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黄征  武莉莉  黎兵  郝霞  贺剑雄  冯良桓  李卫  张静全  蔡亚平 《中国物理 B》2010,19(12):127204-127204
In order to fabricate AlSb polycrystalline thin films without post annealing, this paper studies a technology of magnetron co-sputtering onto intentionally heated substrate. It compares the structural characteristics and electrical properties of AlSb films which are deposited at different substrate temperatures. It finds that the films prepared at a substrate temperature of 450 oC exhibit an enhanced grain growth with an average grain size of 21 nm and the lattice constant is 0.61562 nm that goes well with unstained lattice constant (0.61355 nm). The ln(σdark) ~1/T curves show that the conductivity activation energy is about 0.38 eV when the film is deposited at 450 oC without an annealing. The transmittance and reflectance spectra show that the film deposited at 450 oC has an optical band gap of 1.6 eV. These results indicate that we have prepared AlSb polycrystalline films which do not need a post annealing.  相似文献   
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用近空间升华法制备了CdTe多晶薄膜,用硝酸-磷酸(NP)混合液对薄膜表面进行了腐蚀.经SEM观测,腐蚀后的CdTe薄膜晶界变宽,XRD测试发现,经NP腐蚀后,在CdTe薄膜表面生成了一层高电导的富Te层.在腐蚀后的CdTe薄膜上分别制备了Cu,Cu/ZnTe:Cu,ZnTe:Cu,ZnTe/ZnTe:Cu四种背接触层,比较了它们对太阳电池性能的影响.结果表明,用ZnTe/ZnTe:Cu复合层作为背接触层的效果较好,获得了面积为0.5cm2,转换效率为13.38%的CdTe多晶薄膜太 关键词: 硝磷酸腐蚀 背接触层 CdTe太阳电池  相似文献   
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