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91.
The possibilities of controlling the laser beam properties by a deformable mirror introduced into the laser optical cavity
were studied theoretically and experimentally. The experiments were performed under conditions of an industrial high power
transverse flow cw CO2 laser operating with a stable resonator of a folded configuration. A deformable bimorph mirror of a surface profile controlled
by the voltage applied to the mirror electrodes is implemented to the laser system as a back cavity mirror or as a one of
the inner folding mirrors. The near-and far-field characteristics of the laser beam versus the resonator configuration controlled
by the changes of the focal length of the deformable mirror are discussed in the paper. The analysis reveals that the resonator
with an inner deformable mirror is much more sensitive to the mirror curvature variations than the resonator in which the
deformable mirror is used as a back cavity mirror. The presented results show that dynamic and controllable changes in the
resonator properties result in the controlled modification and optimisation of the laser output power and spatial parameters
of the laser radiation. 相似文献
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T. Bernhard 《Surface science》2006,600(9):1877-1883
The structure and magnetism of thin epitaxial Fe layers grown on Cu(0 0 1) is investigated by grazing scattering of fast H and He atoms. Information on the atomic structure of the film and substrate surfaces is obtained by making use of ion beam triangulation with protons. The magnetic behavior is studied via the polarization of light emitted after capture of spin-polarized electrons into excited atomic terms during scattering of He atoms. For the formation of bcc(1 1 0)-like Fe films at higher coverages, we detect differences in structural and magnetic properties for room and low temperature growth. We suggest that the crystalline structure depends on the film morphology and that Cu impurities affect the magnetic properties. 相似文献
97.
Changes in the spectrum of Gaussian Schell-model beams propagating through turbulent atmosphere 总被引:1,自引:0,他引:1
Based on the extended Huygens-Fresnel principle, the spectrum of Gaussian Schell-model (GSM) beams propagating through turbulent atmosphere is derived analytically. It is shown that, if the scaling law is valid, the normalized spectrum S(ω) of GSM beams propagating through turbulent atmosphere is the same as the normalized source spectrum S(0)(ω), whether GSM source is quasi-homogenous or not. On the other hand, if the scaling law fails, S(ω) of GSM is different from S(0)(ω). The structure constant of the refractive index, transverse coordinate of observation point and spatial correlation length of the source affect the spectrum, which is illustrated numerically. 相似文献
98.
建立一个描述低能电子在多元多层介质中散射的物理模型,运用MonteCarlo方法模拟低能电子在靶体胶衬底中的复杂散射过程,在此基础上通过大量计算研究入射束能、胶层厚度、衬底材料等不同曝光条件对抗蚀剂沉积能密度分布的影响,获得沉积能分布规律:适量的低束能、薄胶层、低原子序数衬底可以使前散射电子对胶中沉积能密度分布的贡献增大、背散射电子的贡献减小,从而提高曝光分辨率.
关键词:
电子束曝光
MonteCarlo方法
低能电子散射
能量沉积 相似文献
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