Design and fabrication of one-dimensional focusing X-ray compound lens with Al material

A method based on Fourier spectrum analysis for predicting the performances of the X-ray compound lenses is briefly introduced, the theoretical result obtained is the same as that of Fresnel-Kirchhoff approach. A kind of technique named moulding is developed for fabricating the one-dimensional (1D) compound X-ray lens with Al material and the fabrication process is presented. In addition, a two-time coating method is used to improve the numerical apertures of the compound lenses. Furthermore, the focusing performance of the Al compound X-ray lens under the high energy X-rays is measured.     

A theoretical method based on Fourier spectrum analysis for the focusing performances of the X-ray compound refractive lenses

It is important to predict the intensity distribution in focusing plane for designing the X-ray compound refractive lenses. On the basis of analyzing the structure of X-ray compound lenses and comparing it with Praunhofer diffraction system, it is concluded that the X-ray focusing system can be regarded as a kind of Praunhofer diffraction system. Therefore, a method based on Fourier spectrum analysis is presented to predict the intensity distribution in the focusing plane for the X-ray lenses. A brief analysis on the relationship between the parameters of X-ray lenses and their focusing performance is also given in this paper.     

抛物面型X射线组合折射透镜聚焦性能的理论与实验研究

结合衍射理论和矩阵光学方法得出抛物面型X射线组合折射透镜的光学性能指标(包括其焦距的严格表达式、薄透镜近似的判定准则、透过率和有效孔径,以及极限聚焦光斑尺寸等).采用X射线深度光刻技术实际制作了PMMA材料抛物面型X射线组合折射透镜并给出了工艺测试结果.最后在北京同步辐射装置(BSRF)上,实际构建了基于3种不同结构参数的PMMA材料抛物面型X射线组合折射透镜的微束聚焦实验系统.并实际测试了其聚焦性能,均获得了良好的聚焦效果,给出实测结果并对实测结果进行了分析和讨论.     

Application of the probability theory in predicting 3D focusing behaviors of compound X-ray refractive lenses

X-rays promise a high resolving power due to the veryshort wavelength. Therefore, people have been trying todevelop X-ray optical devices for focusing X-ray beam toa small spot to perform X-ray analysis techniques. In1996, Snigirev et al.[1] proposed and demonstrated thatX-ray refractive focusing could be accomplished with acompound X-ray refractive lens (CRL). And then manypublications on the further researches appeared[2-8]. Thetheoretical results on the focusing performances in the fo-c…     

制作工艺误差对X射线组合折射透镜聚焦性能影响研究

本文主要介绍对X射线组合折射透镜的制作工艺误差对其聚焦性能影响的研究结果. 首先给出采用深度X射线光刻技术制作的PMMA材料圆柱面型X组合折射透镜的工艺测试结果,得出制作工艺误差值,定性分析制作工艺误差对X射线组合折射透镜聚焦性能的影响. 然后根据实际的制作工艺误差建模,给出详尽的理论分析和定量的理论模拟结果. 最后在北京同步辐射装置(BSRF)上,构建基于PMMA材料的圆柱面型X射线组合折射透镜的微束聚焦实验系统,实际测试了有明显工艺误差和尽量消除工艺误差的两种X射线组合折射透镜的聚焦性能,给出实测结果 关键词： X射线组合折射透镜 制作工艺误差 X射线聚焦性能 同步辐射     

A theoretical method based on Fourier spectrum analysis for the focusing performances of the X-ray compound refractive lenses

It is important to predict the intensity distribution in focusing plane for designing the X-ray compound refractive lenses. On the basis of analyzing the structure of X-ray compound lenses and comparing it with Fraunhofer diffraction system, it is concluded that the X-ray focusing system can be regarded as a kind of Fraunhofer diffraction system. Therefore, a method based on Fourier spectrum analysis is presented to predict the intensity distribution in the focusing plane for the X-ray lenses. A brief analysis on the relationship between the parameters of X-ray lenses and their focusing performance is also given in this paper.     

高能X射线组合透镜聚焦性能的实验结果

高能X射线组合透镜是一种基于折射效应的新型X射线光学元件。报道了这种新型X射线光学元件聚焦性能的最新实验结果。设计的高能X射线组合透镜为聚甲基丙烯酸甲酯(PMMA)材料,包括40个相同的、顺序排布的平凹折射单元,折射单元的球面半径为200μm,组合透镜的几何口径约为500μm,长度约为8 mm,焦距约为1.3 m。简要描述了PMMA材料X射线组合透镜的制作技术和制作过程。并给出了X射线组合透镜聚焦性能测试实验系统和实验条件。最后给出8 keV单色X射线辐射下,PMMA材料X射线组合透镜的聚焦性能的测试结果,对实际测试结果进行了分析和讨论,得出结论,焦距等参量与理论计算结果基本吻合。     

级联式平面抛物面型X射线组合折射透镜的设计与制作

X射线组合折射透镜(CRL)已逐步成为同步辐射光源下X射线聚焦光学器件的标准配件之一,它具有结构紧凑、易调节校准、适用光子能量范围大等优点.本文设计了一种级联式平面抛物面型CRL,它将N1个具有较大抛物面几何孔径(R0)的折射单元I与N2个具有较小抛物面顶点曲率半径(R)的折射单元II级联,以解决常规CRL设计过程中焦斑尺寸与透过率的矛盾.采用PMMA材料,利用LIGA技术制作了一组级联式平面抛物面型CRL,其中折射单元I的主要结构参数为N1=15,R1=200μm,2R01=564μm;折射单元II的主要结构参数为N2=20,R2=50μm,2R02=140μm.在上海光源同步辐射线束上,所制作的级联式平面抛物面型CRL实现了对初始光斑尺寸为200μm×100μm的入射X射线的一维聚焦,测试得到的焦距为1.052 m,横向焦斑尺寸为24.9μm@8 keV,透过率为2.19%.