膜片上薄膜体声波谐振器型微加速度计

针对"FBAR(薄膜体声波谐振器)-梁"结构悬臂梁厚度不足、"嵌入式FBAR"结构微加工工艺复杂的缺点,提出了新型"膜片上FBAR(FBAR-on-diaphragm)"结构的微加速度计。其弹性膜片由氧化硅/氮化硅复合薄膜构成,既便于实现与硅微检测质量和FBAR的IC兼容集成加工,也利于改善微加速度计的灵敏度和温度稳定性。对由氧化硅/氮化硅双层复合膜片-硅检测质量惯性力敏结构和氮化铝FBAR检测元件集成的膜片上FBAR型微加速度计进行了初步的性能分析,验证了该结构的可行性。通过有限元模态分析和静力学仿真得出惯性加速度作用下膜片上FBAR结构的固有频率和弹性膜片上的应力分布;选取计算所得的最大应力作为FBAR中压电薄膜的应力载荷,结合依据第一性原理计算得到的纤锌矿氮化铝的弹性系数-应力关系,粗略估计了惯性加速度作用下氮化铝薄膜弹性系数的最大变化量;采用射频仿真软件,通过改变惯性加速度作用下弹性常数所对应的纵波声速,对比空载和不同惯性加速度作用下加速度计的谐振频率,得到加速度计的频率偏移特性和灵敏度。进一步分析仿真结果还发现:氧化硅/氮化硅膜片的一阶固有频率与高阶频率相隔较远,交叉耦合小;惯性加速度作用下,谐振频率向高频偏移,灵敏度约为数k Hz/g,其加速度-谐振频率偏移特性曲线具有良好的线性。     

三轴压阻微加速度计的结构力学分析

为了提高三轴加速度计机械精度和加工过程中硅片的一致性,设计了基于SOI的单质量块四边八梁结构的三轴加速度计。通过连接扩散在梁上的压敏电阻构成得惠斯通电桥检测三个方向的加速度信号。电桥设计为开环形式,并给出三个方向的电桥输出。结合材料力学和振动力学中的相关理论,建立了结构的数学模型,并对其进行了系统的力学分析,从而得出结构参数对加速度计的一阶固有频率、灵敏度等性能的影响。利用有限元ANSYS仿真软件对结构模型进行了静态和模态分析,验证了力学分析的正确性。最后设计了八张版图及一套可行的工艺流程并加工出加速度计裸片。该微加速度计可同时检测三维加速度矢量,且电桥和结构的设计均较好的抑制了横向效应。     

梳齿式微机械加速度计静态模型的辨识

讨论了一种梳齿式微机械加速度计的静态模型。从加的静态输入入手，求得加速度计平衡的输出关系式，还讨论了敏感输入轴垂直的横向加速度输入分量对输出的影响。在理论分析的基础上，根据离心机试验结果求得加速度计的静态模型。     

六轴硅微静电加速度计的悬浮回路设计

传统的静电加速度计在空间微弱加速度测量方面可以获得极高的分辨率。提出了一种采用静电悬浮、可实现六轴加速度测量的微静电加速度计。敏感组合件采用玻璃-硅-玻璃三层键合结构、体硅加工工艺;检测质量采用"回"字形结构,以提高加速度计的径向量程和刚度。利用有限元软件分析了大气环境下检验质量的气模阻尼特性,对六自由度静电悬浮回路进行了建模与分析,提出了实现六轴加速度检测的控制方案。给出了静电悬浮回路的仿真结果,评估了六轴加速度计的性能。     

静电伺服微加速度计的量程设计

详细推导了静电伺服加速度计在定极板上施加直流偏压、交流驱动电压，动极板上有反馈直流电压和交流检测电压的情况下，检测质量(动极板)受到的静电力。通过对静电力的分析，得出静电伺服彻。速度计的量程除了受系统能提供的最大静电力限制外，还需满足电刚度小于与机械刚度的条件，该电刚度是极板上所有的直流电压、交流电压产生的电刚度之和。离心实验证明，利用该原则设计的“叉指”结构静电伺服微加速度计的量程达到了设计值。该设计原则可以为此类加速度计的设计提供参考。     

硅微谐振式加速度计结构设计与仿真

硅微谐振式加速度计以易于检测的准数字信号作为输出,是微传感器的一个研究热点.提出一种基于一级微杠杆放大机构和DETF谐振器的硅微谐振式加速度计的结构设计,在分析工作机理以及误差来源的基础上阐述硅微谐振式加速度计的设计要点;结合现有加工工艺水平完成整体结构设计;运用MATLAB分析结构参数对性能的影响并对参数进行优化设计;运用ANSYS对加速度计整体结构进行仿真验证.所设计加速度计的谐振频率约29 kHz,标度因数为95 Hz/g,量程为±50g,其差分输出频率的线性度为0.099%.经研究表明,在加速度计的结构设计中,量程范围要与谐振嚣原理性误差协调考虑;谐振器振幅不宜过大;在现有加工工艺条件下,谐振器振梁的宽度产生的加工误差最大,对谐振器的性能影响最大.     

硅微谐振加速度计的温度特性

硅微谐振加速度计以其小体积、低成本和高精度的频率信号输出,成为硅微惯性传感器研制的热点之一.温度特性是影响硅微谐振加速度计精度水平的重要因素.在分析硅微谐振加速度计工作机理的基础上,从结构设计方法、工艺流程加工和闭环控制回路方面分析了温度对零位和标度因数的影响因素,同时给出了相应解决措施.研制的硅微谐振加速度计基频约为17 kHz,标度因数约220 Hz/g,在-40~+70℃范围内,谐振频率的温度系数为-71.5×10-6/℃,标度因数的温度系数为-610×10-6/℃,样机在常温下谐振频率的相对稳定性为0.313×10-6,1.5 h 零偏稳定性达到42.5μg.     

BK14-2型压电石英加速度计的研究

本文利用压电石英晶体谐振器进行加速度计的研究，采用石英晶体谐振器作为测量惯性力的敏感元件，利用石英晶体谐振器的压电效应，通过敏感惯性力进而实现对线加速度的测量。结果表明该加速度计具有良好的线性和稳定性，测量范围±４０ｇ，线性度优于１０－４，灵敏度大于４００Ｈｚ／ｇ。     

静电悬浮转子微陀螺及其关键技术

静电悬浮转子微陀螺具有比振动式微陀螺精度高的潜在优点，并可同时测量二轴角速度和三轴线加速度。介绍了静电悬浮转子微陀螺的研究现状。对该静电悬浮转子微F1螺／加速度计的工作原理、特点进行了分析，并对实现高精度静电悬浮转子微陀螺／加速度计晌关键技术如静电稳定悬浮、微位移检测控制、静电恒速旋转驱动、微机械加工和真空封装技术等进行了探讨。指出这一新颖MEMS陀螺是高精度多轴集成微惯性传感器技术发展的一个重要方向，具有广阔的应用前号和较大的发展潜力。     

基于双离心机的正弦加速度数学模型的建立

基于双离心机的线加速度计动态校准是加速度计动态校准的一种新方法,该校准方法的核心是在被校加速度计检测质量的质心处产生标准的动态加速度,如正弦加速度。文中通过推导建立了基于双离心机的正弦加速度数学模型,为线加速度计的动态校准提供了理论依据。介绍了双离心机的组成原理,分析了被校加速度计检测质量质心处绝对加速度的来源,并采用矢量合成法对相对加速度、牵连加速度和哥氏加速度进行合成得出了绝对加速度的表达式,建立了基于双离心机的正弦加速度数学模型。文中还对基于双离心机的线加速度计动态校准装置和线振动台进行比较,指出了前者在线加速度计动态校准中的优点。     

Prediction of the drag reduction effect of pulsating pipe flow based on machine learning

Prediction of drag reduction effect caused by pulsating pipe flows is examined using machine learning. First, a large set of flow field data is obtained experimentally by measuring turbulent pipe flows with various pulsation patterns. Consequently, more than 7000 waveforms are applied, obtaining a maximum drag reduction rate and maximum energy saving rate of 38.6% and 31.4%, respectively. The results indicate that the pulsating flow effect can be characterized by the pulsation period and pressure gradient during acceleration and deceleration. Subsequently, two machine learning models are tested to predict the drag reduction rate. The results confirm that the machine learning model developed for predicting the time variation of the flow velocity and differential pressure with respect to the pump voltage can accurately predict the nonlinearity of pressure gradients. Therefore, using this model, the drag reduction effect can be estimated with high accuracy.     

On the Plastic Wave Propagation Along the Specimen Length in SHPB Test

To observe the plastic wave propagation, an experimental setup is designed with a SHPB facility and a high speed digital camera. Two types of OFHC copper were selected as specimen materials: in the cold work condition and after total annealing, which represent non strain hardening and strain hardening material respectively. The rise time of incident impulse in the SHPB test is relevant to bar’s radius. A maximum allowable specimen length and a maximum allowable impact velocity (MAIV) of striker are proposed for the SHPB test. The propagation of plastic waves is observed along specimen length at the beginning of specimen’s plastic deformation in SHPB test. However, for both types of material, no plastic wave motion is caught along specimen length for large plastic strain level. Side confinement effect of friction is found to be significant, even with lubricant in the experiment.     

基于碰撞升频的MEMS压电振动能量采集系统

本文提出了一种基于碰撞升频机制的微型压电能量采集系统，由一对共振频率不同的悬臂梁平行叠放组成。在外界低频振动激励下，底部低频S形金属曲梁产生共振，在运动过程中碰撞顶部高频微型压电直梁，从而将低频环境振动转换为高频压电梁的振动，解决了压电直梁的固有频率与外界激励频率不匹配问题，同时提高能量收集的效率。本文建立了悬臂梁受迫振动和碰撞耦合振动的动力学模型，讨论了压电悬臂梁的电压输出特性。通过实验测试了压电能量收集系统和单个压电悬臂梁的开路电压并计算了输出功率，结果表明当振动加速度为1.0 g时，升频式压电能量采集系统在25 Hz的激振下输出功率达到8.6 μW，高于单个压电悬臂梁的最大输出功率。     

一种谐振式微加速度计表芯非线性动力学分析及实验

在研制基于静电刚度谐振式微加速度计过程中,发现增大激励电压可以提高输出信噪比,但响应的振动幅度将不稳定,同时谐振频率也将会出现漂移。针对上述问题,建立了静电驱动微机械谐振系统等效行为模型,非线性动力学理论分析结果与实验现象一致,总结出需要从加速度计结构参数优化和减小激励电压两个方面来减小频率漂移和提高分辨率。将结构优化准则应用到制造的微加速度计上,实验结果表明:在5 V敏感电压下,闭环条件下单梁加速度计灵敏度为58 Hz/g,分辨率为3.5 mg。     

Constrained Optimal Design of Circular Plates Against Buckling∗

Several problems are investigated in which the buckling loads of structures are maximized, subject to the restriction that the volume of structural material is specified. In addition, a constraint is placed upon either the maximum allowable prebuckling stress, or the minimum allowable thickness. The structures analyzed are flat, axisymmetric circular plates, loaded by uniform radial thrust, and assumed to buckle axisymmetrically. The plates are investigated for both sandwich and solid cross-sectional geometries.     

A skid steering model using the Magic Formula

The paper describes a computer model for predicting the steering performance and power flows of a notional skid steered tracked vehicle. The force/slip characteristics of the rubber track pads are calculated by means of the so-called Magic Formula. Relevant parameters for the Magic Formula are derived from the limited amount of data available from traction tests with a tracked vehicle on a hard surface. The computer model considers the vehicle in steady state motion on curves of various radii and allows for lateral and longitudinal weight transfer, roll and pitch motions and the effects of track tension forces. Vehicle dimensions, Magic Formula parameters and the equations of motion are set up in a Microsoft Excel spreadsheet and solutions obtained using the Solver routine. Model outputs are described in terms of driver control input and various power flows against lateral acceleration. Maximum lateral acceleration is generally limited by the available engine power. In some conditions the outer track sprocket could be transmitting almost twice the maximum net engine power. For vehicles with a single electric motor/inverter driving each sprocket, these units would need to be able to transmit these high intermittent powers.     

Seismic behaviour of industrial masonry chimneys

This paper deals with the seismic behaviour of an unreinforced masonry chimney representative of the large number of chimneys currently in existence in many European areas which were built during the period of the industrial revolution. Maximum seismic intensity value that can be resisted in terms of peak ground acceleration and failure mode are the main goals. A 3D finite element model capable of reproducing cracking and crushing phenomena have been used in a non-linear analysis in order to obtain lateral displacements, crack pattern and failure mode for this type of construction. Earthquakes artificially generated for a low to moderate seismic intensity area from the response spectrum proposed by the codes have been tested on the structure obtaining failure mode, maximum stresses and displacements. Subsequently, the accelerograms generated were scaled until non-failure earthquakes were obtained.     

A numerical study of droplet motion/departure on condensation of mixture vapor using lattice Boltzmann method

Droplet motion/departure, which is governed by external force acceleration coefficient, droplet radius and surface wettability on solid surfaces under external forces such as gravitational force, play a significant role in characterizing condensation heat transfer, especially when high fractional non-condensable gases (NCG) present. However, due to the challenge in visualizing the vapor/steam velocity field imposed by droplet motion/departure, the detailed mechanism of droplet motion/departure on condensing surfaces has not been completely investigated experimentally. In this study, droplet motion/departures on solid surfaces under external forces and their interactions with steam flow are simulated using two dimensional (2D) multiphase lattice Boltzmann method (LBM). Large external force acceleration coefficient, droplet radius and contact angle, lead to large droplet deformation and high motion/departure velocity, which significantly shortens the droplet residual time on the solid surface. Our simulation shows that steam vortices (lateral velocity) induced by droplet motion/departure can greatly disturb the vapor flow and would be intensified by increasing external force acceleration coefficient, droplet radius, and contact angle. In addition, the location of vortex center shifts in the ascending direction with increase of these factors. The average lateral velocities induced by droplet motion/departure at various conditions are obtained. The mass transfer resistance is substantially reduced owing to the droplet motion/departure, leading to an enhanced heat flux. The experimental results are compared to validate the influence of droplet motion/departure on condensation heat transfer performance, especially for steam–air mixture with the presence of high fractional NCG.     

PROBABILITY MODEL AND SOLUTION ON EARTHQUAKE EFFECTS COMBINATION IN ALONG WIND RESISTANT DESIGN OF TALL-FLEXIBLE BUILDINGS

A model on the earthquake effects combination in wind resistant design of high-rise flexible structures is proposed in accordance with the probability method. Based on the Turkstra criteria, the stochastic characters of wind velocity, earthquake ground acceleration and excitations occurrence probability are taken into account and then the combination of the earthquake effects in structure wind resistant design is analyzed with the convolution approach. The results indicate that as for the tall flexible buildings whose lateral force is governed by wind loading, the maximum lateral loads verification with respect to the wind resistant design combined with earthquake effects may be more unfavorable compared with that in terms of the earthquake resistant design involving wind effects.