Quantitative surface analysis by Auger and x-ray photoelectron spectroscopy

Recent developments in quantitative surface analysis by Auger (AES) and x-ray photoelectron (XPS) spectroscopies are reviewed and problems relating to a more accurate quantitative interpretation of AES/XPS experimental data are discussed. Special attention is paid to consideration of elementary physical processes involved and influence of multiple scattering effects on signal line intensities. In particular, the major features of core-shell ionization by electron impact, Auger transitions and photoionization are considered qualitatively and rigorous approaches used to calculate the respective transition probabilities are analysed. It is shown that, in amorphous and polycrystalline targets, incoherent scattering of primary and signal Auger and photoelectrons can be described by solving analytically a kinetic equation with appropriate boundary conditions. The analytical results for the angular and energy distribution, the mean escape depth, and the escape probability as a function of depth of origin of signal electrons as well as that for the backscattering factor in AES are in good agreement with the corresponding Mote Carlo simulation data. Methods for inelastic background subtraction, surface composition determination and depth-profile reconstructions by angle-resolved AES/XPS are discussed. Examples of novel techniques based on x-ray induced photoemission are considered.     

Monte Carlo simulation of full energy spectrum of electrons emitted from silicon in Auger electron spectroscopy

A Monte Carlo simulation including surface excitation, Auger electron‐ and secondary electron production has been performed to calculate the energy spectrum of electrons emitted from silicon in Auger electron spectroscopy (AES), covering the full energy range from the elastic peak down to the true‐secondary‐electron peak. The work aims to provide a more comprehensive understanding of the experimental AES spectrum by integrating the up‐to‐date knowledge of electron scattering and electronic excitation near the solid surface region. The Monte Carlo simulation model of beam–sample interaction includes the atomic ionization and relaxation for Auger electron production with Casnati's ionization cross section, surface plasmon excitation and bulk plasmon excitation as well as other bulk electronic excitation for inelastic scattering of electrons (including primary electrons, Auger electrons and secondary electrons) through a dielectric functional approach, cascade secondary electron production in electron inelastic scattering events, and electron elastic scattering with use of Mott's cross section. The simulated energy spectrum for Si sample describes very well the experimental AES EN(E) spectrum measured with a cylindrical mirror analyzer for primary energies ranging from 500 eV to 3000 eV. Surface excitation is found to affect strongly the loss peak shape and the intensities of the elastic peak and Auger peak, and weakly the low energy backscattering background, but it has less effect to high energy backscattering background and the Auger electron peak shape. Copyright © 2014 John Wiley & Sons, Ltd.     

Evaluation of elastic‐scattering cross sections for electrons and positrons over a wide energy range

Quantification of surface‐ and bulk‐analytical methods, e.g. Auger‐electron spectroscopy (AES), X‐ray photoelectron spectroscopy (XPS), electron‐probe microanalysis (EPMA), and analytical electron microscopy (AEM), requires knowledge of reliable elastic‐scattering cross sections for describing electron transport in solids. Cross sections for elastic scattering of electrons and positrons by atoms, ions, and molecules can be calculated with the recently developed code ELSEPA (Elastic Scattering of Electrons and Positrons by Atoms) for kinetic energies of the projectile from 10 eV to 50 eV. These calculations can be made after appropriate selection of the basic input parameters: electron‐density distribution, a model for the nuclear‐charge distribution, and a model for the electron‐exchange potential (the latter option applies only to scattering of electrons). Additionally, the correlation‐polarization potential and an imaginary absorption potential can be considered in the calculations. We report comparisons of calculated differential elastic‐scattering cross sections (DCSs) for silicon and gold at selected energies (500 eV, 5 keV, 30 keV) relevant to AES, XPS, EPMA, and AEM, and at 100 MeV as a limiting case. The DCSs for electrons and positrons differ considerably, particularly for medium‐ and high‐atomic‐number elements and for kinetic energies below about 5 keV. The DCSs for positrons are always monotonically decreasing functions of the scattering angle, while the DCSs for electrons have a diffraction‐like structure with several minima and maxima. A significant influence of the electron‐exchange correction is observed at 500 eV. The correlation‐polarization correction is significant for small scattering angles at 500 eV, while the absorption correction is important at energies below about 10 keV. Copyright © 2005 John Wiley & Sons, Ltd.     

Kinetic energies to analyze the experimental auger electron spectra by density functional theory calculations

In the Auger electron spectra (AES) simulations, we define theoretical modified kinetic energies of AES in the density functional theory (DFT) calculations. The modified kinetic energies correspond to two final-state holes at the ground state and at the transition-state in DFT calculations, respectively. This method is applied to simulate Auger electron spectra (AES) of 2nd periodic atom (Li, Be, B, C, N, O, F)-involving substances (LiF, beryllium, boron, graphite, GaN, SiO₂, PTFE) by deMon DFT calculations using the model molecules of the unit cell. Experimental KVV (valence band electrons can fill K-shell core holes or be emitted during KVV-type transitions) AES of the (Li, O) atoms in the substances agree considerably well with simulation of AES obtained with the maximum kinetic energies of the atoms, while, for AES of LiF, and PTFE substance, the experimental F KVV AES is almost in accordance with the spectra from the transitionstate kinetic energy calculations.     

Reminiscences with Martin P. Seah

Starting in the mid-1960s, the detection and display of peaks in Auger electron spectroscopy (AES) were improved by using modulation of the electron energy analyzer coupled with electron detection using a lock-in amplifier. This allowed a derivative of the electron energy distribution, N(E), to be obtained directly at the output of the lock-in amplifier thereby removing most of the effect from the relatively large, slowly varying, electron background signal due to secondary and backscattered electrons. For relatively low modulation amplitudes, the peak-to-peak intensity of the Auger features increased linearly with modulation amplitude (for a deflection-type analyzer), improving the signal-to-noise ratio. However, with relatively large modulations, the Auger peak shapes distorted, and the peak-to-peak heights eventually decreased in size, and this nonlinearity would cause problems in quantitative analysis. A universal curve was developed for singlet Auger peaks to approximate corrections due to this peak distortion, but an approach to exactly correct for such distortions was largely ignored by the AES community. This approach was called Dynamic Background Subtraction and is even relevant today as some Auger instruments using modulation and lock-in amplifiers are still being manufactured. This review paper describes approximate and exact corrections for modulation effects in AES data.     

X‐ray photoelectron spectroscopy and the pattern recognition method—their application to surface studies in CoPd alloys

In the present work, polycrystalline CoPd alloys in varying range of bulk atomic percent composition (Co30Pd70, Co50Pd50 and Co70Pd30) are investigated by means of X‐ray photoelectron spectroscopy (XPS). The results of conventional XPS quantitative multiline (ML) approach are compared to the results obtained on the basis of XPS lines shape analysis, where the selected XPS or X‐ray induced Auger electron (XAES) transitions, are processed using the pattern recognition method known as the fuzzy k‐nearest neighbour (fkNN) rule. The fkNN rule is applied to the following spectra line shapes: Pd MNV, Co 2p, Co LMM, Pd 3d and valence band, analysing electrons in a varying range of selected kinetic energies. Both methods showed the surface segregation of Pd in Co30Pd70 and Co50Pd50 alloys. The results of the ML, the binding energy shift (ΔBE) analysis and the fkNN rule remained in agreement. Discrepancies in quantitative results obtained using different approaches are discussed within the accuracy of the applied methods, differences due to mean escape depth (MED) of electrons in considered transitions, their depth distribution function, the sensitivity of electron transition line shape on the environmental change (weaker effect for the inner shell transitions, and stronger effect for the outer shell transitions and Auger electron spectroscopy (AES) electrons transitions) and the non‐uniform depth profile concentrations. Copyright © 2005 John Wiley & Sons, Ltd.     

DFT Simulation of Electron Spectra for Auger Electron and Photoelectron Spectra of Lithium Compounds

(Li, O, F)-Auger electron, and X-ray photoelectron spectra (AES, VXPS) of solid lithium compounds (Li metal, LiCl, LiF, Li₂O) are simulated by deMon density functional theory (DFT) calculations using the model molecules of the unit cell. Calculated valence XPS, core-electron binding energies (CEBE)s, and Li-, O-, and F-KVV AES for the substances correspond considerably well to experimental results. For the calculation of VXPS, the observed spectra of Li₂O pellet with chemisorbed CO₂ almost show agreement with simulation curve of the valence XPS according to the model for the 1/1 ratio of Li₂O/Li₂CO₃. In the case of AES calculation, we analyze the experimental AES with our modified Auger electron kinetic energy calculation method which corresponds to the two final-state holes at the ground state and at the transition-state in DFT calculation by removing 1 and 2 electrons, respectively. Experimental KVV AES of the Li atom, and (O, F) KVV AES of (Li₂O and LiF) in the substances almost agree well to the AES calculated with maximum kinetic energies at the ground state, and at the transition-state, respectively.     

Application of the analytical methods REM/EDX, AES and SNMS to a chlorine induced aluminium corrosion

Summary Scanning electron microscopy (SEM) with energy dispersive X-ray detection (EDX), Auger electron spectroscopy (AES) and sputtered neutral mass spectrometry (SNMS) have been used to characterize a chlorine induced corrosion of an aluminium metallisation. SEM/EDX detects the characteristic X-rays, that are emitted from the first few micrometers beneath the specimens surface after inner shell ionisation by the primary electrons. AES detects the alternatively ejected Auger electrons, that are generated within the topmost atomic layers of the sample. To obtain elemental concentration depth profils, the surface layers are removed by ion sputtering. Whereas AES detects the composition of the remaining surface, SNMS measures sputtered fluxes and does not suffer from preferential sputtering. As demonstrated by the example of a chlorine induced aluminium corrosion, these analytical methods are complementary with respect to quantification, chemical information and information depth. Only by simultaneous use measuring artifacts are detectable and able to be excluded from interpretation.     

Data Preprocessing in Peak Shape Analysis of Auger Electron Spectra

 Factor analysis is an established method of peak shape analysis in Auger electron spectrometry. The influence of different commonly used data preprocessing tools onto the results of factor analysis is demonstrated on AES depth profiles of multilayers and implantation profiles. For the analysis of Auger electron spectra it has been traditional to differentiate spectra by Savitzky and Golay’s method to remove background and to elucidate changes in peak shape. For phosphorus implanted in titanium it is shown that background removal works not ideal so that inelastic losses of the Ti(LMM) Auger peak can affect the result of factor analysis for the P(LVV) peak located at ca. 250 eV lower in kinetic energy. The contribution of such losses to the background can be corrected by shifting the spectra so that the high energy side above the peak equals zero. Numerical differentiation can introduce correlated error into the data set. To diminish edge effects the reduction of filter width at the edges and cutting off the outermost data points is recommended. The precision of spectrum reproduction is considered as a crucial test for the number of principal components. The reliability factor is investigated as a measure for the goodness of spectrum reproduction.     

XPS- and AES-investigations of electron and ion beam induced effects on SK16 glass surfaces

Summary Electron beam induced effects in the near surface region of SK16 glass samples (44% SiO₂, 25% B₂O₃, 28% BaO, 3% other) have been studied using Auger electron spectroscopy (AES) with 3 keV primary electrons at different current densities (4.7 mAcm^–2–75 mAcm^–2). It was found that the SiO₂ and B₂O₃ constituents dissociate during electron bombardment to form binding structures which are characteristic for elemental Si and B, respectively. To investigate the influence of the ion beam irradiation on the binding structure, the glass samples were bombarded with Ar⁺ ions of different kinetic energies (0.5 keV–5 keV), followed by XPS analysis. In comparison to the XPS signal of a virgin SK16 surface from a sample fractured in situ under UHV conditions, the FWHM of the photoelectron peaks were found to increase with the bombarding ion energy. Subsequent Auger spectra revealed that the ion bombardment also caused a dissociation of the SiO₂ and B₂O₃ components. Depending on the ion energy, a constant ratio between elemental and oxidized binding form is obtained.     

Application of positron annihilation induced Auger Electron Spectroscopy to the study of surface chemistry

Positron annihilation induced Auger Electron Spectroscopy (PAES), makes use a beam of low energy positrons to excite Auger transitions by annihilating core electrons. This novel mechanism provides PAES with a number of unique features which distinguishes it from other methods of surface analysis. In PAES the very large collisionally induced secondary electron background which is present under the low energy Auger peaks using conventional tecniques can be eliminated by using a positron beam whose energy is below the range of Auger electron energies. In addition, PAES is more surface selective than conventional Auger Spectroscopy because the PAES signal originates almost exclusively from the topmost atomic layer due to the fact that the positrons annihilating with the core electrons are trapped in an image correlation well just outside the surface. In this paper, recent applications of Positron Annihilation Induced Auger Electron Spectroscopy (PAES) to the study of surface structure and surface chemistry will be discussed including studies of the growth, alloying and inter-diffusion of ultrathin layers of metals, metals on semiconductors, and semiconductors on semiconductors. In addition, the possibilities for future application of PAES to the study of catalysis and surface chemistry will be outlined.     

俄歇化学位移及其在表面化学上的应用

从俄歇电子激发过程讨论了化学位移和元素化合价以及电负性的关系, 提供了常用元素在不同化合物中的俄歇电子动能及化学位移数据, 运用俄歇化学位移研究了氧在锌表面的吸附和初始氧化反应, Ti/SiO_2的界面固相反应机理以及摩擦过程中润滑膜的组成和结构.     

Morphology,surface roughness,electron inelastic and quasielastic scattering in elastic peak electron spectroscopy of polymers

In elastic peak electron spectroscopy (EPES), the nearest vicinity of elastic peak in the low kinetic energy region reflects electron inelastic and quasielastic processes. Incident electrons produce surface excitations, inducing surface plasmons, with the corresponding loss peaks separated by 1–20 eV energy from the elastic peak. In this work, X‐ray photoelectron spectroscopy (XPS) and helium pycnometry are applied for determining surface atomic composition and bulk density, whereas atomic force microscopy (AFM) is applied for determining surface morphology and roughness. The component due to electron recoil on hydrogen atoms can be observed in EPES spectra for selected primary electron energies. Simulations of EPES predict a larger contribution of the hydrogen component than observed experimentally, where hydrogen deficiency is observed. Elastic peak intensity is influenced more strongly by surface morphology (roughness and porosity) than by surface excitations and quasielastic scattering of electrons by hydrogen atoms. Copyright © 2007 John Wiley & Sons, Ltd.     

Growth of TiC films by Pulsed Laser Evaporation (PLE) and characterization by XPS and AES

Summary Thin films of TiC with a thickness of some 100 nm have been grown on Si(100) substrates by Pulsed Laser Evaporation (PLE). Advantages of PLE in comparison with more conventional growth methods e. g. PVD or CVD are reported. The feasibility of growing stoichiometric thin films of TiC by PLE was investigated. These films produced have been analysed in situ by X-ray photoelectron spectroscopy (XPS) and Auger electron spectroscopy (AES). XPS results and Auger sputter depth profiles indicate that the films grown between RT and 500°C are stoichiometric TiC. Film/substrate interdiffusion is observed at 600°C substrate temperature and higher.     

Multiple valence electron detachment following Auger decay of inner-shell vacancies in gas-phase DNA

We have studied soft X-ray photoabsorption in the doubly deprotonated gas-phase oligonucleotide [dTGGGGT–2H]²⁻. The dominating decay mechanism of the X-ray induced inner shell vacancy was found to be Auger decay with detachment of at least three electrons, leading to charge reversal of the anionic precursor and the formation of positively charged photofragment ions. The same process is observed in heavy ion (12 MeV C⁴⁺) collisions with [dTGGGGT–2H]²⁻ where inner shell vacancies are generated as well, but with smaller probability. Auger decay of a single K-vacancy in DNA, followed by detachment of three or more low energy electrons instead of a single high energy electron has profound implications for DNA damage and damage modelling. The production of three low kinetic energy electrons with short mean free path instead of one high kinetic energy electron with long mean free path implies that electron-induced DNA damage will be much more localized around the initial K-shell vacancy. The fragmentation channels, triggered by triple electron detachment Auger decay are predominantly related to protonated guanine base loss and even loss of protonated guanine dimers is tentatively observed. The fragmentation is not a consequence of the initial K-shell vacancy but purely due to multiple detachment of valence electrons, as a very similar positive ion fragmentation pattern is observed in femtosecond laser-induced dissociation experiments.

A K-shell vacancy in DNA that is induced by a (therapeutically relevant) soft X-ray of MeV carbon ion, decays by Auger processes accompanied by emission of at least 3 low energy electrons.     

Observation of resonant interatomic coulombic decay in Ne clusters

We have measured the electron spectra of Ne clusters after excitation with photon energies around the 2s inner valence threshold. At two photon energies below threshold, a resonantly enhanced surplus of low kinetic-energy electrons is observed. The kinetic energy of the peak does not vary with the photon energy and is slightly larger than the transition energy of Interatomic Coulombic Decay (ICD) above threshold. This leads us to assume that an ICD-like process is present. In analogy to the Auger and the resonant Auger decay this new phenomenon is termed resonant ICD.     

A unified scale for the Auger parameter: Methodology and benefits

The Auger parameter (AP) is a value extracted from the X-ray photoelectron spectrum (XPS) by addition of the binding energy of a photoelectron, for a given element in the spectrum, to the kinetic energy of the Auger electron emitted as the resulting hole in the electronic structure is filled by an electron from one of the outer orbitals. The value of the AP is sensitive to the polarization of electrons in the orbitals of neighbouring ions towards the photo-ionized atom and is thus related to other opto-electronic properties of the material. A correlation had been shown between the refractive index and the AP of aluminosilicates and thus the ability to compare, on a single chart, the AP's of the Al and Si ions gave important structural information. This comparison was made possible by normalising the individual APs to a common zero-point. In this contribution, the methodology employed is extended to a wider range of elements. The resulting ability, to compare and contrast the normalised AP, thus generated, greatly enhances the information available from XPS and thus relates it directly to the polarizability of the material's structure.     

Experimental derivation of Auger transition probabilities from X-ray excited Auger electron spectra in XPS

Auger transition probabilities were experimentally derived from dominant XAES and related XPS peaks observed in XPS spectra. Some values of derived probabilities were higher than 1, because of addition or subtraction of background signal from the XAES or/and XPS peak intensity. However, the probabilities obtained are recognized to be useful for practical quantification by XAES and AES.     

Surface cosegregationp phenomena on alloys and steels: Structural features and phase transitions

In recent years surface cosegregation phenomena have been studied on various alloy and steel surfaces using surface sensitive techniques such as Auger electron spectroscopy (AES), x-ray photoelectron spectroscopy (XPS), x-ray photoelectron diffraction (XPD) and low energy electron diffraction (LEED). Surface cosegregation causes the formation of two-dimensional surface compounds which may be stabilized by epitaxy on substrate surfaces of suitable structure and orientation. It has been found that in many cases surface compounds undergo phase transitions which are reviewed in this short report.