微波等离子体化学气相沉积法低温合成纳米碳管

纳米碳管的低温合成是纳米碳管合成的一个重要研究方向。在众多的合成方法 中,化学气相沉积法,特别是等离子体化学气相沉积法在纳米碳管的低温合成方面 意义重大。本研究利用溶胶-凝胶法结合等离子体还原,获得了负载在SiO_2上的纳 米金属钻颗粒。以甲烷为碳源、氢气为载气,在纳米金属钴颗粒的催化作用下,利 用微波等离子体化学气相沉积法在低于500 ℃ 的温度条件下合成了纯度较高的纳 米碳管。     

玻璃基片上纳米碳管电极的集成

利用微波等离子体化学气相沉积法在玻璃孔穴中定位生长纳米碳管电极, 分析了负偏压对纳米碳管电极生长的影响. 该电极对铜离子的电化学检测性能分析结果表明, 所制备的纳米碳管电极具有良好的电化学检测性能, 位于－0.0100 V附近的铜离子的还原峰峰形良好, 其电流在铜离子浓度为0.01~0.30 mmol•L^-1时, 与Cu²⁺浓度呈良好的线性关系, 相关系数为0.9975, 且具有较好的长期稳定性和重现性.     

氧化铝模板上定向纳米碳管的快速生长及超声切短

在阳极氧化铝（AAO）模板上电沉积催化剂,快速生长了定向纳米碳管,纳米碳管以顶部生长模式生长.采用了超声的方法来切短露头于AAO模板的纳米碳管,增加纳米碳管膜的定向性.结果显示随着超声时间的增加,纳米碳管的定向性增加.位于纳米碳管膜顶部的催化剂在碳管切短的同时被去除,得到了顶部开口的纳米碳管.解释了纳米碳管被超声切短的机理.     

氮掺杂多壁纳米碳管的合成和定量表征

 采用化学气相沉积法制备了 N 掺杂多壁纳米碳管, 并运用透射电子显微镜、N2 物理吸附、热重-差示扫描量热、程序升温氧化和 X 射线光电子能谱等手段对样品进行了表征. 结果表明, 纯化处理的纳米碳管表面 N 含量为 4.2%, 其中包括吡啶、己内酰胺、氧化吡啶、吡啶酮和吡咯等含氮官能团. 研究了各种含氮官能团燃烧的动力学行为. N 原子掺杂进入碳管的石墨结构中, 提高了表面碱性, 有可能用于催化与能源转化领域. 另外, 本文提供了一种可用于场发射器件的杯状闭合结构纳米碳合成方法.     

一种金刚石薄膜微波等离子体化学气相沉积方法及装置

本发明提供了一种利用磁控技术提高金刚石薄膜微波等离子体化学气相沉积设备沉积速率的方法和装置。该方法包含以下步骤:在微波等离子体化学气相沉积工艺中利用磁场形成电子捕集阱,电子在捕集阱的约束下,在衬底上方固定区域作封闭的曲线运动,电子在运动过程中碰撞反应气体碰撞生成前驱反应基团和石墨组织抑制基团,从而提高反应基团浓度,实现金刚石薄膜沉积速率的提高。使用该方法的反应腔装置由微波源、螺钉调配器、定向耦合器、同轴天线、波导装置、调节活塞、谐振腔、石英罩、磁场发生装置等组成。本发明优点是可以显著提高金刚石微波等离子体化学气相沉积工艺的薄膜沉积速率,工艺和装置简单,便于实施。     

直流负偏压对类金刚石薄膜结构的影响

在不同的直流负偏压下利用直流射频等离子体辅助化学气相沉积技术在单晶硅表面沉积得到了类金刚石薄膜,用拉曼光谱、红外光谱和原子力显微镜对薄膜的结构和形貌进行了表征.结果表明:无偏压时,沉积得到的薄膜呈现类聚合物结构且表面比较粗糙,而叠加了偏压后,薄膜表现出类金刚石薄膜的结构特征,随着偏压的增大,膜中的氢含量和sp3碳含量均逐渐减小,且薄膜的表面粗糙度逐渐减小.     

化学气相沉积法制备氧化锡自组装纳米结构

采用化学气相沉积法在镀有5-10 nm厚金膜的SiO2衬底上, 通过控制生长条件, 实现了二氧化锡纳米结构的自组装生长, 成功制备出了莲花状和菊花状的二氧化锡自组装纳米结构. 利用扫描电子显微镜、X射线衍射等表征分析手段对样品的表面形貌、结构及成份进行表征和研究. 并在此基础上, 讨论了两种自组装纳米结构的生长机制.     

减压化学气相沉积法制备规则螺旋状纳米碳管

以硅胶负载的Co纳米颗粒为催化剂,在低流量的减压体系中通过化学气相沉积法制备了规则螺旋状的纳米碳管.通过TEM和HRTEM研究了螺旋碳管的形貌、尺度分布以及管身、曲面和节点处的晶型;讨论了催化剂制备中pH值对催化剂的尺寸、规则程度和存在形态以致对螺旋碳管产量、管径厚度以及螺旋管的相对比例的影响;此外,还分析了反应压力对碳管生长的影响.     

过渡金属氧化物和金属负载型沸石催化剂上合成 纳米碳管及其表征

采用气相催化沉积法催化合成纳米碳管,比较了不同金属氧化物和金属负载型沸石催化剂以及不同分子筛载体对合成纳米碳管的影响,并用TEM,XRD表征其形貌和结晶度,用DTA-TG考察了纳米碳管的热和稳定性。实验结果表明纳米碳管的形成除了与金属种类有关外,还直接与催化剂的颗粒大小和分散状态有关。粒径在20nm左右的不规则形状的纳米粒子是形成纳米碳管的活性组分,非负载和负载型的催化剂均表明活性组分的粒径与纳米碳管的管径有一定的对应关系。化学提纯后能得到高纯度的纳米碳管;其管壁具有较好的石墨化结构,在空气中的热稳定性大于400℃,而在氮气中能维持到1200℃以上。     

含金属纳米粒子的层层自组装及单壁碳纳米管的催化生长

利用层间的静电吸附作用，重氮树脂和不同种类的含金属纳米粒子被依次吸附到硅片表面形成层层自组装膜。通过改变自组装膜的层数可以控制纳米粒子在表面吸附的量，同时利用重氮树脂的光敏特性可以实现纳米粒子在表面的图案化排布。以这些纳米粒子为催化剂，研究了单壁碳纳米管在硅片表面的化学气相沉积生长。     

镍基板上低温合成定向纳米碳管

纳米碳管具有非常优异的场发射效应 ,亮度高、均匀且稳定的纳米碳管场效应发射器 ,例如平板显示器、阴极射线管以及信号灯等有着非常广阔的应用前景 [1] .由于纳米碳管的场发射效应与纳米碳管的方向性有关[2 ] ,因此定向纳米碳管的制备及其场发射性能研究是当前的一个研究热点     

Iron silicide root formation in carbon nanotubes grown by microwave PECVD

Aligned carbon nanotubes have been grown using microwave plasma enhanced chemical vapor deposition (PECVD). The carbon nanotubes are nucleated from iron catalyst particles which, during growth, remain adherent to the silicon substrates. By analysis with high-resolution electron microscopy, we observe iron silicide roots penetrating into the silicon substrate at the interface of the catalyst particles and the substrate, thus providing strong adhesion of the carbon nanotubes onto the substrate. The iron silicide roots assist in the attachment of the catalyst particles to the substrate and play a role in the evolution of the catalyst particle morphology and resulting base growth mode. Carbon nanotubes grown by microwave PECVD could exhibit superior electrical and thermal transport properties over other PECVD processes, so an understanding of the growth mechanism is important for utilization in device applications.     

纳米碳管电极的制备与电化学检测性能研究

纳米碳管由于其独特的物理和化学性能及广阔的应用前景而备受关注,其相关研究涉及到众多领域[1￣3]。在电化学分析领域,与其它碳电极材料相比,纳米碳管电极具有较大的电极表面积和较高的电子传递速率,其使用能增大响应电流、降低检出限,是目前电化学分析电极中一个十分引人注目     

Direct evidence for root growth of vertically aligned single-walled carbon nanotubes by microwave plasma chemical vapor deposition

The root growth mode of extremely dense and vertically aligned single-walled carbon nanotubes (SWNTs) synthesized by microwave plasma chemical vapor deposition was clarified by a new method, marker growth, which does not require transmission electron microscopy. SWNT layers were grown intermittently on a substrate, and a line between the layers was used as a marker to identify the growth mode. Micro-Raman spectroscopy revealed that the SWNT layers have the same diameter distribution.     

Fabrication of carbon nanotube assemblies on Ni–Mo substrates mimics law of natural forest growth

We fabricated cone-shaped carbon nanotube assemblies, which align in a densely packed geometry like a cedar tree forest, on unpatterned nanocomposite substrate of Ni and Mo by the DC plasma assisted hot filament chemical vapor deposition. Carbon nanotubes initially grew on the nickel domains created during deposition, forming cone-shaped assemblies. These assemblies grew keeping their shape with decreasing their number density by merging together. The relationship between the mean volume and the number density of conical-shaped tree-like assemblies was similar to one of natural plant forest.     

General rules for selective growth of enriched semiconducting single walled carbon nanotubes with water vapor as in situ etchant

The presence of metallic nanotubes in as-grown single walled carbon nanotubes (SWNTs) is the major bottleneck for their applications in field-effect transistors. Herein, we present a method to synthesize enriched, semiconducting nanotube arrays on quartz substrate. It was discovered that introducing appropriate amounts of water could effectively remove the metallic nanotubes and significantly enhance the density of SWNT arrays. More importantly, we proposed and confirmed that the high growth selectivity originates from the etching effect of water and the difference in the chemical reactivities of metallic and semiconducting nanotubes. Three important rules were summarized for achieving a high selectivity in growing semiconducting nanotubes by systematically investigating the relationship among water concentration, carbon feeding rate, and the percentage of semiconducting nanotubes in the produced SWNT arrays. Furthermore, these three rules can be applied to the growth of random SWNT networks on silicon wafers.     

Synthesis of double-walled carbon nanotubes by catalytic chemical vapor deposition and their field emission properties

Double-walled carbon nanotubes (DWCNTs) were synthesized by catalytic chemical vapor deposition using Fe-Mo/MgO as a catalyst at 1000 degrees C under the mixture of methane and hydrogen gas. The nanotubes were purified by acid but were not damaged. Thermogravimetric analysis revealed the purity of the tubes to be about 90%. The high-resolution transmission electron microscopy image showed that DWCNTs have inner tube diameters of 1.4-2.6 nm and outer tube diameters of 2.3-3.4 nm. We observed radial breathing modes in Raman spectra, which are related to the diameter of inner nanotubes. The purified DWCNTs were mixed with organic vehicles and glass frit, and then they were screen-printed on glass substrate coated with indium tin oxide. The field emission properties of the screen-printed DWCNT films were examined by varying the amount of glass frit ingredient within the DWCNT paste. The results showed that DWCNT emitters had good emission properties such as turn-on field of 1.33-1.78 V/microm and high brightness. When the applied anode voltage was gradually increased, current density and brightness became saturated. We also observed DWCNTs adsorbed on the anode plate; they were DWCNTs peeled off from the cathode plate for field emission measurement.     

Creating patterned poly(dimethylsiloxane) surfaces with amoxicillin and poly(ethylene glycol)

This paper reports a simple microwave plasma patterning of poly(dimethylsiloxane) (PDMS) surfaces, which is accomplished by allowing selective surface areas to microwave plasma exposure in the presence of gaseous monomer. When maleic anhydride is used for microwave plasma reaction in the presence of physical barrier on the PDMS substrate, the resulting patterned surfaces with chemically bonded maleic anhydride and carboxylic acid groups are generated. In this particular study we attached amoxicillin via ammonolysis under weak base conditions in the presence of a catalyst as well as poly(ethyleneglycol) (PEG). A combination of internal reflection IR imaging (IRIRI) and atomic force microscopy (AFM) revealed that amoxicillin and PEG can be readily reacted on the microwave plasma patterned PDMS surfaces. Surface areas directly exposed to microwave plasmons exhibit the highest reactivity due to higher content of functional groups. These studies also show that molecular weight of PEG has also significant effect on kinetics of surface reactions.