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A novel micromirror based on the PolyMUMPs process is designed and presented. The hexagonal micromirror with a diameter of 450 μm consists of three supporting bilayer cantilevers and a mirror plate. The bilayer cantilevers, formed with a polysilicon layer and a gold layer, elevate the mirror plate according to residual stress-induced bending. Both analytical and finite element analysis (FEA) models are built to calculate the elevated height of the free end of the cantilever. The analytical solution is in accordance with the FEA simulation results, with longitudinal stresses applied only. Results of a three-dimensional (3D) simulation with two direction stresses applied also show the elevated height to be proportional to the width of the cantilever and the length of the gold layer. Due to the torque of the joint, the elevated heights of the two kinds of cantilevers assembled with the mirror plates are much smaller than those of the free end of the cantilevers. Both micromirrors with different cantilevers are fabricated. The elevated heights of the fabricated micromirrors are measured using Veeco optical profiler, which show good coincidence with simulation results. 相似文献
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采用在惰性气体中蒸发的方法获得了沉积在ZnS基片上的InSb纳米晶体,其平均尺寸随惰性气体的压强增加而增大.从实验测量的室温吸收谱上看到,当纳米晶体的平均直径从27.9 nm减小到24.2nm再到21.4 nm时,其吸收边分别向高能方向移动了0.0151 eV和0.0145 eV.用有效质量近似模型计算了半导体纳米晶体的吸收边相对其体材料的移动,将理论计算与实验结果进行了比较. 相似文献
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光场相机波前传感器是一种新型的波前传感器,具有视场大、动态范围大的优势,但由于存在信号饱和现象,光场相机的线性度和波前传感精度较低。利用动态调制提高光场相机的线性度和波前传感精度,理论分析了光场相机波前传感的原理与特性,利用MATLAB软件对光场相机在动态调制时的波前闭环校正效果进行数值模拟,并与无调制光场相机的模拟结果进行对比分析。仿真结果表明:光场相机在动态调制时的测量精度高,校正效果较好,校正后远场光斑的斯特列尔比大于0.8,波前传感性能优于无调制光场相机。 相似文献
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基于标量衍射理论建立了光谱色散平滑(SSD)、随机相位板(RPP)和偏振匀滑(PS)联用的光束匀滑方案数值仿真模型。以斑纹对比度和偏振度为主要评价参量,利用该模型研究了径向偏振调制的匀滑及消偏振特性。研究表明,径向偏振调制可以有效降低聚焦光斑斑纹对比度和偏振度。使用半波片拼接方式产生近似径向偏振光时,拼接单元数对匀滑及偏振特性影响较小,8片拼接的匀滑效果已与理想径向偏振光几乎一致。对比分析了径向偏振调制、正交偏振调制和双折射楔三种PS方式,结果表明,由于三种PS方式本质上的一致性,光束的匀滑及偏振特性差别较小。 相似文献
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用气体中蒸发的方法在蓝宝石基片上制备了纳米InSb颗粒膜.通过透射电镜分析显示,该方法可以制得多晶的InSb纳米颗粒,且颗粒均匀地分布在蓝宝石基片表面上;用X射线能谱仪分析样品得到两种元素的百分比接近1:1.实验结果表明,通过改变设备的工作条件,可以得到具有不同颗粒尺寸的InSb纳米颗粒. 相似文献
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