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An atomic-level controlled etching(ACE)technology is invstigated for the fabrication of recessed gate AlGaN/GaN high-electron-mobility transistors(HEMTs)with high power added efficiency.We compare the recessed gate HEMTs with conventional etching(CE)based chlorine,Cl2-only ACE and BCl3/Cl2ACE,respectively.The mixed radicals of BCl3/Cl2were used as the active reactants in the step of chemical modification.For ensuring precise and controllable etching depth and low etching damage,the kinetic energy of argon ions was accurately controlled.These argon ions were used precisely to remove the chemical modified surface atomic layer.Compared to the HEMTs with CE,the characteristics of devices fabricated by ACE are significantly improved,which benefits from significant reduction of etching damage.For BCl3/Cl2ACE recessed HEMTs,the load pull test at 17 GHz shows a high power added efficiency(PAE)of 59.8%with an output power density of 1.6 W/mm at Vd=10 V,and a peak PAE of 44.8%with an output power density of 3.2 W/mm at Vd=20 V in a continuous-wave mode. 相似文献
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A statistical model for the effect of casing treatment recesses on compressor rotor performance 总被引:1,自引:0,他引:1
The tip clearance between a compressor’s rotating blades and its casing has an unfavorable influence on performance. By applying an abradable coating (insert) to the casing over the rotating blades, this tip clearance can be reduced to practically zero. A rather frequent variant is for the rotor blade tips to carve an entire annular recess in this coating. Rectangular recesses of various configurations have been tested in several different researches. The results of these investigations are processed using the Group Method of Data Handling. A statistical model is developed that predicts the influence of rectangular recesses on a compressor stage’s efficiency and stable operating (flow) range. The model takes into account the six principal geometric parameters of a rectangular recess, as well as the Lieblein rotor diffusion factor. Analysis of the derived model has also determined which of these parameters are the most influential. Rectangular entire annular recesses are one of the simplest and most progressive types of casing treatment, and this paper concludes with an overview of existing research that supports this claim. 相似文献
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Impact of gate offset in gate recess on DC and RF performance of InAlAs/InGaAs InP-based HEMTs 下载免费PDF全文
Shurui Cao 《中国物理 B》2022,31(5):58502-058502
A set of 100-nm gate-length InP-based high electron mobility transistors (HEMTs) were designed and fabricated with different gate offsets in gate recess. A novel technology was proposed for independent definition of gate recess and T-shaped gate by electron beam lithography. DC and RF measurement was conducted. With the gate offset varying from drain side to source side, the maximum drain current (Ids,max) and transconductance (gm,max) increased. In the meantime, fT decreased while fmax increased, and the highest fmax of 1096 GHz was obtained. It can be explained by the increase of gate-source capacitance and the decrease of gate-drain capacitance and source resistance. Output conductance was also suppressed by gate offset toward source side. This provides simple and flexible device parameter selection for HEMTs of different usages. 相似文献
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