration of liquid Si for different Si film thicknesses are presented. In-situ timeresolved optical measurements reveal that the longest melt duration of 400-nm-thick a-Si thin films at a substrate temperature of 500 °C is 1714 ns. The diameter of the disk grain as large as 4.7 μm is produced by ELC, which can be applied to solar cells with a high conversion efficiency and reliability.     

An improved design approach for thin film solar cells

In this paper an improved design for thin film solar cells is proposed to enhance conversion efficiency. This proposed structure includes two pairs of additional contact to the reversed bias of absorber and buffer layers, directly. The purpose of additional electrodes is to control the carrier distribution in the active region of device. This idea has been implemented on the fabricated Copper indium gallium selenide solar cell with the record efficiency of 22%. The simulations show an improvement of 2% in the conversion efficiency is obtained by direct application of reverse biasing on the absorber and buffer layer. The increase of short circuit current more than 3 mA/cm² is responsible for the improved performance. The open circuit voltage and fill factor of cell can also be increased by the controlling reverse bias.     

Micromorph tandem solar cells: optimization of the microcrystalline silicon bottom cell in a single chamber system

We report on the development of single chamber deposition of microcrystalline and micromorph tandem solar cells directly onto low-cost glass substrates. The cells have pin single-junction or pin/pin double-junction structures on glass substrates coated with a transparent conductive oxide layer such as SnO₂ or ZnO. By controlling boron and phosphorus contaminations, a single-junction microcrystalline silicon cell with a conversion efficiency of 7.47% is achieved with an i-layer thickness of 1.2 μm. In tandem devices, by thickness optimization of the microcrystalline silicon bottom solar cell, we obtained an initial conversion efficiency of 9.91% with an aluminum (Al) back reflector without a dielectric layer. In order to enhance the performance of the tandem solar cells, an improved light trapping structure with a ZnO/Al back reflector is used. As a result, a tandem solar cell with 11.04% of initial conversion efficiency has been obtained.     

Effect of hydrogen on surface texturing and crystallization of a-Si:H thin film irradiated by excimer laser

Hydrogenated amorphous silicon (a-Si:H) thin films have been considered for use in solar cell applications because of their significantly reduced cost compared to crystalline bulk silicon. However, their overall efficiency and stability are lower than that of their bulk crystalline counterpart. Limited work has been performed on simultaneously solving the efficiency and stability issues of a-Si:H. Previous work has shown that surface texturing and crystallization on a-Si:H thin film can be achieved through a single-step laser processing, which can potentially alleviate the disadvantages of a-Si:H in solar cell applications. In this study, hydrogenated and dehydrogenated amorphous silicon thin films deposited on glass substrates were irradiated by KrF excimer laser pulses and the effect of hydrogen on surface morphologies and microstructures is discussed. Sharp spikes are focused only on hydrogenated films, and the large-grained and fine-grained regions caused by two crystallization processes are also induced by presence of hydrogen. Enhanced light absorptance is observed due to light trapping based on surface geometry changes of a-Si:H films, while the formation of a mixture of nanocrystalline silicon and original amorphous silicon after crystallization suggests that the overall material stability can potentially improve. The relationship between crystallinity, fluence and number of pulses is also investigated. Furthermore, a step-by-step crystallization process is introduced to prevent the hydrogen from diffusing out in order to reduce the defect density, and the relationship between residue hydrogen concentration, fluence and step width is discussed. Finally, the combined effects show that the single-step process of surface texturing and step-by-step crystallization induced by excimer laser processing are promising for a-Si:H thin-film solar cell applications.     

一个非晶硅薄膜太阳能电池制备用激光刻线系统

 非晶硅薄膜太阳能电池制备过程中的激光刻线工艺要求刻线宽度在30 μm～50 μm之间,死区范围小于300 μm,刻线深度符合工艺要求。这不仅要求激光器具有较高的光束质量,而且要求光学系统具有较高的成像质量和较宽的焦深。设计了单激光器四分光路的激光刻线系统。采用设计的激光刻线装置,在1 400 mm×1 100 mm×3.2 mm玻璃基板上进行刻线试验,分别得到刻线P1,P2,P3的线宽为35 μm,50 μm和45 μm,死区范围（P1至P3的距离）为287 μm,最终深度分别为0.98 μm,0.24 μm和0.58 μm,刻线宽度和深度均符合薄膜太阳能电池制备工艺要求。     

Deposition of device quality amorphous silicon and solar cell from argon dilution of silane

In our present study hydrogenated amorphous silicon (a-Si:H) thin films and solar cells have been prepared in a conventional single chamber rf-PECVD unit from silane–argon mixture by varying radio frequency (rf) power densities from 6 mW/cm² to 50 mW/cm². By optimizing the properties of the intrinsic material we have chosen a material which is deposited at 6 mW/cm² rf power density, 0.2 Torr pressure, 175 ^oC substrate temperature and by 97% argon dilution. For this material minority carriers (holes) diffusion length (L_d) measured in the as deposited state is 180 nm and it degrades by 15% after light soaking. This high L_d value indicates that the material is of device quality. We have fabricated a single junction solar cell having the structure p-a-SiC:H/i-a-Si:H/n-a-Si:H without optimizing the doped layers. This set exhibits a mean open circuit voltage of 0.8 V and conversion efficiency of 7.7%. After light soaking conversion efficiency decreases by 15% which demonstrates that it is possible to deposit device grade material and solar cells from silane–argon mixture.