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高端芯片制造所需要的极紫外光刻技术位于我国当前面临35项"卡脖子"关键核心技术之首.高转换效率的极紫外光源是极紫外光刻系统的重要组成部分.本文通过采用双激光脉冲打靶技术实现较强的6.7 nm极紫外光输出.首先,理论计算Gd18+—Gd27+离子最外层4d壳层的4p-4d和4d-4f能级之间跃迁、以及Gd14+—Gd17+离子最外层4f壳层的4d-4f能级之间跃迁对波长为6.7 nm附近极紫外光的贡献.其后开展实验研究,结果表明,随着双脉冲之间延时的逐渐增加,波长为6.7 nm附近的极紫外光辐射强度呈现先减弱、后增加、之后再减弱的变化趋势,在双脉冲延时为100 ns处产生的极紫外光辐射最强.并且,在延时为100 ns处产生的光谱效率最高,相比于单脉冲激光产生的光谱效率提升了33%.此外,发现双激光脉冲打靶技术可以有效地减弱等离子体的自吸收效应,获得的6.7 nm附近极紫外光谱宽度均小于单激光脉冲打靶的情形,且在脉冲延时为30 ns时刻所产生的光谱宽度最窄,约为单独主脉冲产生极紫外光谱宽度的1/3.同时... 相似文献
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Science China Chemistry - 相似文献
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Nonlinear Dynamics - This paper proposes the consensus tracking control problem for a class of uncertain nonlinear multi-agent systems. By using a group of nonnegative functions, an adaptive neural... 相似文献
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Yaping Chen Dr. Kun Rui Prof. Jixin Zhu Prof. Shi Xue Dou Dr. Wenping Sun 《Chemistry (Weinheim an der Bergstrasse, Germany)》2019,25(3):703-713
Developing clean and sustainable energies as alternatives to fossil fuels is in strong demand within modern society. The oxygen evolution reaction (OER) is the efficiency-limiting process in plenty of key renewable energy systems, such as electrochemical water splitting and rechargeable metal–air batteries. In this regard, ongoing efforts have been devoted to seeking high-performance electrocatalysts for enhanced energy conversion efficiency. Apart from traditional precious-metal-based catalysts, nickel-based compounds are the most promising earth-abundant OER catalysts, attracting ever-increasing interest due to high activity and stability. In this review, the recent progress on nickel-based oxide and (oxy)hydroxide composites for water oxidation catalysis in terms of materials design/synthesis and electrochemical performance is summarized. Some underlying mechanisms to profoundly understand the catalytic active sites are also highlighted. In addition, the future research trends and perspectives on the development of Ni-based OER electrocatalysts are discussed. 相似文献
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Zheng Yang Xiaowen Zhao Yuqiao Ding Qin Yang 《Journal of Macromolecular Science: Physics》2019,58(1):113-127
A series of phenolic epoxy resin (PEP) modified polyurethane foams (PUF) were prepared via an in-situ polymerization, one step process. It was found that the epoxy modified PUF foam exhibited a perforated network structure with larger cell size, higher open cell porosity and enhanced ovality compared with pure PUF. With increasing content of PEP, the tensile strength, elongation at break and low temperature modulus of PUF decreased. A single Tg was observed for PEP modified PUF, indicating that the two component phases of the polyurethane-epoxy were miscible. With increasing PEP content, the Tg of PUF shifted slightly to higher temperature, tan δmax dropped to lower values, and the retention value of the storage modulus at ?20 and ?10?°C increased. For pure PUF, the cell walls degraded and the structure became disordered after aging under heat and stress, while for PUF/20wt%PEP, the degradation degree was obviously reduced, and an orientation of the cells along the stress direction and a density increase was observed. During aging at 200?°C, the retention of the mechanical properties of PUF/20wt% PEP was much higher than that of pure PUF, and it showed superior stability under heat and stress, attributed to incorporation of the thermally resistant oxazolidone rings and benzene rings in the PU backbones, the highly cross-linked networks of the polyurethane-epoxy systems and the obvious orientation of the cells under stress. 相似文献
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Kai Xu Zhenchang Tang Yan Zhang Wanshu Li Haiou Li Lihui Wang Liming Liu Honghang Wang Feng Chi Xiaowen Zhang 《Current Applied Physics》2019,19(10):1076-1081
Germanium dioxide (GeO2) aqueous solutions are facilely prepared and the corresponding anode buffer layers (ABLs) with solution process are demonstrated. Atomic force microscopy, X-ray photoelectron spectroscopy and ultraviolet photoelectron spectroscopy measurements show that solution-processed GeO2 behaves superior film morphology and enhanced work function. Using GeO2 as ABL of organic light-emitting diodes (OLEDs), the visible device with tris(8-hydroxy-quinolinato)aluminium as emitter gives maximum luminous efficiency of 6.5 cd/A and power efficiency of 3.5 lm/W, the ultraviolet device with 3-(4-biphenyl)-4-phenyl-5-tert-butylphenyl-1,2,4-triazole as emitter exhibits short-wavelength emission with peak of 376 nm, full-width at half-maximum of 42 nm, maximum radiance of 3.36 mW/cm2 and external quantum efficiency of 1.5%. The performances are almost comparable to the counterparts with poly (3,4-ethylenedioxythiophene):poly (styrenesulfonate) as ABL. The current, impedance, phase and capacitance as a function of voltage characteristics elucidate that the GeO2 ABL formed from appropriate concentration of GeO2 aqueous solution favors hole injection enhancement and accordingly promoting device performance. 相似文献
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A nanomaterials-based novel molecular beacon has attracted growing attentions in fluorescent assays as many nanomaterials possess excellent quenching efficiency. In this work, a gold-based nanobeacon probe was established to detect organophosphorus pesticides for the first time. The constructed gold-based nanobeacon acted as a signal indicator and could display the decreasing of the intensity in the presence of targets, which competitively bound to single strand DNA. To achieve a high sensitive probe, some parameters including solution pH, temperature and reaction time were investigated and optimized. The gold-based nanobeacon probe assay was proved to be rapid and sensitive to achieve a detection limit of 0.035 μM for isocarbophos, 0.134 μM for profenofos, 0.384 μM for phorate and 2.35 μM for omethoate, respectively. The prepared nanobeacon effectively reduced the background and improved the detection sensitivity and selectivity. The probe is stable, easy to operate and does not need sophisticated instruments. These features makes the probe feasible for screening trace organophosphorus pesticides in real samples. 相似文献
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Back Cover: Room‐Temperature Synthesis of Cu2−xE (E=S,Se) Nanotubes with Hierarchical Architecture as High‐Performance Counter Electrodes of Quantum‐Dot‐Sensitized Solar Cells (Chem. Eur. J. 3/2015) 下载免费PDF全文