Vertical assembly of carbon nanotubes for via interconnects

The via interconnects are key components in ultra-large scale integrated circuits(ULSI).This paper deals with a new method to create single-walled carbon nanotubes(SWNTs) via interconnects using alternating dielectrophoresis(DEP).Carbon nanotubes are vertically assembled in the microscale via-holes successfully at room temperature under ambient condition.The electrical evaluation of the SWNT vias reveals that our DEP assembly technique is highly reliable and the success rate of assembly can be as high as 90%.We also propose and test possible approaches to reducing the contact resistance between CNT vias and metal electrodes.     

Enhanced etching of silicon didioxide guided by carbon nanotubes in HF solution

This paper describes a new method to create nanoscale SiO₂ pits or channels using single-walled carbon nanotubes (SWNTs) in an HF solution at room temperature within a few seconds. Using aligned SWNT arrays, a pattern of nanoscale SiO₂ channels can be prepared. The nanoscale SiO₂ patterns can also be created on the surface of three-dimensional (3D) SiO₂ substrate and even the nanoscale trenches can be constructed with arbitrary shapes. A possible mechanism for this enhanced etching of SiO₂ has been qualitatively analysed using defects in SWNTs, combined with H₃O⁺ electric double layers around SWNTs in an HF solution.     

基于啁啾布喇格光栅的液位传感器

设计了一种基于啁啾光纤布喇格光栅的新型液位传感器,该传感器主要由矩形悬臂梁构成的传感机构和光纤光谱仪组成。导出了啁啾光纤布喇格光栅的反射谱带宽与液位的关系;通过光谱仪检测啁啾光纤布拉格光栅反射谱的带宽,就可以得到被测液位的高度。并对设计的传感器系统进行了实验验证,实验结果表明,该啁啾光纤布拉格光栅反射谱带宽对温度变化不敏感,且在测量范围内,反射谱带宽与被测液位间有很好的线性关系。     

强度调制的啁啾光纤光栅加速度传感器

设计了一种基于啁啾光纤布拉格光栅的新型加速度传感器,该传感器主要由矩形悬臂梁构成的传感机构和光纤光谱仪及光电探测器组成。导出了啁啾光纤布拉格光栅的反射谱带宽与加速度的关系;通过光谱仪检测啁啾光纤布拉格光栅反射谱的带宽或检测光电探测器输出的电压,即可获得加速度的大小。实验结果表明,该啁啾光纤布拉格光栅反射谱带宽及光电探测器输出的电压对温度变化不敏感,且在0~700m/s2测量范围内,反射谱带宽与加速度间具有良好的线性关系。由于反射谱带宽展宽造成了光纤布拉格光栅反射率的降低,因此光电探测器输出电压的线性响应范围只能达到0~35 m/s2,带宽和电压灵敏度分别达到0.005 6nm·m-1·s-2和0.785 6m V·m-1·s-2。