CMP加工后芯片三维形貌表征参数体系

针对当前化学机械抛光(chemical mechanical polishing, CMP)后的芯片表面形貌的表征常常只停留在研究二维轮廓特征，无法完整地表达整个三维表面形貌信息，仅使用单一的评定指标来表征其表面的不平整程度等问题，建立了1个科学、全面的芯片表面形貌评定参数体系应用于工程表面粗糙度评定中，通过分析芯片表面形貌的幅值分布特征，结合芯片表面的统计特性，基于ISO 25178-2标准表征参数建立适用于芯片表面三维评定的表征参数体系. 仿真结果表明:CMP加工后芯片表面形貌的幅值近似服从高斯分布；分形维数D可以准确表征芯片表面形貌，反映其复杂程度；通过幅度参数、空间参数、混合参数和分形参数建立的芯片表面形貌评定体系能够从多方面表征芯片三维表面形貌特征，对芯片表面形貌参数评定具有一定的可行性.      

粗糙表面接触力学问题的重新分析

为了克服基于统计学参数的接触模型的尺度依赖性以及现有接触分形模型推导过程中初始轮廓表征受控于接触面积或取样长度的不足,基于粗糙表面轮廓分形维数D、尺度系数G和最大微凸体轮廓基底尺寸l,建立了新的粗糙表面接触分形模型,探讨了微凸体变形机制、粗糙表面的真实接触面积和接触载荷的关系,揭示了接触界面的孔隙率和真实接触面积随端面形貌、表面接触压力等参数变化的规律,给出了不同形貌界面被压实的最大变形量.结果表明:微凸体变形从弹性变形开始,并随着平均接触压力pm的增大逐步向弹塑性变形和完全塑性变形转变;接触界面的初始孔隙率φ_0随D的增大而增大,压实孔隙所需要的最大变形量δ也随之增大;接触压力p_c增大,孔隙率φ减小,并随着D的增大和G减小,φ快速减小,直至填实,变为零;D较小时,G的增大对真实接触面积的增大影响较小;D较大时,G的增大对真实接触面积的增大作用明显.研究成果为端面摩擦副的润滑与密封设计提供了理论基础.     

表面轮廓分形维数计算方法的研究

阐述了表面轮廓分形和分形曲线的基本概念，对目前常用于表面轮廓分形维数的４种计算方法的基本思路作了评介，指出这些方法的计算结果都存在一定的偏差，对选择不同计算尺度得到的分形维数表现出较大的不稳定性，致使分形维数难以准确地反映表面轮廓的真实复杂特征．根据表面轮廓的均方差与区间尺度成比例的性质，提出了表面轮廓分形维数计算的协方差加权法．通过与Ｗｅｉｅｒｓｔｒａｓｓ－Ｍａｎｄｅｌｂｒｏｔ分形函数曲线的分形维数计算的比较，协方差加权法所得表面轮廓分形维数的稳定性良好，计算结果的准确性也明显提高，可以简化表面形貌的识别过程，为摩擦学研究中更准确地描述粗糙表面的复杂特征提供了一种简便适用的新方法．     

砂轮约束磨粒喷射加工表面的分形及摩擦特性研究

对砂轮约束磨粒喷射精密光整加工(Abrasive Jet Precision Finishing,AJF)表面进行分形维数和摩擦磨损特性研究.试验在MB1332A外圆磨床上完成,加工式样为Ra为0.6μm左右的45#钢.加工表面形貌和微观几何参数用MICROMESVRE2表面轮廓仪测量;应用分形维数和功率谱密度函数评价磨削加工和光整加工表面的微观形貌特征;利用MG-2000型销盘式高速高温摩擦磨损试验机研究表面形貌和分形维数对摩擦系数和磨损性能的影响.试验结果表明:磨粒喷射精密光整加工使工件表面高度特性参数大幅度降低,轮廓波动平均间距减小,波纹细密性提高.随着加工循环的增加,Ra值由0.6μm下降到0.2μm左右.光整加工表面摩擦系数和磨损量与磨削加工表面相比明显降低,摩擦磨损试验结果和分形维数变化相吻合.     

粗糙表面接触力学问题的重新分析

为了克服基于统计学参数的接触模型的尺度依赖性以及现有接触分形模型推导过程中初始轮廓表征受控于接触面积或取样长度的不足,基于粗糙表面轮廓分形维数$D$、尺度系数$G$ 和最大微凸体轮廓基底尺寸$l$,建立了新的粗糙表面接触分形模型,探讨了微凸体变形机制、粗糙表面的真实接触面积和接触载荷的关系,揭示了接触界面的孔隙率和真实接触面积随端面形貌、表面接触压力等参数变化的规律,给出了不同形貌界面被压实的最大变形量. 结果表明:微凸体变形从弹性变形开始,并随着平均接触压力$p_{\rm m}$ 的增大逐步向弹塑性变形和完全塑性变形转变;接触界面的初始孔隙率$\phi_{0}$ 随$D$ 的增大而增大,压实孔隙所需要的最大变形量$\delta $ 也随之增大;接触压力$p_{\rm c}$ 增大,孔隙率$\phi$ 减小,并随着$D$ 的增大和$G$ 减小,$\phi$ 快速减小,直至填实,变为零;$D$ 较小时,$G$ 的增大对真实接触面积的增大影响较小;$D$ 较大时,$G$ 的增大对真实接触面积的增大作用明显. 研究成果为端面摩擦副的润滑与密封设计提供了理论基础.      

牙齿表面微观磨损形貌的数值化分析研究

牙齿表面磨损一般通过显微镜进行形貌图像表征分析，而数值化分析牙齿表面磨损形貌的工作相对较少. 本研究中通过白光共聚焦显微镜，Solarmap Universal 软件和Tooth-Frax软件对牙齿咬合前后表面磨损形貌进行数值化分析，建立磨损前后表面尺度敏感曲线. 结果显示:牙齿表面磨损形貌可以通过轮廓分形分析法建立相应的表面尺度敏感曲线，形成表面磨损尺度敏感数字信号. 本工作的主要目的是寻求通过表面磨损数值化分析为研发牙齿磨损动态监测设备提供理论基础和技术支撑.      

椭圆孔三维应力集中及其对疲劳强度的影响

应用有限单元法对有限厚中心椭圆孔板的三维应力集中进行了分析。发现厚板的最大应力集中总是与自由表面保持一固定的距离而不随板厚的增加而变化;椭圆形状因子越小,距离自由表面越近。得到了最大三维应力集中、表面应力集中与相应平面解之间的近似关系和经验公式;研究了厚度对疲劳强度的影响,并给出相应的影响系数。     

粗糙表面测量轮廓的分形插值模拟

引入粗糙表面的分形插值理论，提出用分形插值函数模拟粗糙表面轮廓的方法。并以车削，磨削及磨损表面为研究对象，对粗糙表面进行了分形插值模拟，系统地研究了影响其模拟模拟效果的因素和规律。发现可以采用分形插值理论来模拟或表征具有分形特征的粗糙表面。     

基于分维理论的爆炸焊接界面形貌的定量表征

以爆炸焊接界面形貌为研究对象,利用分形理论研究其界面特征。运用三维超景深显微镜获得界面形貌图像,利用Matlab图像分析技术对界面形貌进行二值化处理,基于分形理论计算图像分维值以及多重分维谱。由分维值及多重分形谱的物理意义可知,轮廓分维值是对界面不规则程度宏观度量,而多重分形谱能定量表征界面的起伏程度及高度分布。因而,通过对界面结构进行分形几何分析,可实现界面形貌定量表征,弥补当前定性分析的不足。     

铝-铝爆炸焊接界面剪切行为与断口形貌关系研究

为了研究爆炸焊接界面的剪切损伤行为,本文对铝-铝复合材料开展剪切试验,并基于分形理论对试件剪切断口界面进行表征,尝试建立界面剪切强度与断口轮廓分维值及其多重分形谱关系。结果表明,焊接界面剪切强度随加载速率升高而降低,异于通常金属剪切行为;但从断口形貌及其轮廓分形维可认识界面剪切强度变化原因。此外,多重分形谱起点与终点间的高度差和跨度差值反映了界面的峰、谷落差及分布特征,是界面形貌特征的立体反映,并在数值上也与剪切强度正相关。     

The effects of surface topography on the method of caustics

An investigation was performed to establish the effects of surface topography on the determination of stress intensity factors of opaque components using the method of caustics. Theoretical predictions of caustics produced by curved surfaces were generated and validated by experiment. The errors introduced for stress intensity factors determined at various radii of curvature were assessed. It was found that relatively small surface curvatures caused significant errors in the stress intensity factor. These errors were affected by the initial radius, load and material properties.     

Dynamic analysis of single and cyclic indentation of an elastic-plastic multi-layered medium by a rigid fractal surface

Dynamic indentation of an elastic-plastic multi-layered medium by a rigid rough surface that exhibits fractal behavior was analyzed with the finite element method. A sufficiently large mesh was used to avoid the effects of the faster propagating dilatation waves after they were reflected from the artificial mesh boundaries. Single-indentation results illustrate the significance of the thickness of the surface layer and the indentation speed on the contact pressure distribution and subsurface stresses and strains. The initiation of yielding and the development of plasticity are interpreted in the context of results for the von Mises equivalent stress and equivalent plastic strain obtained during the loading and unloading phases of an indentation cycle. Cumulative plasticity and elastic shakedown are discussed in light of results revealing the evolution of deformation in the multi-layered medium due to cyclic indentation. The analysis provides insight into the importance of indentation speed, layer thickness, surface topography, and indentation cycle on the mechanical response of a multi-layered medium in dynamic contact with a rough surface exhibiting multi-scale (fractal) roughness.     

Stress analysis of a layered elastic solid in contact with a rough surface exhibiting fractal behavior

A contact stress analysis is presented for a layered elastic half-space in contact with a rough surface exhibiting self-affine (fractal) behavior. Relationships for the mean contact pressure versus representative strain and the real half-contact width versus elastic properties of the layer and the substrate, asperity radius, layer thickness, and truncated half-contact width were derived from finite element simulations of a layered medium compressed elastically by a rigid cylindrical asperity. These relationships were incorporated in a numerical algorithm that was used to obtain the contact pressure distributions and stresses generated by the asperity contacts formed at the interface of the layered medium and the fractal surface. Analytical solutions illustrate the significance of the elastic material properties, layer thickness, and surface topography (roughness) on global parameters such as normal load and real contact area. Results for the contact pressure distribution and the surface and subsurface stresses provide insight into the initiation of yielding and the tendency for cracking in the layered medium. It is shown that cracking at the surface and the layer/substrate interface is more likely to occur in the case of a stiff layer, whereas surface cracking is more prominent for a relatively compliant layer.     

基于分形理论的双渐开线齿轮接触应力研究

综合考虑接触面粗糙度、材料特性等因素对齿轮接触应力的影响，基于分形理论和经典Hertz接触理论建立双渐开线齿轮分形接触模型. 该模型中，影响载荷和实际接触面积的主要因素包括分形维数、粗糙度幅值和材料特性参数. 理论分析表明:分形维数一定时，真实接触面积随着载荷的增大而增大；载荷一定时，接触面积随着粗糙度幅值的增大而减小；随着材料特性参数值的增加，在一定程度上加强了软材料轮齿承载能力，同时会使得微凸体由弹性变形到塑性变形的临界面积减小. 对比分形接触模型和有限元模型两种计算双渐开线齿轮轮齿接触应力方法，结果证明了分形接触模型计算双渐开线齿轮接触应力的有效性.      

考虑摩擦因素的结合面切向接触刚度分形预估模型及其仿真分析

为建立更完善和精确的结合面接触刚度模型,本文根据分形理论和摩擦学原理,从微观角度建立了考虑摩擦因素的结合面切向接触刚度分形预估模型.通过数值仿真分析研究了接触载荷、分形维数、摩擦系数和接触面积等因素对结合面切向接触刚度的影响.分析结果表明:结合面切向接触刚度随法向载荷和分形维数的增加而增大,而随分形尺度参数的增大而减小;摩擦系数对结合面切向接触刚度的影响较大,不同实际接触面积下的切向刚度相差较大;当分形维数较小时,摩擦系数对结合面切向刚度的影响将降低.这些研究对于进一步开展结合面的动力学特性研究具有重要意义.     

A slip-line plasticity analysis of sliding friction of rough surfaces exhibiting self-affine (fractal) behavior

A plasticity analysis of sliding friction of rough (fractal) surfaces sliding against smooth surfaces was developed based on a slip-line model of a rigid spherical asperity (wear particle) plowing and cutting through a soft semi-infinite medium. Solutions of the fraction of fully plastic asperity microcontacts responsible for the evolution of friction and energy dissipation were obtained in terms of the total normal load (global interference), interfacial adhesion characteristics, topography (fractal) parameters of the hard surface, and elastic–plastic material properties of the soft surface. This was accomplished by incorporating the slip-line model of a single microcontact into a friction analysis of sliding surfaces demonstrating multi-scale roughness. Numerical results provide insight into the effects of global interference (normal load), fractal parameters (surface roughness) of the hard surface, interfacial shear strength (adhesion), and material properties of the soft surface on plastic deformation at the microcontact level, global coefficient of friction, and frictional energy dissipated during sliding.     

A novel nonlinear contact stiffness model of concrete–steel joint based on the fractal contact theory

The heavy-duty machine tool is usually assumed in the concrete foundation, in which the machine tool-foundation joints have a critical effect on the working accuracy and life of heavy-duty machine tool. This paper proposed a novel contact stiffness model of concrete–steel joint based on the fractal theory. The topography of contact surface exist in concrete–steel joint has a fractal feature and can be described by fractal parameters. Asperities are considered as elastic, plastic deformation in micro-scale. However, the asperities of concrete surface will be crushed when the stress is larger than their yield limit. Then, the force balance of contact surfaces will be broken. Here, an iteration model is proposed to describe the contact state of concrete–steel joint. Because the contact asperities cover a very small proportion (less than 1%), the load on crushed asperities is assumed carried by other no contact asperities. This process will be repeated again and again until the crushed asperities are not being produced under external load. After that, the real contact area, contact stiffness of the concrete–steel joint can be calculated by integrating the asperities of contact surfaces. Nonlinear relationships between contact stiffness and load, fractal roughness parameter G, fractal dimension D can be revealed based on the presented model. An experimental setup with concrete–steel test-specimens is designed to validate the proposed model. Results indicate that the theoretical vibration mode shapes agree well with the experimental variation mode shapes. The errors between theoretical and experimental natural frequencies are less than 4.18%. The presented model can be used to predict the contact stiffness of concrete–steel joint, which will provide a theoretical basis for optimizing the connection characteristic of machine tool-concrete foundation.     

基于泛形理论的粗糙表面法向接触刚度研究

基于泛形理论和赫兹接触理论,通过泛形海岛分布描述粗糙表面的形貌从而建立结合面弹性接触模型,求解结合面的法向接触刚度。假设粗糙接触表面微凸体的高度满足高斯分布,通过赫兹接触理论建立单个微凸体的微观接触模型,利用粗糙表面的泛形复杂度D与面积度量尺码的最小下确界as确定表面形貌。泛形复杂度反映微凸体在粗糙表面上占据的空间大小程度;度量尺码下确界是接触过程中的最小接触面积。通过泛形复杂度和面积最小下确界推导出粗糙表面法向接触刚度的解析表达式。数值算例结果表明：在相同的面积尺度区间内,粗糙表面的法向接触刚度随着泛形复杂度的增加而增加,反之减小。当接触表面的泛形复杂度不变时,粗糙表面的法向接触刚度随最小下确界的减小而增大。泛形复杂度的较大时,最小下确界的变化对于接触刚度的影响更加明显。通过与已发表的文献结果对比分析之后,发现采用泛形海岛模型所得到的结合面接触刚度与文献中实验结果吻合较好。     

Stress concentration around a nano-scale spherical cavity in elastic media: effect of surface stress

Influence of surface effect on stress concentration around a spherical cavity in a linearly isotropic elastic medium is studied on the basis of continuum surface elasticity. Following Goodier's work, a close form solution of the elastic field created by biaxial uniform load is presented. The stress concentration factors under different load combinations are obtained. It is concluded that consideration of surface effect leads to dependence of stress concentration factors on cavity size. Besides, numerical result indicates that stress concentration factors around the cavity are mainly affected by residual surface tension. The result is significant in the understanding of relevant mechanical phenomena in solids with nano-sized cavities.