浮雕型全息相位光栅的衍射

本文从理论上推导出了浮雕型相位全息光栅所满足的衍射方程式,并数值计算了光刻胶四种情况下的+1级衍射光的衍射效率与相位光栅刻蚀深度的关系.还和大量实际拍摄的全息光栅作了比较,发现它基本上都能与实验相符；文中还指出了如何选择拍摄参数来控制光栅的刻蚀深度,以确保制作高衍射效率和高信噪比的PET(聚酯薄膜)模压全息片所需要的光刻胶母版拍摄.     

曝光系统离焦对平面全息光栅衍射波前的影响

波前像差是衍射光栅的重要技术指标，它直接影响光栅的分辨率。由光致刻蚀剂记录两束相干光干涉条纹是制作全息光栅的关键步骤。为了提高全息光栅曝光系统调整精度、减小离焦、降低光栅的衍射波前像差，从离焦对反射球面准直镜的准直光平行度的影响程度出发，分析了准直光平行度对全息光栅衍射波前像差的影响。理论分析和数值模拟结果表明，准直镜调整误差直接决定全息光栅衍射波前像差大小。以3种不同刻线密度光栅为例，得出了准直镜调整误差的允许变化范围。     

角分辨光电子能谱光束线1200line/mm光栅研制

国家同步辐射实验室新建了覆盖5～40 eV的低能区高分辨率角分辨光电子能谱光束线.其球面光栅单色仪包含了三块光栅,即300,600和1200 line/mm球面层式(Laminar)光栅.采用全息离子束刻蚀工艺,在硅光栅基片上成功地刻蚀出1200 line/mm、占空比0.35、槽深35 nm、有效刻划面积大于120 ...     

离子束刻蚀软X射线透射光栅实验研究

利用全息-离子束刻蚀方法研制出了聚酰亚胺薄膜为衬底的金软X射线透射光栅.研究了光栅制作中曝光量、显影条件和离子束刻蚀工艺等因素对光栅参数的影响,并给出了在惯性约束激光核聚变实验研究中的应用结果,     

宽带镀金正弦光栅

为了满足强激光系统中大尺寸镀金光栅对糟深均匀性的要求,采用梯形光栅-涂胶-离子束溅射镀膜和全息光刻-离子束溅射镀膜两种方法,分别制作了线密度为1 740线/mm,槽深为210 nm的宽带镀金正弦光栅.测得其TM波、-1级自准值平均衍射效率在750～850 nm范围内大于87％,最高可达90％.这两种方法易控制光栅槽深,去掉光刻胶后基底可继续使用,且制作的光栅的衍射效率和带宽能满足国内一般宽带镀金脉冲压缩光栅的使用要求.     

Ar+离子束刻蚀制作凸面闪耀光栅

凸面闪耀光栅是研制高光谱分辨率超光谱成像系统的关键器件之一.由于要求的闪耀角度一般较小,制作工艺难度大,其衍射效率与理论值有较大差距,一直制约其应用.针对上述问题与难点进行了分析,通过光刻胶光栅掩模制作和Ar<'+>离子束刻蚀等工艺制作了凸面闪耀光栅.针对离子束大掠入射刻蚀凸球面时槽形闪耀角不易一致的难题,利用转动扫描...     

光谱仪用平场凹面光栅的凸面母光栅的消像差设计思路

平场全息凹面光栅是光谱仪中的核心元件之一,其成像质量和衍射效率直接影响了光谱仪的分辨率和光能利用率。利用凸面母光栅复制制作凹面光栅,便于在凸面基底上进行离子束刻蚀以获得高的衍射效率。为了保证复制的凹面光栅具有高的成像质量,文章提出一种全息凸面光刻胶光栅的消像差设计方法,优化中考虑了凸面基底对记录光束的折射效应以及由基底折射率所引入的附加光程。通过将“光程函数级数展开法”和ZEMAX光学设计软件相结合,采用粗精两步优化的方法,显著提高了优化的效率和成功率。ZEMAX对比仿真结果显示,复制得到的凹面光栅与传统直接采用全息法制作的凹面光栅的成像质量是相当的。     

反应离子束微细加工全息闪耀光栅研究

本文报道以无透镜傅里叶全息术变换记录的全息光栅作掩膜,应用反应离子束入射角控制光栅闪耀角,选择了合适刻蚀工艺参数,制得衍射效率为67%的SiO_2全息闪耀光栅。     

大口径多层介质膜光栅衍射效率测量及其在制作工艺中的应用

多层介质膜光栅是高功率激光系统的关键光学元件.为了满足国内强激光系统的迫切需求, 在大口径多层介质膜光栅的研制过程中,建立了单波长自准直条件下的衍射效率测量方法及其误差分析. 结果表明误差主要由探测器的噪声和测试人员的差异产生,对衍射效率测试精度的影响是±1%. 在此基础上,将光栅衍射效率及其分布测量技术应用于光栅制作工艺中, 作为大口径光栅无损检测的一种手段,如判断光栅掩模是否能进行离子束刻蚀、 离子束刻蚀的在线监测和是否需要再刻蚀,从而实现对大口径多层介质膜光栅离子束刻蚀过程的定量、 科学控制,提高了离子束刻蚀光栅制作工艺的成功率.利用上述技术,已成功研制出多块最大尺寸为 430 mm× 350 mm、线密度1740线/mm、平均衍射效率大于95%的多层介质膜光栅. 实验结果表明,该方法操作简单、测量快速准确,不必检测光栅微结构. 为大口径多层介质膜光栅研制的无损检测工程化奠定了基础.     

HfO2顶层多层介质膜脉宽压缩光栅的离子束刻蚀

多层介质膜光栅是高功率激光系统的关键光学元件. 为了满足国内强激光系统的迫切需求,首先利用考夫曼型离子束刻蚀机开展了HfO₂顶层多层介质膜脉宽压缩光栅的离子束刻蚀实验研究. 采用纯Ar及Ar和CHF₃混合气体作为工作气体进行离子束刻蚀实验,获得了优化的离子源工作参数. 结果表明,与纯Ar离子束刻蚀相比,Ar和CHF₃混合气体离子束刻蚀时的HfO₂/光刻胶的选择比大. HfO₂的离子束刻蚀过程中再沉积效应明显,导致刻蚀光栅占宽比变大. 根据刻蚀速率分布制作的掩模遮挡板可以提高刻蚀速率均匀性,及时清洗离子源和更换灯丝,可保证刻蚀工艺的重复性. 利用上述技术已成功研制出多块最大尺寸为80 mm×150 mm、线密度1480线/mm、平均衍射效率大于95%的HfO₂顶层多层介质膜脉宽压缩光栅. 实验结果与理论设计一致,为大口径多层介质膜脉宽压缩光栅的离子束刻蚀提供了有益参考. 关键词： 光栅 多层介质膜 离子束刻蚀     

Diffraction properties of ultrashort pulsed beams with arbitrary temporal profiles by a reflection volume holographic grating

The diffraction properties of reflection volume holographic gratings are studied when the gratings are illuminated by an ultrashort beam with arbitrary temporal profiles. The modified Kogelnik's theory of coupled waves is used. Simple analytical expressions for spectral and temporal distribution of the transmitted and diffracted are obtained. The dependences of the diffraction bandwidth, the Bragg selectivity bandwidth and the total diffraction efficiency of the reflection volume grating on the temporal profiles of the input ultrashort pulse are investigated. Study shows that the bandwidth of the reflection volume holographic gratings varies with the grating parameters more slowly than the transmitting volume holographic gratings. For three different temporal profiles, numerical results about diffraction properties of the reflection volume holographic gratings are given and compared with the transmitting volume holographic gratings.     

Peculiarities of spontaneous grating generation in light-sensitive waveguide layers during holographic grating formation

The generation of spontaneous (noise) gratings during the simultaneous formation of a holographic grating in thin (on the order of the cutoff thickness of the TE₀ waveguide mode) AgCl-Ag films by two laser beams with λ = 532 nm and polarization vectors that make an angle of 45° with the plane of incidence have been studied. The electron microscopy images and diffraction patterns have revealed a significant difference of the spontaneous-grating structure from the structure obtained under irradiation by one laser beam. The spontaneous gratings have a significant spread in the directions of their wave vector, and the diffraction pattern (recorded using a probe beam with λ = 337 nm) has the form of a bundle of diverging arcs that intersect at one point. This difference is caused by self-diffraction from the holographic grating, which is responsible for the main diffraction peaks with odd orders, the growth of spontaneous gratings because of the interference of the beams diffracted by the holographic grating with the waveguide TE₀ modes scattered in the film, and silver transport to the interference minima. The diffraction patterns are quantitatively analyzed and the period of the new (formed under two-beam irradiation) spontaneous gratings is calculated. The calculation results are in good agreement with the experimental data.     

On the Fresnel diffraction pattern of phase holographic gratings

The Fresnel diffraction pattern of phase diffraction gratings is studied on the example of idealized sinusoidal relief-phase plane holographic thermoplastic gratings. It is shown that, in the region of low spatial frequencies, which are more than two times lower than the inverse wavelength of the reading coherent radiation, the intensities of the main diffraction maxima, the diffraction efficiency, and the light-scattering power are independent of the spatial frequency of the phase gratings under investigation, which are characterized by a sinusoidal law of modulation of the reading-radiation phase. It is established that the range of spatial frequencies at which a plateau is observed in these dependences increases with decreasing amplitude of the phase modulation of the reading light. These dependences are also observed to have similar character for the thermoplastic holographic gratings under study. Calculations were performed to analyze the influence of real profiles of thermoplastic strain on the diffraction efficiency and light-scattering power of such gratings. On the basis of analysis of the results obtained, recommendations on using holographic and raster techniques of recording data on phase carriers are given that make it possible to improve the quality of the restored optical image.     

吲哚俘精酰胺的偏振全息图像光存储实验研究

在吲哚俘精酰胺/PMMA薄膜上记录了同偏振全息和正交偏振全息图，获得了它们的再现衍射像.实验结果表明：吲哚俘精酰胺具有光致各向异性，可以进行正交偏振全息记录.在偏振全息中，衍射光的偏振方向依赖于物光和再现光的偏振方向，衍射像的噪声主要来源于再现光照射到样品上引起的散射.正交偏振全息可以得到比同偏振全息更高信噪比的衍射像.存储于样品上的全息图在室温下黑暗处至少可以保存五个月而衍射效率无明显下降.结果表明，吲哚俘精酰胺是一种可用于偏振全息的可擦重写记录介质. 关键词： 偏振全息 光致各向异性 俘精酸酐 光致变色     

Fabrication of large-area 3D photonic crystals using a holographic optical element

A holographic technique for fabricating 3D photonic crystal is presented. The key element in the fabrication system is a holographic optical element (HOE) consisting of three gratings. Used in combination with a mask, the HOE can generate four beams under single illuminating beam, and 3D lattice structures can be formed by the interference of the four beams. Holographic approach is used to make HOE, so large area lattice structures can be fabricated. Numerical simulations indicate that beam intensity ratio of central beam to outer beam is one of the factors that affects the structures fabricated in photoresist, and high diffraction efficiency of the gratings in HOE is favorable when using cw laser with relatively low power as light source. Experimental results show clear 3D lattice structures fabricated using the HOE, verifying the effectiveness of the technique.     

Polarization properties of thick anisotropic diffraction holograms recorded with infrared-polymerizable media

The polarization properties of thick anisotropic holographic gratings are studied theoretically and experimentally. The dependences of the diffraction efficiency, ellipticity, and polarization orientation of the diffraction beam on the azimuth angle of polarization of an incident Bragg beam are derived. The experimental data are shown to agree well with the analytical calculations. It is found that the diffraction characteristics can be controlled in a wide range of incident polarization.     

Holographic optical elements as scanning lidar telescopes

We have developed and investigated the use of holographic optical elements (HOEs) and holographic transmission gratings for scanning lidar telescopes. Rotating a flat HOE in its own plane with the focal spot on the rotation axis makes a very simple and compact conical scanning telescope. We developed transmission and reflection HOEs for use at the first three harmonic wavelengths of Nd:YAG lasers. The diffraction efficiency, diffraction angle, focal length, focal spot size and optical losses were measured for several HOEs and holographic gratings, and found to be suitable for use as lidar receiver telescopes, and in many cases could also serve as the final collimating and beam steering optic for the laser transmitter. Two lidar systems based on this technology have been designed, built, and successfully tested in atmospheric science applications. This technology will enable future spaceborne lidar missions by significantly lowering the size, weight, power requirement and cost of a large aperture, narrow field of view scanning telescope.     

基于PVA／AA光致聚合物的衍射光锥产生机理及其抑制

研究了以He—Ne激光器作为记录光源,以He-Ne、Nd：YAG和He-Cd激光器作为读出光源的亚甲基蓝敏化的PVA／AA体系光致聚合物的全息衍射光锥现象。衍射光锥现象的产生是由于入射光透过全息记录材料内部的不均匀结构或缺陷所产生的噪音光栅所致。运用Ewald球对此现象产生的机理进行了解释,利用全息光散射理论结合三角学...     

超短脉冲激光光束在一维反射型体全息光栅中的衍射

基于Kogelnik的耦合波理论,研究了在色散效应的影响下,超短脉冲激光光束在反射型体全息光栅中衍射的性质.研究给出了衍射光及透射光在频谱域及时间域的振幅及强度分布、光栅的光谱宽度及衍射效率随光栅参量及入射条件的变化.数值研究的结果表明,在光栅记录介质色散效应的影响下,衍射光束的光谱宽度减小,脉冲展宽,衍射效率降低.通过适当的选取光栅参量及入射条件,可以控制衍射和透射光束的频谱和时间强度分布,得到满意的衍射和透射光束的带宽和波形,从而可以将其应用于脉冲整形等技术中.