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Influence of oxygen on the growth of cubic boron nitride thin films by plasma-enhanced chemical vapour deposition 下载免费PDF全文
Cubic boron nitride thin films were deposited on silicon
substrates by low-pressure inductively coupled plasma-enhanced
chemical vapour deposition. It was found that the introduction of
O2 into the deposition system suppresses both nucleation and
growth of cubic boron nitride. At a B2H6 concentration of
2.5\% during film deposition, the critical O2 concentration
allowed for the nucleation of cubic boron nitride was found to be
less than 1.4\%, while that for the growth of cubic boron nitride
was higher than 2.1\%. Moreover, the infrared absorption peak
observed at around 1230--1280~cm-1, frequently detected for
cubic boron nitride films prepared using non-ultrahigh vacuum
systems, appears to be due to the absorption of boron oxide, a
contaminant formed as a result of the oxygen impurity. Therefore,
the existence of trace oxygen contamination in boron nitride films
can be evaluated qualitatively by this infrared absorption peak. 相似文献
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