The effects of process conditions on the plasma characteristic in radio-frequency capacitively coupled SiH4/NH3/N2 plasmas: Two-dimensional simulations

A two-dimensional (2D) fluid model is presented to study the behavior of silicon plasma mixed with SiH4 , N2 , and NH3 in a radio-frequency capacitively coupled plasma (CCP) reactor. The plasma-wall interaction (including the deposition) is modeled by using surface reaction coefficients. In the present paper we try to identify, by numerical simulations, the effect of variations of the process parameters on the plasma properties. It is found from our simulations that by increasing the gas pressure and the discharge gap, the electron density profile shape changes continuously from an edge-high to a center-high, thus the thin films become more uniform. Moreover, as the N2 /NH3 ratio increases from 6/13 to 10/9, the hydrogen content can be significantly decreased, without decreasing the electron density significantly.     

One-Dimensional Fluid Model for Dust Particles in Dual-Frequency Capacitively Coupled Silane Discharges

A self-consistent fluid model, which incorporates density and flux balances of electrons, ions, neutrals and nanoparticles, electron energy balance, and Poisson＇s equation, is employed to investigate the capacitively coupled silane discharge modulated by dual-frequency electric sources. In this discharge process, nanoparticles are formed by a successive chemical reactions of anion with silane. The density distributions of the precursors in the dust particle formation are put forward, and the charging, transport and growth of nanoparticles are simulated. In this work, we focus our main attention on the influences of the high-frequency and low-frequency voltage on nanoparticle densities, nanoparticle charge distributions in both the bulk plasma and sheath region.     

Simulation of nanoparticle coagulation in radio-frequency C_2H_2/Ar microdischarges

The nanoparticle coagulation is investigated by using a couple of fluid models and aerosol dynamics model in argon with a 5% molecular acetylene admixture rf microdischarges,with the total input gas flow rate of 400 sccm.It co-exists with a homogeneous,secondary electron-dominated low temperature γ-mode glow discharges.The heat transfer equation and flow equation for neutral gas are taken into account.We mainly focused on investigations of the nanoparticle properties in atmospheric pressure microdischarges,and discussed the influences of pressure,electrode spacing,and applied voltage on the plasma density and nanoparticle density profiles.The results show that the characteristics of microdischarges are quite different from those of low pressure radio-frequency discharges.First,the nanoparticle density in the bulk plasma in microdischarges is much larger than that of low pressure discharges.Second,the nanoparticle density of 10 nm experiences an exponential increase as soon as the applied voltage increases,especially in the presheath.Finally,as the electrode spacing increases,the nanoparticle density decreased instead of increasing.     

Effect of Parallel-Plate Geometry on Mode Transition Behavior in Argon Microplasmas: Two-Dimensional Simulation

A two-dimensional self-consistent fluid model is employed to investigate radio-frequency process parameters on the plasma properties in Ar microdischarges. The neutral gas density and temperature balance equations are taken into account. We mainly investigate the effect of the electrode gap on the spatial distribution of the electron density and electron temperature profiles, due to a mode transition from the regime(secondary electrons emission is responsible for the significant ionization) to the regime(sheath oscillations and bulk electrons are responsible for sustaining discharge) induced by a sudden decrease of electron density and electron temperature.The pressure, radio-frequency sources frequency and voltage effects on the electron density are also elaborately investigated.     

Driving frequency effects on the mode transition in capacitively coupled argon discharges

A one-dimensional fluid model is employed to investigate the discharge sustaining mechanisms in the capacitively coupled argon plasmas, by modulating the driving frequency in the range of 40 kHz-60 MHz. The model incorporates the density and flux balance of electron and ion, electron energy balance, as well as Poisson's equation. In our simulation, the discharge experiences mode transition as the driving frequency increases, from the γ regime in which the discharge is maintained by the secondary electrons emitted from the electrodes under ion bombardment, to the α regime in which sheath oscillation is responsible for most of the electron heating in the discharge sustaining. The electron density and electron temperature at the centre of the discharge, as well as the ion flux on the electrode are figured out as a function of the driving frequency, to confirm the two regimes and transition between them. The effects of gas pressure, secondary electron emission coefficient and applied voltage on the discharge are also discussed.     

Mode transition in dusty micro-plasma driven by pulsed radio-frequency source in C_2H_2/Ar mixture

Physical qualities of dusty plasma in the pulsed radio-frequency C_2H_2/Ar microdischarges are carefully investigated by a one-dimensional hydrodynamic model and aerosol dynamics model.Since the thermophoretic force has a great effect on the nanoparticle density spatial distribution,the neutral gas energy equation is taken into accounted.The effects of pulse parameters(dust ratio,modulation frequency) on the nanoparticle formation and growth process are mainly discussed.The calculation results show that,as the duty ratio increases,the mode transition from the sheath oscillation(a regime) to the secondary electron heating(7 regime) occurred,which is quite different from the conventional pulsed discharge.Moreover,the effect of modulation frequency on the width of sheath and plasma density is analyzed.Compared with the H_2CC~-ions,the modulation frequency effect on the nanoparticles density becomes more prominent.     

Simulation of nanoparticle coagulation in radio-frequency capacitively coupled C_2H_2 discharges

A self-consistent fluid model is employed to investigate the coagulation stage of nanoparticle formation, growth,charging, and transport in a radio-frequency capacitively coupled parallel-plate acetylene(C2H2) discharge. In our simulation, the distribution of neutral species across the electrode gap is determined by mass continuity, momentum balance, and energy balance equations. Since a thermal gradient in the gas temperature induced by the flow of the neutral gas, a careful study of the thermophoretic force on the spatial distribution of the nanoparticle density profiles is indispensable. In the present paper, we mainly focus on the influences of the gas flow rate, voltage, and gas pressure on the spatial distribution of the nanoparticle density. It appears that the resulting density profile of the 10-nm particles experiences a significant shift towards the upper showerhead electrode once the neutral equations are applied, and a serious shift is observed when increasing the gas flow rate. Thus, the flow of neutral gas can strongly influence the spatial distribution of the particles in the plasma.