排序方式: 共有16条查询结果,搜索用时 31 毫秒
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利用PIC (particle-in-cell) 方法,结合实验装置的几何结构和实验结果,采用动态开关模型,对微秒等离子体断路开关和电感负载间的功率流特性进行了研究。模拟得到了与实验结果符合较好的开关电压和负载电流波形,并给出了开关下游出现的稀薄等离子体的密度(约1012 cm-3)和速度(约1 cm/ns), 同时也得到了开关下游的空间电流分布。模拟结果表明,开关下游的结构应避免阻抗突变以减少电流损失,同时提高开关阻抗可有利于提高负载上的最大功率。 相似文献
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The effects of process conditions on the plasma characteristic in radio-frequency capacitively coupled SiH4/NH3/N2 plasmas: Two-dimensional simulations 下载免费PDF全文
A two-dimensional (2D) fluid model is presented to study the behavior of silicon plasma mixed with SiH4 , N2 , and NH3 in a radio-frequency capacitively coupled plasma (CCP) reactor. The plasma-wall interaction (including the deposition) is modeled by using surface reaction coefficients. In the present paper we try to identify, by numerical simulations, the effect of variations of the process parameters on the plasma properties. It is found from our simulations that by increasing the gas pressure and the discharge gap, the electron density profile shape changes continuously from an edge-high to a center-high, thus the thin films become more uniform. Moreover, as the N2 /NH3 ratio increases from 6/13 to 10/9, the hydrogen content can be significantly decreased, without decreasing the electron density significantly. 相似文献
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Effect of Parallel-Plate Geometry on Mode Transition Behavior in Argon Microplasmas: Two-Dimensional Simulation 下载免费PDF全文
A two-dimensional self-consistent fluid model is employed to investigate radio-frequency process parameters on the plasma properties in Ar microdischarges. The neutral gas density and temperature balance equations are taken into account. We mainly investigate the effect of the electrode gap on the spatial distribution of the electron density and electron temperature profiles, due to a mode transition from the regime(secondary electrons emission is responsible for the significant ionization) to the regime(sheath oscillations and bulk electrons are responsible for sustaining discharge) induced by a sudden decrease of electron density and electron temperature.The pressure, radio-frequency sources frequency and voltage effects on the electron density are also elaborately investigated. 相似文献
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用于X射线闪光照相的Rod—pinch二极管aRPD)具有电学性能稳定、产额高、焦斑直径小(可达到亚毫米量级)以及结构简单等优点。由于受电场和磁场的影响,二极管中带电粒子的流动方式可以分为空间电荷限制流(SCL)、弱箍缩(WP)和磁绝缘限制流阻)3种基本模式。大量实验和理论研究表明,离子对RPD的工作模式有显著影响,这里结合同轴结构二极管工作模式的半解析描述方法,利用PIC粒子模拟程序,深入研究离子对于RPD工作特性的影响。 相似文献
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介绍了采用外差式记录系统和相位跟踪方法建立的高灵敏度(0.2°)迈克尔逊激光干涉系统对Z-pinch喷气负载质量线密度的测量。通过采用充气隔振光学平台和将干涉仪放置到喷气真空室内等隔振方法,有效地消除了机械振动对测量结果的影响,获得了拉瓦尔喷嘴产生的超音速Ar气喷气负载平均质量线密度随时间的变化曲线,为优化喷嘴理论设计程序提供了实验依据。气流稳态的建立时间可以用于精确控制喷气装置电磁阀门的打开时刻,保证喷气Z-pinch 实验中脉冲功率装置提供的脉冲电流与喷气负载平顶之间的时间同步。 相似文献
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开展了基于等离子体断路开关的脉冲功率源驱动多丝Z箍缩负载初步实验,实验中采用了2根或4根钨丝组成的环形阵列,其中钨丝的直径分别为7 mm和20 mm。利用高速扫描摄影获取钨丝电爆炸和箍缩过程中等离子体自发光的物理图像。实验结果表明:导通电流为105 kA的等离子体断路开关将67%~78%的电流转换至金属丝阵负载上,负载电流上升沿为84~110 ns。高速扫描相机观察到了钨丝电爆炸形成晕等离子体及其向轴线箍缩和后期向外膨胀的物理过程。 相似文献