微机械陀螺的发展现状

随着对微电子机械系统(MEMS)的深入研究和取得的进展,属于MEMS研究内容之一的微机械陀螺,在汽车工业需求的推动下,已经成为过去几十年内广泛研究和发展的主题.微机械陀螺与传统机械式陀螺、固体陀螺、光学陀螺等相比,具有成本低、尺寸小、重量轻、可靠性高等优点,其精度正不断得到提高,应用领域也随之不断扩大.本文首先简要介绍了微机械陀螺的定义及特征、性能指标、工作原理、分类以及加工技术,随后对已出现的不同类型微机械陀螺的结构、加工方式、工作原理以及性能进行了综述,最后对微机械陀螺的商业化现状以及发展趋势进行了展望.

THE STATE OF THE ART OF MICROMACHINED GYROSCOPES

Along with the research and rapid development of Micro Electro-Mechanical Systems (MEMS), micromachined gyroscope as a part of MEMS driven by automobile industry has become a major focus of wide research and development in the past decades. Comparing with the conventional mechanical gyroscope, the solid-state gyroscope and optical gyroscope, the micromachined gyroscope has the advantages of low cost, small size, low weight and high reliability. With its performance improved further, the micromachined gyroscope can be applied in more extensive fields. In this paper, following a brief introduction of its definition, properties, performance indices, operation principles, classification and processes, various micromachined gyroscopes are discussed with respect to their structure, processes, operation principles and performance. Finally the current status of its commercialization and the trend of its developments in future are presented.