Generation and removal of pits during chemical mechanical polishing process for MgO single crystal substrate

Magnesium oxide (MgO) single crystal is an important substrate for high temperature superconductor, ferroelectric and photoelectric applications. The function and reliability of these devices are directly affected by the quality of polished MgO surface because any defect on the substrate, such as pit or scratch, may be propagated onto device level. In this paper, chemical mechanical polishing (CMP) experiments were conducted on MgO (1 0 0) substrate using slurry mainly comprised of 1-hydroxy ethylidene-11-diphosphonic acid (HEDP) and silica or ceria particles. Through monitoring the variations of the pits topography on substrate surface, generation and removal mechanism of the pits were investigated. The experimental results indicate that the pits were first generated by an indentation or scratch caused by particles in the slurry. If the rate of chemical etching in the defect area is higher than the material removal rate, the pits will grow. If chemical reaction in the defect area is slower than the material removal rate, the pits will become smaller and eventually disappear. Consequently, these findings may provide insight into strategies for minimizing pits during CMP process.     

新型CaO／MgO高温CO2吸收剂的循环反应特性

本文采用3种方法制备了新型复合CaO／MgO吸收剂，考察了不同制备方法对复合钙基吸收剂碳化／煅烧循环反应性能的影响。结果表明，不同制备方法能决定了钙基吸收剂中CaO颗粒与MgO颗粒在微观层面上的不同均匀混合程度，因此得到吸收剂的性能差异巨大。采用溶胶凝胶燃烧合成法制备的CaO／MgO吸收剂的性能明显优于其他两种常见方法...     

Ni catalysts supported on nanocrystalline magnesium oxide for syngas production by CO2 reforming of CH4

CO2 reforming of methane (CDRM) was carried out over MgO supported Ni catalysts with various Ni loadings. The preparation of MgO supported Ni catalysts via surfactant-assisted precipitation method led to the formation of a nanocrystalline carrier for nickel catalysts. The synthesized samples were characterized by XRD, N2 adsorption-desorption, H2 chemisorption, TPR, TPO and SEM techniques. It was found that the high catalytic activity and stability of the prepared catalysts could be attributable to high dispersion of reduced Ni species and basicity of support surface. In addition, the effect of feed ratio, nickel loading and GHSV on the catalytic performance of CDRM over the catalysts were investigated.     

Ab initio density functional study of MgO (001) surface with topological defects

Magnesium oxide (MgO) is a useful material because of its catalytical properties. Moreover, surface defects have been found to play a crucial role in determining the activity and selectivity of catalytic surfaces. We present the results of a theoretical investigation of the electronic structure of the MgO (001) surface with three different topological defects. Our calculations are based on density functional theory (DFT) and the pseudopotential method. Slab geometry and periodic boundary conditions have been included with occupied orbitals expanded in plane waves. We compare the obtained results of the (001) MgO clean surface with those containing topological defects. The density of states DOS is analyzed in each case, as well as the chemical nature of the atoms belonging to the defects. © 2005 Wiley Periodicals, Inc. Int J Quantum Chem, 2005     

温度调谐MgO：LiNbO3晶体光参量振荡器

采用调Q Nd:YAG激光倍频光(0.532μm)泵浦温度调谐MgO:LiNbO_3晶体单、双谐振光参量振荡器(OPO包括DRO、SRO)的实验结果.双谐振(DRO)调谐范围达844.1～1411.3nm,最低泵浦阈值0.22mJ/pulse;单谐振(SRO)调谐范围达738.9～1032.2nm,最低泵浦阈值0.66mJ/pulse.最大能量转换效率为10.4%.     

Nucleation of CuGa Phases on the MgO(100) Surface

MSINDO calculations are presented for the coadsorption of Cu and Ga atoms as clusters and islands on the MgO(100) surface. The surface is simulated by a (8 × 8 × 3) Mg₉₆O₉₆ cyclic cluster. The relative number of Cu and Ga atoms was varied in order to understand the influence of copper rich and gallium rich phases. It was found that the copper atoms have a dominating influence on the structural arrangement in mixed phases. The adsorption sites of Cu and Ga atoms are preferably O atoms, but in mixed phases these sites are usually occupied by Cu atoms.     

Pulse reactions of methane, ethane and ethylene over Li-, La- and Sm-promoted MgO catalysts in the presence and absence of free oxygen

Pulse reaction of methane in the presence and absence of free (or gaseous) oxygen and that of ethane and ethylene in the absence of free oxygen over Li−MgO, La−MgO and Sm−MgO (Li or La or Sm/Mg ratio=0.1) have been investigated for elucidating the role of lattice and free oxygen in oxidative coupling of methane (OCM) over these catalysts. No significant role is played by the lattice oxygen from these catalysts in the OCM process. The presence of free oxygen is essential for all these catalysts to be active and selective in OCM process. However, lattice oxygen plays some role in ethane conversion but a very significant role in ethylene conversion over these catalysts.     

MgO－MgCl_2－H_2O溶液热化学研究

用精密量热仪对模拟合成的ＭｇＯ－２７．５６％ＭｇＣｌ_２－Ｈ_２Ｏ浓盐溶液进行恒沸盐酸－△Ｈ滴定。发现活性ＭｇＯ在２７．５６％ＭｇＣｌ_２－Ｈ_２Ｏ溶液中不同浓度时表现出不同的结果，结合该浓盐溶液的恒沸盐酸－ｐＨ滴定结果对反应机制进行了初步探讨。     

Dehydration-dehydrogenation of 1-phenylethanol over acid-basic catalysts

1-Phenylethanol transformation over several oxide catalysts (MgO, MgO-B₂O₃, ZrO₂, AlPO₄-SiO₂ and a Spanish sepiolite of Vallecas) was used as test reaction to determine their acid-basic properties. Different kinds of surface sites are proposed for dehydration and dehydrogenation processes. Thus, strong basic sites are related to the dehydrogenation process while both weak acid and basic sites are responsible for that of dehydration.     

以松木为模板研制高比表面积MgO固体强碱

以松木为模板, 乙酸镁为前驱物, 通过外模板法制备了一系列的MgO固体碱材料, 并用XRD、SEM、正己烷吸附、低温液氮吸附、Hammett指示剂法、ICP、IR和TG-DSC等手段对其进行了表征. 结果表明, 用该方法制备出来的MgO样品具有松木的生物形态, 由横截面积比较均一的棒状纳米颗粒构成, 不同于乙酸镁直接焙烧得到的MgO样品. 松木模板的使用有助于降低形成MgO样品的晶粒直径并明显提高了其比表面积, 与此同时, 这些具有生物形态的MgO样品仍保持了较高的碱强度, 可望用作优良的碱催化剂或催化剂载体.