表面凹陷对等离子体浸没离子注入均匀性的影响

利用二维流体模型和数值计算方法模拟了等离子体浸没离子注入（ＰⅢ）Ｋ ,具有圆弧凹槽的平面靶周围的鞘层扩展情况,计算了鞘层扩展过程中的电热分布、离子速度和离子密度变化获得了沿靶表面的离子入射角度和注入剂量的分布情况,为等离子体浸没离子注入处理复杂形状靶提供了理论基础。     

THE EFFECT OF MESH ANODE ON CATHODIC ARC IN FOCUSING MAGNETIC FIELD

The performance and characteristics of a cathodic arc deposition apparatus consisting of a titanium cathode, an anode with and without a tungsten mesh, and a coil producing a focusing magnetic field between the anode and cathode are investigated. The arc voltage V_a is measured with a fixed arc current. The relationship between V_a and the magnetic field B with and without a mesh is obtained. In addition, the relationship between the arc current I_a and V_c, the voltage to which the artificial transmission line was charged, is measured with and without the mesh to determine the minimum ignition voltage for the arc. The arc resistance increases with the focusing magnetic strength B and decreases when using the mesh. Our results indicate that the high transparency and large area of the mesh allows a high plasma flux to penetrate the anode from the cathodic arc. The mesh also stabilizes the cathodic arc and gives better performance when used in concert with a focusing magnetic field.     

高气密性的深紫外LED半无机封装技术

深紫外LED可通过物理方式破坏病毒和细菌的结构，从而获得高效消毒的效果。相比于工艺成熟的蓝光LED，如何提高深紫外LED的封装可靠性和出光率仍是关键问题。本文采用基底预热方式微固化封装胶，结合阵列点胶方式将石英玻璃固定在镀铜围坝，制备了半无机封装的深紫外LED。该器件的输出波长为275 nm，半峰宽约为11 nm。对比传统类透明材料封装的器件，石英封装的深紫外LED有更高的出光率。在真空红墨水和氦气漏率实验中，采用本文提出的半无机封装技术的深紫外LED器件表现出高密封性。此外，在加速老化测试中，该封装器件的光衰速率在20%以内。实验结果表明，对比有机封装的深紫外LED器件，在基底预热条件下，采用阵列点胶固定石英玻璃是现阶段提高深紫外LED可靠性的一种封装方法。