双激光脉冲打靶形成Gd等离子体的极紫外光谱辐射

高端芯片制造所需要的极紫外光刻技术位于我国当前面临35项"卡脖子"关键核心技术之首.高转换效率的极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用双激光脉冲打靶技术实现较强的6.7 nm极紫外光输出.首先,理论计算Gd¹⁸⁺—Gd²⁷⁺离子最外层4d壳层的4p-4d和4d-4f能级之间跃迁、以及Gd¹⁴⁺—Gd¹⁷⁺离子最外层4f壳层的4d-4f能级之间跃迁对波长为6.7 nm附近极紫外光的贡献.其后开展实验研究,结果表明,随着双脉冲之间延时的逐渐增加,波长为6.7 nm附近的极紫外光辐射强度呈现先减弱、后增加、之后再减弱的变化趋势,在双脉冲延时为100 ns处产生的极紫外光辐射最强.并且,在延时为100 ns处产生的光谱效率最高,相比于单脉冲激光产生的光谱效率提升了33%.此外,发现双激光脉冲打靶技术可以有效地减弱等离子体的自吸收效应,获得的6.7 nm附近极紫外光谱宽度均小于单激光脉冲打靶的情形,且在脉冲延时为30 ns时刻所产生的光谱宽度最窄,约为单独主脉冲产生极紫外光谱宽度的1/3.同时...     

Asymptotic Behavior of Least Energy Solutions for a Fractional Laplacian Eigenvalue Problem on ℝN

Acta Mathematica Sinica, English Series - We are interested in the existence and asymptotic behavior for the least energy solutions of the following fractional eigenvalue problem $$\left({\rm{P}}...     

Guest-assisted assembly strategy: boosting solvent-processed organic solar cells toward commercialization

Science China Chemistry -     

A Lower Bound Sequence for the Minimum Eigenvalue of Hadamard Product of an M-Matrix and its Inverse

Czechoslovak Mathematical Journal - We propose a lower bound sequence for the minimum eigenvalue of Hadamard product of an M-matrix and its inverse, in terms of an S-type eigenvalues inclusion set...     

CdS/Si nanofilm heterojunctions based on amorphous silicon films:Fabrication,structures,and electrical properties

Shortening the distance between the depletion region and the electrodes to reduce the trapped probability of carriers is a useful approach for improving the performance of heterojunction.The CdS/Si nanofilm heterojunctions are fabricated by using the radio frequency magnetron sputtering method to deposit the amorphous silicon nanofilms and Cd S nanofilms on the ITO glass in turn.The relation of current density to applied voltage(I-V)shows the obvious rectification effect.From the analysis of the double logarithm I-V curve it follows that below~2.73 V the electron behaviors obey the Ohmic mechanism and above~2.73 V the electron behaviors conform to the space charge limited current(SCLC)mechanism.In the SCLC region part of the traps between the Fermi level and conduction band are occupied,and with the increase of voltage most of the traps are occupied.It is believed that Cd S/Si nanofilm heterojunction is a potential candidate in the field of nano electronic and optoelectronic devices by optimizing its fabricating procedure.     

A multigrid method for the ground state solution of Bose–Einstein condensates based on Newton iteration

BIT Numerical Mathematics - In this paper, a new kind of multigrid method is proposed for the ground state solution of Bose–Einstein condensates based on Newton iteration scheme. Instead of...     

Delannoy数与Schröder数的一些和式公式

研究了Delannoy数与Schr?der数.利用分析方法和组合技巧,建立了任意多个Delannoy数乘积的一些和式公式,并对Schroder数的和式公式进行了类似的研究.     

Coupled Variational Inequalities: Existence,Stability and Optimal Control

Journal of Optimization Theory and Applications - In this paper, we introduce and investigate a new kind of coupled systems, called coupled variational inequalities, which consist of two elliptic...     

Quantitative Analysis of Al in Flour Products by Laser-Induced Breakdown Spectroscopy Combined with Partial Least Squares

Journal of Applied Spectroscopy - Based on partial least squares (PLS) analysis, the effects of different smoothing points and different preprocessing methods on the accuracy and precision of the...