斜孔气膜冷却数值模拟分析

本文通过数值模拟分析圆柱孔和扩散孔的单斜孔气膜冷却特性,考察复合角、孔型和吹风比对流场和气膜冷却效果的影响。结果表明,复合角的引入使气膜侧向分布更宽,但冷却效果沿主流方向衰减更快。适中吹风比得到的气膜能更有效的保护壁面。在相同吹风比和复合角条件下,扩散孔的气膜冷却效率比圆柱孔更好,且冷却更为均匀持久。     

激光标线的原理和实验

根据几何光学知识分析了激光标线原理.理论和实验表明:激光标线长度与激光光束形状、光学元件形状及材料折射率有关.并讨论了激光标线向两侧扩展的原因.     

X-ray metrology for advanced silicon processes

X-ray reflectivity (XRR), X-ray fluorescence (XRF) and small angle X-ray scattering (SAXS) techniques are used to the monitoring of Cu/porous low κ processes, which are developed for the next generation (≤65 nm) integrated circuits. Sensitivity of XRR and XRF is sufficient to detect drifts of the copper barrier layer, copper seed layer and Cu CMP (chemical-mechanical polishing) processes. Their metrology key parameters comply with production requirements. SAXS allows determining the pore structure of low κ films: average pore size and pore size distribution.     

斜角入射沉积法制备渐变折射率薄膜的折射率分析

斜角入射沉积法是一种制备薄膜的新颖方法,它可以用来制备渐变折射率薄膜.本文首先探讨了膜料的沉积入射角为α,薄膜柱状生长倾斜角为β时的薄膜的填充系数;之后利用drude理论,分析研究了斜角入射沉积法制备渐变折射率薄膜的折射率与薄膜的入射角和生长方向的关系. 关键词： 斜角入射沉积 渐变折射率 填充系数     

Surface free energy of CrNx films deposited using closed field unbalanced magnetron sputtering

CrN_x thin films have attracted much attention for semiconductor IC packaging molding dies and forming tools due to their excellent hardness, thermal stability and non-sticking properties (low surface free energy). However, few data has been published on the surface free energy (SFE) of CrN_x films at temperatures in the range 20-170 °C. In this study CrN_x thin films with CrN, Cr(N), Cr₂N (and mixture of these phases) were prepared using closed field unbalanced magnetron sputtering at a wide range of Cr⁺² emission intensity. The contact angles of water, di-iodomethane and ethylene glycol on the coated surfaces were measured at temperatures in the range 20-170 °C using a Dataphysics OCA-20 contact angle analyzer. The surface free energy of the CrN_x films and their components (e.g., dispersion, polar) were calculated using the Owens-Wendt geometric mean approach. The influences of CrN_x film surface roughness and microstructure on the surface free energy were investigated by atomic force microscopy (AFM) and X-ray diffraction (XRD), respectively. The experimental results showed that the lowest total SFE was obtained corresponding to CrN at temperature in 20 °C. This is lower than that of Cr(N), Cr₂N (and mixture of these phases). The total SFE, dispersive SFE and polar SFE of CrN_x films decreased with increasing surface temperature. The film roughness has an obvious effect on the SFE and there is tendency for the SFE to increase with increasing film surface roughness.     

Propagation properties of vectorial elliptical Gaussian beams beyond the paraxial approximation

Starting from the vectorial Rayleigh diffraction integral formula and without using the far-field approximation, a solution of the wave equation beyond the paraxial approximation is found, which represents vectorial non-paraxial elliptical Gaussian beams in free space. The far-field expressions for non-paraxial Gaussian beams and elliptical Gaussian beams can be regarded as special cases treated in this paper. Some basic propagation properties of vectorial non-paraxial elliptical Gaussian beams, including the irradiance distribution, phase term, beam widths and divergence angles are studied. Numerical results are given and illustrated.     

Analysis of transient wave scattering from an inclusion with an unilateral smoothly contact interface by BEM

Summary A 2D time-domain Boundary Element Method (BEM) is applied to solve the problem of transient scattering of plane waves by an inclusion with a unilateral smooth contact interface. The incident wave is assumed strong enough so that localized separations take place along the interface. The present problem is indeed a nonlinear boundary value problem since the mixed boundary conditions involve unknown intervals (separation and contact regions). In order to determine the unknown intervals, an iterative technique is developed. As an example, we consider the scattering of plane waves by the cross section of a circular cylinder embedded in an infinite solid. Numerical results for the near field solutions are presented. The distortion of the response waves and the variation of the interface states are discussed. The financial support by the China National Natural Science Foundation under Grant No. 19872001 and No. 59878004 is gratefully acknowledged. The second author is also grateful to the support of the National Science Fund for Distinguished Young Scholars under Grant No. 10025211.     

锥形光纤的偏振特性

随着光通信技术的不断发展，光纤的应用越来越广泛，而锥形光纤以其独特的传光方式越来越多地应用于光纤连接、成像及测量等领域。实验测定了不同锥角和不同长度锥形光纤的偏振特性。理论上，根据麦克斯韦方程组以及边界条件给出了光在理想光纤中的场分布，阐明了实际光纤中光的传输特性。论证了锥形光纤长度与其偏振特性的关系，进而利用几何光学方法对锥形光纤锥角与其偏振特性的关系作了定性说明。并用具体数据进行了定量计算，得出偏振光经锥形光纤传输或耦合后再传输到其终端所得到均是椭圆偏振光的结论。     

同步辐射小角x射线散射方法研究由城市固体垃圾制备的活性炭

应用同步辐射小角x射线散射方法研究了由不同城市固体垃圾制备而成的活性炭的孔结构-结果发现利用木类、纸张、塑料这三类典型垃圾组分的热解残余物为原料制备中孔发达的活性炭是可行的-活性炭的形态和结构取决于垃圾热解残余物的组分和热解程度等因素- 关键词： 小角x射线散射 活性炭 分形维数 平均孔径