排序方式: 共有110条查询结果,搜索用时 187 毫秒
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用一个冷阴极离子枪产生的氧离子轰击淀积过程中的薄膜表面.研究了离子轰击对薄膜聚集密度和潮气吸附的影响.实验表明,经离子轰击的ZrO_2,TiO_2和SiO_2膜,用石英晶体微量天平测得的聚集密度增加到0.9以上;用这些材料制成的干涉滤光片,基于滤光片暴露于潮湿气氛中的潮气吸附,测得峰值透射波长的漂移减小了大约2/3.这说明利用离子辅助技术有可能制备优良光学性能和机械性质的薄膜. 相似文献
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用于投影显示的分色合色膜系的消偏振设计 总被引:3,自引:3,他引:0
由于斜入射时,光学薄膜存在一定的偏振效应,将产生S-和P-偏振光的光谱分离.在Philips棱镜系统中,分色合色膜系通常分色时对S-光应用,合色时则对P-光应用.从提高光能利用率、减少杂散光和增加系统对比度等因素综合考虑,要求分色合色膜系的S-和P-偏振光的分离尽可能小.新设计方法采用宽带法布里-珀罗薄膜干涉滤光片中心波长两侧的干涉带作为长波通或短波通截止滤光片,可实现S-和P-偏振分量的分离几乎为零. 相似文献
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<正>We present a new and efficient method for the design of dispersive multilayer by employing a particle swarm optimization(PSO) technique.Its mathematical background is given and an adaptive PSO is realized with computer code.Two practical designing tasks are solved with this method,and the obtained results are competitive compared with other published structures.The adaptive PSO method demonstrates its merits of fast convergence and powerful global search ability,and could be used as a valuable tool for the optical thin film design. 相似文献
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超宽带减反射膜的设计和制备 总被引:3,自引:0,他引:3
设计了400~900 nm波段上的超宽带减反射膜,在410~850 nm范围内的平均残余反射率设计值约为0.2%,在设计的全波段上约为0.24%.讨论了初始膜系结构的选择原则,分析了带宽、膜层折射率差、最外层折射率和膜层总厚度等因素对宽带减反射特性的影响.对特定的带宽.增加两种薄膜材料的折射率差和选择尽可能低的最外层折射率对获得优良的减反射特性是非常重要的.实验制备了K9玻璃上TiO2/MgF2两种材料组成的8层结构的超宽带减反射膜,实测结果表明,在带宽520 nm范围内的平均残余反射率约为0.44%,说明用二种材料设计超宽带减反射膜是成功的,对垂直入射的减反射膜.多种材料的膜系并不比两种材料更具优越性. 相似文献
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采用ZYGO MarkIII-GPI数字波面干涉仪对以K9玻璃为基底的电子束蒸发方法制备的HfO2薄膜中的残余应力进行了研究,讨论了沉积速率、氧分压这两种工艺参量对HfO2薄膜残余应力的影响.实验结果表明:在所有的工艺条件下,薄膜的残余应力均为张应力;随着沉积速率的升高,氧分压的减小,薄膜的堆积密度逐渐增大,而残余应力呈减小趋势.同时用X射线衍射技术测量分析了不同工艺条件下HfO2薄膜的晶体结构,探讨了HfO2薄膜晶体
关键词:
残余应力
2薄膜')" href="#">HfO2薄膜
沉积速率
氧分压 相似文献
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A novel method to measure the absolute phase shift on reflection of thin film is presented utilizing a white-light interferometer in spectral domain. By applying Fourier transformation to the recorded spectral interference signal, we retrieve the spectral phase function Ф, which is induced by three parts: the path length difference in air L, the effective thickness of slightly dispersive cube beam splitter Teff and the nonlinear phase function due to multi-reflection of the thin film structure. We utilize the fact that the overall optical path difference (OPD) is linearly dependent on the refractive index of the beam splitter to determine both L and Teff. The spectral phase shift on reflection of thin film structure can be obtained by subtracting these two parts from Ф. We show theoretically and experimentally that our new method can provide a simple and fast solution in calculating the absolute spectral phase function of optical thin films, while still maintaining high accuracy. 相似文献