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1.
反应磁控溅射法制备HfO2金刚石红外增透膜   总被引:1,自引:0,他引:1  
采用纯铪(Hf)金属靶,在氧+氩反应气氛中进行了HfO2薄膜直流反应磁控溅射沉积.首先在单晶硅片上沉积薄膜,研究工艺参数改变对薄膜的影响,然后选择较优的工艺在金刚石表面沉积符合光学厚度的薄膜,达到增透减反射效果.利用X射线光电子能谱(XPS)研究了O2/Ar比例对薄膜组成的影响.利用X射线衍射仪(GIXRD)和椭偏仪(Ellipsometer)研究了不同衬底温度对氧化铪薄膜组织结构和光学性能的影响.采用傅立叶红外光谱仪(FTIR)检测了镀膜前后金刚石红外透过性能,发现双面镀制HfO2薄膜能够有效提高金刚石在8~12 μm的红外透过性能,在8 μm处最大增透可达21.6;,使金刚石红外透过率达到88;;在3~5 μm范围,双面镀制了HfO2薄膜的金刚石平均透过率达66.8;,比没有镀膜的金刚石在该处的平均透过率54;高出12.8;.  相似文献   

2.
采用分步电化学沉积法,在FTO玻璃基底上成功制备出GaAs薄膜.采用高分辨X射线衍射仪(HRXRD)、场发射扫描电镜(FESEM)、紫外可见光光度计(UV-Vis)、荧光光度计(PL)对不同退火工艺下所制备的薄膜的晶体结构、形貌及光学性能进行表征.结果表明:GaAs薄膜为面心立方晶系,沿(111)方向择优生长.随着退火温度的升高,薄膜内颗粒逐渐增大,Ga与As原子量比发生变化,Eg值减小,光致发光峰为红外发射峰.同时对其形成机理进行了探讨.  相似文献   

3.
采用快速热退火方法对热丝CVD沉积的非晶硅薄膜进行了晶化处理.利用傅里叶红外光谱研究了非晶硅薄膜脱氢处理前后Si-Hx含量的变化;用X射线衍射(XRD),拉曼(Raman)光谱和扫描电子显微镜研究了硅薄膜的结构性能与退火温度的关系;利用电导率测试研究了硅薄膜的电学性能对退火温度的依赖性.研究发现,脱氢处理可以有效的抑制快速热退火引起的硅薄膜中微裂纹的出现.随着退火温度由700℃升高至1100℃,硅薄膜的结晶性逐渐升高,在1100℃下快速热退火15 s制备的多晶硅薄膜的晶化率高达96.7;.同时,硼掺杂硅薄膜的电导率也由700℃退火的1.39×10-6 S·cm-1提高至1100℃退火的16.41 S·cm-1,增大了7个数量级.  相似文献   

4.
ZnO/SnO2复合透明导电膜性能的研究   总被引:1,自引:0,他引:1  
采用直流磁控溅射工艺在SnO:透明导电玻璃上沉积一层ZnO膜,制备出ZnO/SnO2复合透明导电膜,作为硅薄膜太阳电池前电极.比较了具有不同ZnO厚度的复合膜氢轰击前后的光电性能,发现适当控制ZnO膜的厚度至关重要.研究了快速热退火(RTA)对薄膜的结构及光电性能的影响,发现400℃退火能够改善薄膜的光学性能.  相似文献   

5.
采用直流磁控反应溅射法在未加热衬底上沉积TiO2薄膜,以紫外灯为光源进行了薄膜光催化降解亚甲基蓝溶液的实验,研究了沉积工艺参数和后处理退火温度对薄膜光催化性能的影响.结果表明:经过500℃退火、厚度较大的薄膜样品光催化效率较高;膜厚基本相同的样品,沉积时电源功率较小、Ar/O2流量比例较小的薄膜光催化效率较高.  相似文献   

6.
电子传输层是钙钛矿太阳电池的重要组成部分.采用原子层沉积的方法制备二氧化钛薄膜,并将其作为电子传输层制备了平面钙钛矿太阳电池.系统研究了二氧化钛薄膜厚度和退火温度对钙钛矿太阳电池性能的影响.研究结果表明,TiO2的沉积速率约为0.41 ?/cycle,13 nm左右的二氧化钛薄膜能够获得较好的电池性能;后期退火改善了TiO2薄膜的光学和电学性能,但是退火产生的微小裂纹限制了电池的性能,因此,选择90 ℃退火条件下制 备的二氧化钛.最终利用原子层沉积制备的TiO2得到了17.1;的电池效率.  相似文献   

7.
沉积压力对磁控溅射纳米硅薄膜结构和性能影响   总被引:2,自引:1,他引:1  
采用射频(RF)磁控溅射方法在玻璃衬底上制备了氢化纳米硅薄膜,研究了沉积压力(4~9 Pa)对薄膜结构和性能的影响.利用XRD、SEM、紫外-可见光分光光度计、傅立叶红外吸收光谱仪(FT-IR)及四探针电阻测试仪等对薄膜结构和性能进行了表征.结果表明:随着沉积压力的提高,薄膜结晶程度逐渐变差,晶粒尺寸降低;薄膜光学带隙在2.04~2.3 eV之间,且随着沉积压力的提高而增加;薄膜具有SiH、SiO、SiH2和SiH3振动吸收峰, 随着沉积压力的增加,SiH、SiH2振动吸收峰向高波数移动,薄膜方块电阻在132~96 Ω/□,且随着沉积压力的升高而降低.  相似文献   

8.
利用快速热退火法制备多晶硅薄膜   总被引:9,自引:6,他引:3  
为了制备优质的多晶硅薄膜,该论文研究了非晶硅薄膜的快速热退火(RTA)技术.先利用PECVD设备沉积非晶硅薄膜,然后把其放入快速热退火炉中进行退火.退火前后的薄膜利用X射线衍射(XRD)仪、Raman光谱仪及扫描电子显微镜(SEM)测试其晶体结构及表面形貌,利用电导率测试设备测试其暗电导率.研究表明退火温度、退火时间以及沉积时的衬底温度对非晶硅薄膜的晶化都有很大的影响.  相似文献   

9.
以含一定比例Ga与As2O3的酸性溶液(pH=2.5)作为前驱溶液,以Pt片为对电极,饱和甘汞电极(SCE)为参比电极,室温下利用三电极电化学站在Ti衬底上恒压沉积GaAs薄膜.然后对GaAs薄膜进行退火处理.利用X射线衍射仪(XRD)、场发射扫描电子显微镜(FESEM),以及荧光光度计(PL)分别对不同沉积电压下所制备的薄膜的晶体结构,薄膜形貌以及光学性能进行分析表征.结果表明:沉积电压以及退火过程对GaAs薄膜的形貌、晶体结构、薄膜质量有很大影响,所制备的GaAs薄膜退火前晶化程度较低,部分粒子表现出不均匀团聚.光致发光峰为红光发射,且单色性好.退火后的GaAs薄膜为面心立方晶型,呈纳米颗粒状,薄膜的光电性能明显提高.  相似文献   

10.
采用中频双极脉冲(IFBP)和射频(RF)磁控溅射分别在(100)取向的单晶Si衬底上沉积C掺杂h-BN(h-BN:C)薄膜,随后在95;Ar+5;H2混合气氛中进行700℃退火处理,对其结构、化学组成、元素的化学价态、表面形貌以及导电性进行了分析研究.结果表明:两种溅射方法均成功在Si基片上制备出致密连续的h-BN:C薄膜,其电阻率可低至2.9×104~2.5×105Ω·cm.对比发现两种制备方法中IFBP磁控溅射具有较快沉积速率,制备出的h-BN:C薄膜结构更稳定,结晶性更好;而RF磁控溅射制备的h-BN:C薄膜经700℃退火处理后形成了层状结构.在溅射气氛中掺入一定量H2对提高h-BN:C薄膜稳定性极为重要,而沉积后的低温退火处理更可提高其结晶性和稳定性.  相似文献   

11.
A review of measurement of thermophysical properties of silicon melt   总被引:2,自引:0,他引:2  
Measurements of thermophysical properties of Si melt and supplementary study of X-ray scattering/diffraction by the authors' group were reviewed. The values obtained differed variously from those of literature. Density was 2–3% larger, surface tension 20–30% smaller, viscosity up to 40% larger, electrical conductivity 8% smaller, spectral emissivity more or less in good agreement with literature values, and thermal diffusivity a few percent larger. An anomalous density jump was found near the melting point. Surface tension and viscosity also showed anomaly. A strange time-dependent change of density was observed over 3 h after melting. X-ray analyses suggested a slight change in local atom ordering, but showed no sign of cluster formation. An addition of 0.1 at% gallium caused the density jump to disappear, while that of boron caused no change. An EXAFS study of the former melt indicated a strong interaction between Ga and Si atoms as if molecules of GaSi3 existed. The implications of the measured properties are a possibility of soft-turbulence in an Si melt in a relatively large crucible, a more complicated manner of intake of oxygen depleted molten Si from the free surface region to underneath the growing crystal, and a relaxation of the melt after melting arising from trapped gas species.  相似文献   

12.
纳米材料的化学组分及含量影响其光、电、声、热、磁等物理性能,电子显微分析是表征纳米晶体化学组分的重要方法之一.本文综述了X-射线能谱(EDS)、X-射线波谱(WDS)、电子能量损失谱(EELS)和选区电子衍射(SAED)等现代电子显微分析技术在表征纳米晶体化学组分、形貌、尺寸和结构等方面的应用及其研究进展,并比较了这些分析方法存在的差异,提出了其应用中存在的不足及今后的研发方向.  相似文献   

13.
原位氮化法制备TiN纳米粉体   总被引:3,自引:0,他引:3  
用溶胶凝胶法合成的纳米TiO2粉体作为原料,将该粉体在氨气中进行原位氮化制备了TiN纳米粉体.用XRD,TEM,化学分析等手段对合成的TiN纳米粉体的物相组成、形貌、成分进行了分析.实验分析表明:在1000℃和1100℃下分别氮化5h,可以制备粒径大约为40nm和80nm的TiN粉体,其TiN的含量分别为95.40;和98.37;;而在1000℃条件下氮化时间减少到2h时,TiN的含量仅为58.36;.氮化温度和氮化时间是合成纳米TiN的重要因素,提高合成温度和延长氮化时间均可形成纯度较高的TiN纳米粉体,但延长氮化时间更有利于获得粒径小的氮化钛粉体.  相似文献   

14.
Abstract

A fragment of a DNA molecule is considered as one of the channels of metabolic electron transfer. The heterogeneity of the complementary chains is effectively taken into account. This made it possible to find the speed of the electron injected into the DNA conduction band and the current density that it creates. Estimates of electron mobility in nucleic acid chains are made. They were an order of magnitude smaller than that of typical semiconductors. For the specific conductivity of nucleic acid chains, estimates provide a conductivity of one to two orders of magnitude lower than in graphite.  相似文献   

15.
A novel homologous series of ethylene derivatives of thermotropic liquid crystals has been synthesized. The methoxy to octyloxy derivatives are nematogenic, the decyloxy to tetradecyloxy derivatives are smectogenic, in addition to nematogenic, and the hexadecyloxy homologue is smectogenic only. All the members of the series are enantiotropically mesogenic. Thermotropic behavior was determined by an optical polarizing microscope equipped with a heating stage and Differential Scanning Calorimetry (DSC) study. Analytical and spectral data confirm the molecular structures of homologues (infrared, nuclear magnetic resonance, mass spectra, X-ray, and DSC data). Textures of the nematic phase are threaded or Schlieren and that of smectic phase are focal conic fan-shaped of smectic A or C. Transition curves of the phase diagram behave in a normal manner except one or two deviations from the normal trend. The mesophase range (Sm+N) varies from 3°C to 44°C. The average thermal stability for smectic is 93°C and that for nematic 117.4°C. The LC behavior of the novel series is compared with a structurally similar known series.  相似文献   

16.
为制备适用于干压成型的氧化铝造粒粉,研究了PEG聚合度对氧化铝造粒粉微观形貌、流动性和松装密度的影响.结果表明PEG的聚合度对氧化铝浆料粘度影响显著,PEG2000-6000是较为理想的粘结剂选择,造粒粉的流动性与环境温度及湿度相关.采用正交实验设计,以造粒粉的流动性和松装密度为评价指标,对PEG聚合度、粘结剂添加量和固含量进行了优选,其影响顺序为PEG聚合度>固含量>粘结剂添加量.以优选参数PEG6000、添加量为4wt;、固含量为80wt;,制备了性能优良的氧化铝喷雾造粒粉.  相似文献   

17.
近化学计量比铌酸锂晶体组分测定与缺陷观察   总被引:2,自引:0,他引:2  
采用助熔剂提拉法生长得到近化学计量比LiNbO3晶体.用多种方法测定了晶体组分,结果表明生长得到的晶体中[Li2O]含量为49.80;摩尔分数;对晶体缺陷的研究表明晶体质量有待提高,并分析了晶体中出现包裹物的原因.  相似文献   

18.
D. Stoyan  H. Hermann  A. Elsner 《Journal of Non》2011,357(6):1508-1515
An improved statistical characterization of disordered structures such as metallic glasses, random porous media, or granular matter is presented. Suitable structure models follow the idea of dense random packed spheres, where the spheres represent atoms and particles in the case of metallic glasses and porous or granular matter, respectively. The geometry of the empty space between the atoms or particles is described by means of the already otherwise successful concept of so-called contact distributions. Their exact mathematical forms are unknown for hard sphere systems. Knowledge on these is obtained by means of Monte Carlo simulations of the structure models. The numerical results are approximated by simple and general mathematical expressions, with parameters that can be easily determined. These may serve as additional tools for the structural characterization of disordered matter, including systems of partly penetrable spheres.  相似文献   

19.
采用共沉淀-热处理工艺合成了尖晶石型锰锌铁氧体粉末,利用正交试验优化了制备工艺。利用X射线衍射仪(XRD)扫描电子显微镜(SEM)和振动样品磁强计(VSM)对粉体的显微结构和静磁性能进行了研究。结果表明:热处理温度为1350℃、保温时间为3.5 h、进料比为1.5时,若前驱物的pH值为6,制备的样品的主晶相为锰锌铁氧体;若前驱物的pH值为7 9,则形成单相尖晶石型锰锌铁氧体,样品的饱和磁化强度先增大后减小,矫顽力逐渐增大。pH值为7时,配方为Fe∶Mn∶Zn=68.4816∶17.1368∶14.381,进料比为1.5,滴加时间为40 min,反应温度为50℃,不加表面活性剂时得到的样品具有较高的饱和磁化强度。  相似文献   

20.
P.J. Lezzi 《Journal of Non》2011,357(10):2086-2092
The enthalpy of mixing of mixed alkali (Na2O and K2O) silicate glasses containing various concentrations of alumina was determined using an ion-exchange equilibrium method. For glasses with a constant alkali concentration, the enthalpy of mixing was found to become less negative with alumina addition. Consistent with our previous results on the enthalpy of mixing of alumina-free mixed alkali silicate glasses, the magnitude of enthalpy of mixing exhibited a good correlation with the molar volume mismatch of the corresponding two single alkali glasses as well as with the extent of conductivity mixed alkali effect, e.g. excess activation energy of conductivity, ΔE. The reduction of the magnitude of the enthalpy of mixing with alumina addition can be attributed to the reduction of non-bridging oxygen and ionic field strength. Combining the present results with results obtained earlier, the magnitude of the enthalpy of mixing for all mixed alkali (Na2O and K2O) silicate glasses with and without alumina was expressed by a simple function of a modified Tobolsky parameter, which takes into account the alkali concentration and the difference in cation-to-effective anion distances. The enthalpy of mixing data of the mixed alkali glasses was then compared with reported experimental data on the conductivity of mixed alkali aluminosilicate glasses. What appears to be conflicting experimental data can be understood in terms of the magnitude of the enthalpy of mixing and we can conclude that the mixed alkali effect is closely correlated with the negative enthalpy of mixing.  相似文献   

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