HL-2M 装置宽谱段光谱诊断系统研制

HL-2M 装置宽谱段光谱诊断系统由采集光学、石英光纤和集成式光栅光谱仪构成,工作波段为 300~1100nm,可实现对工作气体(氢及其同位素)和内在杂质(碳、铁、氧等)线辐射的同步监测。通过将 5 台紧凑 型光谱仪并联形成集成式光栅光谱仪,可在保证宽谱段覆盖的同时实现较好的光谱分辨(0.04~0.19nm⋅pixel⁻¹)。目 前系统具有一个空间通道,最优时间分辨为 1.05ms,常规采样时间为 20ms。在 HL-2M 装置初始等离子体放电 实验期间,利用该套系统识别出氢等离子体的主要杂质为碳和氧,并对不同粒子的辐射特性进行了初步分析。     

Evolution of vacuum ultraviolet emission in dual-frequency capacitively coupled plasmas

In plasma material processing, vacuum ultraviolet (VUV) emission is released from gas discharges, leading to undesirable results. Energetic VUV photons enable the creation of an electron-hole pair current when their energy is larger than the bandgap energy of the plasma-facing top layer during plasma material processing. For example, the high energy of VUV photons from helium (21.2 eV), argon (11.6 eV), and oxygen (13.6 eV) is sufficient to generate induced currents in SiO₂ thin films. These feedstock gases are widely used in many procedures utilizing low-temperature industrial plasmas. Thus, the VUV emission evolution with both the power ratio between high (60 MHz) and low (2 MHz) frequencies and pulse duty ratio of the low-frequency radio frequency (rf) power in a dual-frequency capacitively coupled plasma, which is indispensable in modern plasma etching processes, was investigated. Both the power ratio between high and low frequencies and the pulse duty ratio changed the electron temperature, leading to evolution of the VUV emission intensity.     

介质阻挡放电氢等离子体中氢原子浓度的光谱诊断

在化学气相沉积功能材料等离子体刻蚀及表面处理等过程中, 氢原子起着非常重要的作用。文章详细论述了利用发射光谱技术诊断氢原子的基本原理,以氩气作为内标对介质阻挡放电氢等离子体中的氢原子浓度进行了定量的诊断,研究了氢原子浓度、氢分子解离率随气压的变化规律。发现在0.32到5.1 kPa气压范围内,氢分子的解离率由5.2%下降到0.089%,相应的氢原子浓度由4.9×1015·cm-3下降到1.3×1015·cm-3。文章还研究了氢Balmer系以及氩(750.4 nm)谱线的发射强度随气压、放电电压、频率等放电参数的变化规律。     

One-dimensional solution to the stable, space-charge-limited emission of secondary electrons from plasma-wall interactions

Numerical solutions to the stable, space-charge-limited emission of secondary electrons from plasma-wall interaction are found based on one-dimensional plasma moment equations that assume cold ions, Maxwellian electrons and cold secondary electrons. The numerical method finds a range of plasma parameters that permit stable emission of secondary electrons in the absence of normal electric fields to the wall. These solutions were not obtained with previous method that solves only for the marginally stable plasma sheath. Range of the ion Mach number at the sheath edge, the floating wall potential relative to the plasmas, and secondary electron emission coefficients corresponding to the vanishing normal electric fields are found for hydrogen, argon and xenon plasmas. The results show that a relatively small range of secondary electron emission coefficient exists to allow stable sheaths structures along with larger ranges of ion injection speed at the sheath edge and floating potential of the emitting wall.     

Z箍缩等离子体X射线凸晶谱仪

 针对波长为0.3~0.5 nm的喷气箍缩等离子体X射线诊断,研制了一种适用的高空间分辨的晶体谱仪。色散元件采用云母（002）凸面晶体,布拉格角为37°,信号采用X射线胶片进行接收,有效接收面积为30 mm×80 mm。物理实验在“阳”加速器装置上进行,胶片获得了氩喷气K,L壳层光谱信号,其光谱范围较宽,为0.31~0.40 nm。经解谱发现,类氦谱线有明显的基底,用最小二乘法拟合包络曲线去噪处理后,得到类氦谱线光谱分辨力为200~300。实验结果表明,该谱仪获得的X射线测量值与理论值相符,适合喷气箍缩等离子体X射线光谱的诊断。     

In-situ monitoring and control of hydrogenated amorphous silicon–germanium band-gap profiling during plasma deposition process

In-situ germanium content monitoring and its characteristics in SiH₄/GeH₄/H₂ plasmas was studied during hydrogenated amorphous silicon–germanium (a-SiGe:H) film depositions. Since an appropriate band-gap profiling in a-SiGe:H deposition is very important to achieve high efficiency solar cell, the accurate monitoring and control of Ge contents are required. In this work, we found the spectral intensity ratio of silicon atom (288.2 nm) and germanium atom (303.9 nm) emission has strong relation with Ge content in plasmas. In typical, band-gap energy of films was decreased with the increasing of gas flow ratio GeH₄/SiH₄. However, at different total flow rate of GeH₄, the band-gap was different for same gas flow ratio cases because the Ge content in plasmas was changed due to the changes of electron temperature by hydrogen dilution. On the other hand, the emission intensity ratio Ge/Si detected the band-gap variation. Using this method, therefore, we measured and control Ge/Si to make a U-shape band-gap profile which was proved by an ellipsometer and Auger electron spectroscopy depth profile analysis.     

绝缘阻挡放电等离子体发光光谱的特性

为了对绝缘阻挡放电(DBD)等离子体进行参数优化,以常压DBD等离子体为研究对象,在常温常压下使用可见光光栅光谱仪对等离子体发光光谱进行了诊断,得到了N₂和O₂的第二正带跃迁谱线. 通过对等离子体光谱的分析发现,等离子体发射光谱强度随着电压升高而增大,并且在39—41kHz的范围内可以获得稳定的等离子体发光. 与此同时,Helium气体的引入,可以在很大程度上增加等离子体的发光强度. 与理论分析结合,证实了光谱测量方法在DBD等离子体研究上的可行性. 关键词： 绝缘阻挡放电 光谱 荧光 光谱仪     

脉冲金属氢化物真空弧放电等离子体发射光谱特性

利用发射光谱方法对真空弧离子源放电等离子体特性进行了诊断。同时,基于局域热力学平衡等离子体的发射光谱理论,建立了等离子体的发射光谱拟合模型,对真空弧放电等离子体光谱进行了分析。针对TiH真空弧离子源,分别对330~340nm与498~503nm范围内Ti+离子与Ti原子的发射光谱进行了对比拟合,获得了较好的符合度,解决了传统Boltzmann斜率法计算等离子体温度需要孤立的不受附近谱线干扰的线状光谱的困难。最后,利用该方法计算了真空弧离子源在不同放电条件下的等离子体发射光谱、等离子体密度与温度参数。结果表明,TiH真空弧放电等离子体温度在1eV左右,同时,放电所产生的氢原子要远远大于金属原子,并且随着真空弧离子源馈入功率的增加,TiH电极中解吸附出来的氢比蒸发出来的金属增加得更多,这有利于TiH离子源在中子发生器方面的应用。     

快速真空紫外光谱诊断在EAST实验的初步应用

为了在EAST装置上开展高参数放电条件下边界杂质辐射的实验研究,发展了真空紫外(VUV)光谱诊断系统。该系统采用了焦距为200mm的Seya-Namioka型VUV光谱仪,并配备了600g·mm^-1凹面全息光栅,所能观测的波长范围为50~700nm,覆盖真空紫外、近紫外和可见光波段。系统在垂直方向的观测范围为Z=-350~350mm。利用该系统开展了EAST边界杂质谱线的实验研究。通过分析CⅣ(154.8nm)杂质和FeⅡ(235nm)的谱线强度的时间演化行为,验证了该系统谱线强度测量的准确性与可靠性。通过分析CⅠ(365.2nm)杂质辐射强度在加热功率调制下的时间演化行为,验证了该系统研究较短时间尺度的杂质辐射行为的可行性。     

VUV信号强度与等离子体宏观参数相关性分析

东方超环(EAST)上高速真空紫外(VUV)成像系统是一套选择性测量中心波长为13.5 nm的等离子体线辐射的光学成像系统。此系统具有高时空分辨能力,主要用于边界(包括台基区)等离子体行为研究。该系统已经投入EAST等离子体物理实验并获得了大量的实验数据。基于这些数据,分析了VUV诊断系统的信号强度与等离子体宏观参数之间的相关性,着重研究了EAST上中性束注入(NBI)加热功率、杂质(碳和锂)水平、电子密度等因素对VUV信号强度的影响。结果与预期基本一致:随着NBI功率的增加,VUV信号强度随之增强;VUV信号强度与电子密度、杂质水平呈现线性关系。此外,本文还评估了由于NBI注入引起的电荷交换复合产生的C5+离子对VUV信号的贡献,结果表明这部分贡献可以忽略不计。     

对天体等离子体中铝发射谱的理论研究

超强超短脉冲激光产生的高温、高密、强磁场等离子体与天体等离子体在许多方面都有很强的相似性,这使得某些天体物理过程的实验室模拟成为可能.对天体等离子体中的铝发射谱进行了理论模拟,结果显示,利用激光等离子体的发射光谱,可以在实验室获得天体上难于观测的光谱范围并为天体物理学研究提供丰富的信息. 关键词： 实验室天体物理 激光等离子体 发射谱     

侧吹气体对光纤激光修锐青铜金刚石砂轮等离子体特性影响

为了研究辅助侧吹氩气对光纤激光修锐青铜结合剂金刚石砂轮等离子体的影响,利用高速摄像机拍摄不同侧吹工艺参数下等离子体空间膨胀形态,结果表明：氩气降低了等离子体的膨胀高度,随着压力增加,等离子体的膨胀距离减小,等离子抑制作用增强。 利用光谱仪研究了等离子体发射光谱在砂轮径向上的最大值随氩气压力的变化情况,并根据Boltzmann斜线法和Stark展宽法,计算不同氩气压力下等离子体在砂轮径向上电子温度和电子数密度的最大值,结果表明：气体压力增大,等离子体光谱线强度先增大后减小,等离子体光谱线强度在0.2 MPa时达到峰值,较大的氩气压力明显降低等离子体电子温度和电子数密度,从而减小对砂轮表面形貌的影响。 利用超景深三维扫描仪观测添加侧吹气体前后砂轮表面形貌,结果表明：0.5 MPa侧吹氩气后,砂轮表面形貌质量明显优于未添加侧吹气体时。     

微波液相放电乙醇制氢发射光谱研究

氢能作为一种高热值、无污染的清洁能源日渐受到国内外专家学者的追捧。微波液相放电技术在醇类中制氢具有光明的研究前景,为氢能的研究开发开辟了一条新的途径。通过对乙醇制氢发射光谱分析,有利于分析微波液相放电醇类制氢机理的探讨,为进一步改进微波液相放电制氢技术奠定基础。本文采用2.45 GHz频率微波在液相醇类中放电实现了微波液相等离子体制氢,并借助发射光谱仪对微波液相放电乙醇制氢光谱特性进行了研究。研究结果显示：微波液相放电乙醇制氢过程中,能产生大量的H,O,OH,CH,C₂等活性粒子;乙醇放电光谱中OH自由基、H自由基和O自由基的光谱强度要远大于纯水中OH自由基、H自由基和O自由基的光谱强度;高能粒子打开水分子中的O—H键,脱氢制氢的过程较乙醇分子难度要大,因此在微波乙醇放电制氢过程中,氢气的来源主要是乙醇分子的脱氢重组,水分解产氢的贡献度较低;在外界压力与温度一定的条件下,OH,H,O自由基的发射光谱强度随着功率的增加显著增强,而CH和C₂活性粒子发射光谱强度则出现减弱趋势,这表明较大的微波功率不仅使产生的高能粒子的能量增加,同时高能粒子的密度也有所增加,导致较多的CH和C₂基团被充分碰撞打开。     

Experimental study of conversion from atomic high—order harmonics to x—ray emissions

There are two physical phenomena in a strong laser intensity. One is the high-order harmonic emission; the other is x-ray emission from optical-field ionized plasmas. The experiment of conversion from high-order harmonics to x-ray emissions was given with a 105fs Ti:sapphire laser by adjusting laser intensities. The ingredient in plasma was investigated by the numerical simulations.Our experimental results suggested that the free electrons have detrimental effects on harmonic generation but are favourable for x-ray emission from optical-field ionized plasmas. If we want to obtain more intense harmonic signals as a coherent light source in the soft x-ray region, we must avoid the production of free electrons in plasmas. At the same time, if we want to observe x-rays for the development of high-repetition-rate table-top soft x-ray lasers, we should strip all atoms in the plasmas to a necessary ionized stage by the optical-field-ionization in the field of a high-intensity laser pulse.     

极化X光谱诊断铝激光等离子体的电子密度

为了准确诊断激光等离子体的电子密度,提出了一种基于极化光谱的类氦共振线与互组合线相对强度比诊断电子密度的方法.该法考虑了激光等离子体发射的X射线存在极化的特性,用极化光谱理论对测量的类氦共振线和互组合线光谱相对强度比进行精密校正,再推导等离子体的电子密度.在2×10 J激光装置上进行了实验,使用极化PET（002）晶体谱仪测量了Al类氦离子光谱,利用光谱的极化特性推出Al等离子体的电子密度约为1.5×1020 cm－3.结果表明极化X光谱推导等离子体电子密度方法适合激光高温高密等离子体诊断.     

Line broadening studies in low energy plasma focus

Optical emission spectroscopic studies were carried out to characterise the plasma leading to the estimation of two plasma parameters, electron density and temperature. These experiments were conducted on a 2 kJ plasma device which is equipped with squirrel cage electrode configuration enclosed in a glass vacuum chamber filled with hydrogen at a pressure of 5 mbar. Spectral emissions obtained from each flash were photographed in the region of 4000–6000 Å using one metre Czerny-Turner spectrograph cum monochromator. Detailed examination of the observed features showed that theH _β andH _λ lines of hydrogen showed significant broadening of the order of 35 Å FWHM which is due to Stark effect expected in high density plasmas. Further several atomic lines of Cu and Zn from the electrode material (brass) showed broadening which was due to quadratic Stark effect. A comparative study of the broadening of lines obtained in DC arc, hollow cathode and plasma focus was made. Electron density from Stark broadened hydrogen lines and quadratic Stark Coefficient C₄ for the CuI and ZnI lines were evaluated. The excitation temperature was determined from the line intensity ratio method using CuI lines.     

Diagnostics for first plasma study on EAST tokamak

The first plasma was obtained in the EAST on September 26th, 2006. Single-null (SN) and double-null (DN) diverted plasmas were achieved successfully in the EAST tokamak on January 22nd, 2007. The employed plasma diagnostics for first plasma study of EAST are as follows: a vertical one-channel far-infrared (FIR) hydrogen cyanide (HCN) laser interferometer for measuring the line average density, a 10-channel soft X-ray array for intensity measurement, a 16-channel heterodyne Electron Cyclotron Emission (ECE) for measuring the electron temperature profile, a 8-channel XUV bolometer array to measure plasma radiation losses, a 3-channel hard X-ray array for intensity measurement, an electromagnetic measurement system, a 35-channel Hα radiation array, 20 probes for divertor plasma, a one-channel visible bremsstrahlung emission, an impurity optical spectrum measurement system and two optical spectroscopic multi-channel analyzers (OMA). The first experimental results of diagnostic systems are summarized in this Letter.     

Temperature measurements in plasmas generated by using lasers at different intensities

The temperature of laser-generated pulsed plasmas is an important property that depends on many parameters, such as the particle species and the time elapsed from the laser interaction with the matter and the surface characteristics.

Laser-generated plasmas with low intensity (<10¹⁰ W/cm²) at INFN-LNS of Catania and with high intensity (>10¹⁴ W/cm²) in PALS laboratory in Prague have been investigated in terms of temperatures relative to ions, electrons, and neutral species. Time-of-flight (ToF) measurements have been performed with an electrostatic ion energy analyzer (IEA) and with different Faraday cups, in order to measure the ion and electron average velocities. The IEA was also used to measure the ion energy, the ion charge state, and the ion energy distribution.

The Maxwell–Boltzmann function permitted to fit the experimental data and to extrapolate the ion temperature of the plasma core.

The velocity of the neutrals was measured with a special mass quadrupole spectrometer. The Nd:Yag laser operating at low intensity produced an ion temperature core of the order of 400 eV and a neutral temperature of the order of 100 eV for many ablated materials. The ToF of electrons indicates the presence of hot electron emission with an energy of ～1 keV.     

Investigation of RF breakdowns on the MILO

Describes a series of experiments performed to isolate the RF breakdown mechanisms in the hard tube magnetically insulated transmission line oscillator (MILO) Experiment at the Air Force Phillips Laboratory, Albuquerque, NM. Specifically, several causes of RF breakdown in the region of the vacuum-air interface and the antenna region have been investigated. These causes are X-ray induced electron emission, VUV and visible photoemission of electrons, and breakdown due to large field stresses in the antenna. Each of these mechanisms has the effect of liberating electrons from a surface in a high field region which then are a seed for a breakdown. This paper discusses measurements in the X-ray, VUV, and visible regimes with support from computer simulation. Also, imagery results are shown, which in conjunction with the computer work, point to the presence of high electric field stresses in the antenna, which cause a subsequent breakdown. In particular, X-rays, VUV, visible light, and plasmas do not seem to be the major source of RF breakdown in this tube     

Neutron spectrometry in compact ignition experiments

Summary The role of neutron spectrometry is discussed as a diagnostics of plasmas of compact ignition experiments. The situation with regard to instrumentation (including diagnostic capabilities and limitations) is reviewed on the basis of existing experience and new solutions are proposed as required by compact-plasma observations. Especially, the question of time resolution is addressed and a dedicated spectrometer system is devised to make use of the high neutron fluxes expected for the nuclear-burn phase of compact plasmas. It is shown that a system of three neutron spectrometers can provide adequate data on ion temperature of D and DT plasmas over a range of plasma conditions of interest and with the required accuracy. The diagnostic output from this neutron spectrometer system is presented especially with regard to flash ignition studies.