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1.
为了满足强激光系统中大尺寸镀金光栅对糟深均匀性的要求,采用梯形光栅-涂胶-离子束溅射镀膜和全息光刻-离子束溅射镀膜两种方法,分别制作了线密度为1 740线/mm,槽深为210nm的宽带镀金正弦光栅.测得其TM波、-1级自准值平均衍射效率在750~850nm范围内大于87%,最高可达90%.这两种方法易控制光栅槽深,去掉光刻胶后基底可继续使用,且制作的光栅的衍射效率和带宽能满足国内一般宽带镀金脉冲压缩光栅的使用要求.  相似文献   

2.
软X射线位相型金透射光栅的设计与制作   总被引:1,自引:0,他引:1       下载免费PDF全文
邱克强  徐向东  刘颖  洪义麟  付绍军 《物理学报》2008,57(10):6329-6334
根据衍射光栅的标量理论,计算并讨论了金透射光栅在软X波段衍射效率对光栅厚度和占宽比的依赖关系.结果表明,选择合适的光栅槽深和占宽比,高达 21.9%的衍射效率可能被获得,远高于振幅型光栅的+1级衍射效率10.14%.通过全息光刻与电镀转移技术制作的位相型金透射光栅由300nm的聚酰亚胺薄膜支撑,光栅槽深200nm,占宽比为0.55,周期为1μm,面积为20mm×5mm.在国家同步辐射装置上,测得其+1级透射衍射效率在波长λ=7.425nm时获得最大值,约为16%. 关键词: 透射位相光栅 全息光刻 电镀  相似文献   

3.
凸面闪耀光栅是研制高光谱分辨率超光谱成像系统的关键器件之一.由于要求的闪耀角度一般较小,制作工艺难度大,其衍射效率与理论值有较大差距,一直制约其应用.针对上述问题与难点进行了分析,通过光刻胶光栅掩模制作和Ar<'+>离子束刻蚀等工艺制作了凸面闪耀光栅.针对离子束大掠入射刻蚀凸球面时槽形闪耀角不易一致的难题,利用转动扫描...  相似文献   

4.
全息离子束刻蚀衍射光栅   总被引:16,自引:0,他引:16  
徐向东  洪义麟  傅绍军  王占山 《物理》2004,33(5):340-344
全息离子束刻蚀衍射光栅集中了机械刻划光栅的高效率和全息光栅的无鬼线、低杂散光、高信噪比的优点.全息离子束刻蚀已作为常规工艺手段应用于真空紫外及软x射线衍射光栅的制作.文章对全息离子束刻蚀衍射光栅的制作方法、主要类型、研究现状和应用进行了综述.  相似文献   

5.
王彤彤 《发光学报》2013,34(11):1489-1493
采用具有良好比刚度和热稳定性的碳化硅材料作为基底,使用全息-离子束刻蚀技术制作了光栅。碳化硅材料表面固有缺陷导致制作的光栅刻槽表面粗糙度高,槽底和槽顶粗糙度分别达到了29.6 nm和65.3 nm (Rq)。通过等离子辅助沉积技术在碳化硅表面镀制一层均匀的硅改性层,经过抛光可以获得无缺陷的超光滑表面。XRD测试表明制备的硅改性层为无定形结构。原子力显微镜的测试结果表明:经过抛光后,表面粗糙度为0.64 nm(Rq)。在此表面上制作的光栅刻槽表面粗糙度明显降低,槽底和槽顶粗糙度分别为2.96 nm和7.21 nm,相当于改性前的1/10和1/9。  相似文献   

6.
色分离光栅镀膜减反技术研究   总被引:1,自引:0,他引:1       下载免费PDF全文
 根据惯性约束聚变系统技术要求,提出一种镀膜减反方案,以解决现有光栅由于元件表面反射影响衍射效率的问题。对色分离光栅镀膜减反技术进行了详细的分析,根据标量理论给出了镀膜光栅的各项技术要求,优化了光栅结构参数。模拟计算结果发现,光栅表面反射几乎完全消除,表明可以通过色分离光栅镀膜减反提高衍射效率的目的。该镀膜光栅刻槽深度的优化值为2.84μm,膜厚为等效1/4波长,即71.2nm。  相似文献   

7.
结合单晶硅各向异性腐蚀和倾斜光刻技术,在14°斜切(110)单晶硅片上成功制作出90°顶角的中阶梯光栅。在1500~1600nm波段对其进行了闪耀级次衍射效率测量,测量结果的趋势与C方法计算结果基本吻合,其中在1500~1550nm波段光栅表现出良好的闪耀特性,效率为理论值的52%~75%,峰值约为58%。讨论并计算了制作工艺中的槽深误差对光栅闪耀级次衍射效率的影响。结果表明,在1500~1550nm波段,考虑槽深误差计算所得的理论闪耀级次衍射效率约为完美槽形计算效率的77%~85%。  相似文献   

8.
张恒  周云  周雷  陈林森 《光子学报》2009,38(2):241-244
利用波长为351 nm的半导体泵浦全固态脉冲激光器,采用双光束干涉方法,对蒸镀在石英玻璃衬底上的铬薄膜直接刻蚀形成微光栅结构的方法进行了实验研究.通过实验,分析了激光能量和脉冲数与微光栅结构槽形和一级衍射效率之间的关系.利用光学显微镜和原子力显微镜检测分析光栅槽形,测得槽深为253 nm的最佳微光栅结构,并测得其在波长为532 nm的激光的一级衍射效率为6.5%.结果表明:在激光能量为1 150 μJ时,适当增加曝光脉冲数有利于提高制备光栅的槽深和一级衍射效率.  相似文献   

9.
纳秒激光刻蚀玻璃基质铬薄膜直写微光栅结构   总被引:2,自引:2,他引:0  
利用波长为351 nm的半导体泵浦全固态脉冲激光器,采用双光束干涉方法,对蒸镀在石英玻璃衬底上的铬薄膜直接刻蚀形成微光栅结构的方法进行了实验研究.通过实验,分析了激光能量和脉冲数与微光栅结构槽形和一级衍射效率之间的关系.利用光学显微镜和原子力显微镜检测分析光栅槽形,测得槽深为253 nm的最佳微光栅结构,并测得其在波长为532 nm的激光的一级衍射效率为6.5%.结果表明:在激光能量为1 150 μJ时,适当增加曝光脉冲数有利于提高制备光栅的槽深和一级衍射效率.  相似文献   

10.
梯形介质膜光栅衍射特性分析   总被引:3,自引:1,他引:2  
基于严格耦合波理论建立了梯形介质膜光栅的衍射机理模型,利用该模型讨论了底角为70°的梯形介质膜光栅-1级的衍射行为.通过对梯形介质膜光栅的占空比、槽深和剩余厚度的优化,设计了应用于1053 nm和51.2°角度入射的梯形介质膜光栅.对于顶层为HfO2的介质膜光栅,当槽深为200 nm,剩余厚度为100 nm,占空比为0.35时.其衍射效率优于99.5%,而对于顶层为SiO2的梯形光栅,为获得99.5%的衍射效率.其槽深为800 nm,剩余厚度为320 nm.而且,获得同样的衍射效率,顶层为HfO2的梯形光栅具有更宽的光谱特性.数值计算表明,严格耦合波理论模型对梯形介质膜光栅衍射效率的计算具有很好的收敛性和稳定性.  相似文献   

11.
一种制作二维全息光栅图象的新方法   总被引:3,自引:0,他引:3  
王昭  裴书宝 《光子学报》1996,25(12):1077-1080
本文介绍了一种新的制作光栅图象的方法,它是利用全息光栅做为象素,由光栅的空间频率决定该象素的颜色,而由光栅的方向决定该象素被观察的范围或角度,并给出了实验中所使用的设计参数和实施方案。  相似文献   

12.
根据光致聚合物记录机理,研究了不同记录方式对光栅衍射效率的影响.对已有的光致聚合物光栅形成的一阶扩散模型进行简化,求解出全息曝光、暗增长、均匀后曝光过程对应的折射率调制度的解析式.应用所得解析结果,对三种记录方式在不同光强下的折射率调制度动态进行数值模拟.采用蓝敏光致聚合物,分别在4 mW/cm~2和2 mW/cm~2光强下应用不同方式记录光栅,结果表明:如果曝光光强较高,暗增长的记录方式将获得相对高的饱和折射率调制度,而均匀后曝光会加速达到饱和的进程.  相似文献   

13.
The collimation of strongly diverging laser beams emitted by high-power diode lasers is performed with aspherical micro-optical components which have large numerical apertures up to NA=0.7. Conventional interferometric techniques do neither deliver the resolution nor the test frequency and are too costly for an industrial application.Digital holography is presented as a measurement tool for the characterization of micro-optical components in this paper providing a robust and fast technique with a simple and compact setup.The setup presented in this contribution does not apply any imaging or magnifying optics thus avoiding any additional aberrations in the wavefront which would falsify the measurement. The reconstruction process is performed in the computer giving direct access to intensity and phase of the measured wavefront. Additional experimental efforts like, e.g. phase shifting techniques are not needed.The large numerical aperture of the microlenses leads to high fringe densities in the holograms which cannot be resolved by CCD-detectors directly. In order to avoid this problem digital holography is combined with a multiple wavelength technique and a diffusing screen to capture the highly diverging wavefront. An averaging method to reduce the introduced speckle noise is applied and results of the characterization of refractive cylindrical microlenses are presented.  相似文献   

14.
Conventional methods of measuring the various parameters of holographic optical elements are tedious for mass production. A novel approach is described for the holographic elements used in the holographic sight, in which the parameters are defined and measured as per their intended final application. Since the holographic sight is used for accurate target acquisition along with the other features, parallax in the sight becomes a critical parameter. Besides, the maximum brightness of the reticle is another parameter of the device, which is important for the use of sight in the strong sunlight in summers. There are two holographic elements, namely holographic reticle and holographic lens in the sight. Both can be tested in a simple set-up in terms of the parallax of the sight and the brightness of the reticle. The masters for both elements are required to be benchmarked once and rest of the elements in a mass production can be tested with the reference of masters.  相似文献   

15.
We investigate thermal inflation in double-screen entropic cosmology. We find that its realization is general, resulting from the system evolution from non-equilibrium to equilibrium. Furthermore, going beyond the background evolution, we study the primordial curvature perturbations arising from the universe interior, as well as from the thermal fluctuations generated on the holographic screens. We show that the power spectrum is nearly scale-invariant with a red tilt, while the tensor-to-scalar ratio is in agreement with observations. Finally, we examine the non-Gaussianities of primordial curvature perturbations, and we find that a sizable value of the non-linearity parameter is possible due to holographic statistics on the outer screen.  相似文献   

16.
物表面消偏振效应对全息干涉计量的影响   总被引:1,自引:0,他引:1  
方强 《光子学报》1994,23(5):402-405
本文用统计光学方法从理论上揭示了物表面消偏振效应对全息干涉计量的影响。  相似文献   

17.
The holographic principle has revealed that phyical systems in 3-D space, black holes included, are basically two-dimensional as far as their information content is concerned. This conclusion is complemented by one sketched here: as far as entropy or information flow is concerned, a black hole behaves as a one-dimensional channel. We define a channel in flat spacetime in thermodynamic terms, and contrast it with common entropy emitting systems. A black hole is more like the former: its entropy output is related to the emitted power as it would be for a one-dimensional channel, and disposal of an information stream down a black hole is limited by the power invested in the same way as for a one-dimensional channel.  相似文献   

18.
孙平 《光子学报》1997,26(8):729-732
本文应用全息干涉法测量中的二次曝光法,对不均匀散热盘表面附近的空气折射率变化规律及温度空间分布规律进行了研究,给出了实验的基本原理、过程,及数据处理方法,实现了全息术对温度分布的定量测量.  相似文献   

19.
Supermassive Black Holes are the most entropic objects found in the universe. The Holographic Bound (HB) to the entropy is used to constrain their formation time with initial masses 106–8 M , as inferred from observations. We find that the entropy considerations are more limiting than causality for this direct formation. Later we analyze the possibility of SMBHs growing from seed black holes. The growth of the initial mass is studied in the case of accretion of pure radiation and quintessence fields, and we find that there is a class of models that may allow this metamorphosis. Our analysis generalizes recent work for some models of quintessence capable of producing a substantial growth in a short time, while simultaneously obeying the causal and Holographic Bound limits.  相似文献   

20.
By assuming that a dark component (dark energy) in the universe strictly obeys the holographic principle, that is, its entropy is one fourth of the apparent horizon, we find that the existence of the other dark component (dark matter) is compulsory, as a compensation of dark energy, based on the first law of thermodynamics. By using the method of dynamical system analysis, we find that there exists a stable dark energy-dark matter scaling solution at late time, which is helpful to solve the coincidence problem. For reasonable parameters, the deceleration parameter is well consistent with current observations.  相似文献   

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