三明治结构微机械静电伺服加速度计稳定性研究

对影响微加速度计稳定性的主要因素（外置偏压和横向加速度干扰）进行了详细分析，给出了最小临界偏压和最大可随横向加速度的计算公式，提出一种具有良好稳定性的四梁中心悬臂式结构。根据Matlab仿真结果，在大量程微加速度计典型结构参数下，惯性敏感单元可承受的最大横向加速度达2000g以上，远远满足实际需求。     

Interactions of DNA with graphene and sensing applications of graphene field-effect transistor devices: A review

Graphene field-effect transistors (GFET) have emerged as powerful detection platforms enabled by the advent of chemical vapor deposition (CVD) production of the unique atomically thin 2D material on a large scale. DNA aptamers, short target-specific oligonucleotides, are excellent sensor moieties for GFETs due to their strong affinity to graphene, relatively short chain-length, selectivity, and a high degree of analyte variability. However, the interaction between DNA and graphene is not fully understood, leading to questions about the structure of surface-bound DNA, including the morphology of DNA nanostructures and the nature of the electronic response seen from analyte binding. This review critically evaluates recent insights into the nature of the DNA graphene interaction and its affect on sensor viability for DNA, small molecules, and proteins with respect to previously established sensing methods. We first discuss the sorption of DNA to graphene to introduce the interactions and forces acting in DNA based GFET devices and how these forces can potentially affect the performance of increasingly popular DNA aptamers and even future DNA nanostructures as sensor substrates. Next, we discuss the novel use of GFETs to detect DNA and the underlying electronic phenomena that are typically used as benchmarks for characterizing the analyte response of these devices. Finally, we address the use of DNA aptamers to increase the selectivity of GFET sensors for small molecules and proteins and compare them with other, state of the art, detection methods.     

一种解耦的微机械陀螺研究

设计了一种解耦的微机械陀螺，它能够极大地降低正交误差信号的影响，从而大大地提高佗螺的性能；制造了一批样机，进行了初步的驱动特性和敏感特性的实验研究。研制结果表明，陀螺性能符合设计要求。     

Stress wave interference effects during fracture of silicon micromachined specimens

We report on unique measurements of multiple microsecond-duration arrest periods during the propagation of high speed (>1 km s⁻¹) cracks in micromachined single-crystal silicon specimens. These events were recorded electronically and in physical features remaining on the fracture plane. Using time-of-flight calculations, we have determined that these arrest patterns are due to the interference of boundary-reflected stress waves with the propagating crack tip. The specimen size, the measurement method, and the low acoustic attenuation in cyrstalline silicon facilitated the observation of these phenomena.     

微机械框架陀螺仪的动力学分析

本文根据欧拉动力学方程导出微机械框架陀螺仪的动力学方程，给出陀螺仪的运动规律，并探讨惯性质量对测量灵敏度的影响。     

微机械陀螺的发展现状

随着对微电子机械系统(MEMS)的深入研究和取得的进展,属于MEMS研究内容之一的微机械陀螺,在汽车工业需求的推动下,已经成为过去几十年内广泛研究和发展的主题.微机械陀螺与传统机械式陀螺、固体陀螺、光学陀螺等相比,具有成本低、尺寸小、重量轻、可靠性高等优点,其精度正不断得到提高,应用领域也随之不断扩大.本文首先简要介绍了微机械陀螺的定义及特征、性能指标、工作原理、分类以及加工技术,随后对已出现的不同类型微机械陀螺的结构、加工方式、工作原理以及性能进行了综述,最后对微机械陀螺的商业化现状以及发展趋势进行了展望.      

振动轮式微机械陀螺频率配置和气压选择

推导了振动轮式微机械陀螺的输出信号与输入角速度的幅频、相频关系,讨论了在不同的频率配置和品质因数下陀螺的灵敏度、带宽和零位稳定性。陀螺振动频率应设计在2kHz左右,检测轴自然频率比驱动轴高一个陀螺频带宽度。根据实测陀螺振动品质因数与气压的关系曲线,振动轮式微机械陀螺合适的工作气压是100Pa-1000Pa。     

微型自适应光学系统的波前重构算法

基于测量所得的 37通道微型机械薄膜变形镜的影响函数矩阵和微型自适应光学系统 ,给出模式法波前重构与补偿的微型变形镜的控制电压 ,模拟计算和微型自适应光学系统的实验结果说明所得结果是正确可行的     

实时小波滤波方法在硅微陀螺仪中的应用研究

采用实时小波滤波技术构建硅微陀螺仪数字化平台，对快速的MaIfat算法选用何种小波基，是否采用软硬阈值处理以及选用何种尺度和采样点数进行深入分析。考虑到滤波效果即陀螺仪输出信号滤波前后A1lan方差改进情况和硬件处理的实时性，通过比较最终选择3尺度16点软闽值db2小波Mallat快速算法。仿真计算和实验结果表明该滤波方法对改善微机械陀螺仪的零偏稳定性有一定的实用价值。     

三轴硅微静电加速度计的实验研究

静电加速度计依靠可控静电力将敏感质量无接触地悬浮在电极腔内,在空间微重力环境下通过降低带宽和量程可以实现极高的分辨率.设计了一种采用玻璃硅-玻璃“三明治”结构、环形敏感质量、体硅加工工艺的三轴硅微静电加速度计,对加速度计的力/力矩平衡回路进行了分析.采用基于DSP的数字控制器,实现了环形敏感质量的五自由度稳定悬浮,在大...