双激光脉冲打靶形成Gd等离子体的极紫外光谱辐射

高端芯片制造所需要的极紫外光刻技术位于我国当前面临35项"卡脖子"关键核心技术之首.高转换效率的极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用双激光脉冲打靶技术实现较强的6.7 nm极紫外光输出.首先,理论计算Gd¹⁸⁺—Gd²⁷⁺离子最外层4d壳层的4p-4d和4d-4f能级之间跃迁、以及Gd¹⁴⁺—Gd¹⁷⁺离子最外层4f壳层的4d-4f能级之间跃迁对波长为6.7 nm附近极紫外光的贡献.其后开展实验研究,结果表明,随着双脉冲之间延时的逐渐增加,波长为6.7 nm附近的极紫外光辐射强度呈现先减弱、后增加、之后再减弱的变化趋势,在双脉冲延时为100 ns处产生的极紫外光辐射最强.并且,在延时为100 ns处产生的光谱效率最高,相比于单脉冲激光产生的光谱效率提升了33%.此外,发现双激光脉冲打靶技术可以有效地减弱等离子体的自吸收效应,获得的6.7 nm附近极紫外光谱宽度均小于单激光脉冲打靶的情形,且在脉冲延时为30 ns时刻所产生的光谱宽度最窄,约为单独主脉冲产生极紫外光谱宽度的1/3.同时...     

金属衬底在石墨烯化学气相沉积生长中的作用

以过渡金属为催化衬底的化学气相沉积法(Chemical Vapor Deposition，CVD)已经可以制备与机械剥离样品相媲美的石墨烯，是实现石墨烯工业应用的关键技术之一。原子尺度理论研究能够帮助我们深刻理解石墨烯生长机理，为实验现象提供合理的解释，并有可能成为将来实验设计的理论指导。本文从理论计算的角度，总结了各种金属衬底在石墨烯CVD生长过程中的各种作用与相应的机理，包括在催化碳源裂解、降低石墨烯成核密度等，催化加快石墨烯快速生长，修复石墨烯生长过程中产生的缺陷，控制外延生长石墨烯的晶格取向，以及在降温过程中石墨烯褶皱与金属表面台阶束的形成过程等。在本文最后，我们对当前石墨烯生长领域中亟需解决的理论问题进行了深入探讨与展望。     

Synthesis of yolk-shell Bi2O3@TiO2 submicrospheres with enhanced potassium storage

Science China Chemistry - Due to their enormous potential for large-scale energy storage, rechargeable potassium-ion batteries have been widely researched and developed. However, the drastic volume...     

A multigrid method for the ground state solution of Bose–Einstein condensates based on Newton iteration

BIT Numerical Mathematics - In this paper, a new kind of multigrid method is proposed for the ground state solution of Bose–Einstein condensates based on Newton iteration scheme. Instead of...     

Delannoy数与Schröder数的一些和式公式

研究了Delannoy数与Schr?der数.利用分析方法和组合技巧,建立了任意多个Delannoy数乘积的一些和式公式,并对Schroder数的和式公式进行了类似的研究.     

Boundedness of Singular Integral Operators on Local Hardy Spaces and Dual Spaces

Potential Analysis - The purpose of this paper is to provide necessary and sufficient conditions of the boundedness for singular integrals on the local Hardy space and its dual. Particularly the...     

A Criterion of Nonparabolicity by the Ricci Curvature

A complete manifold is said to be nonparabolic if it does admit a positive Green’s function. To ?nd a sharp geometric criterion for the parabolicity/nonparbolicity is an attractive question inside the function theory on Riemannian manifolds. This paper devotes to proving a criterion for nonparabolicity of a complete manifold weakened by the Ricci curvature. For this purpose, we shall apply the new Laplacian comparison theorem established by the ?rst author to show the existence of a non-constant bounded subharmonic function.     

Ultrahigh Loading Copper Single Atom Catalyst for Palladium-free Wacker Oxidation

Wacker oxidation is an industry-adopted process to transform olefins into value-added epoxides and carbonyls. However, traditional Wacker oxidation involves the use of homogeneous palladium and copper catalysts for the olefin addition and reductive elimination. Here, we demonstrated an ultrahigh loading Cu single atom catalyst(14% Cu, mass fraction) for the palladium-free Wacker oxidation of 4-vinylanisole into the corresponding ketone with N-methylhydroxylamine hydrochloride as an additive under mild conditions. Mechanistic studies by ¹⁸O and deuterium isotope labelling revealed a hydrogen shift mechanism in this palladium-free process using N-methylhydroxylamine hydrochloride as the oxygen source. The reaction scope can be further extended to Kucherov oxidation. Our study paves the way to replace noble metal catalysts in the traditional homogeneous processes with single atom catalysts.     

Quantitative Analysis of Al in Flour Products by Laser-Induced Breakdown Spectroscopy Combined with Partial Least Squares

Journal of Applied Spectroscopy - Based on partial least squares (PLS) analysis, the effects of different smoothing points and different preprocessing methods on the accuracy and precision of the...     

A perimeter-based angle measure in Minkowski planes

Measuring angles in the Euclidean plane is a well-known topic, but for general normed planes there exists a variety of different concepts. These can be of a special kind, e.g. also preserving special orthogonality types. But these concepts are no angle measures in the sense of measure theory since they are not additive. This motivates us to define a new angle measure for normed planes that is in fact a measure in the sense of measure theory. Furthermore, we look at related types of rotation and reflection.